George A. Goudreau

Array ( [id] => 250465 [patent_doc_number] => 07582221 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2009-09-01 [patent_title] => 'Wafer manufacturing method, polishing apparatus, and wafer' [patent_app_type] => utility [patent_app_number] => 10/181829 [patent_app_country] => US [patent_app_date] => 2001-10-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 18 [patent_no_of_words] => 13056 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 107 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/582/07582221.pdf [firstpage_image] =>[orig_patent_app_number] => 10181829 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6503661 [patent_doc_number] => 20020025680 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-02-28 [patent_title] => 'Methods of etching insulative materials, of forming electrical devices, and of forming capacitors' [patent_app_type] => new [patent_app_number] => 09/978489 [patent_app_country] => US [patent_app_date] => 2001-10-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 3522 [patent_no_of_claims] => 36 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 58 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0025/20020025680.pdf [firstpage_image] =>[orig_patent_app_number] => 09978489 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5968596 [patent_doc_number] => 20020090822 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-07-11 [patent_title] => 'Plasma treatment of low-k dielectric films to improve patterning' [patent_app_type] => new [patent_app_number] => 09/975109 [patent_app_country] => US [patent_app_date] => 2001-10-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 2373 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 56 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0090/20020090822.pdf [firstpage_image] =>[orig_patent_app_number] => 09975109 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6130221 [patent_doc_number] => 20020076935 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-06-20 [patent_title] => 'Anisotropic etching of organic-containing insulating layers' [patent_app_type] => new [patent_app_number] => 09/967848 [patent_app_country] => US [patent_app_date] => 2001-09-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 10208 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 82 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0076/20020076935.pdf [firstpage_image] =>[orig_patent_app_number] => 09967848 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6674446 [patent_doc_number] => 20030060049 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-03-27 [patent_title] => 'PROCESSES FOR CHEMICAL-MECHANICAL POLISHING OF A SEMICONDUCTOR WAFER' [patent_app_type] => new [patent_app_number] => 09/960349 [patent_app_country] => US [patent_app_date] => 2001-09-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 4761 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 202 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0060/20030060049.pdf [firstpage_image] =>[orig_patent_app_number] => 09960349 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6074562 [patent_doc_number] => 20020078891 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-06-27 [patent_title] => 'Wafer stage including electrostatic chuck and method for dechucking wafer using the wafer stage' [patent_app_type] => new [patent_app_number] => 09/951709 [patent_app_country] => US [patent_app_date] => 2001-09-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4654 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 93 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0078/20020078891.pdf [firstpage_image] =>[orig_patent_app_number] => 09951709 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1303136 [patent_doc_number] => 06620737 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-09-16 [patent_title] => 'Plasma etching method' [patent_app_type] => B2 [patent_app_number] => 09/946509 [patent_app_country] => US [patent_app_date] => 2001-09-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 8 [patent_no_of_words] => 4302 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 71 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/620/06620737.pdf [firstpage_image] =>[orig_patent_app_number] => 09946509 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6595506 [patent_doc_number] => 20020042203 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-04-11 [patent_title] => 'Method of forming a fine pattern' [patent_app_type] => new [patent_app_number] => 09/938499 [patent_app_country] => US [patent_app_date] => 2001-08-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 6006 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 143 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0042/20020042203.pdf [firstpage_image] =>[orig_patent_app_number] => 09938499 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6776459 [patent_doc_number] => 20030047539 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-03-13 [patent_title] => 'Abrasive free formulations for chemical mechanical polishing of copper and associated materials and method of using same' [patent_app_type] => new [patent_app_number] => 09/935805 [patent_app_country] => US [patent_app_date] => 2001-08-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 5346 [patent_no_of_claims] => 75 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 19 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0047/20030047539.pdf [firstpage_image] =>[orig_patent_app_number] => 09935805 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6630483 [patent_doc_number] => 20020086495 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-07-04 [patent_title] => 'Method of fabricating a trench isolation structure having sidewall oxide layers with different thicknesses' [patent_app_type] => new [patent_app_number] => 09/933039 [patent_app_country] => US [patent_app_date] => 2001-08-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 3408 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 142 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0086/20020086495.pdf [firstpage_image] =>[orig_patent_app_number] => 09933039 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6347743 [patent_doc_number] => 20020056702 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-05-16 [patent_title] => 'Method of producing copper surfaces for improved bonding, compositions used therein and articles made therefrom' [patent_app_type] => new [patent_app_number] => 09/885422 [patent_app_country] => US [patent_app_date] => 2001-08-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 12379 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 19 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0056/20020056702.pdf [firstpage_image] =>[orig_patent_app_number] => 09885422 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1321243 [patent_doc_number] => 06602436 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-08-05 [patent_title] => 'Chemical mechanical planarization of metal substrates' [patent_app_type] => B2 [patent_app_number] => 09/925209 [patent_app_country] => US [patent_app_date] => 2001-08-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 8 [patent_no_of_words] => 5527 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 19 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/602/06602436.pdf [firstpage_image] =>[orig_patent_app_number] => 09925209 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 720022 [patent_doc_number] => 07049244 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-05-23 [patent_title] => 'Method for enhancing silicon dioxide to silicon nitride selectivity' [patent_app_type] => utility [patent_app_number] => 09/923058 [patent_app_country] => US [patent_app_date] => 2001-08-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 6 [patent_no_of_words] => 3838 [patent_no_of_claims] => 114 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 60 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/049/07049244.pdf [firstpage_image] =>[orig_patent_app_number] => 09923058 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6564261 [patent_doc_number] => 20020014310 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-02-07 [patent_title] => 'Method and apparatus for endpointing a chemical-mechanical planarization process' [patent_app_type] => new [patent_app_number] => 09/910661 [patent_app_country] => US [patent_app_date] => 2001-07-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 5813 [patent_no_of_claims] => 77 [patent_no_of_ind_claims] => 9 [patent_words_short_claim] => 63 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0014/20020014310.pdf [firstpage_image] =>[orig_patent_app_number] => 09910661 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1408480 [patent_doc_number] => 06517668 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-02-11 [patent_title] => 'Method and apparatus for endpointing a chemical-mechanical planarization process' [patent_app_type] => B2 [patent_app_number] => 09/910356 [patent_app_country] => US [patent_app_date] => 2001-07-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 10 [patent_no_of_words] => 5793 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 117 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/517/06517668.pdf [firstpage_image] =>[orig_patent_app_number] => 09910356 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6774372 [patent_doc_number] => 20030017710 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-01-23 [patent_title] => 'Method to improve latchup by forming selective sloped staircase STI structure to use in the I/0 or latchup sensitive area' [patent_app_type] => new [patent_app_number] => 09/907649 [patent_app_country] => US [patent_app_date] => 2001-07-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 1809 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 186 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0017/20030017710.pdf [firstpage_image] =>[orig_patent_app_number] => 09907649 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1318594 [patent_doc_number] => 06605546 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-08-12 [patent_title] => 'Dual bake for BARC fill without voids' [patent_app_type] => B1 [patent_app_number] => 09/901699 [patent_app_country] => US [patent_app_date] => 2001-07-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 11 [patent_no_of_words] => 4066 [patent_no_of_claims] => 49 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 122 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/605/06605546.pdf [firstpage_image] =>[orig_patent_app_number] => 09901699 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7645641 [patent_doc_number] => 06472328 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2002-10-29 [patent_title] => 'Methods of forming an electrical contact to semiconductive material' [patent_app_type] => B2 [patent_app_number] => 09/896773 [patent_app_country] => US [patent_app_date] => 2001-06-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 11 [patent_no_of_words] => 2460 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 12 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/472/06472328.pdf [firstpage_image] =>[orig_patent_app_number] => 09896773 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1065623 [patent_doc_number] => 06846749 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2005-01-25 [patent_title] => 'N-containing plasma etch process with reduced resist poisoning' [patent_app_type] => utility [patent_app_number] => 09/887165 [patent_app_country] => US [patent_app_date] => 2001-06-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 16 [patent_no_of_words] => 4112 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 141 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/846/06846749.pdf [firstpage_image] =>[orig_patent_app_number] => 09887165 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6986912 [patent_doc_number] => 20010036744 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-11-01 [patent_title] => 'Confinement device for use in dry etching of substrate surface and method of dry etching a wafer surface' [patent_app_type] => new [patent_app_number] => 09/884805 [patent_app_country] => US [patent_app_date] => 2001-06-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 9162 [patent_no_of_claims] => 33 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 83 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0036/20010036744.pdf [firstpage_image] =>[orig_patent_app_number] => 09884805 [rel_patent_id] =>[rel_patent_doc_number] =>)