Search

Gary A. Nash

Examiner (ID: 5667, Phone: (571)270-3349 , Office: P/2838 )

Most Active Art Unit
2838
Art Unit(s)
2839, 2838
Total Applications
1062
Issued Applications
959
Pending Applications
55
Abandoned Applications
69

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 16901269 [patent_doc_number] => 20210180185 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-06-17 [patent_title] => SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM [patent_app_type] => utility [patent_app_number] => 17/186498 [patent_app_country] => US [patent_app_date] => 2021-02-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11263 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 100 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17186498 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/186498
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM Feb 25, 2021 Abandoned
Array ( [id] => 20690398 [patent_doc_number] => 12620556 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-05-05 [patent_title] => Plasma processing apparatus [patent_app_type] => utility [patent_app_number] => 17/763301 [patent_app_country] => US [patent_app_date] => 2021-02-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 22 [patent_no_of_words] => 5930 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 168 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17763301 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/763301
Plasma processing apparatus Feb 18, 2021 Issued
Array ( [id] => 17115543 [patent_doc_number] => 20210296140 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-09-23 [patent_title] => DOUBLE TUBE STRUCTURE FLOW CELL APPARATUS [patent_app_type] => utility [patent_app_number] => 17/174510 [patent_app_country] => US [patent_app_date] => 2021-02-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6890 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 125 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17174510 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/174510
DOUBLE TUBE STRUCTURE FLOW CELL APPARATUS Feb 11, 2021 Abandoned
Array ( [id] => 17037258 [patent_doc_number] => 20210254216 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-19 [patent_title] => GAS DISTRIBUTION ASSEMBLY AND METHOD OF USING SAME [patent_app_type] => utility [patent_app_number] => 17/171793 [patent_app_country] => US [patent_app_date] => 2021-02-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4107 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17171793 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/171793
Gas distribution assembly Feb 8, 2021 Issued
Array ( [id] => 18199024 [patent_doc_number] => 20230052543 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-16 [patent_title] => DECOUPLING RADIOFREQUENCY (RF) SIGNALS FROM INPUT SIGNAL CONDUCTORS OF A PROCESS CHAMBER [patent_app_type] => utility [patent_app_number] => 17/760159 [patent_app_country] => US [patent_app_date] => 2021-02-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11825 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17760159 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/760159
DECOUPLING RADIOFREQUENCY (RF) SIGNALS FROM INPUT SIGNAL CONDUCTORS OF A PROCESS CHAMBER Feb 8, 2021 Abandoned
Array ( [id] => 17025367 [patent_doc_number] => 20210249239 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-12 [patent_title] => METHODS AND APPARATUS FOR IMPROVING FLOW UNIFORMITY IN A PROCESS CHAMBER [patent_app_type] => utility [patent_app_number] => 17/167469 [patent_app_country] => US [patent_app_date] => 2021-02-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3394 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 126 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17167469 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/167469
Process chamber and exhaust liner system therefor Feb 3, 2021 Issued
Array ( [id] => 17318719 [patent_doc_number] => 20210407769 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-30 [patent_title] => VOLTAGE WAVEFORM GENERATOR, WAFER PROCESSING APPARATUS AND PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/158231 [patent_app_country] => US [patent_app_date] => 2021-01-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11656 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17158231 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/158231
Voltage waveform generator, wafer processing apparatus and plasma processing apparatus Jan 25, 2021 Issued
Array ( [id] => 16812049 [patent_doc_number] => 20210134604 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-06 [patent_title] => ETCHING METHOD [patent_app_type] => utility [patent_app_number] => 17/149886 [patent_app_country] => US [patent_app_date] => 2021-01-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8504 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 197 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17149886 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/149886
ETCHING METHOD Jan 14, 2021 Abandoned
Array ( [id] => 18688283 [patent_doc_number] => 11784026 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-10-10 [patent_title] => Substrate processing apparatus, material layer deposition apparatus, and atmospheric pressure chemical vapor deposition apparatus [patent_app_type] => utility [patent_app_number] => 17/149206 [patent_app_country] => US [patent_app_date] => 2021-01-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 15 [patent_no_of_words] => 7592 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 210 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17149206 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/149206
Substrate processing apparatus, material layer deposition apparatus, and atmospheric pressure chemical vapor deposition apparatus Jan 13, 2021 Issued
Array ( [id] => 17705128 [patent_doc_number] => 20220205134 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-30 [patent_title] => SYSTEMS AND METHODS FOR A PREHEAT RING IN A SEMICONDUCTOR WAFER REACTOR [patent_app_type] => utility [patent_app_number] => 17/139339 [patent_app_country] => US [patent_app_date] => 2020-12-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5603 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17139339 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/139339
Systems and methods for a preheat ring in a semiconductor wafer reactor Dec 30, 2020 Issued
