Search

Golam M Shameem

Examiner (ID: 6808, Phone: (571)272-0706 , Office: P/1626 )

Most Active Art Unit
1626
Art Unit(s)
1621, 1626, 1622
Total Applications
3003
Issued Applications
2200
Pending Applications
268
Abandoned Applications
535

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 15886011 [patent_doc_number] => 10649347 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-05-12 [patent_title] => Lithographic apparatus and device manufacturing method [patent_app_type] => utility [patent_app_number] => 16/219449 [patent_app_country] => US [patent_app_date] => 2018-12-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 14858 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 143 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16219449 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/219449
Lithographic apparatus and device manufacturing method Dec 12, 2018 Issued
Array ( [id] => 15312269 [patent_doc_number] => 10520836 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-12-31 [patent_title] => Immersion lithography system using a sealed wafer bath [patent_app_type] => utility [patent_app_number] => 16/217095 [patent_app_country] => US [patent_app_date] => 2018-12-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 2944 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 53 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16217095 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/217095
Immersion lithography system using a sealed wafer bath Dec 11, 2018 Issued
Array ( [id] => 14981429 [patent_doc_number] => 10444624 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2019-10-15 [patent_title] => Active metrology frame and thermal frame temperature control in imprint lithography [patent_app_type] => utility [patent_app_number] => 16/206642 [patent_app_country] => US [patent_app_date] => 2018-11-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 10 [patent_no_of_words] => 9462 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 234 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16206642 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/206642
Active metrology frame and thermal frame temperature control in imprint lithography Nov 29, 2018 Issued
Array ( [id] => 15544069 [patent_doc_number] => 10571808 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-02-25 [patent_title] => Polarized light irradiation apparatus and photosensitive film-coated substrate manufacturing method [patent_app_type] => utility [patent_app_number] => 16/205130 [patent_app_country] => US [patent_app_date] => 2018-11-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 10 [patent_no_of_words] => 9021 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 112 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16205130 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/205130
Polarized light irradiation apparatus and photosensitive film-coated substrate manufacturing method Nov 28, 2018 Issued
Array ( [id] => 17136141 [patent_doc_number] => 11137692 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-10-05 [patent_title] => Metrology targets and methods with oblique periodic structures [patent_app_type] => utility [patent_app_number] => 16/313972 [patent_app_country] => US [patent_app_date] => 2018-11-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 16 [patent_no_of_words] => 5320 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 167 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16313972 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/313972
Metrology targets and methods with oblique periodic structures Nov 28, 2018 Issued
Array ( [id] => 18801952 [patent_doc_number] => 11835106 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-12-05 [patent_title] => Method for manufacturing damper device, lithographic apparatus, projection system, and device manufacturing method [patent_app_type] => utility [patent_app_number] => 16/772406 [patent_app_country] => US [patent_app_date] => 2018-11-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 6 [patent_no_of_words] => 5795 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 167 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16772406 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/772406
Method for manufacturing damper device, lithographic apparatus, projection system, and device manufacturing method Nov 14, 2018 Issued
Array ( [id] => 14217709 [patent_doc_number] => 20190121239 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-04-25 [patent_title] => CONFIGURING OPTICAL LAYERS IN IMPRINT LITHOGRAPHY PROCESSES [patent_app_type] => utility [patent_app_number] => 16/165027 [patent_app_country] => US [patent_app_date] => 2018-10-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7819 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -21 [patent_words_short_claim] => 38 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16165027 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/165027
Configuring optical layers in imprint lithography processes Oct 18, 2018 Issued
Array ( [id] => 15366615 [patent_doc_number] => 20200019072 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-01-16 [patent_title] => PARTICLE REMOVAL FROM WAFER TABLE AND PHOTOMASK [patent_app_type] => utility [patent_app_number] => 16/164652 [patent_app_country] => US [patent_app_date] => 2018-10-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9636 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 50 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16164652 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/164652
Particle removal from wafer table and photomask Oct 17, 2018 Issued
Array ( [id] => 13932675 [patent_doc_number] => 20190049853 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-02-14 [patent_title] => METHOD FOR ALIGNING A MIRROR OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS [patent_app_type] => utility [patent_app_number] => 16/159936 [patent_app_country] => US [patent_app_date] => 2018-10-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5338 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16159936 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/159936
Method for aligning a mirror of a microlithographic projection exposure apparatus Oct 14, 2018 Issued
Array ( [id] => 13932689 [patent_doc_number] => 20190049860 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-02-14 [patent_title] => Metrology Method and Apparatus, Lithographic System and Device Manufacturing Method [patent_app_type] => utility [patent_app_number] => 16/159884 [patent_app_country] => US [patent_app_date] => 2018-10-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10742 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 214 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16159884 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/159884
