Search

Gregory T. Prather

Examiner (ID: 17269, Phone: (571)270-5412 , Office: P/3658 )

Most Active Art Unit
3658
Art Unit(s)
4127, 3658, 3618, 3656
Total Applications
652
Issued Applications
437
Pending Applications
56
Abandoned Applications
182

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 11760234 [patent_doc_number] => 20170207103 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-07-20 [patent_title] => 'GAS PHASE ETCH OF AMORPHOUS AND POLY-CRYSTALLINE SILICON FROM HIGH ASPECT RATIO FEATURES WITH HIGH SELECTIVITY TOWARDS VARIOUS FILMS' [patent_app_type] => utility [patent_app_number] => 15/405977 [patent_app_country] => US [patent_app_date] => 2017-01-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 5214 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15405977 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/405977
GAS PHASE ETCH OF AMORPHOUS AND POLY-CRYSTALLINE SILICON FROM HIGH ASPECT RATIO FEATURES WITH HIGH SELECTIVITY TOWARDS VARIOUS FILMS Jan 12, 2017 Abandoned
Array ( [id] => 12902047 [patent_doc_number] => 20180192524 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-07-05 [patent_title] => FORMING METHOD OF CONTACT HOLE PATTERN [patent_app_type] => utility [patent_app_number] => 15/396067 [patent_app_country] => US [patent_app_date] => 2016-12-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9569 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 188 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15396067 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/396067
FORMING METHOD OF CONTACT HOLE PATTERN Dec 29, 2016 Abandoned
Array ( [id] => 12872371 [patent_doc_number] => 20180182632 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-06-28 [patent_title] => Method of Feature Exaction from Time-series of Spectra to Control Endpoint of Process [patent_app_type] => utility [patent_app_number] => 15/389451 [patent_app_country] => US [patent_app_date] => 2016-12-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11875 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -20 [patent_words_short_claim] => 112 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15389451 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/389451
Method of feature exaction from time-series of spectra to control endpoint of process Dec 22, 2016 Issued
Array ( [id] => 11557639 [patent_doc_number] => 20170103885 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-04-13 [patent_title] => 'METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE-PROCESSING APPARATUS, AND RECORDING MEDIUM' [patent_app_type] => utility [patent_app_number] => 15/386859 [patent_app_country] => US [patent_app_date] => 2016-12-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 17 [patent_no_of_words] => 22803 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15386859 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/386859
Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium Dec 20, 2016 Issued
Array ( [id] => 15574651 [patent_doc_number] => 10577696 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-03-03 [patent_title] => Copper etchant composition [patent_app_type] => utility [patent_app_number] => 15/387456 [patent_app_country] => US [patent_app_date] => 2016-12-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 4734 [patent_no_of_claims] => 2 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 272 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15387456 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/387456
Copper etchant composition Dec 20, 2016 Issued
Array ( [id] => 11557639 [patent_doc_number] => 20170103885 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-04-13 [patent_title] => 'METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE-PROCESSING APPARATUS, AND RECORDING MEDIUM' [patent_app_type] => utility [patent_app_number] => 15/386859 [patent_app_country] => US [patent_app_date] => 2016-12-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 17 [patent_no_of_words] => 22803 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15386859 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/386859
Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium Dec 20, 2016 Issued
Array ( [id] => 14883713 [patent_doc_number] => 10421883 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-09-24 [patent_title] => Abrasive particle-dispersion layer composite and polishing slurry composition including the same [patent_app_type] => utility [patent_app_number] => 15/386502 [patent_app_country] => US [patent_app_date] => 2016-12-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4424 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 295 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15386502 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/386502
Abrasive particle-dispersion layer composite and polishing slurry composition including the same Dec 20, 2016 Issued
Array ( [id] => 11557639 [patent_doc_number] => 20170103885 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-04-13 [patent_title] => 'METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE-PROCESSING APPARATUS, AND RECORDING MEDIUM' [patent_app_type] => utility [patent_app_number] => 15/386859 [patent_app_country] => US [patent_app_date] => 2016-12-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 17 [patent_no_of_words] => 22803 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15386859 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/386859
Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium Dec 20, 2016 Issued
Array ( [id] => 11557639 [patent_doc_number] => 20170103885 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-04-13 [patent_title] => 'METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE-PROCESSING APPARATUS, AND RECORDING MEDIUM' [patent_app_type] => utility [patent_app_number] => 15/386859 [patent_app_country] => US [patent_app_date] => 2016-12-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 17 [patent_no_of_words] => 22803 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15386859 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/386859
Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium Dec 20, 2016 Issued
Array ( [id] => 11952179 [patent_doc_number] => 20170256330 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-09-07 [patent_title] => 'BATCH-PROCESSING METHOD FOR SUPER-HIGH ASPECT RATIO DIFFRACTIVE OPTICS' [patent_app_type] => utility [patent_app_number] => 15/363950 [patent_app_country] => US [patent_app_date] => 2016-11-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 16652 [patent_no_of_claims] => 38 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15363950 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/363950
