
Gregory T. Prather
Examiner (ID: 17269, Phone: (571)270-5412 , Office: P/3658 )
| Most Active Art Unit | 3658 |
| Art Unit(s) | 4127, 3658, 3618, 3656 |
| Total Applications | 652 |
| Issued Applications | 437 |
| Pending Applications | 56 |
| Abandoned Applications | 182 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 11760234
[patent_doc_number] => 20170207103
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2017-07-20
[patent_title] => 'GAS PHASE ETCH OF AMORPHOUS AND POLY-CRYSTALLINE SILICON FROM HIGH ASPECT RATIO FEATURES WITH HIGH SELECTIVITY TOWARDS VARIOUS FILMS'
[patent_app_type] => utility
[patent_app_number] => 15/405977
[patent_app_country] => US
[patent_app_date] => 2017-01-13
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 3
[patent_no_of_words] => 5214
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15405977
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/405977 | GAS PHASE ETCH OF AMORPHOUS AND POLY-CRYSTALLINE SILICON FROM HIGH ASPECT RATIO FEATURES WITH HIGH SELECTIVITY TOWARDS VARIOUS FILMS | Jan 12, 2017 | Abandoned |
Array
(
[id] => 12902047
[patent_doc_number] => 20180192524
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2018-07-05
[patent_title] => FORMING METHOD OF CONTACT HOLE PATTERN
[patent_app_type] => utility
[patent_app_number] => 15/396067
[patent_app_country] => US
[patent_app_date] => 2016-12-30
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 9569
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -19
[patent_words_short_claim] => 188
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15396067
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/396067 | FORMING METHOD OF CONTACT HOLE PATTERN | Dec 29, 2016 | Abandoned |
Array
(
[id] => 12872371
[patent_doc_number] => 20180182632
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2018-06-28
[patent_title] => Method of Feature Exaction from Time-series of Spectra to Control Endpoint of Process
[patent_app_type] => utility
[patent_app_number] => 15/389451
[patent_app_country] => US
[patent_app_date] => 2016-12-23
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 11875
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -20
[patent_words_short_claim] => 112
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15389451
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/389451 | Method of feature exaction from time-series of spectra to control endpoint of process | Dec 22, 2016 | Issued |
Array
(
[id] => 11557639
[patent_doc_number] => 20170103885
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2017-04-13
[patent_title] => 'METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE-PROCESSING APPARATUS, AND RECORDING MEDIUM'
[patent_app_type] => utility
[patent_app_number] => 15/386859
[patent_app_country] => US
[patent_app_date] => 2016-12-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 17
[patent_figures_cnt] => 17
[patent_no_of_words] => 22803
[patent_no_of_claims] => 14
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15386859
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/386859 | Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium | Dec 20, 2016 | Issued |
Array
(
[id] => 15574651
[patent_doc_number] => 10577696
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2020-03-03
[patent_title] => Copper etchant composition
[patent_app_type] => utility
[patent_app_number] => 15/387456
[patent_app_country] => US
[patent_app_date] => 2016-12-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 2
[patent_figures_cnt] => 2
[patent_no_of_words] => 4734
[patent_no_of_claims] => 2
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 272
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15387456
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/387456 | Copper etchant composition | Dec 20, 2016 | Issued |
Array
(
[id] => 11557639
[patent_doc_number] => 20170103885
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2017-04-13
[patent_title] => 'METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE-PROCESSING APPARATUS, AND RECORDING MEDIUM'
[patent_app_type] => utility
[patent_app_number] => 15/386859
[patent_app_country] => US
[patent_app_date] => 2016-12-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 17
[patent_figures_cnt] => 17
[patent_no_of_words] => 22803
[patent_no_of_claims] => 14
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15386859
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/386859 | Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium | Dec 20, 2016 | Issued |
Array
(
[id] => 14883713
[patent_doc_number] => 10421883
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2019-09-24
[patent_title] => Abrasive particle-dispersion layer composite and polishing slurry composition including the same
[patent_app_type] => utility
[patent_app_number] => 15/386502
[patent_app_country] => US
[patent_app_date] => 2016-12-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 4424
[patent_no_of_claims] => 14
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 295
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15386502
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/386502 | Abrasive particle-dispersion layer composite and polishing slurry composition including the same | Dec 20, 2016 | Issued |
Array
(
[id] => 11557639
[patent_doc_number] => 20170103885
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2017-04-13
[patent_title] => 'METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE-PROCESSING APPARATUS, AND RECORDING MEDIUM'
[patent_app_type] => utility
[patent_app_number] => 15/386859
[patent_app_country] => US
[patent_app_date] => 2016-12-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 17
[patent_figures_cnt] => 17
[patent_no_of_words] => 22803
[patent_no_of_claims] => 14
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15386859
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/386859 | Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium | Dec 20, 2016 | Issued |
Array
(
[id] => 11557639
[patent_doc_number] => 20170103885
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2017-04-13
[patent_title] => 'METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE-PROCESSING APPARATUS, AND RECORDING MEDIUM'
[patent_app_type] => utility
[patent_app_number] => 15/386859
[patent_app_country] => US
[patent_app_date] => 2016-12-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 17
[patent_figures_cnt] => 17
[patent_no_of_words] => 22803
[patent_no_of_claims] => 14
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15386859
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/386859 | Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium | Dec 20, 2016 | Issued |
Array
(
[id] => 11952179
[patent_doc_number] => 20170256330
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2017-09-07
[patent_title] => 'BATCH-PROCESSING METHOD FOR SUPER-HIGH ASPECT RATIO DIFFRACTIVE OPTICS'
[patent_app_type] => utility
[patent_app_number] => 15/363950
[patent_app_country] => US
[patent_app_date] => 2016-11-29
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 13
[patent_figures_cnt] => 13
[patent_no_of_words] => 16652
