Search

Farhan M. Syed

Examiner (ID: 2118, Phone: (571)272-7191 , Office: P/2165 )

Most Active Art Unit
2165
Art Unit(s)
2165, 2161
Total Applications
964
Issued Applications
666
Pending Applications
79
Abandoned Applications
232

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18754501 [patent_doc_number] => 20230357925 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-11-09 [patent_title] => TEMPERATURE CONTROL ASSEMBLY FOR SUBSTRATE PROCESSING APPARATUS AND METHOD OF USING SAME [patent_app_type] => utility [patent_app_number] => 18/222024 [patent_app_country] => US [patent_app_date] => 2023-07-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5121 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -20 [patent_words_short_claim] => 60 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18222024 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/222024
Temperature control assembly for substrate processing apparatus and method of using same Jul 13, 2023 Issued
Array ( [id] => 19712546 [patent_doc_number] => 20250022688 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-01-16 [patent_title] => PLASMA PROCESSING METHOD AND APPARATUS [patent_app_type] => utility [patent_app_number] => 18/350519 [patent_app_country] => US [patent_app_date] => 2023-07-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12650 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 143 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18350519 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/350519
PLASMA PROCESSING METHOD AND APPARATUS Jul 10, 2023 Pending
Array ( [id] => 18988201 [patent_doc_number] => 20240060170 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-02-22 [patent_title] => FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD [patent_app_type] => utility [patent_app_number] => 18/350179 [patent_app_country] => US [patent_app_date] => 2023-07-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8599 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 292 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18350179 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/350179
Film deposition apparatus and film deposition method Jul 10, 2023 Issued
Array ( [id] => 18729312 [patent_doc_number] => 20230343608 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-26 [patent_title] => GASBOX FOR SEMICONDUCTOR PROCESSING CHAMBER [patent_app_type] => utility [patent_app_number] => 18/346433 [patent_app_country] => US [patent_app_date] => 2023-07-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6351 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => 0 [patent_words_short_claim] => 106 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18346433 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/346433
Gasbox for semiconductor processing chamber Jul 2, 2023 Issued
Array ( [id] => 18955666 [patent_doc_number] => 20240043993 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-02-08 [patent_title] => SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, CLEANING METHOD, AND RECORDING MEDIUM [patent_app_type] => utility [patent_app_number] => 18/341239 [patent_app_country] => US [patent_app_date] => 2023-06-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9807 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 38 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18341239 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/341239
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, CLEANING METHOD, AND RECORDING MEDIUM Jun 25, 2023 Pending
Array ( [id] => 18882798 [patent_doc_number] => 20240006167 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-01-04 [patent_title] => SUBSTRATE PROCESSING MODULE AND LASER BEAM PROVIDING METHOD [patent_app_type] => utility [patent_app_number] => 18/213863 [patent_app_country] => US [patent_app_date] => 2023-06-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10719 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 87 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18213863 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/213863
SUBSTRATE PROCESSING MODULE AND LASER BEAM PROVIDING METHOD Jun 24, 2023 Pending
Array ( [id] => 19646404 [patent_doc_number] => 20240420924 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-12-19 [patent_title] => SEMICONDUCTOR MANUFACTURING PROCESS CHAMBER COOLING FLANGE FOR REMOTE PLASMA SOURCE SUPPLY [patent_app_type] => utility [patent_app_number] => 18/209716 [patent_app_country] => US [patent_app_date] => 2023-06-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6371 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 165 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18209716 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/209716
SEMICONDUCTOR MANUFACTURING PROCESS CHAMBER COOLING FLANGE FOR REMOTE PLASMA SOURCE SUPPLY Jun 13, 2023 Pending
Array ( [id] => 18693141 [patent_doc_number] => 20230323536 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-12 [patent_title] => SYMMETRIC PUMP DOWN MINI-VOLUME WITH LAMINAR FLOW CAVITY GAS INJECTION FOR HIGH AND LOW PRESSURE [patent_app_type] => utility [patent_app_number] => 18/333361 [patent_app_country] => US [patent_app_date] => 2023-06-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5551 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18333361 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/333361
Symmetric pump down mini-volume with laminar flow cavity gas injection for high and low pressure Jun 11, 2023 Issued
Array ( [id] => 19632324 [patent_doc_number] => 20240410773 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-12-12 [patent_title] => Integrated Pressure Sensor for Process Chamber Assemblies [patent_app_type] => utility [patent_app_number] => 18/208010 [patent_app_country] => US [patent_app_date] => 2023-06-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6199 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 43 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18208010 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/208010
Integrated Pressure Sensor for Process Chamber Assemblies Jun 8, 2023 Pending
Array ( [id] => 18679780 [patent_doc_number] => 20230317437 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-05 [patent_title] => VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP [patent_app_type] => utility [patent_app_number] => 18/329791 [patent_app_country] => US [patent_app_date] => 2023-06-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 15203 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18329791 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/329791