Batch-processing method for super-high aspect ratio diffractive optics Nov 28, 2016 Issued
Array ( [id] => 16789370 [patent_doc_number] => 10991809 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-04-27 [patent_title] => Composition and process for selectively etching p-doped polysilicon relative to silicon nitride [patent_app_type] => utility [patent_app_number] => 15/777837 [patent_app_country] => US [patent_app_date] => 2016-11-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7230 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 213 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15777837 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/777837
Composition and process for selectively etching p-doped polysilicon relative to silicon nitride Nov 21, 2016 Issued
Array ( [id] => 16293462 [patent_doc_number] => 10770316 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-09-08 [patent_title] => Substrate liquid processing apparatus, substrate liquid processing method and recording medium [patent_app_type] => utility [patent_app_number] => 15/777941 [patent_app_country] => US [patent_app_date] => 2016-11-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 6 [patent_no_of_words] => 7189 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 303 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15777941 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/777941
Substrate liquid processing apparatus, substrate liquid processing method and recording medium Nov 16, 2016 Issued
Array ( [id] => 11630732 [patent_doc_number] => 20170140921 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-05-18 [patent_title] => 'METHOD OF REVERSE TONE PATTERNING' [patent_app_type] => utility [patent_app_number] => 15/336909 [patent_app_country] => US [patent_app_date] => 2016-10-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 7911 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15336909 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/336909
Method of reverse tone patterning Oct 27, 2016 Issued
Array ( [id] => 12661447 [patent_doc_number] => 20180112315 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-04-26 [patent_title] => Method and Apparatus of Forming Cracks as Masks for the Fabrication of Micro-Metal Mesh [patent_app_type] => utility [patent_app_number] => 15/335368 [patent_app_country] => US [patent_app_date] => 2016-10-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4715 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -25 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15335368 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/335368
Method and Apparatus of Forming Cracks as Masks for the Fabrication of Micro-Metal Mesh Oct 25, 2016 Abandoned
Array ( [id] => 13187875 [patent_doc_number] => 10109464 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-10-23 [patent_title] => Minimization of ring erosion during plasma processes [patent_app_type] => utility [patent_app_number] => 15/335074 [patent_app_country] => US [patent_app_date] => 2016-10-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 4597 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 107 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15335074 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/335074
Minimization of ring erosion during plasma processes Oct 25, 2016 Issued
Array ( [id] => 11607958 [patent_doc_number] => 20170125261 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-05-04 [patent_title] => 'METHOD OF ETCHING TRANSITION METAL FILM AND SUBSTRATE PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 15/333323 [patent_app_country] => US [patent_app_date] => 2016-10-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 6193 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15333323 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/333323
METHOD OF ETCHING TRANSITION METAL FILM AND SUBSTRATE PROCESSING APPARATUS Oct 24, 2016 Abandoned
Array ( [id] => 11670191 [patent_doc_number] => 20170158911 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-06-08 [patent_title] => 'HALITE SALTS AS SILICON CARBIDE ETCHANTS FOR ENHANCING CMP MATERIAL REMOVAL RATE FOR SIC WAFER' [patent_app_type] => utility [patent_app_number] => 15/332966 [patent_app_country] => US [patent_app_date] => 2016-10-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6669 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15332966 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/332966
Halite salts as silicon carbide etchants for enhancing CMP material removal rate for SiC wafer Oct 23, 2016 Issued
Array ( [id] => 12334644 [patent_doc_number] => 09947549 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2018-04-17 [patent_title] => Cobalt-containing material removal [patent_app_type] => utility [patent_app_number] => 15/332849 [patent_app_country] => US [patent_app_date] => 2016-10-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 12 [patent_no_of_words] => 7166 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 159 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15332849 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/332849
Cobalt-containing material removal Oct 23, 2016 Issued
Array ( [id] => 13019033 [patent_doc_number] => 10032632 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-07-24 [patent_title] => Selective gas etching for self-aligned pattern transfer [patent_app_type] => utility [patent_app_number] => 15/284862 [patent_app_country] => US [patent_app_date] => 2016-10-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 21 [patent_no_of_words] => 8105 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 136 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15284862 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/284862
Selective gas etching for self-aligned pattern transfer Oct 3, 2016 Issued
Array ( [id] => 11513384 [patent_doc_number] => 20170080457 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-03-23 [patent_title] => 'METHOD FOR ORIENTING ELONGATED OBJECTS ARRANGED ON A SURFACE OF A SUBSTRATE' [patent_app_type] => utility [patent_app_number] => 15/267990 [patent_app_country] => US [patent_app_date] => 2016-09-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 5145 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15267990 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/267990
Method for orienting elongated objects arranged on a surface of a substrate Sep 15, 2016 Issued
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