Search

Hung Nguyen

Examiner (ID: 14976, Phone: (571)272-2124 , Office: P/2882 )

Most Active Art Unit
2882
Art Unit(s)
2851, 2882
Total Applications
3019
Issued Applications
2637
Pending Applications
109
Abandoned Applications
304

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 19812348 [patent_doc_number] => 12243761 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-03-04 [patent_title] => Detection and analysis of substrate support and pre-heat ring in a process chamber via imaging [patent_app_type] => utility [patent_app_number] => 18/050384 [patent_app_country] => US [patent_app_date] => 2022-10-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 11 [patent_no_of_words] => 9587 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 85 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18050384 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/050384
Detection and analysis of substrate support and pre-heat ring in a process chamber via imaging Oct 26, 2022 Issued
Array ( [id] => 18337387 [patent_doc_number] => 20230129336 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-04-27 [patent_title] => EXTREME ULTRAVIOLET INNER POD SEAL GAP [patent_app_type] => utility [patent_app_number] => 17/973170 [patent_app_country] => US [patent_app_date] => 2022-10-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8207 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 96 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17973170 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/973170
EXTREME ULTRAVIOLET INNER POD SEAL GAP Oct 24, 2022 Pending
Array ( [id] => 18696274 [patent_doc_number] => 20230326710 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-12 [patent_title] => SCREENING EDGE PLACEMENT UNIFORMITY WAFER STOCHASTICS [patent_app_type] => utility [patent_app_number] => 17/967854 [patent_app_country] => US [patent_app_date] => 2022-10-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7942 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17967854 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/967854
SCREENING EDGE PLACEMENT UNIFORMITY WAFER STOCHASTICS Oct 16, 2022 Pending
Array ( [id] => 18322259 [patent_doc_number] => 20230120387 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-04-20 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 18/046567 [patent_app_country] => US [patent_app_date] => 2022-10-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11236 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 121 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18046567 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/046567
Substrate processing apparatus Oct 13, 2022 Issued
Array ( [id] => 18194402 [patent_doc_number] => 20230047921 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-16 [patent_title] => DRIVE DEVICE, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS [patent_app_type] => utility [patent_app_number] => 17/961447 [patent_app_country] => US [patent_app_date] => 2022-10-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7848 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 182 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17961447 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/961447
Drive device, optical system and lithography apparatus Oct 5, 2022 Issued
Array ( [id] => 18159683 [patent_doc_number] => 20230026275 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-01-26 [patent_title] => SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM, AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/959517 [patent_app_country] => US [patent_app_date] => 2022-10-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 15335 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -3 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17959517 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/959517
Substrate processing method, storage medium, and substrate processing apparatus Oct 3, 2022 Issued
Array ( [id] => 18170482 [patent_doc_number] => 20230037093 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-02 [patent_title] => SYSTEM AND METHOD FOR FOCUS CONTROL IN EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMS USING A FOCUS-SENSITIVE METROLOGY TARGET [patent_app_type] => utility [patent_app_number] => 17/959142 [patent_app_country] => US [patent_app_date] => 2022-10-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 16907 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 75 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17959142 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/959142
System and method for focus control in extreme ultraviolet lithography systems using a focus-sensitive metrology target Oct 2, 2022 Issued
Array ( [id] => 19848432 [patent_doc_number] => 20250093783 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-03-20 [patent_title] => EDGE PLACEMENT WITH SPATIAL LIGHT MODULATOR WRITING [patent_app_type] => utility [patent_app_number] => 18/292138 [patent_app_country] => US [patent_app_date] => 2022-09-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7627 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 263 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18292138 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/292138
EDGE PLACEMENT WITH SPATIAL LIGHT MODULATOR WRITING Sep 26, 2022 Pending
Array ( [id] => 19474951 [patent_doc_number] => 12105030 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-10-01 [patent_title] => Automatic detecting device for detecting flaws on surface of camshaft [patent_app_type] => utility [patent_app_number] => 17/947124 [patent_app_country] => US [patent_app_date] => 2022-09-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 18 [patent_no_of_words] => 8673 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 872 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17947124 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/947124
Automatic detecting device for detecting flaws on surface of camshaft Sep 17, 2022 Issued
Array ( [id] => 19632781 [patent_doc_number] => 20240411230 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-12-12 [patent_title] => A FLUID EXTRACTION SYSTEM, METHOD AND LITHOGRAPHIC APPARATUS [patent_app_type] => utility [patent_app_number] => 18/700780 [patent_app_country] => US [patent_app_date] => 2022-09-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6934 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18700780 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/700780
A FLUID EXTRACTION SYSTEM, METHOD AND LITHOGRAPHIC APPARATUS Sep 14, 2022 Pending
