Gary B. Nickol

Array ( [id] => 13734293 [patent_doc_number] => 20180371614 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-12-27 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 16/047611 [patent_app_country] => US [patent_app_date] => 2018-07-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4803 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 107 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16047611 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17847864 [patent_doc_number] => 11437248 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-09-06 [patent_title] => To pumping line arrangements [patent_app_type] => utility [patent_app_number] => 16/628337 [patent_app_country] => US [patent_app_date] => 2018-07-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 4581 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 176 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16628337 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16773913 [patent_doc_number] => 10985034 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-04-20 [patent_title] => Semiconductor processing device [patent_app_type] => utility [patent_app_number] => 16/004655 [patent_app_country] => US [patent_app_date] => 2018-06-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 8 [patent_no_of_words] => 5908 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 188 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16004655 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13434991 [patent_doc_number] => 20180269038 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-09-20 [patent_title] => Multi-Zone Gas Injection Assembly with Azimuthal and Radial Distribution Control [patent_app_type] => utility [patent_app_number] => 15/989019 [patent_app_country] => US [patent_app_date] => 2018-05-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4922 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15989019 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13629603 [patent_doc_number] => 20180366354 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-12-20 [patent_title] => IN-SITU SEMICONDUCTOR PROCESSING CHAMBER TEMPERATURE APPARATUS [patent_app_type] => utility [patent_app_number] => 15/964296 [patent_app_country] => US [patent_app_date] => 2018-04-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7971 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 96 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15964296 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15036563 [patent_doc_number] => 20190329286 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-10-31 [patent_title] => UNIFORM THIN FILM DEPOSITION FOR POLY-P-XYLYLENE [patent_app_type] => utility [patent_app_number] => 15/964959 [patent_app_country] => US [patent_app_date] => 2018-04-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3966 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 52 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15964959 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14036147 [patent_doc_number] => 10229829 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-03-12 [patent_title] => Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium [patent_app_type] => utility [patent_app_number] => 15/950879 [patent_app_country] => US [patent_app_date] => 2018-04-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 19 [patent_no_of_words] => 21533 [patent_no_of_claims] => 2 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 388 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15950879 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14930753 [patent_doc_number] => 20190301014 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-10-03 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND METHOD [patent_app_type] => utility [patent_app_number] => 15/940729 [patent_app_country] => US [patent_app_date] => 2018-03-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7218 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -20 [patent_words_short_claim] => 73 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15940729 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14752875 [patent_doc_number] => 20190259611 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-08-22 [patent_title] => SUBSTRATE PROCESSING METHOD AND APPARATUS [patent_app_type] => utility [patent_app_number] => 15/925532 [patent_app_country] => US [patent_app_date] => 2018-03-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11081 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 85 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15925532 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17941653 [patent_doc_number] => 11476112 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-10-18 [patent_title] => Substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 15/918858 [patent_app_country] => US [patent_app_date] => 2018-03-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 9 [patent_no_of_words] => 12820 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 237 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15918858 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14491861 [patent_doc_number] => 10332729 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-06-25 [patent_title] => Compression member for use in showerhead electrode assembly [patent_app_type] => utility [patent_app_number] => 15/895367 [patent_app_country] => US [patent_app_date] => 2018-02-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 21 [patent_no_of_words] => 5305 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 62 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15895367 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13363717 [patent_doc_number] => 20180233398 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-08-16 [patent_title] => METHOD TO CREATE AIR GAPS [patent_app_type] => utility [patent_app_number] => 15/893458 [patent_app_country] => US [patent_app_date] => 2018-02-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12880 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -28 [patent_words_short_claim] => 57 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15893458 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12771013 [patent_doc_number] => 20180148839 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-05-31 [patent_title] => DEPOSITION SYSTEM AND METHOD USING A DELIVERY HEAD SEPARATED FROM A SUBSTRATE BY GAS PRESSURE [patent_app_type] => utility [patent_app_number] => 15/881872 [patent_app_country] => US [patent_app_date] => 2018-01-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12450 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 158 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15881872 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16215452 [patent_doc_number] => 10731253 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-08-04 [patent_title] => Gas injector used for semiconductor equipment [patent_app_type] => utility [patent_app_number] => 15/871618 [patent_app_country] => US [patent_app_date] => 2018-01-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 11 [patent_no_of_words] => 2431 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 134 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15871618 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17513961 [patent_doc_number] => 11293096 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-04-05 [patent_title] => Substrate processing apparatus, method for manufacturing semiconductor device and vaporizer [patent_app_type] => utility [patent_app_number] => 15/870283 [patent_app_country] => US [patent_app_date] => 2018-01-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 18 [patent_no_of_words] => 14965 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 349 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15870283 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17163261 [patent_doc_number] => 11149350 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-10-19 [patent_title] => Shower plate structure for supplying carrier and dry gas [patent_app_type] => utility [patent_app_number] => 15/867669 [patent_app_country] => US [patent_app_date] => 2018-01-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 22 [patent_no_of_words] => 9486 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 277 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15867669 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14137811 [patent_doc_number] => 20190103295 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-04-04 [patent_title] => Integrated Circuit Fabrication System with Adjustable Gas Injector [patent_app_type] => utility [patent_app_number] => 15/864807 [patent_app_country] => US [patent_app_date] => 2018-01-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4761 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15864807 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13582255 [patent_doc_number] => 20180342676 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-11-29 [patent_title] => DOUBLE-LAYER MASK COMPONENT AND EVAPORATION DEVICE [patent_app_type] => utility [patent_app_number] => 15/864437 [patent_app_country] => US [patent_app_date] => 2018-01-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3791 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 161 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15864437 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12909991 [patent_doc_number] => 20180195173 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-07-12 [patent_title] => Substrate Processing Apparatus [patent_app_type] => utility [patent_app_number] => 15/862190 [patent_app_country] => US [patent_app_date] => 2018-01-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11073 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 157 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15862190 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16432807 [patent_doc_number] => 10832903 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-11-10 [patent_title] => Process feed management for semiconductor substrate processing [patent_app_type] => utility [patent_app_number] => 15/861418 [patent_app_country] => US [patent_app_date] => 2018-01-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 17 [patent_no_of_words] => 11651 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 201 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15861418 [rel_patent_id] =>[rel_patent_doc_number] =>)