
Hung Nguyen
Examiner (ID: 13829, Phone: (571)272-2124 , Office: P/2882 )
| Most Active Art Unit | 2882 |
| Art Unit(s) | 2851, 2882 |
| Total Applications | 3062 |
| Issued Applications | 2654 |
| Pending Applications | 133 |
| Abandoned Applications | 304 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 20396030
[patent_doc_number] => 20250371505
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2025-12-04
[patent_title] => METHOD FOR MONITORING PROPER FUNCTIONING OF ONE OR MORE COMPONENTS OF A LITHOGRAPHY SYSTEM
[patent_app_type] => utility
[patent_app_number] => 18/873609
[patent_app_country] => US
[patent_app_date] => 2023-08-14
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 0
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -16
[patent_words_short_claim] => 2
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18873609
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/873609 | METHOD FOR MONITORING PROPER FUNCTIONING OF ONE OR MORE COMPONENTS OF A LITHOGRAPHY SYSTEM | Aug 13, 2023 | Pending |
Array
(
[id] => 18832248
[patent_doc_number] => 20230400775
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-12-14
[patent_title] => METHOD OF USING WAFER STAGE
[patent_app_type] => utility
[patent_app_number] => 18/448110
[patent_app_country] => US
[patent_app_date] => 2023-08-10
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 9456
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 89
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18448110
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/448110 | Method of using wafer stage | Aug 9, 2023 | Issued |
Array
(
[id] => 20081123
[patent_doc_number] => 12355204
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2025-07-08
[patent_title] => Gas laser apparatus and electronic device manufacturing method
[patent_app_type] => utility
[patent_app_number] => 18/447520
[patent_app_country] => US
[patent_app_date] => 2023-08-10
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 20
[patent_figures_cnt] => 21
[patent_no_of_words] => 12422
[patent_no_of_claims] => 17
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 318
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18447520
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/447520 | Gas laser apparatus and electronic device manufacturing method | Aug 9, 2023 | Issued |
Array
(
[id] => 19537693
[patent_doc_number] => 12130242
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2024-10-29
[patent_title] => Inspection system of semiconductor wafer and method of driving the same
[patent_app_type] => utility
[patent_app_number] => 18/446837
[patent_app_country] => US
[patent_app_date] => 2023-08-09
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 7
[patent_no_of_words] => 6347
[patent_no_of_claims] => 18
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 128
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18446837
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/446837 | Inspection system of semiconductor wafer and method of driving the same | Aug 8, 2023 | Issued |
Array
(
[id] => 18904304
[patent_doc_number] => 20240019789
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2024-01-18
[patent_title] => SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
[patent_app_type] => utility
[patent_app_number] => 18/446698
[patent_app_country] => US
[patent_app_date] => 2023-08-09
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 8956
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 68
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18446698
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/446698 | Semiconductor processing tool and methods of operation | Aug 8, 2023 | Issued |
Array
(
[id] => 19595501
[patent_doc_number] => 12153341
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2024-11-26
[patent_title] => Cleaning method, method for forming semiconductor structure and system thereof
[patent_app_type] => utility
[patent_app_number] => 18/360830
[patent_app_country] => US
[patent_app_date] => 2023-07-28
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 9
[patent_no_of_words] => 6236
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 65
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18360830
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/360830 | Cleaning method, method for forming semiconductor structure and system thereof | Jul 27, 2023 | Issued |
Array
(
[id] => 18755689
[patent_doc_number] => 20230359133
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-11-09
[patent_title] => SUBSTRATE STAGE AND SUBSTRATE PROCESSING SYSTEM USING THE SAME
[patent_app_type] => utility
[patent_app_number] => 18/351571
[patent_app_country] => US
[patent_app_date] => 2023-07-13
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 5855
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 65
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18351571
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/351571 | Substrate stage and substrate processing system using the same | Jul 12, 2023 | Issued |
Array
(
[id] => 18741330
[patent_doc_number] => 20230350311
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-11-02
[patent_title] => DEVICE FOR POSITIONING AND HOLDING AT LEAST ONE OPTICAL ELEMENT, MEASUREMENT SYSTEM
[patent_app_type] => utility
[patent_app_number] => 18/348549
[patent_app_country] => US
[patent_app_date] => 2023-07-07
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 4559
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -7
[patent_words_short_claim] => 152
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18348549
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/348549 | Device for positioning and holding at least one optical element, measurement system | Jul 6, 2023 | Issued |
Array
(
[id] => 20221278
[patent_doc_number] => 20250284209
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2025-09-11
[patent_title] => METHOD AND SYSTEM OF OVERLAY MEASUREMENT USING CHARGED-PARTICLE INSPECTION APPARATUS
[patent_app_type] => utility
[patent_app_number] => 18/861859
[patent_app_country] => US
[patent_app_date] => 2023-07-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 5895
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 79
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18861859
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/861859 | METHOD AND SYSTEM OF OVERLAY MEASUREMENT USING CHARGED-PARTICLE INSPECTION APPARATUS | Jul 5, 2023 | Pending |
Array
(
[id] => 20474541
[patent_doc_number] => 20260016762
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2026-01-15
[patent_title] => DESIGN FOR MULTIPLE OFF-AXIS ILLUMINATION BEAMS FOR WAFER ALIGNMENT SENSOR
[patent_app_type] => utility
[patent_app_number] => 18/875589
[patent_app_country] => US
[patent_app_date] => 2023-07-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 5557
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -14
[patent_words_short_claim] => 76
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18875589
