Search

Edward J. Webman

Examiner (ID: 8225)

Most Active Art Unit
1617
Art Unit(s)
1617, 2899, 1621, 3617, 1616, 1615, 1501, 1502
Total Applications
1435
Issued Applications
869
Pending Applications
171
Abandoned Applications
394

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 19848435 [patent_doc_number] => 20250093786 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-03-20 [patent_title] => MULTI-COLUMN LARGE FIELD OF VIEW IMAGING PLATFORM [patent_app_type] => utility [patent_app_number] => 18/368795 [patent_app_country] => US [patent_app_date] => 2023-09-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8004 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -21 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18368795 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/368795
MULTI-COLUMN LARGE FIELD OF VIEW IMAGING PLATFORM Sep 14, 2023 Pending
Array ( [id] => 20454387 [patent_doc_number] => 12517439 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-01-06 [patent_title] => Vacuum bake for EUV lithography [patent_app_type] => utility [patent_app_number] => 18/243129 [patent_app_country] => US [patent_app_date] => 2023-09-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 5818 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 77 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18243129 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/243129
Vacuum bake for EUV lithography Sep 6, 2023 Issued
Array ( [id] => 19068950 [patent_doc_number] => 20240103376 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-03-28 [patent_title] => BAKE UNIT, OPERATION METHOD THEREOF, AND PHOTO SPINNER EQUIPMENT HAVING THE BAKE UNIT [patent_app_type] => utility [patent_app_number] => 18/241892 [patent_app_country] => US [patent_app_date] => 2023-09-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6284 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 102 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18241892 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/241892
BAKE UNIT, OPERATION METHOD THEREOF, AND PHOTO SPINNER EQUIPMENT HAVING THE BAKE UNIT Sep 2, 2023 Pending
Array ( [id] => 20109744 [patent_doc_number] => 12360459 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-07-15 [patent_title] => Optical assembly, method for deforming an optical element, and projection exposure system [patent_app_type] => utility [patent_app_number] => 18/453750 [patent_app_country] => US [patent_app_date] => 2023-08-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 7 [patent_no_of_words] => 5697 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 180 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18453750 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/453750
Optical assembly, method for deforming an optical element, and projection exposure system Aug 21, 2023 Issued
Array ( [id] => 20081123 [patent_doc_number] => 12355204 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-07-08 [patent_title] => Gas laser apparatus and electronic device manufacturing method [patent_app_type] => utility [patent_app_number] => 18/447520 [patent_app_country] => US [patent_app_date] => 2023-08-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 21 [patent_no_of_words] => 12422 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 318 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18447520 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/447520
Gas laser apparatus and electronic device manufacturing method Aug 9, 2023 Issued
Array ( [id] => 18832248 [patent_doc_number] => 20230400775 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-12-14 [patent_title] => METHOD OF USING WAFER STAGE [patent_app_type] => utility [patent_app_number] => 18/448110 [patent_app_country] => US [patent_app_date] => 2023-08-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9456 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 89 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18448110 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/448110
Method of using wafer stage Aug 9, 2023 Issued
Array ( [id] => 18904304 [patent_doc_number] => 20240019789 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-01-18 [patent_title] => SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION [patent_app_type] => utility [patent_app_number] => 18/446698 [patent_app_country] => US [patent_app_date] => 2023-08-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8956 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 68 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18446698 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/446698
Semiconductor processing tool and methods of operation Aug 8, 2023 Issued
Array ( [id] => 19537693 [patent_doc_number] => 12130242 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-10-29 [patent_title] => Inspection system of semiconductor wafer and method of driving the same [patent_app_type] => utility [patent_app_number] => 18/446837 [patent_app_country] => US [patent_app_date] => 2023-08-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 7 [patent_no_of_words] => 6347 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 128 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18446837 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/446837
Inspection system of semiconductor wafer and method of driving the same Aug 8, 2023 Issued
Array ( [id] => 19595501 [patent_doc_number] => 12153341 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-11-26 [patent_title] => Cleaning method, method for forming semiconductor structure and system thereof [patent_app_type] => utility [patent_app_number] => 18/360830 [patent_app_country] => US [patent_app_date] => 2023-07-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 6236 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 65 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18360830 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/360830
Cleaning method, method for forming semiconductor structure and system thereof Jul 27, 2023 Issued
Array ( [id] => 18755689 [patent_doc_number] => 20230359133 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-11-09 [patent_title] => SUBSTRATE STAGE AND SUBSTRATE PROCESSING SYSTEM USING THE SAME [patent_app_type] => utility [patent_app_number] => 18/351571 [patent_app_country] => US [patent_app_date] => 2023-07-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5855 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 65 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18351571 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/351571
