Search

Edward J. Webman

Examiner (ID: 8225)

Most Active Art Unit
1617
Art Unit(s)
1617, 2899, 1621, 3617, 1616, 1615, 1501, 1502
Total Applications
1435
Issued Applications
869
Pending Applications
171
Abandoned Applications
394

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 17201747 [patent_doc_number] => 20210341842 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-04 [patent_title] => SUBSTRATE MEASURING DEVICE AND A METHOD OF USING THE SAME [patent_app_type] => utility [patent_app_number] => 17/374753 [patent_app_country] => US [patent_app_date] => 2021-07-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6177 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 122 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17374753 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/374753
Substrate measuring device and a method of using the same Jul 12, 2021 Issued
Array ( [id] => 17201746 [patent_doc_number] => 20210341841 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-04 [patent_title] => SUBSTRATE MEASURING DEVICE AND A METHOD OF USING THE SAME [patent_app_type] => utility [patent_app_number] => 17/374647 [patent_app_country] => US [patent_app_date] => 2021-07-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6177 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 162 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17374647 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/374647
Substrate measuring device and a method of using the same Jul 12, 2021 Issued
Array ( [id] => 19710880 [patent_doc_number] => 20250021022 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-01-16 [patent_title] => ELECTROSTATIC HOLDER, OBJECT TABLE AND LITHOGRAPHIC APPARATUS [patent_app_type] => utility [patent_app_number] => 18/682883 [patent_app_country] => US [patent_app_date] => 2021-07-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8897 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18682883 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/682883
ELECTROSTATIC HOLDER, OBJECT TABLE AND LITHOGRAPHIC APPARATUS Jul 12, 2021 Pending
Array ( [id] => 18126082 [patent_doc_number] => 20230011701 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-01-12 [patent_title] => OPTICAL LITHOGRAPHY SYSTEM AND METHOD OF USING THE SAME [patent_app_type] => utility [patent_app_number] => 17/371204 [patent_app_country] => US [patent_app_date] => 2021-07-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12557 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17371204 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/371204
Optical lithography system and method of using the same Jul 8, 2021 Issued
Array ( [id] => 17853475 [patent_doc_number] => 20220283517 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-08 [patent_title] => SUBSTRATE STAGE, SUBSTRATE PROCESSING SYSTEM USING THE SAME, AND METHOD FOR PROCESSING SUBSTRATE [patent_app_type] => utility [patent_app_number] => 17/370267 [patent_app_country] => US [patent_app_date] => 2021-07-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5823 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 62 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17370267 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/370267
Substrate stage, substrate processing system using the same, and method for processing substrate Jul 7, 2021 Issued
Array ( [id] => 17743976 [patent_doc_number] => 11392039 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-07-19 [patent_title] => Photoresist baking apparatus with cover plate having uneven exhaust hole distribution [patent_app_type] => utility [patent_app_number] => 17/369001 [patent_app_country] => US [patent_app_date] => 2021-07-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 5 [patent_no_of_words] => 6783 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 110 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17369001 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/369001
Photoresist baking apparatus with cover plate having uneven exhaust hole distribution Jul 6, 2021 Issued
Array ( [id] => 18479589 [patent_doc_number] => 11693325 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-07-04 [patent_title] => Methods and systems for reducing particulate deposition on photomask [patent_app_type] => utility [patent_app_number] => 17/360440 [patent_app_country] => US [patent_app_date] => 2021-06-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 6 [patent_no_of_words] => 6709 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 92 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17360440 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/360440
Methods and systems for reducing particulate deposition on photomask Jun 27, 2021 Issued
Array ( [id] => 17316494 [patent_doc_number] => 20210405543 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-30 [patent_title] => COMPENSATION OF CREEP EFFECTS IN AN IMAGING DEVICE [patent_app_type] => utility [patent_app_number] => 17/354204 [patent_app_country] => US [patent_app_date] => 2021-06-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12055 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -20 [patent_words_short_claim] => 136 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17354204 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/354204
Compensation of creep effects in an imaging device Jun 21, 2021 Issued
Array ( [id] => 18582211 [patent_doc_number] => 20230264466 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-24 [patent_title] => Apparatus and Method for Exposure or Relief Precursors [patent_app_type] => utility [patent_app_number] => 18/009922 [patent_app_country] => US [patent_app_date] => 2021-06-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12863 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18009922 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/009922
Apparatus and method for exposure or relief precursors Jun 20, 2021 Issued
Array ( [id] => 18332251 [patent_doc_number] => 11637512 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-04-25 [patent_title] => Object table comprising an electrostatic clamp [patent_app_type] => utility [patent_app_number] => 17/351181 [patent_app_country] => US [patent_app_date] => 2021-06-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 27 [patent_figures_cnt] => 33 [patent_no_of_words] => 35423 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 132 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17351181 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/351181
Object table comprising an electrostatic clamp Jun 16, 2021 Issued