Vacuum pump protection against deposition byproduct buildup Jun 5, 2023 Issued
Array ( [id] => 18991023 [patent_doc_number] => 20240062992 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-02-22 [patent_title] => PLASMA POST-PROCESSING APPARATUS AND PLASMA POST-PROCESSING METHOD USING THE SAME [patent_app_type] => utility [patent_app_number] => 18/327211 [patent_app_country] => US [patent_app_date] => 2023-06-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9515 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 87 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18327211 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/327211
PLASMA POST-PROCESSING APPARATUS AND PLASMA POST-PROCESSING METHOD USING THE SAME May 31, 2023 Pending
Array ( [id] => 20636705 [patent_doc_number] => 12597588 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-04-07 [patent_title] => Inductively coupled plasma apparatus with novel faraday shield [patent_app_type] => utility [patent_app_number] => 18/198682 [patent_app_country] => US [patent_app_date] => 2023-05-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 11 [patent_no_of_words] => 0 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 142 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18198682 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/198682
Inductively coupled plasma apparatus with novel faraday shield May 16, 2023 Issued
Array ( [id] => 19106086 [patent_doc_number] => 11959172 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-04-16 [patent_title] => Substrate processing systems including gas delivery system with reduced dead legs [patent_app_type] => utility [patent_app_number] => 18/196605 [patent_app_country] => US [patent_app_date] => 2023-05-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 14 [patent_no_of_words] => 6154 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 217 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18196605 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/196605
Substrate processing systems including gas delivery system with reduced dead legs May 11, 2023 Issued
Array ( [id] => 18679813 [patent_doc_number] => 20230317471 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-05 [patent_title] => FLUID CONTROL SYSTEM [patent_app_type] => utility [patent_app_number] => 18/195095 [patent_app_country] => US [patent_app_date] => 2023-05-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7979 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 102 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18195095 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/195095
FLUID CONTROL SYSTEM May 8, 2023 Pending
Array ( [id] => 18817919 [patent_doc_number] => 20230392259 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-12-07 [patent_title] => HARDWARE TO PREVENT BOTTOM PURGE INCURSION IN APPLICATION VOLUME AND PROCESS GAS DIFFUSION BELOW HEATER [patent_app_type] => utility [patent_app_number] => 18/313736 [patent_app_country] => US [patent_app_date] => 2023-05-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7832 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 125 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18313736 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/313736
Hardware to prevent bottom purge incursion in application volume and process gas diffusion below heater May 7, 2023 Issued
Array ( [id] => 18743295 [patent_doc_number] => 20230352283 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-11-02 [patent_title] => SYSTEM AND METHOD FOR DETECTING ENDPOINT IN PLASMA PROCESSING [patent_app_type] => utility [patent_app_number] => 18/139470 [patent_app_country] => US [patent_app_date] => 2023-04-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8110 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 89 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18139470 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/139470
System and method for detecting endpoint in plasma processing Apr 25, 2023 Issued
Array ( [id] => 19528677 [patent_doc_number] => 20240352579 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-10-24 [patent_title] => PROCESS CHAMBER [patent_app_type] => utility [patent_app_number] => 18/305750 [patent_app_country] => US [patent_app_date] => 2023-04-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8179 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 63 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18305750 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/305750
Process chamber Apr 23, 2023 Issued
Array ( [id] => 19130866 [patent_doc_number] => 20240136219 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-04-25 [patent_title] => WAFER PLACEMENT TABLE [patent_app_type] => utility [patent_app_number] => 18/299130 [patent_app_country] => US [patent_app_date] => 2023-04-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5622 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 174 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18299130 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/299130
WAFER PLACEMENT TABLE Apr 11, 2023 Pending
Array ( [id] => 19130866 [patent_doc_number] => 20240136219 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-04-25 [patent_title] => WAFER PLACEMENT TABLE [patent_app_type] => utility [patent_app_number] => 18/299130 [patent_app_country] => US [patent_app_date] => 2023-04-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5622 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 174 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18299130 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/299130
WAFER PLACEMENT TABLE Apr 10, 2023 Pending
Array ( [id] => 18743332 [patent_doc_number] => 20230352320 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-11-02 [patent_title] => GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 18/184736 [patent_app_country] => US [patent_app_date] => 2023-03-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13756 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 93 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18184736 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/184736
GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE Mar 15, 2023 Pending
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