Search

Jeffrie Robert Lund

Examiner (ID: 3524, Phone: (571)272-1437 , Office: P/1716 )

Most Active Art Unit
1716
Art Unit(s)
1792, 1716, 1109, 1763
Total Applications
1820
Issued Applications
1165
Pending Applications
174
Abandoned Applications
493

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 15268313 [patent_doc_number] => 20190382890 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-12-19 [patent_title] => APPARATUS AND METHOD FOR CONTROLLING A FLOW PROCESS MATERIAL TO A DEPOSITION CHAMBER [patent_app_type] => utility [patent_app_number] => 16/442527 [patent_app_country] => US [patent_app_date] => 2019-06-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10867 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 121 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16442527 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/442527
Apparatus and method for controlling a flow process material to a deposition chamber Jun 15, 2019 Issued
Array ( [id] => 16909210 [patent_doc_number] => 11041241 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-06-22 [patent_title] => Plasma processing apparatus and temperature control method [patent_app_type] => utility [patent_app_number] => 16/432207 [patent_app_country] => US [patent_app_date] => 2019-06-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 12 [patent_no_of_words] => 10886 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 196 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16432207 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/432207
Plasma processing apparatus and temperature control method Jun 4, 2019 Issued
Array ( [id] => 20272309 [patent_doc_number] => 12442081 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-10-14 [patent_title] => Nozzle head and apparatus [patent_app_type] => utility [patent_app_number] => 17/047550 [patent_app_country] => US [patent_app_date] => 2019-04-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 24 [patent_figures_cnt] => 26 [patent_no_of_words] => 6828 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 342 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17047550 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/047550
Nozzle head and apparatus Apr 14, 2019 Issued
Array ( [id] => 14963883 [patent_doc_number] => 20190309420 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-10-10 [patent_title] => Substrate Processing Apparatus and Substrate Processing Method [patent_app_type] => utility [patent_app_number] => 16/371818 [patent_app_country] => US [patent_app_date] => 2019-04-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9058 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 72 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16371818 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/371818
Substrate Processing Apparatus and Substrate Processing Method Mar 31, 2019 Abandoned
Array ( [id] => 14968817 [patent_doc_number] => 20190311887 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-10-10 [patent_title] => MULTIZONE GAS DISTRIBUTION APPARATUS [patent_app_type] => utility [patent_app_number] => 16/369911 [patent_app_country] => US [patent_app_date] => 2019-03-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4000 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 136 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16369911 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/369911
MULTIZONE GAS DISTRIBUTION APPARATUS Mar 28, 2019 Abandoned
Array ( [id] => 14446283 [patent_doc_number] => 20190181015 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-06-13 [patent_title] => Substrate Processing Method and Substrate Processing Apparatus [patent_app_type] => utility [patent_app_number] => 16/275674 [patent_app_country] => US [patent_app_date] => 2019-02-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9312 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16275674 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/275674
Substrate Processing Method and Substrate Processing Apparatus Feb 13, 2019 Abandoned
Array ( [id] => 17076302 [patent_doc_number] => 11112697 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-09-07 [patent_title] => Method and apparatus for post exposure processing of photoresist wafers [patent_app_type] => utility [patent_app_number] => 16/272962 [patent_app_country] => US [patent_app_date] => 2019-02-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 7195 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 80 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16272962 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/272962
Method and apparatus for post exposure processing of photoresist wafers Feb 10, 2019 Issued
Array ( [id] => 14475549 [patent_doc_number] => 20190189422 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-06-20 [patent_title] => METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE-PROCESSING APPARATUS, AND RECORDING MEDIUM [patent_app_type] => utility [patent_app_number] => 16/270099 [patent_app_country] => US [patent_app_date] => 2019-02-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 21560 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 275 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16270099 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/270099
Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium Feb 6, 2019 Issued
Array ( [id] => 16609229 [patent_doc_number] => 10910242 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-02-02 [patent_title] => Temperature controller for manufacturing semiconductor [patent_app_type] => utility [patent_app_number] => 16/265625 [patent_app_country] => US [patent_app_date] => 2019-02-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4876 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 226 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16265625 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/265625
Temperature controller for manufacturing semiconductor Jan 31, 2019 Issued
Array ( [id] => 14573241 [patent_doc_number] => 20190214228 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-07-11 [patent_title] => RADICAL ASSISTED CURE OF DIELECTRIC FILMS [patent_app_type] => utility [patent_app_number] => 16/244779 [patent_app_country] => US [patent_app_date] => 2019-01-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7616 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 92 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16244779 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/244779
RADICAL ASSISTED CURE OF DIELECTRIC FILMS Jan 9, 2019 Abandoned
