
Edward J. Webman
Examiner (ID: 8225)
| Most Active Art Unit | 1617 |
| Art Unit(s) | 1617, 2899, 1621, 3617, 1616, 1615, 1501, 1502 |
| Total Applications | 1435 |
| Issued Applications | 869 |
| Pending Applications | 171 |
| Abandoned Applications | 394 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 17201747
[patent_doc_number] => 20210341842
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-11-04
[patent_title] => SUBSTRATE MEASURING DEVICE AND A METHOD OF USING THE SAME
[patent_app_type] => utility
[patent_app_number] => 17/374753
[patent_app_country] => US
[patent_app_date] => 2021-07-13
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 6177
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 122
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17374753
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/374753 | Substrate measuring device and a method of using the same | Jul 12, 2021 | Issued |
Array
(
[id] => 17201746
[patent_doc_number] => 20210341841
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-11-04
[patent_title] => SUBSTRATE MEASURING DEVICE AND A METHOD OF USING THE SAME
[patent_app_type] => utility
[patent_app_number] => 17/374647
[patent_app_country] => US
[patent_app_date] => 2021-07-13
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 6177
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 162
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17374647
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/374647 | Substrate measuring device and a method of using the same | Jul 12, 2021 | Issued |
Array
(
[id] => 19710880
[patent_doc_number] => 20250021022
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2025-01-16
[patent_title] => ELECTROSTATIC HOLDER, OBJECT TABLE AND LITHOGRAPHIC APPARATUS
[patent_app_type] => utility
[patent_app_number] => 18/682883
[patent_app_country] => US
[patent_app_date] => 2021-07-13
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 8897
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -14
[patent_words_short_claim] => 2
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18682883
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/682883 | ELECTROSTATIC HOLDER, OBJECT TABLE AND LITHOGRAPHIC APPARATUS | Jul 12, 2021 | Pending |
Array
(
[id] => 18126082
[patent_doc_number] => 20230011701
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-01-12
[patent_title] => OPTICAL LITHOGRAPHY SYSTEM AND METHOD OF USING THE SAME
[patent_app_type] => utility
[patent_app_number] => 17/371204
[patent_app_country] => US
[patent_app_date] => 2021-07-09
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 12557
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -12
[patent_words_short_claim] => 2
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17371204
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/371204 | Optical lithography system and method of using the same | Jul 8, 2021 | Issued |
Array
(
[id] => 17853475
[patent_doc_number] => 20220283517
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-09-08
[patent_title] => SUBSTRATE STAGE, SUBSTRATE PROCESSING SYSTEM USING THE SAME, AND METHOD FOR PROCESSING SUBSTRATE
[patent_app_type] => utility
[patent_app_number] => 17/370267
[patent_app_country] => US
[patent_app_date] => 2021-07-08
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 5823
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 62
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17370267
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/370267 | Substrate stage, substrate processing system using the same, and method for processing substrate | Jul 7, 2021 | Issued |
Array
(
[id] => 17743976
[patent_doc_number] => 11392039
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2022-07-19
[patent_title] => Photoresist baking apparatus with cover plate having uneven exhaust hole distribution
[patent_app_type] => utility
[patent_app_number] => 17/369001
[patent_app_country] => US
[patent_app_date] => 2021-07-07
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 5
[patent_no_of_words] => 6783
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 110
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17369001
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/369001 | Photoresist baking apparatus with cover plate having uneven exhaust hole distribution | Jul 6, 2021 | Issued |
Array
(
[id] => 18479589
[patent_doc_number] => 11693325
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2023-07-04
[patent_title] => Methods and systems for reducing particulate deposition on photomask
[patent_app_type] => utility
[patent_app_number] => 17/360440
[patent_app_country] => US
[patent_app_date] => 2021-06-28
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 6
[patent_no_of_words] => 6709
[patent_no_of_claims] => 19
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 92
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17360440
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/360440 | Methods and systems for reducing particulate deposition on photomask | Jun 27, 2021 | Issued |
Array
(
[id] => 17316494
[patent_doc_number] => 20210405543
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-12-30
[patent_title] => COMPENSATION OF CREEP EFFECTS IN AN IMAGING DEVICE
[patent_app_type] => utility
[patent_app_number] => 17/354204
[patent_app_country] => US
[patent_app_date] => 2021-06-22
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 12055
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -20
[patent_words_short_claim] => 136
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17354204
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/354204 | Compensation of creep effects in an imaging device | Jun 21, 2021 | Issued |
Array
(
[id] => 18582211
[patent_doc_number] => 20230264466
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-08-24
[patent_title] => Apparatus and Method for Exposure or Relief Precursors
[patent_app_type] => utility
[patent_app_number] => 18/009922
[patent_app_country] => US
[patent_app_date] => 2021-06-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 12863
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -18
[patent_words_short_claim] => 2
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18009922
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/009922 | Apparatus and method for exposure or relief precursors | Jun 20, 2021 | Issued |
Array
(
[id] => 18332251
[patent_doc_number] => 11637512
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2023-04-25
[patent_title] => Object table comprising an electrostatic clamp
[patent_app_type] => utility
[patent_app_number] => 17/351181
[patent_app_country] => US
[patent_app_date] => 2021-06-17
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 27
[patent_figures_cnt] => 33
[patent_no_of_words] => 35423
[patent_no_of_claims] => 16
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 132
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17351181
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/351181 | Object table comprising an electrostatic clamp | Jun 16, 2021 | Issued |