Metrology method and apparatus, lithographic system and device manufacturing method Oct 14, 2018 Issued
Array ( [id] => 15684419 [patent_doc_number] => 20200096873 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-03-26 [patent_title] => PRISM-MASK FOR ANGLED PATTERNING APPLICATIONS [patent_app_type] => utility [patent_app_number] => 16/143206 [patent_app_country] => US [patent_app_date] => 2018-09-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8676 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -22 [patent_words_short_claim] => 62 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16143206 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/143206
Prism-mask for angled patterning applications Sep 25, 2018 Issued
Array ( [id] => 13737391 [patent_doc_number] => 20180373163 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-12-27 [patent_title] => PROJECTION EXPOSURE APPARATUS AND METHOD FOR MEASURING A PROJECTION LENS [patent_app_type] => utility [patent_app_number] => 16/119218 [patent_app_country] => US [patent_app_date] => 2018-08-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2544 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -20 [patent_words_short_claim] => 45 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16119218 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/119218
Projection exposure apparatus and method for measuring a projection lens Aug 30, 2018 Issued
Array ( [id] => 13737381 [patent_doc_number] => 20180373158 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-12-27 [patent_title] => METHOD FOR PRODUCING AN ILLUMINATION SYSTEM FOR AN EUV PROJECTION EXPOSURE SYSTEM, AND ILLUMINATION SYSTEM [patent_app_type] => utility [patent_app_number] => 16/114883 [patent_app_country] => US [patent_app_date] => 2018-08-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12010 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -20 [patent_words_short_claim] => 263 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16114883 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/114883
Method for producing an illumination system for an EUV projection exposure system, and illumination system Aug 27, 2018 Issued
Array ( [id] => 13626081 [patent_doc_number] => 20180364592 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-12-20 [patent_title] => PATTERN FORMING APPARATUS AND PATTERN FORMING METHOD, MOVABLE BODY DRIVE SYSTEM AND MOVABLE BODY DRIVE METHOD, EXPOSURE APPARATUS AND EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 16/111556 [patent_app_country] => US [patent_app_date] => 2018-08-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 45023 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -25 [patent_words_short_claim] => 611 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16111556 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/111556
PATTERN FORMING APPARATUS AND PATTERN FORMING METHOD, MOVABLE BODY DRIVE SYSTEM AND MOVABLE BODY DRIVE METHOD, EXPOSURE APPARATUS AND EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD Aug 23, 2018 Abandoned
Array ( [id] => 15560653 [patent_doc_number] => 20200064738 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-02-27 [patent_title] => METHOD TO ACHIEVE TILTED PATTERNING WITH A THROUGH RESIST THICKNESS [patent_app_type] => utility [patent_app_number] => 16/111056 [patent_app_country] => US [patent_app_date] => 2018-08-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5535 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -22 [patent_words_short_claim] => 50 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16111056 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/111056
Method to achieve tilted patterning with a through resist thickness Aug 22, 2018 Issued
Array ( [id] => 15918593 [patent_doc_number] => 10656533 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-05-19 [patent_title] => Metrology in lithographic processes [patent_app_type] => utility [patent_app_number] => 16/106322 [patent_app_country] => US [patent_app_date] => 2018-08-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 18 [patent_no_of_words] => 15442 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 216 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16106322 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/106322
Metrology in lithographic processes Aug 20, 2018 Issued
Array ( [id] => 16438688 [patent_doc_number] => 20200356014 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-11-12 [patent_title] => MASK TRANSFER SYSTEM AND TRANSFER METHOD [patent_app_type] => utility [patent_app_number] => 16/640540 [patent_app_country] => US [patent_app_date] => 2018-08-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3807 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16640540 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/640540
MASK TRANSFER SYSTEM AND TRANSFER METHOD Aug 16, 2018 Abandoned
Array ( [id] => 13594187 [patent_doc_number] => 20180348642 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-12-06 [patent_title] => EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD [patent_app_type] => utility [patent_app_number] => 16/057254 [patent_app_country] => US [patent_app_date] => 2018-08-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10948 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 161 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16057254 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/057254
EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD Aug 6, 2018 Abandoned
Array ( [id] => 16485679 [patent_doc_number] => 20200379282 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-12-03 [patent_title] => PHOTO-ALIGNING EXPOSURE DEVICE [patent_app_type] => utility [patent_app_number] => 16/636784 [patent_app_country] => US [patent_app_date] => 2018-08-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2445 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 124 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16636784 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/636784
PHOTO-ALIGNING EXPOSURE DEVICE Aug 5, 2018 Abandoned
Array ( [id] => 14234291 [patent_doc_number] => 20190129318 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-05-02 [patent_title] => PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY WITH A MEASUREMENT DEVICE [patent_app_type] => utility [patent_app_number] => 16/054411 [patent_app_country] => US [patent_app_date] => 2018-08-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 17765 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => 0 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16054411 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/054411
PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY WITH A MEASUREMENT DEVICE Aug 2, 2018 Abandoned
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