
Edward J. Webman
Examiner (ID: 8225)
| Most Active Art Unit | 1617 |
| Art Unit(s) | 1617, 2899, 1621, 3617, 1616, 1615, 1501, 1502 |
| Total Applications | 1435 |
| Issued Applications | 869 |
| Pending Applications | 171 |
| Abandoned Applications | 394 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 17898796
[patent_doc_number] => 20220308458
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-09-29
[patent_title] => PHOTOLITHOGRAPHY DEVICE AND METHOD FOR MONITORING POSITION OF A LIGHT SOURCE IN A PHOTOLITHOGRAPHY DEVICE
[patent_app_type] => utility
[patent_app_number] => 17/593054
[patent_app_country] => US
[patent_app_date] => 2021-04-16
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 8168
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -19
[patent_words_short_claim] => 74
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17593054
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/593054 | Photolithography device and method for monitoring position of a light source in a photolithography device | Apr 15, 2021 | Issued |
Array
(
[id] => 17931480
[patent_doc_number] => 20220326605
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-10-13
[patent_title] => SINGLE-VOLUME BAKING CHAMBER FOR MASK CLEAN
[patent_app_type] => utility
[patent_app_number] => 17/226762
[patent_app_country] => US
[patent_app_date] => 2021-04-09
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 3450
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 91
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17226762
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/226762 | Single-volume baking chamber for mask clean | Apr 8, 2021 | Issued |
Array
(
[id] => 17931481
[patent_doc_number] => 20220326606
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-10-13
[patent_title] => MULTI-VOLUME BAKING CHAMBER FOR MASK CLEAN
[patent_app_type] => utility
[patent_app_number] => 17/226775
[patent_app_country] => US
[patent_app_date] => 2021-04-09
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 3799
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 78
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17226775
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/226775 | Multi-volume baking chamber for mask clean | Apr 8, 2021 | Issued |
Array
(
[id] => 19668681
[patent_doc_number] => 12181419
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2024-12-31
[patent_title] => Station and method for translationally detecting glaze defects on glass containers
[patent_app_type] => utility
[patent_app_number] => 17/918154
[patent_app_country] => US
[patent_app_date] => 2021-04-09
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 15
[patent_figures_cnt] => 22
[patent_no_of_words] => 17691
[patent_no_of_claims] => 17
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 520
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17918154
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/918154 | Station and method for translationally detecting glaze defects on glass containers | Apr 8, 2021 | Issued |
Array
(
[id] => 19978186
[patent_doc_number] => 12345658
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2025-07-01
[patent_title] => Large-particle monitoring with laser power control for defect inspection
[patent_app_type] => utility
[patent_app_number] => 17/224913
[patent_app_country] => US
[patent_app_date] => 2021-04-07
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 6
[patent_no_of_words] => 1188
[patent_no_of_claims] => 32
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 142
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17224913
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/224913 | Large-particle monitoring with laser power control for defect inspection | Apr 6, 2021 | Issued |
Array
(
[id] => 17915183
[patent_doc_number] => 20220317579
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-10-06
[patent_title] => APPARATUS AND METHODS FOR VERIFICATION AND RE-USE OF PROCESS FLUIDS
[patent_app_type] => utility
[patent_app_number] => 17/222696
[patent_app_country] => US
[patent_app_date] => 2021-04-05
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 5432
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 87
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17222696
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/222696 | Apparatus and methods for verification and re-use of process fluids | Apr 4, 2021 | Issued |
Array
(
[id] => 17572481
[patent_doc_number] => 11320749
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2022-05-03
[patent_title] => Actuator device for aligning an element, projection exposure apparatus for semiconductor lithography, and method for aligning an element
[patent_app_type] => utility
[patent_app_number] => 17/220305
[patent_app_country] => US
[patent_app_date] => 2021-04-01
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 8
[patent_no_of_words] => 10168
[patent_no_of_claims] => 24
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 128
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17220305
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/220305 | Actuator device for aligning an element, projection exposure apparatus for semiconductor lithography, and method for aligning an element | Mar 31, 2021 | Issued |
Array
(
[id] => 17915181
[patent_doc_number] => 20220317577
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-10-06
[patent_title] => ENHANCING PERFORMANCE OF OVERLAY METROLOGY
[patent_app_type] => utility
[patent_app_number] => 17/219869
[patent_app_country] => US
[patent_app_date] => 2021-03-31
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 12739
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -30
[patent_words_short_claim] => 86
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17219869
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/219869 | Enhancing performance of overlay metrology | Mar 30, 2021 | Issued |
Array
(
[id] => 18326872
[patent_doc_number] => 20230125000
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-04-20
[patent_title] => METHOD FOR MEASURING DIC DEFECT SHAPE ON SILICON WAFER AND POLISHING METHOD
[patent_app_type] => utility
[patent_app_number] => 17/914631
[patent_app_country] => US
[patent_app_date] => 2021-03-31
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 2919
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -3
[patent_words_short_claim] => 2
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17914631
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/914631 | Method for measuring DIC defect shape on silicon wafer and polishing method | Mar 30, 2021 | Issued |
Array
(
[id] => 16979466
[patent_doc_number] => 20210223703
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-07-22
[patent_title] => LITHOGRAPHIC APPARATUS
[patent_app_type] => utility
[patent_app_number] => 17/218420
[patent_app_country] => US
[patent_app_date] => 2021-03-31
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 7349
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -14