Substrate stage and substrate processing system using the same Jul 12, 2023 Issued
Array ( [id] => 18741330 [patent_doc_number] => 20230350311 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-11-02 [patent_title] => DEVICE FOR POSITIONING AND HOLDING AT LEAST ONE OPTICAL ELEMENT, MEASUREMENT SYSTEM [patent_app_type] => utility [patent_app_number] => 18/348549 [patent_app_country] => US [patent_app_date] => 2023-07-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4559 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 152 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18348549 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/348549
Device for positioning and holding at least one optical element, measurement system Jul 6, 2023 Issued
Array ( [id] => 20265470 [patent_doc_number] => 12436457 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-10-07 [patent_title] => Developing apparatus and substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 18/333570 [patent_app_country] => US [patent_app_date] => 2023-06-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 5 [patent_no_of_words] => 0 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 149 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18333570 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/333570
Developing apparatus and substrate processing apparatus Jun 12, 2023 Issued
Array ( [id] => 19794644 [patent_doc_number] => 12235589 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-02-25 [patent_title] => Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor device [patent_app_type] => utility [patent_app_number] => 18/206970 [patent_app_country] => US [patent_app_date] => 2023-06-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 110 [patent_figures_cnt] => 116 [patent_no_of_words] => 22484 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 117 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18206970 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/206970
Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor device Jun 6, 2023 Issued
Array ( [id] => 19426454 [patent_doc_number] => 12085866 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-09-10 [patent_title] => Particle removing assembly and method of cleaning mask for lithography [patent_app_type] => utility [patent_app_number] => 18/200951 [patent_app_country] => US [patent_app_date] => 2023-05-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 23 [patent_no_of_words] => 5982 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18200951 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/200951
Particle removing assembly and method of cleaning mask for lithography May 22, 2023 Issued
Array ( [id] => 19609834 [patent_doc_number] => 12158707 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-12-03 [patent_title] => Methods and systems for reducing particulate deposition on photomask [patent_app_type] => utility [patent_app_number] => 18/199730 [patent_app_country] => US [patent_app_date] => 2023-05-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 6 [patent_no_of_words] => 6729 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 70 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18199730 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/199730
Methods and systems for reducing particulate deposition on photomask May 18, 2023 Issued
Array ( [id] => 18629380 [patent_doc_number] => 20230288260 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-09-14 [patent_title] => METHOD AND DEVICE FOR DETERMINING THE HEATING STATE OF AN OPTICAL ELEMENT IN AN OPTICAL SYSTEM [patent_app_type] => utility [patent_app_number] => 18/320685 [patent_app_country] => US [patent_app_date] => 2023-05-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4383 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 68 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18320685 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/320685
METHOD AND DEVICE FOR DETERMINING THE HEATING STATE OF AN OPTICAL ELEMENT IN AN OPTICAL SYSTEM May 18, 2023 Pending
Array ( [id] => 18629927 [patent_doc_number] => 20230288817 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-09-14 [patent_title] => SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS [patent_app_type] => utility [patent_app_number] => 18/196432 [patent_app_country] => US [patent_app_date] => 2023-05-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 18573 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18196432 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/196432
SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS May 11, 2023 Pending
Array ( [id] => 18598733 [patent_doc_number] => 20230273532 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-31 [patent_title] => EXHAUST GAS MONITOR FOR PHOTORESIST ADHESION CONTROL [patent_app_type] => utility [patent_app_number] => 18/142715 [patent_app_country] => US [patent_app_date] => 2023-05-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7489 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 92 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18142715 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/142715
Exhaust gas monitor for photoresist adhesion control May 2, 2023 Issued
Array ( [id] => 19522458 [patent_doc_number] => 12124178 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-10-22 [patent_title] => Lithography system and method [patent_app_type] => utility [patent_app_number] => 18/310483 [patent_app_country] => US [patent_app_date] => 2023-05-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 6112 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 89 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18310483 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/310483
Lithography system and method Apr 30, 2023 Issued
Array ( [id] => 19107113 [patent_doc_number] => 11960213 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-04-16 [patent_title] => Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder [patent_app_type] => utility [patent_app_number] => 18/299534 [patent_app_country] => US [patent_app_date] => 2023-04-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 24 [patent_no_of_words] => 16254 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 99 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18299534 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/299534
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder Apr 11, 2023 Issued
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