James R Greece

Array ( [id] => 4738168 [patent_doc_number] => 20080231820 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-09-25 [patent_title] => 'Contamination prevention system, a lithographic apparatus, a radiation source and a method for manufacturing a device' [patent_app_type] => utility [patent_app_number] => 11/727166 [patent_app_country] => US [patent_app_date] => 2007-03-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 5635 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0231/20080231820.pdf [firstpage_image] =>[orig_patent_app_number] => 11727166 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4630365 [patent_doc_number] => 08009270 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2011-08-30 [patent_title] => 'Uniform background radiation in maskless lithography' [patent_app_type] => utility [patent_app_number] => 11/689926 [patent_app_country] => US [patent_app_date] => 2007-03-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 10 [patent_no_of_words] => 10543 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/08/009/08009270.pdf [firstpage_image] =>[orig_patent_app_number] => 11689926 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4801475 [patent_doc_number] => 20080013062 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-01-17 [patent_title] => 'Exposure apparatus, exposure method, and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/723888 [patent_app_country] => US [patent_app_date] => 2007-03-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 12204 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0013/20080013062.pdf [firstpage_image] =>[orig_patent_app_number] => 11723888 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4582862 [patent_doc_number] => 07826035 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-11-02 [patent_title] => 'Lithographic apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/725499 [patent_app_country] => US [patent_app_date] => 2007-03-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 5 [patent_no_of_words] => 6923 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 131 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/826/07826035.pdf [firstpage_image] =>[orig_patent_app_number] => 11725499 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4458580 [patent_doc_number] => 07894038 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2011-02-22 [patent_title] => 'Device manufacturing method, lithographic apparatus, and a computer program' [patent_app_type] => utility [patent_app_number] => 11/717786 [patent_app_country] => US [patent_app_date] => 2007-03-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 7579 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 128 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/894/07894038.pdf [firstpage_image] =>[orig_patent_app_number] => 11717786 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4630364 [patent_doc_number] => 08009269 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2011-08-30 [patent_title] => 'Optimal rasterization for maskless lithography' [patent_app_type] => utility [patent_app_number] => 11/686136 [patent_app_country] => US [patent_app_date] => 2007-03-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 11 [patent_no_of_words] => 11513 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 94 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/08/009/08009269.pdf [firstpage_image] =>[orig_patent_app_number] => 11686136 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4817985 [patent_doc_number] => 20080225244 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-09-18 [patent_title] => 'Lithographic apparatus and method' [patent_app_type] => utility [patent_app_number] => 11/716670 [patent_app_country] => US [patent_app_date] => 2007-03-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 4570 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0225/20080225244.pdf [firstpage_image] =>[orig_patent_app_number] => 11716670 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5246015 [patent_doc_number] => 20070242249 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-10-18 [patent_title] => 'Exposure apparatus, exposure method, and method for producing device' [patent_app_type] => utility [patent_app_number] => 11/712957 [patent_app_country] => US [patent_app_date] => 2007-03-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 11565 [patent_no_of_claims] => 46 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0242/20070242249.pdf [firstpage_image] =>[orig_patent_app_number] => 11712957 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4725155 [patent_doc_number] => 20080204696 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-08-28 [patent_title] => 'METHOD OF ALIGNMENT' [patent_app_type] => utility [patent_app_number] => 11/680249 [patent_app_country] => US [patent_app_date] => 2007-02-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 6957 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0204/20080204696.pdf [firstpage_image] =>[orig_patent_app_number] => 11680249 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4725147 [patent_doc_number] => 20080204688 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-08-28 [patent_title] => 'Methodology For Implementing Enhanced Optical Lithography For Hole Patterning In Semiconductor Fabrication' [patent_app_type] => utility [patent_app_number] => 11/677693 [patent_app_country] => US [patent_app_date] => 2007-02-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 1685 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0204/20080204688.pdf [firstpage_image] =>[orig_patent_app_number] => 11677693 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10883762 [patent_doc_number] => 08908145 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2014-12-09 [patent_title] => 'Pattern forming apparatus and pattern forming method, movable body drive system and movable body drive method, exposure