Array ( [id] => 18548168 [patent_doc_number] => 11721527 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-08-08 [patent_title] => Processing chamber mixing systems [patent_app_type] => utility [patent_app_number] => 16/241537 [patent_app_country] => US [patent_app_date] => 2019-01-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 13 [patent_no_of_words] => 11213 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 224 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16241537 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/241537
Processing chamber mixing systems Jan 6, 2019 Issued
Array ( [id] => 16824746 [patent_doc_number] => 20210140039 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-13 [patent_title] => DEVICE FOR FORMING DIAMOND FILM ETC. AND METHOD THEREFOR [patent_app_type] => utility [patent_app_number] => 16/958415 [patent_app_country] => US [patent_app_date] => 2018-12-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10955 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 25 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16958415 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/958415
Device for forming diamond film etc. and method therefor Dec 25, 2018 Issued
Array ( [id] => 16098281 [patent_doc_number] => 20200203127 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-25 [patent_title] => SYSTEMS AND METHODS FOR STORAGE AND SUPPLY OF F3NO-FREE FNO GASES AND F3NO-FREE FNO GAS MIXTURES FOR SEMICONDUCTOR PROCESSES [patent_app_type] => utility [patent_app_number] => 16/227623 [patent_app_country] => US [patent_app_date] => 2018-12-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 16973 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 41 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16227623 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/227623
SYSTEMS AND METHODS FOR STORAGE AND SUPPLY OF F3NO-FREE FNO GASES AND F3NO-FREE FNO GAS MIXTURES FOR SEMICONDUCTOR PROCESSES Dec 19, 2018 Abandoned
Array ( [id] => 17395787 [patent_doc_number] => 11244811 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-02-08 [patent_title] => Plasma reactor with highly symmetrical four-fold gas injection [patent_app_type] => utility [patent_app_number] => 16/226536 [patent_app_country] => US [patent_app_date] => 2018-12-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 11 [patent_no_of_words] => 4685 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 292 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16226536 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/226536
Plasma reactor with highly symmetrical four-fold gas injection Dec 18, 2018 Issued
Array ( [id] => 15785561 [patent_doc_number] => 10626491 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-04-21 [patent_title] => Method for manufacturing deposition mask and deposition mask [patent_app_type] => utility [patent_app_number] => 16/194196 [patent_app_country] => US [patent_app_date] => 2018-11-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 19 [patent_no_of_words] => 6535 [patent_no_of_claims] => 3 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 327 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16194196 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/194196
Method for manufacturing deposition mask and deposition mask Nov 15, 2018 Issued
Array ( [id] => 17060401 [patent_doc_number] => 11104992 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-08-31 [patent_title] => Substrate processing apparatus, non-transitory computer-readable recording medium thereof and semiconductor manufacturing method by employing thereof [patent_app_type] => utility [patent_app_number] => 16/139784 [patent_app_country] => US [patent_app_date] => 2018-09-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 9336 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 374 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16139784 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/139784
Substrate processing apparatus, non-transitory computer-readable recording medium thereof and semiconductor manufacturing method by employing thereof Sep 23, 2018 Issued
Array ( [id] => 13832441 [patent_doc_number] => 20190019705 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-01-17 [patent_title] => SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM [patent_app_type] => utility [patent_app_number] => 16/136644 [patent_app_country] => US [patent_app_date] => 2018-09-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6177 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 143 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16136644 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/136644
Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium Sep 19, 2018 Issued
Array ( [id] => 13827369 [patent_doc_number] => 20190017169 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-01-17 [patent_title] => SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM [patent_app_type] => utility [patent_app_number] => 16/135451 [patent_app_country] => US [patent_app_date] => 2018-09-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7128 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 191 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16135451 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/135451
Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium Sep 18, 2018 Issued
Array ( [id] => 16650296 [patent_doc_number] => 10927461 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-02-23 [patent_title] => Gas diffuser support structure for reduced particle generation [patent_app_type] => utility [patent_app_number] => 16/119505 [patent_app_country] => US [patent_app_date] => 2018-08-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 3 [patent_no_of_words] => 2802 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 74 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16119505 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/119505
Gas diffuser support structure for reduced particle generation Aug 30, 2018 Issued
Array ( [id] => 13629597 [patent_doc_number] => 20180366351 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-12-20 [patent_title] => OXYGEN COMPATIBLE PLASMA SOURCE [patent_app_type] => utility [patent_app_number] => 16/113568 [patent_app_country] => US [patent_app_date] => 2018-08-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11275 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 75 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16113568 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/113568
OXYGEN COMPATIBLE PLASMA SOURCE Aug 26, 2018 Abandoned
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