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/875589 | DESIGN FOR MULTIPLE OFF-AXIS ILLUMINATION BEAMS FOR WAFER ALIGNMENT SENSOR | Jul 5, 2023 | Pending |
Array
(
[id] => 20265470
[patent_doc_number] => 12436457
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2025-10-07
[patent_title] => Developing apparatus and substrate processing apparatus
[patent_app_type] => utility
[patent_app_number] => 18/333570
[patent_app_country] => US
[patent_app_date] => 2023-06-13
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 5
[patent_no_of_words] => 0
[patent_no_of_claims] => 9
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 149
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18333570
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/333570 | Developing apparatus and substrate processing apparatus | Jun 12, 2023 | Issued |
Array
(
[id] => 19794644
[patent_doc_number] => 12235589
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2025-02-25
[patent_title] => Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor device
[patent_app_type] => utility
[patent_app_number] => 18/206970
[patent_app_country] => US
[patent_app_date] => 2023-06-07
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 110
[patent_figures_cnt] => 116
[patent_no_of_words] => 22484
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 117
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18206970
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/206970 | Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor device | Jun 6, 2023 | Issued |
Array
(
[id] => 20811601
[patent_doc_number] => 20260186425
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2026-07-02
[patent_title] => SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, COMPUTER PROGRAM AND METHOD
[patent_app_type] => utility
[patent_app_number] => 18/865364
[patent_app_country] => US
[patent_app_date] => 2023-05-31
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 2529
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -16
[patent_words_short_claim] => 2
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18865364
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/865364 | SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, COMPUTER PROGRAM AND METHOD | May 30, 2023 | Pending |
Array
(
[id] => 19426454
[patent_doc_number] => 12085866
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2024-09-10
[patent_title] => Particle removing assembly and method of cleaning mask for lithography
[patent_app_type] => utility
[patent_app_number] => 18/200951
[patent_app_country] => US
[patent_app_date] => 2023-05-23
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 10
[patent_figures_cnt] => 23
[patent_no_of_words] => 5982
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 97
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18200951
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/200951 | Particle removing assembly and method of cleaning mask for lithography | May 22, 2023 | Issued |
Array
(
[id] => 19609834
[patent_doc_number] => 12158707
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2024-12-03
[patent_title] => Methods and systems for reducing particulate deposition on photomask
[patent_app_type] => utility
[patent_app_number] => 18/199730
[patent_app_country] => US
[patent_app_date] => 2023-05-19
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 6
[patent_no_of_words] => 6729
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 70
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18199730
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/199730 | Methods and systems for reducing particulate deposition on photomask | May 18, 2023 | Issued |
Array
(
[id] => 18629380
[patent_doc_number] => 20230288260
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-09-14
[patent_title] => METHOD AND DEVICE FOR DETERMINING THE HEATING STATE OF AN OPTICAL ELEMENT IN AN OPTICAL SYSTEM
[patent_app_type] => utility
[patent_app_number] => 18/320685
[patent_app_country] => US
[patent_app_date] => 2023-05-19
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 4383
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -18
[patent_words_short_claim] => 68
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18320685
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/320685 | Method and device for determining the heating state of an optical element in an optical system | May 18, 2023 | Issued |
Array
(
[id] => 20594942
[patent_doc_number] => 12578655
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2026-03-17
[patent_title] => Sub-field control of a lithographic process and associated apparatus
[patent_app_type] => utility
[patent_app_number] => 18/196432
[patent_app_country] => US
[patent_app_date] => 2023-05-12
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 10
[patent_figures_cnt] => 22
[patent_no_of_words] => 13790
[patent_no_of_claims] => 12
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 82
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18196432
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/196432 | Sub-field control of a lithographic process and associated apparatus | May 11, 2023 | Issued |
Array
(
[id] => 18598733
[patent_doc_number] => 20230273532
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-08-31
[patent_title] => EXHAUST GAS MONITOR FOR PHOTORESIST ADHESION CONTROL
[patent_app_type] => utility
[patent_app_number] => 18/142715
[patent_app_country] => US
[patent_app_date] => 2023-05-03
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 7489
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -13
[patent_words_short_claim] => 92
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18142715
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/142715 | Exhaust gas monitor for photoresist adhesion control | May 2, 2023 | Issued |
Array
(
[id] => 19522458
[patent_doc_number] => 12124178
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2024-10-22
[patent_title] => Lithography system and method
[patent_app_type] => utility
[patent_app_number] => 18/310483
[patent_app_country] => US
[patent_app_date] => 2023-05-01
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 5
[patent_no_of_words] => 6112
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 89
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18310483
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/310483 | Lithography system and method | Apr 30, 2023 | Issued |
Array
(
[id] => 19107113
[patent_doc_number] => 11960213
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2024-04-16
[patent_title] => Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
[patent_app_type] => utility
[patent_app_number] => 18/299534
[patent_app_country] => US
[patent_app_date] => 2023-04-12
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 24
[patent_no_of_words] => 16254
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 99
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18299534
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/299534 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Apr 11, 2023 | Issued |