Array ( [id] => 18225177 [patent_doc_number] => 20230064171 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-02 [patent_title] => EXPOSURE MACHINE [patent_app_type] => utility [patent_app_number] => 17/439566 [patent_app_country] => US [patent_app_date] => 2021-06-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8953 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 176 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17439566 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/439566
Exposure machine Jun 16, 2021 Issued
Array ( [id] => 18103870 [patent_doc_number] => 11543754 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2023-01-03 [patent_title] => Extractor piping on outermost sidewall of immersion hood apparatus [patent_app_type] => utility [patent_app_number] => 17/349231 [patent_app_country] => US [patent_app_date] => 2021-06-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 17 [patent_no_of_words] => 6525 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 170 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17349231 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/349231
Extractor piping on outermost sidewall of immersion hood apparatus Jun 15, 2021 Issued
Array ( [id] => 18086540 [patent_doc_number] => 11536668 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-12-27 [patent_title] => Apparatus for use in an automated optical inspection [patent_app_type] => utility [patent_app_number] => 17/348103 [patent_app_country] => US [patent_app_date] => 2021-06-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3882 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 167 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17348103 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/348103
Apparatus for use in an automated optical inspection Jun 14, 2021 Issued
Array ( [id] => 18568701 [patent_doc_number] => 20230259037 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-17 [patent_title] => A FLUID HANDLING SYSTEM, METHOD AND LITHOGRAPHIC APPARATUS [patent_app_type] => utility [patent_app_number] => 18/015522 [patent_app_country] => US [patent_app_date] => 2021-06-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11129 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 22 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18015522 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/015522
Fluid handling system, method and lithographic apparatus Jun 13, 2021 Issued
Array ( [id] => 19810815 [patent_doc_number] => 12242203 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-03-04 [patent_title] => Target for measuring a parameter of a lithographic process [patent_app_type] => utility [patent_app_number] => 18/001255 [patent_app_country] => US [patent_app_date] => 2021-06-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 11 [patent_no_of_words] => 7554 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 64 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18001255 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/001255
Target for measuring a parameter of a lithographic process Jun 7, 2021 Issued
Array ( [id] => 17999190 [patent_doc_number] => 11500294 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-11-15 [patent_title] => Method for replacing a mirror in a projection exposure apparatus, and position- and orientation data measuring device for carrying out the method [patent_app_type] => utility [patent_app_number] => 17/340052 [patent_app_country] => US [patent_app_date] => 2021-06-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 17 [patent_no_of_words] => 6584 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 112 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17340052 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/340052
Method for replacing a mirror in a projection exposure apparatus, and position- and orientation data measuring device for carrying out the method Jun 5, 2021 Issued
Array ( [id] => 18156128 [patent_doc_number] => 11569119 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-01-31 [patent_title] => Conveyance apparatus, substrate processing apparatus, and method of manufacturing article [patent_app_type] => utility [patent_app_number] => 17/338836 [patent_app_country] => US [patent_app_date] => 2021-06-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 7 [patent_no_of_words] => 4644 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 203 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17338836 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/338836
Conveyance apparatus, substrate processing apparatus, and method of manufacturing article Jun 3, 2021 Issued
Array ( [id] => 18486523 [patent_doc_number] => 20230213868 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-07-06 [patent_title] => LITHOGRAPHIC APPARATUS, METROLOGY SYSTEMS, ILLUMINATION SWITCHES AND METHODS THEREOF [patent_app_type] => utility [patent_app_number] => 18/012308 [patent_app_country] => US [patent_app_date] => 2021-06-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 15343 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 92 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18012308 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/012308
Lithographic apparatus, metrology systems, illumination switches and methods thereof Jun 3, 2021 Issued
Array ( [id] => 17112935 [patent_doc_number] => 20210293532 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-09-23 [patent_title] => Scatterometry Based Methods And Systems For Measurement Of Strain In Semiconductor Structures [patent_app_type] => utility [patent_app_number] => 17/338449 [patent_app_country] => US [patent_app_date] => 2021-06-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13496 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 118 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17338449 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/338449
Scatterometry based methods and systems for measurement of strain in semiconductor structures Jun 2, 2021 Issued
Array ( [id] => 18037379 [patent_doc_number] => 20220381594 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-12-01 [patent_title] => VOLUME FLOW MEASUREMENT OF MATERIAL USING 3D LIDAR [patent_app_type] => utility [patent_app_number] => 17/303456 [patent_app_country] => US [patent_app_date] => 2021-05-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3279 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 123 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17303456 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/303456
VOLUME FLOW MEASUREMENT OF MATERIAL USING 3D LIDAR May 27, 2021 Abandoned
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