Search

Edward J. Webman

Examiner (ID: 8225)

Most Active Art Unit
1617
Art Unit(s)
1617, 2899, 1621, 3617, 1616, 1615, 1501, 1502
Total Applications
1435
Issued Applications
869
Pending Applications
171
Abandoned Applications
394

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18225846 [patent_doc_number] => 20230064840 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-02 [patent_title] => METHOD AND APPARATUS FOR MITIGATING CONTAMINATION [patent_app_type] => utility [patent_app_number] => 17/460144 [patent_app_country] => US [patent_app_date] => 2021-08-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7138 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17460144 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/460144
Method and apparatus for mitigating contamination Aug 26, 2021 Issued
Array ( [id] => 18430063 [patent_doc_number] => 11675280 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-06-13 [patent_title] => Lithography system and method [patent_app_type] => utility [patent_app_number] => 17/459357 [patent_app_country] => US [patent_app_date] => 2021-08-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 6255 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17459357 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/459357
Lithography system and method Aug 26, 2021 Issued
Array ( [id] => 20415054 [patent_doc_number] => 12498332 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-12-16 [patent_title] => Imaging metrology [patent_app_type] => utility [patent_app_number] => 18/043331 [patent_app_country] => US [patent_app_date] => 2021-08-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 17 [patent_no_of_words] => 3531 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 114 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18043331 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/043331
Imaging metrology Aug 26, 2021 Issued
Array ( [id] => 18203725 [patent_doc_number] => 11586115 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-02-21 [patent_title] => Method of operating semiconductor apparatus [patent_app_type] => utility [patent_app_number] => 17/411571 [patent_app_country] => US [patent_app_date] => 2021-08-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 19 [patent_no_of_words] => 7588 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 89 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17411571 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/411571
Method of operating semiconductor apparatus Aug 24, 2021 Issued
Array ( [id] => 17461977 [patent_doc_number] => 20220075282 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-10 [patent_title] => SYSTEM AND METHOD FOR OPTIMIZING A LITHOGRAPHY EXPOSURE PROCESS [patent_app_type] => utility [patent_app_number] => 17/407678 [patent_app_country] => US [patent_app_date] => 2021-08-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 15304 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 77 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17407678 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/407678
System and method for optimizing a lithography exposure process Aug 19, 2021 Issued
Array ( [id] => 20188325 [patent_doc_number] => 12399436 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-08-26 [patent_title] => Substrate holder, carrier system comprising a substrate holder and lithographic apparatus [patent_app_type] => utility [patent_app_number] => 18/027094 [patent_app_country] => US [patent_app_date] => 2021-08-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 8 [patent_no_of_words] => 2780 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 133 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18027094 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/027094
Substrate holder, carrier system comprising a substrate holder and lithographic apparatus Aug 19, 2021 Issued
Array ( [id] => 17445292 [patent_doc_number] => 20220065797 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-03 [patent_title] => SUBSTRATE DEFECT INSPECTION METHOD AND SUBSTRATE DEFECT INSPECTION APPARATUS [patent_app_type] => utility [patent_app_number] => 17/406743 [patent_app_country] => US [patent_app_date] => 2021-08-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9242 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 139 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17406743 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/406743
Substrate defect inspection method and substrate defect inspection apparatus Aug 18, 2021 Issued
Array ( [id] => 19355423 [patent_doc_number] => 12055861 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-08-06 [patent_title] => Inspection method, inspection system, and semiconductor fabrication using the same [patent_app_type] => utility [patent_app_number] => 17/406529 [patent_app_country] => US [patent_app_date] => 2021-08-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 4462 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 206 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17406529 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/406529
Inspection method, inspection system, and semiconductor fabrication using the same Aug 18, 2021 Issued
Array ( [id] => 17507001 [patent_doc_number] => 20220100104 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-31 [patent_title] => LITHOGRAPHIC APPARATUS [patent_app_type] => utility [patent_app_number] => 17/445344 [patent_app_country] => US [patent_app_date] => 2021-08-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5174 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 340 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17445344 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/445344
Lithographic apparatus Aug 17, 2021 Issued
Array ( [id] => 18046294 [patent_doc_number] => 11520245 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-12-06 [patent_title] => Apparatus and method for processing substrate [patent_app_type] => utility [patent_app_number] => 17/404240 [patent_app_country] => US [patent_app_date] => 2021-08-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 9 [patent_no_of_words] => 6553 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 99 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17404240 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/404240
Apparatus and method for processing substrate Aug 16, 2021 Issued
