Search

Farhan M. Syed

Examiner (ID: 2118, Phone: (571)272-7191 , Office: P/2165 )

Most Active Art Unit
2165
Art Unit(s)
2165, 2161
Total Applications
964
Issued Applications
666
Pending Applications
79
Abandoned Applications
232

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 17852329 [patent_doc_number] => 20220282371 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-08 [patent_title] => ELECTROSTATIC CHUCK WITH METAL SHAFT [patent_app_type] => utility [patent_app_number] => 17/672520 [patent_app_country] => US [patent_app_date] => 2022-02-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5182 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 72 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17672520 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/672520
ELECTROSTATIC CHUCK WITH METAL SHAFT Feb 14, 2022 Pending
Array ( [id] => 17630564 [patent_doc_number] => 20220165579 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-26 [patent_title] => PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/669944 [patent_app_country] => US [patent_app_date] => 2022-02-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10049 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 172 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17669944 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/669944
Plasma processing method and plasma processing apparatus Feb 10, 2022 Issued
Array ( [id] => 19135846 [patent_doc_number] => 11970778 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-04-30 [patent_title] => Processing apparatus [patent_app_type] => utility [patent_app_number] => 17/650090 [patent_app_country] => US [patent_app_date] => 2022-02-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 18 [patent_no_of_words] => 10410 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 151 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17650090 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/650090
Processing apparatus Feb 6, 2022 Issued
Array ( [id] => 17807892 [patent_doc_number] => 20220259727 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-08-18 [patent_title] => SUBSTRATE HEATING DEVICE, SUBSTRATE HEATING METHOD, AND METHOD OF MANUFACTURING SUBSTRATE HEATER [patent_app_type] => utility [patent_app_number] => 17/650133 [patent_app_country] => US [patent_app_date] => 2022-02-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3428 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 87 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17650133 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/650133
SUBSTRATE HEATING DEVICE, SUBSTRATE HEATING METHOD, AND METHOD OF MANUFACTURING SUBSTRATE HEATER Feb 6, 2022 Pending
Array ( [id] => 17883165 [patent_doc_number] => 20220298642 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-22 [patent_title] => Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device [patent_app_type] => utility [patent_app_number] => 17/591396 [patent_app_country] => US [patent_app_date] => 2022-02-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 15890 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 159 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17591396 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/591396
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device Feb 1, 2022 Pending
Array ( [id] => 17595890 [patent_doc_number] => 20220145464 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-12 [patent_title] => Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device [patent_app_type] => utility [patent_app_number] => 17/582844 [patent_app_country] => US [patent_app_date] => 2022-01-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14181 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 259 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17582844 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/582844
Substrate processing apparatus and method of manufacturing semiconductor device Jan 23, 2022 Issued
Array ( [id] => 18145574 [patent_doc_number] => 20230019430 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-01-19 [patent_title] => GAS INJECTOR AND DIFFUSION FURNACE DEVICE [patent_app_type] => utility [patent_app_number] => 17/648454 [patent_app_country] => US [patent_app_date] => 2022-01-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5632 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 47 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17648454 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/648454
GAS INJECTOR AND DIFFUSION FURNACE DEVICE Jan 19, 2022 Abandoned
Array ( [id] => 19850621 [patent_doc_number] => 20250095972 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-03-20 [patent_title] => SUPPORT UNIT AND SUBSTRATE PROCESSING APPARATUS INCLUDING SAME [patent_app_type] => utility [patent_app_number] => 18/040341 [patent_app_country] => US [patent_app_date] => 2022-01-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6070 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 59 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18040341 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/040341
Support unit and substrate processing apparatus including same Jan 3, 2022 Issued
Array ( [id] => 19043852 [patent_doc_number] => 11932941 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2024-03-19 [patent_title] => Load assemblies for loading parts in a furnace [patent_app_type] => utility [patent_app_number] => 17/564472 [patent_app_country] => US [patent_app_date] => 2021-12-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 11 [patent_no_of_words] => 12645 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 163 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17564472 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/564472
Load assemblies for loading parts in a furnace Dec 28, 2021 Issued
Array ( [id] => 20201833 [patent_doc_number] => 12404603 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-09-02 [patent_title] => Gas inlet assembly of process chamber, gas inlet device, and semiconductor processing apparatus [patent_app_type] => utility [patent_app_number] => 18/262261 [patent_app_country] => US [patent_app_date] => 2021-12-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 17 [patent_no_of_words] => 2444 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 236 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18262261 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/262261
Gas inlet assembly of process chamber, gas inlet device, and semiconductor processing apparatus Dec 27, 2021 Issued
