Search

Erin Flanagan Bergner

Examiner (ID: 15763, Phone: (571)270-1133 , Office: P/1713 )

Most Active Art Unit
1713
Art Unit(s)
1713
Total Applications
736
Issued Applications
519
Pending Applications
82
Abandoned Applications
164

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 19563916 [patent_doc_number] => 12138667 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-11-12 [patent_title] => Apparatus for treating substrate [patent_app_type] => utility [patent_app_number] => 17/691215 [patent_app_country] => US [patent_app_date] => 2022-03-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 16 [patent_no_of_words] => 10043 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 245 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17691215 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/691215
Apparatus for treating substrate Mar 9, 2022 Issued
Array ( [id] => 17886402 [patent_doc_number] => 20220301880 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-22 [patent_title] => SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/690709 [patent_app_country] => US [patent_app_date] => 2022-03-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9977 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17690709 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/690709
Substrate processing method and substrate processing apparatus Mar 8, 2022 Issued
Array ( [id] => 18570442 [patent_doc_number] => 20230260779 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-17 [patent_title] => METHODS FOR STRIPPING AND CLEANING SEMICONDUCTOR STRUCTURES [patent_app_type] => utility [patent_app_number] => 17/670167 [patent_app_country] => US [patent_app_date] => 2022-02-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3857 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 131 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17670167 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/670167
Methods for stripping and cleaning semiconductor structures Feb 10, 2022 Issued
Array ( [id] => 19066144 [patent_doc_number] => 20240100570 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-03-28 [patent_title] => DEVICE AND METHOD FOR CLEANING A COATING MATERIAL [patent_app_type] => utility [patent_app_number] => 18/275186 [patent_app_country] => US [patent_app_date] => 2022-02-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2980 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 34 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18275186 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/275186
DEVICE AND METHOD FOR CLEANING A COATING MATERIAL Feb 8, 2022 Abandoned
Array ( [id] => 19059324 [patent_doc_number] => 11938521 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-03-26 [patent_title] => Method and apparatus for semiconductor wafer cleaning [patent_app_type] => utility [patent_app_number] => 17/591080 [patent_app_country] => US [patent_app_date] => 2022-02-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 7 [patent_no_of_words] => 7941 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 89 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17591080 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/591080
Method and apparatus for semiconductor wafer cleaning Feb 1, 2022 Issued
Array ( [id] => 18301367 [patent_doc_number] => 11623253 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-04-11 [patent_title] => In-situ DC plasma for cleaning pedestal heater [patent_app_type] => utility [patent_app_number] => 17/582100 [patent_app_country] => US [patent_app_date] => 2022-01-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 11 [patent_no_of_words] => 9370 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 371 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17582100 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/582100
In-situ DC plasma for cleaning pedestal heater Jan 23, 2022 Issued
Array ( [id] => 17521770 [patent_doc_number] => 20220107619 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-04-07 [patent_title] => REMOTE-PLASMA CLEAN (RPC) DIRECTIONAL-FLOW DEVICE [patent_app_type] => utility [patent_app_number] => 17/553686 [patent_app_country] => US [patent_app_date] => 2021-12-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7728 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -30 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17553686 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/553686
Remote-plasma clean (RPC) directional-flow device Dec 15, 2021 Issued
Array ( [id] => 17894876 [patent_doc_number] => 20220304538 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-29 [patent_title] => METHOD FOR CLEANING MOP OF CLEANING ROBOT AND MAINTENANCE STATION [patent_app_type] => utility [patent_app_number] => 17/548784 [patent_app_country] => US [patent_app_date] => 2021-12-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7597 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 44 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17548784 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/548784
Method for cleaning mop of cleaning robot and maintenance station Dec 12, 2021 Issued
Array ( [id] => 19592796 [patent_doc_number] => 12150610 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-11-26 [patent_title] => Cleaning control method for cleaning robot, base station and storage medium [patent_app_type] => utility [patent_app_number] => 17/643229 [patent_app_country] => US [patent_app_date] => 2021-12-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 11 [patent_no_of_words] => 8562 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 461 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17643229 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/643229
Cleaning control method for cleaning robot, base station and storage medium Dec 7, 2021 Issued
Array ( [id] => 17641220 [patent_doc_number] => 20220168958 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-02 [patent_title] => POWDER REMOVAL PROCESS FOR ADDITIVELY MANUFACTURED ARTICLE [patent_app_type] => utility [patent_app_number] => 17/537017 [patent_app_country] => US [patent_app_date] => 2021-11-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3185 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 72 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17537017 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/537017
