Search

Gregory T. Prather

Examiner (ID: 17269, Phone: (571)270-5412 , Office: P/3658 )

Most Active Art Unit
3658
Art Unit(s)
4127, 3658, 3618, 3656
Total Applications
652
Issued Applications
437
Pending Applications
56
Abandoned Applications
182

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18890970 [patent_doc_number] => 11869747 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2024-01-09 [patent_title] => Atomic layer etching by electron wavefront [patent_app_type] => utility [patent_app_number] => 18/149893 [patent_app_country] => US [patent_app_date] => 2023-01-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 39 [patent_figures_cnt] => 39 [patent_no_of_words] => 17337 [patent_no_of_claims] => 29 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 164 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18149893 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/149893
Atomic layer etching by electron wavefront Jan 3, 2023 Issued
Array ( [id] => 18890970 [patent_doc_number] => 11869747 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2024-01-09 [patent_title] => Atomic layer etching by electron wavefront [patent_app_type] => utility [patent_app_number] => 18/149893 [patent_app_country] => US [patent_app_date] => 2023-01-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 39 [patent_figures_cnt] => 39 [patent_no_of_words] => 17337 [patent_no_of_claims] => 29 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 164 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18149893 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/149893
Atomic layer etching by electron wavefront Jan 3, 2023 Issued
Array ( [id] => 19269324 [patent_doc_number] => 20240213028 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-06-27 [patent_title] => Silicon (Si) Dry Etch for Die-to-Wafer Thinning [patent_app_type] => utility [patent_app_number] => 18/086150 [patent_app_country] => US [patent_app_date] => 2022-12-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3933 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 42 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18086150 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/086150
Silicon (Si) dry etch for die-to-wafer thinning Dec 20, 2022 Issued
Array ( [id] => 18729313 [patent_doc_number] => 20230343609 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-26 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 18/086366 [patent_app_country] => US [patent_app_date] => 2022-12-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6852 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 209 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18086366 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/086366
Substrate processing apparatus and substrate processing method Dec 20, 2022 Issued
Array ( [id] => 18456166 [patent_doc_number] => 20230197448 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-22 [patent_title] => Hardmask to substrate pattern transfer method for Microfabrication of micro to mesoscale, high aspect ratio, multi-level, 3D Structures [patent_app_type] => utility [patent_app_number] => 18/084303 [patent_app_country] => US [patent_app_date] => 2022-12-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7719 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -4 [patent_words_short_claim] => 139 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18084303 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/084303
Hardmask to substrate pattern transfer method for Microfabrication of micro to mesoscale, high aspect ratio, multi-level, 3D Structures Dec 18, 2022 Pending
Array ( [id] => 18270720 [patent_doc_number] => 20230091962 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-23 [patent_title] => METHOD AND SYSTEM FOR DETECTING OPERATION FAILURE OF PLASMA GENERATING DEVICE BASED ON ARTIFICIAL INTELLIGENCE [patent_app_type] => utility [patent_app_number] => 17/991580 [patent_app_country] => US [patent_app_date] => 2022-11-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10582 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 103 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17991580 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/991580
METHOD AND SYSTEM FOR DETECTING OPERATION FAILURE OF PLASMA GENERATING DEVICE BASED ON ARTIFICIAL INTELLIGENCE Nov 20, 2022 Abandoned
Array ( [id] => 18488387 [patent_doc_number] => 20230215735 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-07-06 [patent_title] => ELECTRODE TUNING, DEPOSITING, AND ETCHING METHODS [patent_app_type] => utility [patent_app_number] => 17/986028 [patent_app_country] => US [patent_app_date] => 2022-11-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6276 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17986028 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/986028
ELECTRODE TUNING, DEPOSITING, AND ETCHING METHODS Nov 13, 2022 Pending
Array ( [id] => 20189712 [patent_doc_number] => 12400835 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-08-26 [patent_title] => Plasma processing method and plasma processing system [patent_app_type] => utility [patent_app_number] => 17/978558 [patent_app_country] => US [patent_app_date] => 2022-11-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 3480 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 129 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17978558 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/978558
Plasma processing method and plasma processing system Oct 31, 2022 Issued
Array ( [id] => 18224361 [patent_doc_number] => 20230063355 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-02 [patent_title] => GALLIUM COMPOUND-BASED SEMICONDUCTOR SUBSTRATE POLISHING COMPOSITION [patent_app_type] => utility [patent_app_number] => 17/975805 [patent_app_country] => US [patent_app_date] => 2022-10-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 18869 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 119 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17975805 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/975805
GALLIUM COMPOUND-BASED SEMICONDUCTOR SUBSTRATE POLISHING COMPOSITION Oct 27, 2022 Abandoned
Array ( [id] => 18213132 [patent_doc_number] => 20230059396 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-23 [patent_title] => COMPOSITION AND METHOD FOR COBALT CMP [patent_app_type] => utility [patent_app_number] => 17/972509 [patent_app_country] => US [patent_app_date] => 2022-10-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7090 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 124 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17972509 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/972509
