Hai Phan

Array ( [id] => 6595463 [patent_doc_number] => 20020042199 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-04-11 [patent_title] => 'Polishing by CMP for optimized planarization' [patent_app_type] => new [patent_app_number] => 09/956680 [patent_app_country] => US [patent_app_date] => 2001-09-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 2580 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 96 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0042/20020042199.pdf [firstpage_image] =>[orig_patent_app_number] => 09956680 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6838935 [patent_doc_number] => 20030036275 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-02-20 [patent_title] => 'METHOD FOR FORMING INTEGRATED CIRCUIT HAVING MONOS DEVICE AND MIXED-SIGNAL CIRCUIT' [patent_app_type] => new [patent_app_number] => 09/930998 [patent_app_country] => US [patent_app_date] => 2001-08-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 3127 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 202 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0036/20030036275.pdf [firstpage_image] =>[orig_patent_app_number] => 09930998 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6409417 [patent_doc_number] => 20020182864 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-12-05 [patent_title] => 'Etching process' [patent_app_type] => new [patent_app_number] => 09/888846 [patent_app_country] => US [patent_app_date] => 2001-06-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 2161 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0182/20020182864.pdf [firstpage_image] =>[orig_patent_app_number] => 09888846 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6894059 [patent_doc_number] => 20010016425 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-08-23 [patent_title] => 'Semiconductor processing methods, methods of forming hemispherical grain polysilicon, methods of forming capacitors, and methods of forming wordlines' [patent_app_type] => new [patent_app_number] => 09/751213 [patent_app_country] => US [patent_app_date] => 2000-12-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3134 [patent_no_of_claims] => 32 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 58 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0016/20010016425.pdf [firstpage_image] =>[orig_patent_app_number] => 09751213 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7026481 [patent_doc_number] => 20010013507 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-08-16 [patent_title] => 'Method for CMP of low dielectric constant polymer layers' [patent_app_type] => new [patent_app_number] => 09/742853 [patent_app_country] => US [patent_app_date] => 2000-12-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3641 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 101 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0013/20010013507.pdf [firstpage_image] =>[orig_patent_app_number] => 09742853 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1532710 [patent_doc_number] => 06410449 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-06-25 [patent_title] => 'Method of processing a workpiece using an externally excited torroidal plasma source' [patent_app_type] => B1 [patent_app_number] => 09/636436 [patent_app_country] => US [patent_app_date] => 2000-08-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 39 [patent_figures_cnt] => 46 [patent_no_of_words] => 10614 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 80 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/410/06410449.pdf [firstpage_image] =>[orig_patent_app_number] => 09636436 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1474663 [patent_doc_number] => 06387808 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-05-14 [patent_title] => 'Method of correcting topographical effects on a micro-electronic substrate' [patent_app_type] => B1 [patent_app_number] => 09/620896 [patent_app_country] => US [patent_app_date] => 2000-07-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 20 [patent_no_of_words] => 3113 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 191 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/387/06387808.pdf [firstpage_image] =>[orig_patent_app_number] => 09620896 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1536192 [patent_doc_number] => 06337277 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-01-08 [patent_title] => 'Clean chemistry low-k organic polymer etch' [patent_app_type] => B1 [patent_app_number] => 09/606842 [patent_app_country] => US [patent_app_date] => 2000-06-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 8303 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 34 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/337/06337277.pdf [firstpage_image] =>[orig_patent_app_number] => 09606842 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1503679 [patent_doc_number] => 06465352 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-10-15 [patent_title] => 'Method for removing dry-etching residue in a semiconductor device fabricating process' [patent_app_type] => B1 [patent_app_number] => 09/592523 [patent_app_country] => US [patent_app_date] => 2000-06-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 29 [patent_no_of_words] => 6837 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 85 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/465/06465352.pdf [firstpage_image] =>[orig_patent_app_number] => 09592523 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1367878 [patent_doc_number] => 06566264 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-05-20 [patent_title] => 'Method for forming an opening in a semiconductor device substrate' [patent_app_type] => B1 [patent_app_number] => 09/583970 [patent_app_country] => US [patent_app_date] => 2000-05-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 11 [patent_no_of_words] => 4274 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 136 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/566/06566264.pdf [firstpage_image] =>[orig_patent_app_number] => 09583970 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1440137 [patent_doc_number] => 06495462 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-12-17 [patent_title] => 'Components with releasable leads' [patent_app_type] => B1 [patent_app_number] => 09/566273 [patent_app_country] => US [patent_app_date] => 2000-05-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 34 [patent_no_of_words] => 11817 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 100 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/495/06495462.pdf [firstpage_image] =>[orig_patent_app_number] => 09566273 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1486632 [patent_doc_number] => 06428721 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-08-06 [patent_title] => 'Polishing composition and polishing method employing it' [patent_app_type] => B1 [patent_app_number] => 09/564546 [patent_app_country] => US [patent_app_date] => 2000-05-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4839 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 20 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/428/06428721.pdf [firstpage_image] =>[orig_patent_app_number] => 09564546 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1503674 [patent_doc_number] => 06465351 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-10-15 [patent_title] => 'Method of forming a capacitor lower electrode using a CMP stopping layer' [patent_app_type] => B1 [patent_app_number] => 09/563716 [patent_app_country] => US [patent_app_date] => 2000-05-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 14 [patent_no_of_words] => 5917 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 150 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/465/06465351.pdf [firstpage_image] =>[orig_patent_app_number] => 09563716 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1570328 [patent_doc_number] => 06498107 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-12-24 [patent_title] => 'Interface control for film deposition by gas-cluster ion-beam processing' [patent_app_type] => B1 [patent_app_number] => 09/563035 [patent_app_country] => US [patent_app_date] => 2000-05-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 17 [patent_no_of_words] => 6121 [patent_no_of_claims] => 31 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 71 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/498/06498107.pdf [firstpage_image] =>[orig_patent_app_number] => 09563035 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1446660 [patent_doc_number] => 06368968 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-04-09 [patent_title] => 'Ditch type floating ring for chemical mechanical polishing' [patent_app_type] => B1 [patent_app_number] => 09/547236 [patent_app_country] => US [patent_app_date] => 2000-04-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 3274 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 141 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/368/06368968.pdf [firstpage_image] =>[orig_patent_app_number] => 09547236 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1566097 [patent_doc_number] => 06376377 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-04-23 [patent_title] => 'Post chemical mechanical polish (CMP) planarizing substrate cleaning method employing enhanced substrate hydrophilicity' [patent_app_type] => B1 [patent_app_number] => 09/541487 [patent_app_country] => US [patent_app_date] => 2000-04-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 4 [patent_no_of_words] => 6205 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 217 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/376/06376377.pdf [firstpage_image] =>[orig_patent_app_number] => 09541487 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6473766 [patent_doc_number] => 20020022281 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-02-21 [patent_title] => 'Convertible hot edge ring to improve low-k dielectric etch' [patent_app_type] => new [patent_app_number] => 09/502864 [patent_app_country] => US [patent_app_date] => 2000-02-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 7359 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 171 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0022/20020022281.pdf [firstpage_image] =>[orig_patent_app_number] => 09502864 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1340110 [patent_doc_number] => 06589870 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-07-08 [patent_title] => 'Inter-layer connection structure, multilayer printed circuit board and production processes therefor' [patent_app_type] => B1 [patent_app_number] => 09/498222 [patent_app_country] => US [patent_app_date] => 2000-02-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 32 [patent_no_of_words] => 4379 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 246 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/589/06589870.pdf [firstpage_image] =>[orig_patent_app_number] => 09498222 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1347489 [patent_doc_number] => 06579797 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-06-17 [patent_title] => 'Cleaning brush conditioning apparatus' [patent_app_type] => B1 [patent_app_number] => 09/490912 [patent_app_country] => US [patent_app_date] => 2000-01-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 7 [patent_no_of_words] => 2308 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 45 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/579/06579797.pdf [firstpage_image] =>[orig_patent_app_number] => 09490912 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4304347 [patent_doc_number] => 06326307 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2001-12-04 [patent_title] => 'Plasma pretreatment of photoresist in an oxide etch process' [patent_app_type] => 1 [patent_app_number] => 9/440792 [patent_app_country] => US [patent_app_date] => 1999-11-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 12 [patent_no_of_words] => 5368 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 39 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/326/06326307.pdf [firstpage_image] =>[orig_patent_app_number] => 440792 [rel_patent_id] =>[rel_patent_doc_number] =>)