POWDER REMOVAL PROCESS FOR ADDITIVELY MANUFACTURED ARTICLE Nov 28, 2021 Abandoned
Array ( [id] => 19594486 [patent_doc_number] => 12152316 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2024-11-26 [patent_title] => Passivation of nonlinear optical crystals [patent_app_type] => utility [patent_app_number] => 17/532685 [patent_app_country] => US [patent_app_date] => 2021-11-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 9720 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 164 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17532685 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/532685
Passivation of nonlinear optical crystals Nov 21, 2021 Issued
Array ( [id] => 17475438 [patent_doc_number] => 20220082942 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-17 [patent_title] => PERIPHERAL PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/531858 [patent_app_country] => US [patent_app_date] => 2021-11-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10871 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 199 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17531858 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/531858
Peripheral processing method Nov 21, 2021 Issued
Array ( [id] => 18708132 [patent_doc_number] => 20230330717 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-19 [patent_title] => METHOD AND DEVICE FOR REMOVING IMPURITIES IN GRANULES [patent_app_type] => utility [patent_app_number] => 18/027135 [patent_app_country] => US [patent_app_date] => 2021-11-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9493 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 167 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18027135 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/027135
METHOD AND DEVICE FOR REMOVING IMPURITIES IN GRANULES Nov 15, 2021 Pending
Array ( [id] => 18561166 [patent_doc_number] => 11726409 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-08-15 [patent_title] => Substrate processing system, liquid amount measuring method, computer-readable recording medium, and measuring jig [patent_app_type] => utility [patent_app_number] => 17/522050 [patent_app_country] => US [patent_app_date] => 2021-11-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 22 [patent_no_of_words] => 12924 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 206 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17522050 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/522050
Substrate processing system, liquid amount measuring method, computer-readable recording medium, and measuring jig Nov 8, 2021 Issued
Array ( [id] => 17898677 [patent_doc_number] => 20220308339 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-29 [patent_title] => METHOD OF CLEANING COLLECTOR OF EUV LIGHT SOURCE SYSTEM [patent_app_type] => utility [patent_app_number] => 17/508224 [patent_app_country] => US [patent_app_date] => 2021-10-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5039 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 142 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17508224 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/508224
Method of cleaning collector of EUV light source system Oct 21, 2021 Issued
Array ( [id] => 18890978 [patent_doc_number] => 11869755 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-01-09 [patent_title] => Cleaning method and protecting member [patent_app_type] => utility [patent_app_number] => 17/496097 [patent_app_country] => US [patent_app_date] => 2021-10-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 7 [patent_no_of_words] => 4795 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 204 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17496097 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/496097
Cleaning method and protecting member Oct 6, 2021 Issued
Array ( [id] => 18190581 [patent_doc_number] => 11581182 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-02-14 [patent_title] => Wafer cleaning apparatus, method for cleaning wafer and method for fabricating semiconductor device [patent_app_type] => utility [patent_app_number] => 17/478619 [patent_app_country] => US [patent_app_date] => 2021-09-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 20 [patent_no_of_words] => 10322 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 117 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17478619 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/478619
Wafer cleaning apparatus, method for cleaning wafer and method for fabricating semiconductor device Sep 16, 2021 Issued
Array ( [id] => 19425380 [patent_doc_number] => 12084783 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-09-10 [patent_title] => Plating apparatus and rinse process method [patent_app_type] => utility [patent_app_number] => 17/781356 [patent_app_country] => US [patent_app_date] => 2021-09-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 9420 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 204 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17781356 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/781356
Plating apparatus and rinse process method Sep 9, 2021 Issued
Array ( [id] => 17870664 [patent_doc_number] => 20220293401 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-15 [patent_title] => SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 17/409514 [patent_app_country] => US [patent_app_date] => 2021-08-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8859 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 60 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17409514 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/409514
SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURING METHOD Aug 22, 2021 Abandoned
Array ( [id] => 20185503 [patent_doc_number] => 12396602 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-08-26 [patent_title] => Dust removal device and dust removal method [patent_app_type] => utility [patent_app_number] => 18/247317 [patent_app_country] => US [patent_app_date] => 2021-08-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 22 [patent_figures_cnt] => 24 [patent_no_of_words] => 5497 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 227 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18247317 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/247317
Dust removal device and dust removal method Aug 19, 2021 Issued
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