COMPOSITION AND METHOD FOR COBALT CMP Oct 23, 2022 Abandoned
Array ( [id] => 20332761 [patent_doc_number] => 12463045 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-11-04 [patent_title] => Selective trench modification using directional etch [patent_app_type] => utility [patent_app_number] => 17/969333 [patent_app_country] => US [patent_app_date] => 2022-10-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 14 [patent_no_of_words] => 0 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 123 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17969333 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/969333
Selective trench modification using directional etch Oct 18, 2022 Issued
Array ( [id] => 20332761 [patent_doc_number] => 12463045 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-11-04 [patent_title] => Selective trench modification using directional etch [patent_app_type] => utility [patent_app_number] => 17/969333 [patent_app_country] => US [patent_app_date] => 2022-10-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 14 [patent_no_of_words] => 0 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 123 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17969333 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/969333
Selective trench modification using directional etch Oct 18, 2022 Issued
Array ( [id] => 19116339 [patent_doc_number] => 20240128089 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-04-18 [patent_title] => METHOD TO SELECTIVELY ETCH SILICON NITRIDE TO SILICON OXIDE USING WATER CRYSTALLIZATION [patent_app_type] => utility [patent_app_number] => 17/967996 [patent_app_country] => US [patent_app_date] => 2022-10-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9177 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 176 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17967996 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/967996
Method to selectively etch silicon nitride to silicon oxide using water crystallization Oct 17, 2022 Issued
Array ( [id] => 19100982 [patent_doc_number] => 20240120210 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-04-11 [patent_title] => ISOTROPIC SILICON NITRIDE REMOVAL [patent_app_type] => utility [patent_app_number] => 17/963687 [patent_app_country] => US [patent_app_date] => 2022-10-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9445 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 117 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17963687 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/963687
Isotropic silicon nitride removal Oct 10, 2022 Issued
Array ( [id] => 20404392 [patent_doc_number] => 12494372 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-12-09 [patent_title] => Plasma etched silicon carbide [patent_app_type] => utility [patent_app_number] => 17/958408 [patent_app_country] => US [patent_app_date] => 2022-10-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 10 [patent_no_of_words] => 3454 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 254 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17958408 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/958408
Plasma etched silicon carbide Oct 1, 2022 Issued
Array ( [id] => 20441485 [patent_doc_number] => 12512327 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-12-30 [patent_title] => Surface modification to achieve selective isotropic etch [patent_app_type] => utility [patent_app_number] => 17/945897 [patent_app_country] => US [patent_app_date] => 2022-09-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 7 [patent_no_of_words] => 1149 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 151 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17945897 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/945897
Surface modification to achieve selective isotropic etch Sep 14, 2022 Issued
Array ( [id] => 18140785 [patent_doc_number] => 20230014626 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-01-19 [patent_title] => POLISHING COMPOSITION, POLISHING METHOD, AND METHOD OF PRODUCING SEMICONDUCTOR SUBSTRATE [patent_app_type] => utility [patent_app_number] => 17/901412 [patent_app_country] => US [patent_app_date] => 2022-09-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11000 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 129 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17901412 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/901412
Polishing composition, polishing method, and method of producing semiconductor substrate Aug 31, 2022 Issued
Array ( [id] => 18068124 [patent_doc_number] => 20220399212 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-12-15 [patent_title] => SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/887061 [patent_app_country] => US [patent_app_date] => 2022-08-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 21689 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 86 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17887061 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/887061
Substrate processing method and substrate processing apparatus Aug 11, 2022 Issued
Array ( [id] => 18943406 [patent_doc_number] => 20240038545 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-02-01 [patent_title] => METHOD OF FORMING CONDUCTIVE LAYER OF SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 17/815215 [patent_app_country] => US [patent_app_date] => 2022-07-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4497 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17815215 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/815215
Method of forming conductive layer of semiconductor device Jul 26, 2022 Issued
Array ( [id] => 19151321 [patent_doc_number] => 11976220 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-05-07 [patent_title] => Polishing composition and method for producing same [patent_app_type] => utility [patent_app_number] => 17/870663 [patent_app_country] => US [patent_app_date] => 2022-07-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10383 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 121 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17870663 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/870663
Polishing composition and method for producing same Jul 20, 2022 Issued
Menu