Hung Nhat Ngo

Array ( [id] => 1398829 [patent_doc_number] => 06534225 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-03-18 [patent_title] => 'Tapered ion implantation with femtosecond laser ablation to remove printable alternating phase shift features' [patent_app_type] => B2 [patent_app_number] => 09/892957 [patent_app_country] => US [patent_app_date] => 2001-06-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 17 [patent_no_of_words] => 4058 [patent_no_of_claims] => 49 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 120 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/534/06534225.pdf [firstpage_image] =>[orig_patent_app_number] => 09892957 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6884793 [patent_doc_number] => 20010038954 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-11-08 [patent_title] => 'Method and apparatus for repairing an alternating phase shift mask' [patent_app_type] => new [patent_app_number] => 09/893151 [patent_app_country] => US [patent_app_date] => 2001-06-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 5139 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 46 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0038/20010038954.pdf [firstpage_image] =>[orig_patent_app_number] => 09893151 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6325552 [patent_doc_number] => 20020197541 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-12-26 [patent_title] => 'Method and apparatus for forming a pattern on an integrated circuit using differing exposure characteristics' [patent_app_type] => new [patent_app_number] => 09/885575 [patent_app_country] => US [patent_app_date] => 2001-06-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 3808 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 79 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0197/20020197541.pdf [firstpage_image] =>[orig_patent_app_number] => 09885575 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1334467 [patent_doc_number] => 06593039 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-07-15 [patent_title] => 'Photoresist mask that combines attenuated and alternating phase shifting masks' [patent_app_type] => B1 [patent_app_number] => 09/884840 [patent_app_country] => US [patent_app_date] => 2001-06-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 11 [patent_no_of_words] => 3419 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 106 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/593/06593039.pdf [firstpage_image] =>[orig_patent_app_number] => 09884840 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5999606 [patent_doc_number] => 20020028393 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-03-07 [patent_title] => 'Optical proximity correction method utilizing serifs having variable dimensions' [patent_app_type] => new [patent_app_number] => 09/877231 [patent_app_country] => US [patent_app_date] => 2001-06-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 8718 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 162 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0028/20020028393.pdf [firstpage_image] =>[orig_patent_app_number] => 09877231 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6557621 [patent_doc_number] => 20020164533 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-11-07 [patent_title] => 'Method and apparatus for reducing color conflicts during trim generation for phase shifters' [patent_app_type] => new [patent_app_number] => 09/876307 [patent_app_country] => US [patent_app_date] => 2001-06-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 4114 [patent_no_of_claims] => 33 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 92 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0164/20020164533.pdf [firstpage_image] =>[orig_patent_app_number] => 09876307 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1359268 [patent_doc_number] => 06569583 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-05-27 [patent_title] => 'Method and apparatus for using phase shifter cutbacks to resolve phase shifter conflicts' [patent_app_type] => B2 [patent_app_number] => 09/876306 [patent_app_country] => US [patent_app_date] => 2001-06-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 20 [patent_no_of_words] => 4064 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 123 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/569/06569583.pdf [firstpage_image] =>[orig_patent_app_number] => 09876306 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6896235 [patent_doc_number] => 20010027025 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-10-04 [patent_title] => 'Projection lithography photomask blanks, preforms and method of making' [patent_app_type] => new [patent_app_number] => 09/876194 [patent_app_country] => US [patent_app_date] => 2001-06-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 8235 [patent_no_of_claims] => 81 [patent_no_of_ind_claims] => 12 [patent_words_short_claim] => 19 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0027/20010027025.pdf [firstpage_image] =>[orig_patent_app_number] => 09876194 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1286473 [patent_doc_number] => 06635394 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-10-21 [patent_title] => 'Three dimensional mask' [patent_app_type] => B2 [patent_app_number] => 09/871073 [patent_app_country] => US [patent_app_date] => 2001-05-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 5 [patent_no_of_words] => 2064 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/635/06635394.pdf [firstpage_image] =>[orig_patent_app_number] => 09871073 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1296482 [patent_doc_number] => 06627359 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-09-30 [patent_title] => 'Phase-shift photomask manufacturing method and phase-shift photomask' [patent_app_type] => B2 [patent_app_number] => 09/859552 [patent_app_country] => US [patent_app_date] => 2001-05-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 13 [patent_no_of_words] => 5490 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 143 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/627/06627359.pdf [firstpage_image] =>[orig_patent_app_number] => 09859552 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6524427 [patent_doc_number] => 20020192569 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-12-19 [patent_title] => 'Devices and methods for exposure of photoreactive compositions with light emitting diodes' [patent_app_type] => new [patent_app_number] => 09/858272 [patent_app_country] => US [patent_app_date] => 2001-05-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 4034 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 70 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0192/20020192569.pdf [firstpage_image] =>[orig_patent_app_number] => 09858272 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6901460 [patent_doc_number] => 20010023043 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-09-20 [patent_title] => 'Optical proximity correction methods, and methods of forming radiation-patterning tools' [patent_app_type] => new [patent_app_number] => 09/858834 [patent_app_country] => US [patent_app_date] => 2001-05-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 3596 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 118 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0023/20010023043.pdf [firstpage_image] =>[orig_patent_app_number] => 09858834 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6404780 [patent_doc_number] => 20020182514 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-12-05 [patent_title] => 'Organic bottom antireflective coating for high performance mask making using optical imaging' [patent_app_type] => new [patent_app_number] => 09/848859 [patent_app_country] => US [patent_app_date] => 2001-05-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 9494 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 61 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0182/20020182514.pdf [firstpage_image] =>[orig_patent_app_number] => 09848859 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1317321 [patent_doc_number] => 06605393 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-08-12 [patent_title] => 'Alternative PSM with new phase conflict canceling method' [patent_app_type] => B2 [patent_app_number] => 09/847485 [patent_app_country] => US [patent_app_date] => 2001-05-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 14 [patent_no_of_words] => 2202 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 116 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/605/06605393.pdf [firstpage_image] =>[orig_patent_app_number] => 09847485 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1334448 [patent_doc_number] => 06593037 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-07-15 [patent_title] => 'EUV mask or reticle having reduced reflections' [patent_app_type] => B1 [patent_app_number] => 09/847803 [patent_app_country] => US [patent_app_date] => 2001-05-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 5 [patent_no_of_words] => 2793 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 38 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/593/06593037.pdf [firstpage_image] =>[orig_patent_app_number] => 09847803 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1369307 [patent_doc_number] => 06562525 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-05-13 [patent_title] => 'Photo mask to be used for photolithography, method of inspecting pattern defect, and method of manufacturing semiconductor device through use of the mask' [patent_app_type] => B2 [patent_app_number] => 09/843693 [patent_app_country] => US [patent_app_date] => 2001-04-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 9 [patent_no_of_words] => 3590 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 75 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/562/06562525.pdf [firstpage_image] =>[orig_patent_app_number] => 09843693 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1154612 [patent_doc_number] => 06764792 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2004-07-20 [patent_title] => 'Halftone phase shift photomask and blanks for halftone phase shift photomask for producing it' [patent_app_type] => B1 [patent_app_number] => 09/830598 [patent_app_country] => US [patent_app_date] => 2001-04-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 23 [patent_no_of_words] => 5828 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 43 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/764/06764792.pdf [firstpage_image] =>[orig_patent_app_number] => 09830598 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5786787 [patent_doc_number] => 20020160275 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-10-31 [patent_title] => 'Dark field trench in an alternating phase shift mask to avoid phase conflict' [patent_app_type] => new [patent_app_number] => 09/844015 [patent_app_country] => US [patent_app_date] => 2001-04-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 2970 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 52 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0160/20020160275.pdf [firstpage_image] =>[orig_patent_app_number] => 09844015 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6884792 [patent_doc_number] => 20010038953 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-11-08 [patent_title] => 'Reflection-type mask for use in pattern exposure, manufacturing method therefor, exposure apparatus, and method of manufacturing a device' [patent_app_type] => new [patent_app_number] => 09/842056 [patent_app_country] => US [patent_app_date] => 2001-04-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 7258 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 67 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0038/20010038953.pdf [firstpage_image] =>[orig_patent_app_number] => 09842056 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5814568 [patent_doc_number] => 20020039689 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-04-04 [patent_title] => 'Halftone phase shift photomask and blank for halftone phase shift photomask' [patent_app_type] => new [patent_app_number] => 09/843309 [patent_app_country] => US [patent_app_date] => 2001-04-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 9472 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 48 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0039/20020039689.pdf [firstpage_image] =>[orig_patent_app_number] => 09843309 [rel_patent_id] =>[rel_patent_doc_number] =>)