apparatus and exposure method, and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/708611 [patent_app_country] => US [patent_app_date] => 2007-02-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 37 [patent_figures_cnt] => 57 [patent_no_of_words] => 47685 [patent_no_of_claims] => 42 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 91 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 11708611 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4871620 [patent_doc_number] => 20080198354 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-08-21 [patent_title] => 'Optical system and method for illuimination of reflective spatial light modulators in maskless lithography' [patent_app_type] => utility [patent_app_number] => 11/708131 [patent_app_country] => US [patent_app_date] => 2007-02-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 9268 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0198/20080198354.pdf [firstpage_image] =>[orig_patent_app_number] => 11708131 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 66093 [patent_doc_number] => 07760331 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-07-20 [patent_title] => 'Decoupled, multiple stage positioning system' [patent_app_type] => utility [patent_app_number] => 11/676937 [patent_app_country] => US [patent_app_date] => 2007-02-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 8 [patent_no_of_words] => 4892 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 134 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/760/07760331.pdf [firstpage_image] =>[orig_patent_app_number] => 11676937 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8691248 [patent_doc_number] => 08390779 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2013-03-05 [patent_title] => 'Exposure apparatus, exposure method, and method for producing device' [patent_app_type] => utility [patent_app_number] => 11/707079 [patent_app_country] => US [patent_app_date] => 2007-02-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 26 [patent_figures_cnt] => 39 [patent_no_of_words] => 39292 [patent_no_of_claims] => 47 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 275 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 11707079 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7523856 [patent_doc_number] => 08027020 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2011-09-27 [patent_title] => 'Exposure apparatus, exposure method, and method for producing device' [patent_app_type] => utility [patent_app_number] => 11/707027 [patent_app_country] => US [patent_app_date] => 2007-02-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 25 [patent_figures_cnt] => 35 [patent_no_of_words] => 46761 [patent_no_of_claims] => 37 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 251 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/08/027/08027020.pdf [firstpage_image] =>[orig_patent_app_number] => 11707027 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7812149 [patent_doc_number] => 08134683 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2012-03-13 [patent_title] => 'Device manufacturing method, computer program and lithographic apparatus' [patent_app_type] => utility [patent_app_number] => 11/704374 [patent_app_country] => US [patent_app_date] => 2007-02-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 5 [patent_no_of_words] => 5649 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 201 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/08/134/08134683.pdf [firstpage_image] =>[orig_patent_app_number] => 11704374 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8116859 [patent_doc_number] => 08159649 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2012-04-17 [patent_title] => 'Exposure method, exposure apparatus, photomask and method for manufacturing photomask' [patent_app_type] => utility [patent_app_number] => 11/704199 [patent_app_country] => US [patent_app_date] => 2007-02-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 29 [patent_figures_cnt] => 29 [patent_no_of_words] => 14102 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 135 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/08/159/08159649.pdf [firstpage_image] =>[orig_patent_app_number] => 11704199 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4963895 [patent_doc_number] => 20080106715 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-05-08 [patent_title] => 'Immersion Lithography System Using A Sealed Wafer Bath' [patent_app_type] => utility [patent_app_number] => 11/671046 [patent_app_country] => US [patent_app_date] => 2007-02-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 2896 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0106/20080106715.pdf [firstpage_image] =>[orig_patent_app_number] => 11671046 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4589498 [patent_doc_number] => 07852459 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-12-14 [patent_title] => 'Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/701516 [patent_app_country] => US [patent_app_date] => 2007-02-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 6 [patent_no_of_words] => 6586 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 214 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/852/07852459.pdf [firstpage_image] =>[orig_patent_app_number] => 11701516 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8258617 [patent_doc_number] => 08208116 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2012-06-26 [patent_title] => 'Immersion lithography system using a sealed wafer bath' [patent_app_type] => utility [patent_app_number] => 11/670860 [patent_app_country] => US [patent_app_date] => 2007-02-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 21 [patent_no_of_words] => 3312 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 32 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 11670860 [rel_patent_id] =>[rel_patent_doc_number] =>)