[patent_no_of_claims] => 38
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15363950
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/363950 | Batch-processing method for super-high aspect ratio diffractive optics | Nov 28, 2016 | Issued |
Array
(
[id] => 16789370
[patent_doc_number] => 10991809
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2021-04-27
[patent_title] => Composition and process for selectively etching p-doped polysilicon relative to silicon nitride
[patent_app_type] => utility
[patent_app_number] => 15/777837
[patent_app_country] => US
[patent_app_date] => 2016-11-22
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 7230
[patent_no_of_claims] => 17
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 213
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15777837
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/777837 | Composition and process for selectively etching p-doped polysilicon relative to silicon nitride | Nov 21, 2016 | Issued |
Array
(
[id] => 16293462
[patent_doc_number] => 10770316
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2020-09-08
[patent_title] => Substrate liquid processing apparatus, substrate liquid processing method and recording medium
[patent_app_type] => utility
[patent_app_number] => 15/777941
[patent_app_country] => US
[patent_app_date] => 2016-11-17
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 6
[patent_no_of_words] => 7189
[patent_no_of_claims] => 4
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 303
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15777941
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/777941 | Substrate liquid processing apparatus, substrate liquid processing method and recording medium | Nov 16, 2016 | Issued |
Array
(
[id] => 11630732
[patent_doc_number] => 20170140921
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2017-05-18
[patent_title] => 'METHOD OF REVERSE TONE PATTERNING'
[patent_app_type] => utility
[patent_app_number] => 15/336909
[patent_app_country] => US
[patent_app_date] => 2016-10-28
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 8
[patent_figures_cnt] => 8
[patent_no_of_words] => 7911
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15336909
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/336909 | Method of reverse tone patterning | Oct 27, 2016 | Issued |
Array
(
[id] => 12661447
[patent_doc_number] => 20180112315
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2018-04-26
[patent_title] => Method and Apparatus of Forming Cracks as Masks for the Fabrication of Micro-Metal Mesh
[patent_app_type] => utility
[patent_app_number] => 15/335368
[patent_app_country] => US
[patent_app_date] => 2016-10-26
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 4715
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -25
[patent_words_short_claim] => 78
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15335368
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/335368 | Method and Apparatus of Forming Cracks as Masks for the Fabrication of Micro-Metal Mesh | Oct 25, 2016 | Abandoned |
Array
(
[id] => 13187875
[patent_doc_number] => 10109464
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2018-10-23
[patent_title] => Minimization of ring erosion during plasma processes
[patent_app_type] => utility
[patent_app_number] => 15/335074
[patent_app_country] => US
[patent_app_date] => 2016-10-26
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 3
[patent_no_of_words] => 4597
[patent_no_of_claims] => 19
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 107
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15335074
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/335074 | Minimization of ring erosion during plasma processes | Oct 25, 2016 | Issued |
Array
(
[id] => 11607958
[patent_doc_number] => 20170125261
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2017-05-04
[patent_title] => 'METHOD OF ETCHING TRANSITION METAL FILM AND SUBSTRATE PROCESSING APPARATUS'
[patent_app_type] => utility
[patent_app_number] => 15/333323
[patent_app_country] => US
[patent_app_date] => 2016-10-25
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 6
[patent_no_of_words] => 6193
[patent_no_of_claims] => 12
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15333323
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/333323 | METHOD OF ETCHING TRANSITION METAL FILM AND SUBSTRATE PROCESSING APPARATUS | Oct 24, 2016 | Abandoned |
Array
(
[id] => 11670191
[patent_doc_number] => 20170158911
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2017-06-08
[patent_title] => 'HALITE SALTS AS SILICON CARBIDE ETCHANTS FOR ENHANCING CMP MATERIAL REMOVAL RATE FOR SIC WAFER'
[patent_app_type] => utility
[patent_app_number] => 15/332966
[patent_app_country] => US
[patent_app_date] => 2016-10-24
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 6669
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15332966
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/332966 | Halite salts as silicon carbide etchants for enhancing CMP material removal rate for SiC wafer | Oct 23, 2016 | Issued |
Array
(
[id] => 12334644
[patent_doc_number] => 09947549
[patent_country] => US
[patent_kind] => B1
[patent_issue_date] => 2018-04-17
[patent_title] => Cobalt-containing material removal
[patent_app_type] => utility
[patent_app_number] => 15/332849
[patent_app_country] => US
[patent_app_date] => 2016-10-24
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 12
[patent_no_of_words] => 7166
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 159
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15332849
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/332849 | Cobalt-containing material removal | Oct 23, 2016 | Issued |
Array
(
[id] => 13019033
[patent_doc_number] => 10032632
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2018-07-24
[patent_title] => Selective gas etching for self-aligned pattern transfer
[patent_app_type] => utility
[patent_app_number] => 15/284862
[patent_app_country] => US
[patent_app_date] => 2016-10-04
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 21
[patent_no_of_words] => 8105
[patent_no_of_claims] => 19
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 136
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15284862
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/284862 | Selective gas etching for self-aligned pattern transfer | Oct 3, 2016 | Issued |
Array
(
[id] => 11513384
[patent_doc_number] => 20170080457
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2017-03-23
[patent_title] => 'METHOD FOR ORIENTING ELONGATED OBJECTS ARRANGED ON A SURFACE OF A SUBSTRATE'
[patent_app_type] => utility
[patent_app_number] => 15/267990
[patent_app_country] => US
[patent_app_date] => 2016-09-16
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 4
[patent_no_of_words] => 5145
[patent_no_of_claims] => 14
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15267990
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/267990 | Method for orienting elongated objects arranged on a surface of a substrate | Sep 15, 2016 | Issued |