Array ( [id] => 18492466 [patent_doc_number] => 11697877 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-07-11 [patent_title] => High temperature face plate for deposition application [patent_app_type] => utility [patent_app_number] => 17/646176 [patent_app_country] => US [patent_app_date] => 2021-12-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 4530 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 64 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17646176 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/646176
High temperature face plate for deposition application Dec 27, 2021 Issued
Array ( [id] => 17840632 [patent_doc_number] => 20220277938 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-01 [patent_title] => SUBSTRATE PROCESSING APPARATUS, PLASMA GENERATING DEVICE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/560684 [patent_app_country] => US [patent_app_date] => 2021-12-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 15029 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 110 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17560684 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/560684
SUBSTRATE PROCESSING APPARATUS, PLASMA GENERATING DEVICE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND SUBSTRATE PROCESSING METHOD Dec 22, 2021 Pending
Array ( [id] => 18481126 [patent_doc_number] => 11694878 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-07-04 [patent_title] => Gas supply system, plasma processing apparatus, and control method for gas supply system [patent_app_type] => utility [patent_app_number] => 17/560242 [patent_app_country] => US [patent_app_date] => 2021-12-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 22 [patent_no_of_words] => 12788 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 543 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17560242 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/560242
Gas supply system, plasma processing apparatus, and control method for gas supply system Dec 21, 2021 Issued
Array ( [id] => 18854196 [patent_doc_number] => 11851760 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-12-26 [patent_title] => PECVD deposition system for deposition on selective side of the substrate [patent_app_type] => utility [patent_app_number] => 17/644760 [patent_app_country] => US [patent_app_date] => 2021-12-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 14 [patent_no_of_words] => 9644 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 103 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17644760 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/644760
PECVD deposition system for deposition on selective side of the substrate Dec 15, 2021 Issued
Array ( [id] => 17627738 [patent_doc_number] => 20220162753 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-26 [patent_title] => PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUBSTRATE [patent_app_type] => utility [patent_app_number] => 17/644759 [patent_app_country] => US [patent_app_date] => 2021-12-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9645 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17644759 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/644759
PECVD deposition system for deposition on selective side of the substrate Dec 15, 2021 Issued
Array ( [id] => 18560047 [patent_doc_number] => 11725283 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-08-15 [patent_title] => PECVD deposition system for deposition on selective side of the substrate [patent_app_type] => utility [patent_app_number] => 17/644761 [patent_app_country] => US [patent_app_date] => 2021-12-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 14 [patent_no_of_words] => 9678 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 157 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17644761 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/644761
PECVD deposition system for deposition on selective side of the substrate Dec 15, 2021 Issued
Array ( [id] => 19244495 [patent_doc_number] => 12014948 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-06-18 [patent_title] => Semiconductor heat treatment member and manufacturing method thereof [patent_app_type] => utility [patent_app_number] => 17/552170 [patent_app_country] => US [patent_app_date] => 2021-12-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 4839 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 75 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17552170 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/552170
Semiconductor heat treatment member and manufacturing method thereof Dec 14, 2021 Issued
Array ( [id] => 17676581 [patent_doc_number] => 20220189748 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-16 [patent_title] => PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/548594 [patent_app_country] => US [patent_app_date] => 2021-12-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6620 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 124 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17548594 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/548594
Plasma processing apparatus Dec 12, 2021 Issued
Array ( [id] => 17933165 [patent_doc_number] => 20220328291 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-13 [patent_title] => APPARATUS AND METHOD FOR PLASMA ETCHING [patent_app_type] => utility [patent_app_number] => 17/543794 [patent_app_country] => US [patent_app_date] => 2021-12-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10947 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17543794 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/543794
Apparatus and method for plasma etching Dec 6, 2021 Issued
Array ( [id] => 18879639 [patent_doc_number] => 20240003008 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-01-04 [patent_title] => PRECURSOR DISPENSING SYSTEMS WITH LINE CHARGE VOLUME CONTAINERS FOR ATOMIC LAYER DEPOSITION [patent_app_type] => utility [patent_app_number] => 18/037146 [patent_app_country] => US [patent_app_date] => 2021-12-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12051 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -30 [patent_words_short_claim] => 149 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18037146 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/037146
Precursor dispensing systems with line charge volume containers for atomic layer deposition Nov 30, 2021 Issued
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