Array
(
[id] => 18225177
[patent_doc_number] => 20230064171
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-03-02
[patent_title] => EXPOSURE MACHINE
[patent_app_type] => utility
[patent_app_number] => 17/439566
[patent_app_country] => US
[patent_app_date] => 2021-06-17
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 8953
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -16
[patent_words_short_claim] => 176
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17439566
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/439566 | Exposure machine | Jun 16, 2021 | Issued |
Array
(
[id] => 18103870
[patent_doc_number] => 11543754
[patent_country] => US
[patent_kind] => B1
[patent_issue_date] => 2023-01-03
[patent_title] => Extractor piping on outermost sidewall of immersion hood apparatus
[patent_app_type] => utility
[patent_app_number] => 17/349231
[patent_app_country] => US
[patent_app_date] => 2021-06-16
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 17
[patent_no_of_words] => 6525
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 170
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17349231
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/349231 | Extractor piping on outermost sidewall of immersion hood apparatus | Jun 15, 2021 | Issued |
Array
(
[id] => 18086540
[patent_doc_number] => 11536668
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2022-12-27
[patent_title] => Apparatus for use in an automated optical inspection
[patent_app_type] => utility
[patent_app_number] => 17/348103
[patent_app_country] => US
[patent_app_date] => 2021-06-15
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 4
[patent_no_of_words] => 3882
[patent_no_of_claims] => 8
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 167
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17348103
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/348103 | Apparatus for use in an automated optical inspection | Jun 14, 2021 | Issued |
Array
(
[id] => 18568701
[patent_doc_number] => 20230259037
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-08-17
[patent_title] => A FLUID HANDLING SYSTEM, METHOD AND LITHOGRAPHIC APPARATUS
[patent_app_type] => utility
[patent_app_number] => 18/015522
[patent_app_country] => US
[patent_app_date] => 2021-06-14
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 11129
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -16
[patent_words_short_claim] => 22
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18015522
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/015522 | Fluid handling system, method and lithographic apparatus | Jun 13, 2021 | Issued |
Array
(
[id] => 19810815
[patent_doc_number] => 12242203
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2025-03-04
[patent_title] => Target for measuring a parameter of a lithographic process
[patent_app_type] => utility
[patent_app_number] => 18/001255
[patent_app_country] => US
[patent_app_date] => 2021-06-08
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 11
[patent_no_of_words] => 7554
[patent_no_of_claims] => 11
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 64
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18001255
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/001255 | Target for measuring a parameter of a lithographic process | Jun 7, 2021 | Issued |
Array
(
[id] => 17999190
[patent_doc_number] => 11500294
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2022-11-15
[patent_title] => Method for replacing a mirror in a projection exposure apparatus, and position- and orientation data measuring device for carrying out the method
[patent_app_type] => utility
[patent_app_number] => 17/340052
[patent_app_country] => US
[patent_app_date] => 2021-06-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 17
[patent_no_of_words] => 6584
[patent_no_of_claims] => 14
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 112
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17340052
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/340052 | Method for replacing a mirror in a projection exposure apparatus, and position- and orientation data measuring device for carrying out the method | Jun 5, 2021 | Issued |
Array
(
[id] => 18156128
[patent_doc_number] => 11569119
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2023-01-31
[patent_title] => Conveyance apparatus, substrate processing apparatus, and method of manufacturing article
[patent_app_type] => utility
[patent_app_number] => 17/338836
[patent_app_country] => US
[patent_app_date] => 2021-06-04
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 7
[patent_no_of_words] => 4644
[patent_no_of_claims] => 23
[patent_no_of_ind_claims] => 5
[patent_words_short_claim] => 203
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17338836
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/338836 | Conveyance apparatus, substrate processing apparatus, and method of manufacturing article | Jun 3, 2021 | Issued |
Array
(
[id] => 18486523
[patent_doc_number] => 20230213868
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-07-06
[patent_title] => LITHOGRAPHIC APPARATUS, METROLOGY SYSTEMS, ILLUMINATION SWITCHES AND METHODS THEREOF
[patent_app_type] => utility
[patent_app_number] => 18/012308
[patent_app_country] => US
[patent_app_date] => 2021-06-04
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 15343
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 92
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18012308
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/012308 | Lithographic apparatus, metrology systems, illumination switches and methods thereof | Jun 3, 2021 | Issued |
Array
(
[id] => 17112935
[patent_doc_number] => 20210293532
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-09-23
[patent_title] => Scatterometry Based Methods And Systems For Measurement Of Strain In Semiconductor Structures
[patent_app_type] => utility
[patent_app_number] => 17/338449
[patent_app_country] => US
[patent_app_date] => 2021-06-03
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 13496
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 118
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17338449
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/338449 | Scatterometry based methods and systems for measurement of strain in semiconductor structures | Jun 2, 2021 | Issued |
Array
(
[id] => 18037379
[patent_doc_number] => 20220381594
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-12-01
[patent_title] => VOLUME FLOW MEASUREMENT OF MATERIAL USING 3D LIDAR
[patent_app_type] => utility
[patent_app_number] => 17/303456
[patent_app_country] => US
[patent_app_date] => 2021-05-28
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 3279
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -15
[patent_words_short_claim] => 123
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17303456
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/303456 | VOLUME FLOW MEASUREMENT OF MATERIAL USING 3D LIDAR | May 27, 2021 | Abandoned |