Array ( [id] => 17969681 [patent_doc_number] => 11487210 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2022-11-01 [patent_title] => Method and system of surface topography measurement for lithography [patent_app_type] => utility [patent_app_number] => 17/400666 [patent_app_country] => US [patent_app_date] => 2021-08-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 20 [patent_no_of_words] => 11197 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 156 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17400666 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/400666
Method and system of surface topography measurement for lithography Aug 11, 2021 Issued
Array ( [id] => 18029905 [patent_doc_number] => 11513083 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-11-29 [patent_title] => Photolithography method and photolithography system [patent_app_type] => utility [patent_app_number] => 17/396281 [patent_app_country] => US [patent_app_date] => 2021-08-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 29 [patent_figures_cnt] => 51 [patent_no_of_words] => 13875 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 116 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17396281 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/396281
Photolithography method and photolithography system Aug 5, 2021 Issued
Array ( [id] => 18505649 [patent_doc_number] => 11703458 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-07-18 [patent_title] => Detecting device and automatic cleaner [patent_app_type] => utility [patent_app_number] => 17/393424 [patent_app_country] => US [patent_app_date] => 2021-08-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 10 [patent_no_of_words] => 3869 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 229 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17393424 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/393424
Detecting device and automatic cleaner Aug 3, 2021 Issued
Array ( [id] => 17386969 [patent_doc_number] => 20220034821 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-02-03 [patent_title] => CONNECTING DEVICE FOR INSPECTION [patent_app_type] => utility [patent_app_number] => 17/392214 [patent_app_country] => US [patent_app_date] => 2021-08-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6347 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 160 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17392214 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/392214
Connecting device for inspection Aug 1, 2021 Issued
Array ( [id] => 17387396 [patent_doc_number] => 20220035248 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-02-03 [patent_title] => SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM, AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/385387 [patent_app_country] => US [patent_app_date] => 2021-07-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 15335 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 157 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17385387 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/385387
Substrate processing method, storage medium, and substrate processing apparatus Jul 25, 2021 Issued
Array ( [id] => 17227753 [patent_doc_number] => 20210354309 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-18 [patent_title] => CARRIER SYSTEM, EXPOSURE APPARATUS, CARRIER METHOD, EXPOSURE METHOD, DEVICE MANUFACTURING METHOD, AND SUCTION DEVICE [patent_app_type] => utility [patent_app_number] => 17/381491 [patent_app_country] => US [patent_app_date] => 2021-07-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 17724 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 65 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17381491 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/381491
Carrier system, exposure apparatus, carrier method, exposure method, device manufacturing method, and suction device Jul 20, 2021 Issued
Array ( [id] => 17621480 [patent_doc_number] => 11340533 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-05-24 [patent_title] => Substrate treating apparatus and substrate treating method [patent_app_type] => utility [patent_app_number] => 17/380308 [patent_app_country] => US [patent_app_date] => 2021-07-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 18 [patent_no_of_words] => 13143 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 131 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17380308 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/380308
Substrate treating apparatus and substrate treating method Jul 19, 2021 Issued
Array ( [id] => 18741327 [patent_doc_number] => 20230350308 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-11-02 [patent_title] => DOUBLE-SCANNING OPTO-MECHANICAL CONFIGURATIONS TO IMPROVE THROUGHPUT OF PARTICLE INSPECTION SYSTEMS [patent_app_type] => utility [patent_app_number] => 18/018127 [patent_app_country] => US [patent_app_date] => 2021-07-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 20610 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 165 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18018127 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/018127
Double-scanning opto-mechanical configurations to improve throughput of particle inspection systems Jul 19, 2021 Issued
Array ( [id] => 17801597 [patent_doc_number] => 11415894 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-08-16 [patent_title] => Projection exposure system for semiconductor lithography having an optical arrangement [patent_app_type] => utility [patent_app_number] => 17/380231 [patent_app_country] => US [patent_app_date] => 2021-07-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 8 [patent_no_of_words] => 4234 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 94 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17380231 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/380231
Projection exposure system for semiconductor lithography having an optical arrangement Jul 19, 2021 Issued
Array ( [id] => 17386971 [patent_doc_number] => 20220034823 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-02-03 [patent_title] => Die Bonding Apparatus and Manufacturing Method for Semiconductor Device [patent_app_type] => utility [patent_app_number] => 17/378049 [patent_app_country] => US [patent_app_date] => 2021-07-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11424 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 237 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17378049 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/378049
Die bonding apparatus and manufacturing method for semiconductor device Jul 15, 2021 Issued
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