Search

Hetul B. Patel

Supervisory Patent Examiner (ID: 9435, Phone: (571)272-4184 , Office: P/3992 )

Most Active Art Unit
2186
Art Unit(s)
2186, 3992
Total Applications
615
Issued Applications
334
Pending Applications
175
Abandoned Applications
126

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18863722 [patent_doc_number] => 20230418158 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-12-28 [patent_title] => Novel Sulfonium Salt, Resist Composition, And Patterning Process [patent_app_type] => utility [patent_app_number] => 18/317019 [patent_app_country] => US [patent_app_date] => 2023-05-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 24034 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 194 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18317019 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/317019
Novel Sulfonium Salt, Resist Composition, And Patterning Process May 11, 2023 Pending
Array ( [id] => 19248553 [patent_doc_number] => 20240199540 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-06-20 [patent_title] => CARBOXYLATE SALT, PHOTORESIST COMPOSITION INCLUDING THE SAME, AND METHOD OF FORMING PATTERN USING THE PHOTORESIST COMPOSITION [patent_app_type] => utility [patent_app_number] => 18/312825 [patent_app_country] => US [patent_app_date] => 2023-05-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12269 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 11 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18312825 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/312825
CARBOXYLATE SALT, PHOTORESIST COMPOSITION INCLUDING THE SAME, AND METHOD OF FORMING PATTERN USING THE PHOTORESIST COMPOSITION May 4, 2023 Pending
Array ( [id] => 18584412 [patent_doc_number] => 20230266675 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-24 [patent_title] => INSPECTION METHOD, METHOD FOR PRODUCING COMPOSITION, AND METHOD FOR VERIFYING COMPOSITION [patent_app_type] => utility [patent_app_number] => 18/310573 [patent_app_country] => US [patent_app_date] => 2023-05-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 37844 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -20 [patent_words_short_claim] => 161 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18310573 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/310573
INSPECTION METHOD, METHOD FOR PRODUCING COMPOSITION, AND METHOD FOR VERIFYING COMPOSITION May 1, 2023 Pending
Array ( [id] => 18904298 [patent_doc_number] => 20240019783 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-01-18 [patent_title] => METHOD FOR ADJUSTING LOCAL THICKNESS OF PHOTORESIST [patent_app_type] => utility [patent_app_number] => 18/141952 [patent_app_country] => US [patent_app_date] => 2023-05-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2501 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 303 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18141952 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/141952
METHOD FOR ADJUSTING LOCAL THICKNESS OF PHOTORESIST Apr 30, 2023 Pending
Array ( [id] => 19375194 [patent_doc_number] => 12066757 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-08-20 [patent_title] => Mask and method of forming the same [patent_app_type] => utility [patent_app_number] => 18/308635 [patent_app_country] => US [patent_app_date] => 2023-04-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 10 [patent_no_of_words] => 6372 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 43 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18308635 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/308635
Mask and method of forming the same Apr 26, 2023 Issued
Array ( [id] => 19513783 [patent_doc_number] => 20240345469 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-10-17 [patent_title] => PHOTOMASK STRUCTURE [patent_app_type] => utility [patent_app_number] => 18/308670 [patent_app_country] => US [patent_app_date] => 2023-04-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3365 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 128 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18308670 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/308670
PHOTOMASK STRUCTURE Apr 26, 2023 Pending
Array ( [id] => 19529853 [patent_doc_number] => 20240353755 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-10-24 [patent_title] => METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 18/137288 [patent_app_country] => US [patent_app_date] => 2023-04-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12694 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 54 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18137288 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/137288
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE Apr 19, 2023 Pending
Array ( [id] => 18553557 [patent_doc_number] => 20230251569 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-10 [patent_title] => MONOALKYL TIN TRIALKOXIDES AND/OR MONOALKYL TIN TRIAMIDES WITH LOW METAL CONTAMINATION AND/OR PARTICULATE CONTAMINATION, AND CORRESPONDING METHODS [patent_app_type] => utility [patent_app_number] => 18/136414 [patent_app_country] => US [patent_app_date] => 2023-04-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10369 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 48 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18136414 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/136414
MONOALKYL TIN TRIALKOXIDES AND/OR MONOALKYL TIN TRIAMIDES WITH LOW METAL CONTAMINATION AND/OR PARTICULATE CONTAMINATION, AND CORRESPONDING METHODS Apr 18, 2023 Pending
Array ( [id] => 18553566 [patent_doc_number] => 20230251578 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-10 [patent_title] => METHOD FOR FORMING SEMICONDUCTOR STRUCTURE [patent_app_type] => utility [patent_app_number] => 18/302951 [patent_app_country] => US [patent_app_date] => 2023-04-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6602 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 69 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18302951 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/302951
METHOD FOR FORMING SEMICONDUCTOR STRUCTURE Apr 18, 2023 Pending
Array ( [id] => 19911367 [patent_doc_number] => 12287575 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-04-29 [patent_title] => Photoresist and method of formation and use [patent_app_type] => utility [patent_app_number] => 18/302608 [patent_app_country] => US [patent_app_date] => 2023-04-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 5 [patent_no_of_words] => 6103 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 63 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18302608 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/302608
Photoresist and method of formation and use Apr 17, 2023 Issued