Array ( [id] => 18150274 [patent_doc_number] => 20230024132 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-01-26 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND METHOD [patent_app_type] => utility [patent_app_number] => 17/791075 [patent_app_country] => US [patent_app_date] => 2020-12-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5583 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 93 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17791075 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/791075
SUBSTRATE PROCESSING APPARATUS AND METHOD Dec 21, 2020 Pending
Array ( [id] => 16963346 [patent_doc_number] => 20210214845 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-15 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND ROTARY DRIVE METHOD [patent_app_type] => utility [patent_app_number] => 17/128655 [patent_app_country] => US [patent_app_date] => 2020-12-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5618 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 52 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17128655 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/128655
SUBSTRATE PROCESSING APPARATUS AND ROTARY DRIVE METHOD Dec 20, 2020 Abandoned
Array ( [id] => 18124247 [patent_doc_number] => 20230009859 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-01-12 [patent_title] => ASYMMETRIC PURGED BLOCK BENEATH WAFER PLANE TO MANAGE NON-UNIFORMITY [patent_app_type] => utility [patent_app_number] => 17/784751 [patent_app_country] => US [patent_app_date] => 2020-12-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5158 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 103 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17784751 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/784751
ASYMMETRIC PURGED BLOCK BENEATH WAFER PLANE TO MANAGE NON-UNIFORMITY Dec 14, 2020 Pending
Array ( [id] => 18932595 [patent_doc_number] => 11885003 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-01-30 [patent_title] => Rotational drive device, substrate processing apparatus, and rotational driving method [patent_app_type] => utility [patent_app_number] => 17/110719 [patent_app_country] => US [patent_app_date] => 2020-12-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 7 [patent_no_of_words] => 4325 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 237 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17110719 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/110719
Rotational drive device, substrate processing apparatus, and rotational driving method Dec 2, 2020 Issued
Array ( [id] => 18751449 [patent_doc_number] => 11810769 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-11-07 [patent_title] => Piping assembly and substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 17/104499 [patent_app_country] => US [patent_app_date] => 2020-11-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 14 [patent_no_of_words] => 7568 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 183 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17104499 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/104499
Piping assembly and substrate processing apparatus Nov 24, 2020 Issued
Array ( [id] => 18024222 [patent_doc_number] => 20220375721 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-24 [patent_title] => RADIO FREQUENCY (RF) POWER IMBALANCING IN A MULTI-STATION INTEGRATED CIRCUIT FABRICATION CHAMBER [patent_app_type] => utility [patent_app_number] => 17/755141 [patent_app_country] => US [patent_app_date] => 2020-10-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10740 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -24 [patent_words_short_claim] => 85 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17755141 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/755141
RADIO FREQUENCY (RF) POWER IMBALANCING IN A MULTI-STATION INTEGRATED CIRCUIT FABRICATION CHAMBER Oct 22, 2020 Abandoned
Array ( [id] => 17551477 [patent_doc_number] => 20220122819 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-04-21 [patent_title] => SEMICONDUCTOR CHAMBER COMPONENTS FOR BACK DIFFUSION CONTROL [patent_app_type] => utility [patent_app_number] => 17/071683 [patent_app_country] => US [patent_app_date] => 2020-10-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6261 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 122 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17071683 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/071683
SEMICONDUCTOR CHAMBER COMPONENTS FOR BACK DIFFUSION CONTROL Oct 14, 2020 Abandoned
Array ( [id] => 19670848 [patent_doc_number] => 12183618 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-12-31 [patent_title] => Apparatus and methods to transfer substrates into and out of a spatial multi-substrate processing tool [patent_app_type] => utility [patent_app_number] => 17/061015 [patent_app_country] => US [patent_app_date] => 2020-10-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 23 [patent_no_of_words] => 11624 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 451 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17061015 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/061015
Apparatus and methods to transfer substrates into and out of a spatial multi-substrate processing tool Sep 30, 2020 Issued
Array ( [id] => 16731091 [patent_doc_number] => 20210098239 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-04-01 [patent_title] => SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/036943 [patent_app_country] => US [patent_app_date] => 2020-09-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6264 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17036943 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/036943
Substrate support and plasma processing apparatus Sep 28, 2020 Issued
Array ( [id] => 16752373 [patent_doc_number] => 20210104385 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-04-08 [patent_title] => SUBSTRATE SUPPORT PEDESTAL AND PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/034265 [patent_app_country] => US [patent_app_date] => 2020-09-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4526 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 69 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17034265 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/034265
SUBSTRATE SUPPORT PEDESTAL AND PLASMA PROCESSING APPARATUS Sep 27, 2020 Abandoned
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