Array ( [id] => 19731980 [patent_doc_number] => 12209972 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-01-28 [patent_title] => Inspection support device, inspection support method, and inspection support program [patent_app_type] => utility [patent_app_number] => 17/932076 [patent_app_country] => US [patent_app_date] => 2022-09-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 25 [patent_figures_cnt] => 56 [patent_no_of_words] => 11908 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 131 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17932076 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/932076
Inspection support device, inspection support method, and inspection support program Sep 13, 2022 Issued
Array ( [id] => 18243436 [patent_doc_number] => 20230075747 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-09 [patent_title] => HIGH RESOLUTION MULTISPECTRAL MULTI-FIELD-OF-VIEW IMAGING SYSTEM FOR WAFER INSPECTION [patent_app_type] => utility [patent_app_number] => 17/930606 [patent_app_country] => US [patent_app_date] => 2022-09-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2563 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 68 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17930606 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/930606
High resolution multispectral multi-field-of-view imaging system for wafer inspection Sep 7, 2022 Issued
Array ( [id] => 20318138 [patent_doc_number] => 12456693 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-10-28 [patent_title] => Method for dual wavelength overlay measurement with focus at a photoresist top surface and apparatus for using same [patent_app_type] => utility [patent_app_number] => 17/930156 [patent_app_country] => US [patent_app_date] => 2022-09-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 30 [patent_figures_cnt] => 30 [patent_no_of_words] => 9519 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 173 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17930156 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/930156
Method for dual wavelength overlay measurement with focus at a photoresist top surface and apparatus for using same Sep 6, 2022 Issued
Array ( [id] => 19028535 [patent_doc_number] => 11927890 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2024-03-12 [patent_title] => Substrate processing apparatus and method of fabricating semiconductor device using the same [patent_app_type] => utility [patent_app_number] => 17/892379 [patent_app_country] => US [patent_app_date] => 2022-08-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 23 [patent_figures_cnt] => 23 [patent_no_of_words] => 9930 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 140 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17892379 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/892379
Substrate processing apparatus and method of fabricating semiconductor device using the same Aug 21, 2022 Issued
Array ( [id] => 20000214 [patent_doc_number] => 20250138436 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-05-01 [patent_title] => METROLOGY METHOD AND DEVICE [patent_app_type] => utility [patent_app_number] => 18/690961 [patent_app_country] => US [patent_app_date] => 2022-08-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8628 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18690961 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/690961
METROLOGY METHOD AND DEVICE Aug 15, 2022 Pending
Array ( [id] => 18006672 [patent_doc_number] => 20220365438 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-17 [patent_title] => PHOTOLITHOGRAPHY METHOD AND APPARATUS [patent_app_type] => utility [patent_app_number] => 17/875268 [patent_app_country] => US [patent_app_date] => 2022-07-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 17698 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 118 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17875268 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/875268
Photolithography method and apparatus Jul 26, 2022 Issued
Array ( [id] => 17991627 [patent_doc_number] => 20220357664 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-10 [patent_title] => RADIATION SOURCE SUPPLY SYSTEM FOR LITHOGRAPHIC TOOLS [patent_app_type] => utility [patent_app_number] => 17/874204 [patent_app_country] => US [patent_app_date] => 2022-07-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6826 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 132 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17874204 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/874204
Radiation source supply system for lithographic tools Jul 25, 2022 Issued
Array ( [id] => 17991634 [patent_doc_number] => 20220357671 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-10 [patent_title] => SEMICONDUCTOR LITHOGRAPHY SYSTEM AND/OR METHOD [patent_app_type] => utility [patent_app_number] => 17/872461 [patent_app_country] => US [patent_app_date] => 2022-07-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13831 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 79 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17872461 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/872461
Semiconductor lithography system and/or method Jul 24, 2022 Issued
Array ( [id] => 17991630 [patent_doc_number] => 20220357667 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-10 [patent_title] => FILM FORMATION DEVICE, FILM FORMATION METHOD, AND ARTICLE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 17/870102 [patent_app_country] => US [patent_app_date] => 2022-07-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7477 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 96 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17870102 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/870102
Film formation device, film formation method, and article manufacturing method Jul 20, 2022 Issued
Array ( [id] => 18008457 [patent_doc_number] => 20220367224 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-17 [patent_title] => MEASUREMENT SYSTEM, SUBSTRATE PROCESSING SYSTEM, AND DEVICE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 17/869912 [patent_app_country] => US [patent_app_date] => 2022-07-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 36299 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => 0 [patent_words_short_claim] => 155 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17869912 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/869912
Measurement system, substrate processing system, and device manufacturing method Jul 20, 2022 Issued
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