Search

Edward J. Webman

Examiner (ID: 8225)

Most Active Art Unit
1617
Art Unit(s)
1617, 2899, 1621, 3617, 1616, 1615, 1501, 1502
Total Applications
1435
Issued Applications
869
Pending Applications
171
Abandoned Applications
394

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18802709 [patent_doc_number] => 11835866 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-12-05 [patent_title] => Method and system of surface topography measurement for lithography [patent_app_type] => utility [patent_app_number] => 18/051016 [patent_app_country] => US [patent_app_date] => 2022-10-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 20 [patent_no_of_words] => 11387 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 128 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18051016 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/051016
Method and system of surface topography measurement for lithography Oct 30, 2022 Issued
Array ( [id] => 19812348 [patent_doc_number] => 12243761 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-03-04 [patent_title] => Detection and analysis of substrate support and pre-heat ring in a process chamber via imaging [patent_app_type] => utility [patent_app_number] => 18/050384 [patent_app_country] => US [patent_app_date] => 2022-10-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 11 [patent_no_of_words] => 9587 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 85 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18050384 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/050384
Detection and analysis of substrate support and pre-heat ring in a process chamber via imaging Oct 26, 2022 Issued
Array ( [id] => 18337387 [patent_doc_number] => 20230129336 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-04-27 [patent_title] => EXTREME ULTRAVIOLET INNER POD SEAL GAP [patent_app_type] => utility [patent_app_number] => 17/973170 [patent_app_country] => US [patent_app_date] => 2022-10-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8207 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 96 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17973170 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/973170
EXTREME ULTRAVIOLET INNER POD SEAL GAP Oct 24, 2022 Pending
Array ( [id] => 18696274 [patent_doc_number] => 20230326710 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-12 [patent_title] => SCREENING EDGE PLACEMENT UNIFORMITY WAFER STOCHASTICS [patent_app_type] => utility [patent_app_number] => 17/967854 [patent_app_country] => US [patent_app_date] => 2022-10-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7942 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17967854 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/967854
SCREENING EDGE PLACEMENT UNIFORMITY WAFER STOCHASTICS Oct 16, 2022 Pending
Array ( [id] => 18322259 [patent_doc_number] => 20230120387 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-04-20 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 18/046567 [patent_app_country] => US [patent_app_date] => 2022-10-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11236 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 121 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18046567 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/046567
Substrate processing apparatus Oct 13, 2022 Issued
Array ( [id] => 18194402 [patent_doc_number] => 20230047921 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-16 [patent_title] => DRIVE DEVICE, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS [patent_app_type] => utility [patent_app_number] => 17/961447 [patent_app_country] => US [patent_app_date] => 2022-10-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7848 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 182 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17961447 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/961447
Drive device, optical system and lithography apparatus Oct 5, 2022 Issued
Array ( [id] => 18159683 [patent_doc_number] => 20230026275 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-01-26 [patent_title] => SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM, AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/959517 [patent_app_country] => US [patent_app_date] => 2022-10-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 15335 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -3 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17959517 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/959517
Substrate processing method, storage medium, and substrate processing apparatus Oct 3, 2022 Issued
Array ( [id] => 18170482 [patent_doc_number] => 20230037093 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-02 [patent_title] => SYSTEM AND METHOD FOR FOCUS CONTROL IN EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMS USING A FOCUS-SENSITIVE METROLOGY TARGET [patent_app_type] => utility [patent_app_number] => 17/959142 [patent_app_country] => US [patent_app_date] => 2022-10-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 16907 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 75 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17959142 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/959142
System and method for focus control in extreme ultraviolet lithography systems using a focus-sensitive metrology target Oct 2, 2022 Issued
Array ( [id] => 19848432 [patent_doc_number] => 20250093783 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-03-20 [patent_title] => EDGE PLACEMENT WITH SPATIAL LIGHT MODULATOR WRITING [patent_app_type] => utility [patent_app_number] => 18/292138 [patent_app_country] => US [patent_app_date] => 2022-09-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7627 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 263 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18292138 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/292138
EDGE PLACEMENT WITH SPATIAL LIGHT MODULATOR WRITING Sep 26, 2022 Pending
Array ( [id] => 19474951 [patent_doc_number] => 12105030 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-10-01 [patent_title] => Automatic detecting device for detecting flaws on surface of camshaft [patent_app_type] => utility [patent_app_number] => 17/947124 [patent_app_country] => US [patent_app_date] => 2022-09-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 18 [patent_no_of_words] => 8673 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 872 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17947124 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/947124