[patent_words_short_claim] => 110
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17218420
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/218420 | Lithographic apparatus | Mar 30, 2021 | Issued |
Array
(
[id] => 18470067
[patent_doc_number] => 20230204352
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-06-29
[patent_title] => SYSTEM AND METHOD FOR GENERATING LEVEL DATA FOR A SURFACE OF A SUBSTRATE
[patent_app_type] => utility
[patent_app_number] => 17/923535
[patent_app_country] => US
[patent_app_date] => 2021-03-29
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 21424
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -15
[patent_words_short_claim] => 2
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17923535
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/923535 | SYSTEM AND METHOD FOR GENERATING LEVEL DATA FOR A SURFACE OF A SUBSTRATE | Mar 28, 2021 | Issued |
Array
(
[id] => 17580660
[patent_doc_number] => 20220137515
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-05-05
[patent_title] => DIGITAL EXPOSURE APPARATUS AND EXPOSURE METHOD
[patent_app_type] => utility
[patent_app_number] => 17/214678
[patent_app_country] => US
[patent_app_date] => 2021-03-26
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 5153
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -19
[patent_words_short_claim] => 109
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17214678
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/214678 | Digital exposure apparatus and exposure method | Mar 25, 2021 | Issued |
Array
(
[id] => 17008927
[patent_doc_number] => 20210240088
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-08-05
[patent_title] => METROLOGY APPARATUS WITH RADIATION SOURCE HAVING MULTIPLE BROADBAND OUTPUTS
[patent_app_type] => utility
[patent_app_number] => 17/213983
[patent_app_country] => US
[patent_app_date] => 2021-03-26
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 8103
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -11
[patent_words_short_claim] => 167
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17213983
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/213983 | Metrology apparatus with radiation source having multiple broadband outputs | Mar 25, 2021 | Issued |
Array
(
[id] => 18261490
[patent_doc_number] => 11609188
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2023-03-21
[patent_title] => Processing condition determination system and processing condition searching method
[patent_app_type] => utility
[patent_app_number] => 17/209735
[patent_app_country] => US
[patent_app_date] => 2021-03-23
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 10
[patent_figures_cnt] => 16
[patent_no_of_words] => 5278
[patent_no_of_claims] => 14
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 267
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17209735
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/209735 | Processing condition determination system and processing condition searching method | Mar 22, 2021 | Issued |
Array
(
[id] => 18352167
[patent_doc_number] => 20230140278
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-05-04
[patent_title] => METHOD AND INSPECTION DEVICE FOR OPTICALLY INSPECTING A SURFACE
[patent_app_type] => utility
[patent_app_number] => 17/917812
[patent_app_country] => US
[patent_app_date] => 2021-03-22
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 10490
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -13
[patent_words_short_claim] => 273
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17917812
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/917812 | Method and inspection device for optically inspecting a surface | Mar 21, 2021 | Issued |
Array
(
[id] => 17922194
[patent_doc_number] => 11465418
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2022-10-11
[patent_title] => Manufacturing method for structure and manufacturing method for liquid ejection head
[patent_app_type] => utility
[patent_app_number] => 17/204554
[patent_app_country] => US
[patent_app_date] => 2021-03-17
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 61
[patent_no_of_words] => 17370
[patent_no_of_claims] => 13
[patent_no_of_ind_claims] => 6
[patent_words_short_claim] => 131
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17204554
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/204554 | Manufacturing method for structure and manufacturing method for liquid ejection head | Mar 16, 2021 | Issued |
Array
(
[id] => 16934216
[patent_doc_number] => 20210200105
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-07-01
[patent_title] => FIELD-TO-FIELD CORRECTIONS USING OVERLAY TARGETS
[patent_app_type] => utility
[patent_app_number] => 17/200479
[patent_app_country] => US
[patent_app_date] => 2021-03-12
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 10663
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -29
[patent_words_short_claim] => 175
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17200479
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/200479 | Field-to-field corrections using overlay targets | Mar 11, 2021 | Issued |
Array
(
[id] => 19609829
[patent_doc_number] => 12158702
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2024-12-03
[patent_title] => Exposure device
[patent_app_type] => utility
[patent_app_number] => 17/910632
[patent_app_country] => US
[patent_app_date] => 2021-03-11
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 8
[patent_figures_cnt] => 15
[patent_no_of_words] => 6489
[patent_no_of_claims] => 12
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 148
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17910632
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/910632 | Exposure device | Mar 10, 2021 | Issued |
Array
(
[id] => 17371761
[patent_doc_number] => 20220026813
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-01-27
[patent_title] => MASK CHUCK AND MASK MANUFACTURING APPARATUS INCLUDING SAME
[patent_app_type] => utility
[patent_app_number] => 17/198469
[patent_app_country] => US
[patent_app_date] => 2021-03-11
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 7419
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 71
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17198469
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/198469 | Mask chuck and mask manufacturing apparatus including same | Mar 10, 2021 | Issued |
Array
(
[id] => 17293843
[patent_doc_number] => 20210389682
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-12-16
[patent_title] => Digital Exposure Control Method and Apparatus
[patent_app_type] => utility
[patent_app_number] => 17/199395
[patent_app_country] => US
[patent_app_date] => 2021-03-11
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 11388
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 47
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17199395
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/199395 | Digital exposure control method and apparatus | Mar 10, 2021 | Issued |