Gregory T. Prather

Array ( [id] => 18376410 [patent_doc_number] => 20230151494 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-05-18 [patent_title] => CHAMBER WALL POLYMER PROTECTION SYSTEM AND METHOD [patent_app_type] => utility [patent_app_number] => 17/679537 [patent_app_country] => US [patent_app_date] => 2022-02-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6258 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 75 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17679537 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18227730 [patent_doc_number] => 20230066724 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-02 [patent_title] => SPECTROSCOPIC ANALYSIS METHOD, METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME, AND SUBSTRATE PROCESS SYSTEM USING THE SAME [patent_app_type] => utility [patent_app_number] => 17/673903 [patent_app_country] => US [patent_app_date] => 2022-02-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5881 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17673903 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18570426 [patent_doc_number] => 20230260763 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-17 [patent_title] => SEMICONDUCTOR MANUFACTURING CHAMBER WITH PLASMA/GAS FLOW CONTROL DEVICE [patent_app_type] => utility [patent_app_number] => 17/671646 [patent_app_country] => US [patent_app_date] => 2022-02-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8288 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 145 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17671646 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18540784 [patent_doc_number] => 20230245895 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-03 [patent_title] => SIDEWALL PASSIVATION FOR PLASMA ETCHING [patent_app_type] => utility [patent_app_number] => 17/590084 [patent_app_country] => US [patent_app_date] => 2022-02-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8797 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 69 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17590084 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19420922 [patent_doc_number] => 20240297046 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-09-05 [patent_title] => ETCHING METHOD [patent_app_type] => utility [patent_app_number] => 18/025442 [patent_app_country] => US [patent_app_date] => 2022-02-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10830 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 79 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18025442 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17780090 [patent_doc_number] => 20220246440 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-08-04 [patent_title] => SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/586251 [patent_app_country] => US [patent_app_date] => 2022-01-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6572 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 103 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17586251 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18500278 [patent_doc_number] => 20230223063 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-07-13 [patent_title] => SEMICONDUCTOR MEMORY STRUCTURE AND METHOD FOR FORMING THE SAME [patent_app_type] => utility [patent_app_number] => 17/571945 [patent_app_country] => US [patent_app_date] => 2022-01-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8278 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 100 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17571945 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19900176 [patent_doc_number] => 12278110 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-04-15 [patent_title] => Bias voltage modulation approach for SiO/SiN layer alternating etch process [patent_app_type] => utility [patent_app_number] => 17/572397 [patent_app_country] => US [patent_app_date] => 2022-01-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 6 [patent_no_of_words] => 0 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17572397 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19828726 [patent_doc_number] => 12249517 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-03-11 [patent_title] => Manufacturing method of semiconductor structure [patent_app_type] => utility [patent_app_number] => 17/646487 [patent_app_country] => US [patent_app_date] => 2021-12-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 19 [patent_no_of_words] => 4810 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 154 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17646487 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19886835 [patent_doc_number] => 12272562 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-04-08 [patent_title] => Oxygen and iodine-containing hydrofluorocarbon compound for etching semiconductor structures [patent_app_type] => utility [patent_app_number] => 17/555094 [patent_app_country] => US [patent_app_date] => 2021-12-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 14 [patent_no_of_words] => 15253 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 87 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17555094 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18439922 [patent_doc_number] => 20230187217 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-15 [patent_title] => METHOD FOR PREPARING SEMICONDUCTOR DEVICE STRUCTURE WITH PATTERNS HAVING DIFFERENT HEIGHTS [patent_app_type] => utility [patent_app_number] => 17/550317 [patent_app_country] => US [patent_app_date] => 2021-12-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7062 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 94 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17550317 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17692117 [patent_doc_number] => 20220199410 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-23 [patent_title] => CONFORMAL AMORPHOUS CARBON LAYER ETCH WITH SIDE-WALL PASSIVATION [patent_app_type] => utility [patent_app_number] => 17/550182 [patent_app_country] => US [patent_app_date] => 2021-12-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2994 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 90 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17550182 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18265946 [patent_doc_number] => 20230087188 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-23 [patent_title] => PLASMA ETCHING METHOD, PLASMA ETCHING APPARATUS, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 17/644154 [patent_app_country] => US [patent_app_date] => 2021-12-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5734 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 57 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17644154 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19071040 [patent_doc_number] => 20240105466 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-03-28 [patent_title] => METHOD FOR FORMING PATTERN OF METAL OXIDE AND METHOD FOR PRODUCING SEMICONDUCTOR ELEMENT [patent_app_type] => utility [patent_app_number] => 18/273605 [patent_app_country] => US [patent_app_date] => 2021-12-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10304 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 272 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18273605 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18439923 [patent_doc_number] => 20230187218 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-15 [patent_title] => METHOD FOR PREPARING SEMICONDUCTOR DEVICE STRUCTURE WITH ISOLATION PATTERNS HAVING DIFFERENT HEIGHTS [patent_app_type] => utility [patent_app_number] => 17/550321 [patent_app_country] => US [patent_app_date] => 2021-12-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7063 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 151 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17550321 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19079442 [patent_doc_number] => 11948818 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-04-02 [patent_title] => Temperature calibration with deposition and etch process [patent_app_type] => utility [patent_app_number] => 17/546769 [patent_app_country] => US [patent_app_date] => 2021-12-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 8 [patent_no_of_words] => 8684 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 186 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17546769 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18967411 [patent_doc_number] => 11901191 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-02-13 [patent_title] => Atomic layer etching method and semiconductor device manufacturing method using the same [patent_app_type] => utility [patent_app_number] => 17/535933 [patent_app_country] => US [patent_app_date] => 2021-11-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 30 [patent_figures_cnt] => 32 [patent_no_of_words] => 10913 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 92 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17535933 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17963547 [patent_doc_number] => 20220344128 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-27 [patent_title] => SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/532026 [patent_app_country] => US [patent_app_date] => 2021-11-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8254 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17532026 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17963547 [patent_doc_number] => 20220344128 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-27 [patent_title] => SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/532026 [patent_app_country] => US [patent_app_date] => 2021-11-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8254 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17532026 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17963547 [patent_doc_number] => 20220344128 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-27 [patent_title] => SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/532026 [patent_app_country] => US [patent_app_date] => 2021-11-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8254 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17532026 [rel_patent_id] =>[rel_patent_doc_number] =>)