Automatic detecting device for detecting flaws on surface of camshaft Sep 17, 2022 Issued
Array ( [id] => 19632781 [patent_doc_number] => 20240411230 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-12-12 [patent_title] => A FLUID EXTRACTION SYSTEM, METHOD AND LITHOGRAPHIC APPARATUS [patent_app_type] => utility [patent_app_number] => 18/700780 [patent_app_country] => US [patent_app_date] => 2022-09-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6934 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18700780 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/700780
A FLUID EXTRACTION SYSTEM, METHOD AND LITHOGRAPHIC APPARATUS Sep 14, 2022 Pending
Array ( [id] => 19731980 [patent_doc_number] => 12209972 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-01-28 [patent_title] => Inspection support device, inspection support method, and inspection support program [patent_app_type] => utility [patent_app_number] => 17/932076 [patent_app_country] => US [patent_app_date] => 2022-09-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 25 [patent_figures_cnt] => 56 [patent_no_of_words] => 11908 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 131 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17932076 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/932076
Inspection support device, inspection support method, and inspection support program Sep 13, 2022 Issued
Array ( [id] => 18243436 [patent_doc_number] => 20230075747 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-09 [patent_title] => HIGH RESOLUTION MULTISPECTRAL MULTI-FIELD-OF-VIEW IMAGING SYSTEM FOR WAFER INSPECTION [patent_app_type] => utility [patent_app_number] => 17/930606 [patent_app_country] => US [patent_app_date] => 2022-09-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2563 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 68 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17930606 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/930606
High resolution multispectral multi-field-of-view imaging system for wafer inspection Sep 7, 2022 Issued
Array ( [id] => 20318138 [patent_doc_number] => 12456693 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-10-28 [patent_title] => Method for dual wavelength overlay measurement with focus at a photoresist top surface and apparatus for using same [patent_app_type] => utility [patent_app_number] => 17/930156 [patent_app_country] => US [patent_app_date] => 2022-09-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 30 [patent_figures_cnt] => 30 [patent_no_of_words] => 9519 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 173 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17930156 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/930156
Method for dual wavelength overlay measurement with focus at a photoresist top surface and apparatus for using same Sep 6, 2022 Issued
Array ( [id] => 19028535 [patent_doc_number] => 11927890 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2024-03-12 [patent_title] => Substrate processing apparatus and method of fabricating semiconductor device using the same [patent_app_type] => utility [patent_app_number] => 17/892379 [patent_app_country] => US [patent_app_date] => 2022-08-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 23 [patent_figures_cnt] => 23 [patent_no_of_words] => 9930 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 140 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17892379 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/892379
Substrate processing apparatus and method of fabricating semiconductor device using the same Aug 21, 2022 Issued
Array ( [id] => 20000214 [patent_doc_number] => 20250138436 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-05-01 [patent_title] => METROLOGY METHOD AND DEVICE [patent_app_type] => utility [patent_app_number] => 18/690961 [patent_app_country] => US [patent_app_date] => 2022-08-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8628 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18690961 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/690961
METROLOGY METHOD AND DEVICE Aug 15, 2022 Pending
Array ( [id] => 18006672 [patent_doc_number] => 20220365438 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-17 [patent_title] => PHOTOLITHOGRAPHY METHOD AND APPARATUS [patent_app_type] => utility [patent_app_number] => 17/875268 [patent_app_country] => US [patent_app_date] => 2022-07-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 17698 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 118 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17875268 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/875268
Photolithography method and apparatus Jul 26, 2022 Issued
Array ( [id] => 17991627 [patent_doc_number] => 20220357664 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-10 [patent_title] => RADIATION SOURCE SUPPLY SYSTEM FOR LITHOGRAPHIC TOOLS [patent_app_type] => utility [patent_app_number] => 17/874204 [patent_app_country] => US [patent_app_date] => 2022-07-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6826 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 132 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17874204 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/874204
Radiation source supply system for lithographic tools Jul 25, 2022 Issued
Array ( [id] => 17991634 [patent_doc_number] => 20220357671 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-10 [patent_title] => SEMICONDUCTOR LITHOGRAPHY SYSTEM AND/OR METHOD [patent_app_type] => utility [patent_app_number] => 17/872461 [patent_app_country] => US [patent_app_date] => 2022-07-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13831 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 79 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17872461 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/872461
Semiconductor lithography system and/or method Jul 24, 2022 Issued
Array ( [id] => 17991630 [patent_doc_number] => 20220357667 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-10 [patent_title] => FILM FORMATION DEVICE, FILM FORMATION METHOD, AND ARTICLE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 17/870102 [patent_app_country] => US [patent_app_date] => 2022-07-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7477 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 96 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17870102 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/870102
Film formation device, film formation method, and article manufacturing method Jul 20, 2022 Issued
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