Array ( [id] => 19005380 [patent_doc_number] => 20240069451 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-02-29 [patent_title] => SUPERCRITICAL FLUID SUPPLY APPARATUS, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME [patent_app_type] => utility [patent_app_number] => 18/130001 [patent_app_country] => US [patent_app_date] => 2023-04-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8561 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 110 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18130001 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/130001
SUPERCRITICAL FLUID SUPPLY APPARATUS, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME Apr 2, 2023 Pending
Array ( [id] => 19250598 [patent_doc_number] => 20240201588 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-06-20 [patent_title] => ORGANIC SALT, PHOTORESIST COMPOSITION INCLUDING THE SAME, AND PATTERN FORMATION METHOD USING THE SAME [patent_app_type] => utility [patent_app_number] => 18/192316 [patent_app_country] => US [patent_app_date] => 2023-03-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10371 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 72 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18192316 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/192316
ORGANIC SALT, PHOTORESIST COMPOSITION INCLUDING THE SAME, AND PATTERN FORMATION METHOD USING THE SAME Mar 28, 2023 Pending
Array ( [id] => 18568693 [patent_doc_number] => 20230259029 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-17 [patent_title] => ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, RESIST FILM, PATTERN FORMING METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE [patent_app_type] => utility [patent_app_number] => 18/191597 [patent_app_country] => US [patent_app_date] => 2023-03-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 36924 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 75 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18191597 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/191597
ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, RESIST FILM, PATTERN FORMING METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE Mar 27, 2023 Pending
Array ( [id] => 18659379 [patent_doc_number] => 20230305384 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-09-28 [patent_title] => LOW INTENSITY PHOTOMASK AND SYSTEM, METHOD AND PROGRAM PRODUCT FOR MAKING LOW INTENSITY PHOTOMASK FOR USE IN FLAT PANEL DISPLAY LITHOGRAPHY [patent_app_type] => utility [patent_app_number] => 18/123420 [patent_app_country] => US [patent_app_date] => 2023-03-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7016 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 151 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18123420 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/123420
LOW INTENSITY PHOTOMASK AND SYSTEM, METHOD AND PROGRAM PRODUCT FOR MAKING LOW INTENSITY PHOTOMASK FOR USE IN FLAT PANEL DISPLAY LITHOGRAPHY Mar 19, 2023 Pending
Array ( [id] => 18539042 [patent_doc_number] => 20230244149 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-03 [patent_title] => COMPOSITION FOR FORMING SILICON-CONTAINING RESIST UNDERLAYER FILM AND PATTERNING PROCESS [patent_app_type] => utility [patent_app_number] => 18/184709 [patent_app_country] => US [patent_app_date] => 2023-03-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 22658 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 274 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18184709 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/184709
Composition for forming silicon-containing resist underlayer film and patterning process Mar 15, 2023 Issued
Array ( [id] => 18585914 [patent_doc_number] => 20230268178 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-24 [patent_title] => PROTECTIVE COMPOSITION AND METHOD OF FORMING PHOTORESIST PATTERN [patent_app_type] => utility [patent_app_number] => 18/120978 [patent_app_country] => US [patent_app_date] => 2023-03-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 16082 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 71 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18120978 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/120978
Protective composition and method of forming photoresist pattern Mar 12, 2023 Issued
Array ( [id] => 18832237 [patent_doc_number] => 20230400764 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-12-14 [patent_title] => ORGANOMETALLIC COMPOUND COMPRISING A METAL COMBINED WITH AT LEAST ONE LIGAND CONTAINING FOUR OR MORE FLUORINE ATOMS, RESIST COMPOSITION COMPRISING THE SAME, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME [patent_app_type] => utility [patent_app_number] => 18/120248 [patent_app_country] => US [patent_app_date] => 2023-03-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7491 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 183 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18120248 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/120248
ORGANOMETALLIC COMPOUND COMPRISING A METAL COMBINED WITH AT LEAST ONE LIGAND CONTAINING FOUR OR MORE FLUORINE ATOMS, RESIST COMPOSITION COMPRISING THE SAME, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME Mar 9, 2023 Pending
Array ( [id] => 18568699 [patent_doc_number] => 20230259035 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-17 [patent_title] => CHARACTERIZATION OF PHOTOSENSITIVE MATERIALS [patent_app_type] => utility [patent_app_number] => 18/093121 [patent_app_country] => US [patent_app_date] => 2023-01-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5924 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 131 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18093121 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/093121
CHARACTERIZATION OF PHOTOSENSITIVE MATERIALS Jan 3, 2023 Pending
Array ( [id] => 18347007 [patent_doc_number] => 20230135117 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-05-04 [patent_title] => SOLUTION, SOLUTION STORAGE BODY, ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, PATTERN FORMING METHOD, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 18/147228 [patent_app_country] => US [patent_app_date] => 2022-12-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 29531 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -4 [patent_words_short_claim] => 129 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18147228 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/147228
Solution, solution storage body, actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method, and manufacturing method of semiconductor device Dec 27, 2022 Issued
Array ( [id] => 18468786 [patent_doc_number] => 20230203068 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-29 [patent_title] => AZASTANNATRANES, STANNATRANES, AND METHODS OF PREPARATION AND USE THEREOF [patent_app_type] => utility [patent_app_number] => 18/088843 [patent_app_country] => US [patent_app_date] => 2022-12-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5560 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -22 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18088843 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/088843
AZASTANNATRANES, STANNATRANES, AND METHODS OF PREPARATION AND USE THEREOF Dec 26, 2022 Pending
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