Gary A. Nash

Array ( [id] => 17776967 [patent_doc_number] => 20220243316 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-08-04 [patent_title] => HOLDING ARRANGEMENT FOR HOLDING A SUBSTRATE, CARRIER FOR SUPPORTING A SUBSTRATE, VACUUM PROCESSING SYSTEM, METHOD FOR HOLDING A SUBSTRATE, AND METHOD FOR RELEASING A SUBSTRATE [patent_app_type] => utility [patent_app_number] => 17/723237 [patent_app_country] => US [patent_app_date] => 2022-04-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8454 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 48 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17723237 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18472974 [patent_doc_number] => 20230207262 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-29 [patent_title] => PLASMA GENERATION UNIT, AND APPARATUS FOR TREATING SUBSTRATE WITH THE SAME [patent_app_type] => utility [patent_app_number] => 17/710269 [patent_app_country] => US [patent_app_date] => 2022-03-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8899 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 73 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17710269 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17917404 [patent_doc_number] => 20220319800 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-06 [patent_title] => PLASMA PROCESSING SYSTEM, TRANSFER ARM, AND METHOD OF TRANSFERRING ANNULAR MEMBER [patent_app_type] => utility [patent_app_number] => 17/706590 [patent_app_country] => US [patent_app_date] => 2022-03-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5865 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 87 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17706590 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17723313 [patent_doc_number] => 20220216035 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-07-07 [patent_title] => VACUUM PROCESSING APPARATUS AND MAINTENANCE APPARATUS [patent_app_type] => utility [patent_app_number] => 17/703503 [patent_app_country] => US [patent_app_date] => 2022-03-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14878 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17703503 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17917479 [patent_doc_number] => 20220319875 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-06 [patent_title] => SUBSTRATE DRYING APPARATUS AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/656059 [patent_app_country] => US [patent_app_date] => 2022-03-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7237 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 118 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17656059 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19339518 [patent_doc_number] => 12049699 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-07-30 [patent_title] => Dielectric gapfill using atomic layer deposition (ALD), inhibitor plasma and etching [patent_app_type] => utility [patent_app_number] => 17/696276 [patent_app_country] => US [patent_app_date] => 2022-03-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 16 [patent_no_of_words] => 4970 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 221 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17696276 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20646115 [patent_doc_number] => 12601052 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-04-14 [patent_title] => Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device and non-transitory computer-readable recording medium [patent_app_type] => utility [patent_app_number] => 17/696615 [patent_app_country] => US [patent_app_date] => 2022-03-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 7189 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 296 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17696615 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19176036 [patent_doc_number] => 20240162010 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-05-16 [patent_title] => ADJUSTABLE DIELECTRIC CONSTANT CERAMIC WINDOW [patent_app_type] => utility [patent_app_number] => 18/550664 [patent_app_country] => US [patent_app_date] => 2022-03-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8754 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 59 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18550664 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18145655 [patent_doc_number] => 20230019511 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-01-19 [patent_title] => DUAL AMPOULE SEPARATOR PLATE AND METHOD [patent_app_type] => utility [patent_app_number] => 17/651112 [patent_app_country] => US [patent_app_date] => 2022-02-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13019 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 127 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17651112 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18556944 [patent_doc_number] => 20230254963 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-10 [patent_title] => SPINNING DISK PLASMA REACTOR FOR TREATMENT OF WATER [patent_app_type] => utility [patent_app_number] => 17/669087 [patent_app_country] => US [patent_app_date] => 2022-02-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 1729 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -4 [patent_words_short_claim] => 132 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17669087 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18540744 [patent_doc_number] => 20230245854 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-03 [patent_title] => HYBRID LIQUID/AIR COOLING SYSTEM FOR TCP WINDOWS [patent_app_type] => utility [patent_app_number] => 18/013736 [patent_app_country] => US [patent_app_date] => 2022-02-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5782 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -22 [patent_words_short_claim] => 42 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18013736 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20715682 [patent_doc_number] => 12630922 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-05-19 [patent_title] => Microwave system for microwave-assisted surface chemistry annealing of ALD processes utilizing microwave radiation energy [patent_app_type] => utility [patent_app_number] => 17/590874 [patent_app_country] => US [patent_app_date] => 2022-02-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 10 [patent_no_of_words] => 1154 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 581 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17590874 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17612062 [patent_doc_number] => 20220154341 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-19 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/587650 [patent_app_country] => US [patent_app_date] => 2022-01-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12369 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 119 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17587650 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17599328 [patent_doc_number] => 20220148902 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-12 [patent_title] => CLEANING METHOD AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/586333 [patent_app_country] => US [patent_app_date] => 2022-01-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6444 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17586333 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18898530 [patent_doc_number] => 20240014015 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-01-11 [patent_title] => C-shroud Modification For Plasma Uniformity Without Impacting Mechanical Strength Or Lifetime Of The C-shroud [patent_app_type] => utility [patent_app_number] => 18/042198 [patent_app_country] => US [patent_app_date] => 2022-01-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11670 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -25 [patent_words_short_claim] => 115 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18042198 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19023043 [patent_doc_number] => 20240079214 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-03-07 [patent_title] => SURFACE MODIFYING METHOD AND SURFACE MODIFYING APPARATUS [patent_app_type] => utility [patent_app_number] => 18/262422 [patent_app_country] => US [patent_app_date] => 2022-01-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14208 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18262422 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17737922 [patent_doc_number] => 20220223384 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-07-14 [patent_title] => APPARATUS FOR MANUFACTURING A SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 17/570806 [patent_app_country] => US [patent_app_date] => 2022-01-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4966 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 83 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17570806 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18488354 [patent_doc_number] => 20230215702 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-07-06 [patent_title] => UNIFORMITY CONTROL FOR PLASMA PROCESSING USING WALL RECOMBINATION [patent_app_type] => utility [patent_app_number] => 17/566584 [patent_app_country] => US [patent_app_date] => 2021-12-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12078 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17566584 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20077862 [patent_doc_number] => 12351916 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-07-08 [patent_title] => Gas showerhead with controllable airflow distribution [patent_app_type] => utility [patent_app_number] => 17/564387 [patent_app_country] => US [patent_app_date] => 2021-12-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 24 [patent_figures_cnt] => 24 [patent_no_of_words] => 1062 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 313 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17564387 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17548608 [patent_doc_number] => 20220119949 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-04-21 [patent_title] => SUBSTRATE PROCESSING APPARATUS, RECORDING MEDIUM, AND METHOD OF PROCESSING SUBSTRATE [patent_app_type] => utility [patent_app_number] => 17/563566 [patent_app_country] => US [patent_app_date] => 2021-12-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13871 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 113 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17563566 [rel_patent_id] =>[rel_patent_doc_number] =>)