Search

Jeffrie Robert Lund

Examiner (ID: 3524, Phone: (571)272-1437 , Office: P/1716 )

Most Active Art Unit
1716
Art Unit(s)
1792, 1716, 1109, 1763
Total Applications
1820
Issued Applications
1165
Pending Applications
174
Abandoned Applications
493

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 16653285 [patent_doc_number] => 10930476 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-02-23 [patent_title] => Plasma processing device [patent_app_type] => utility [patent_app_number] => 15/204183 [patent_app_country] => US [patent_app_date] => 2016-07-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 9 [patent_no_of_words] => 9205 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 298 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15204183 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/204183
Plasma processing device Jul 6, 2016 Issued
Array ( [id] => 14519697 [patent_doc_number] => 10337096 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-07-02 [patent_title] => Method for manufacturing deposition mask and deposition mask [patent_app_type] => utility [patent_app_number] => 15/179829 [patent_app_country] => US [patent_app_date] => 2016-06-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 19 [patent_no_of_words] => 6501 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 216 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15179829 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/179829
Method for manufacturing deposition mask and deposition mask Jun 9, 2016 Issued
Array ( [id] => 11087648 [patent_doc_number] => 20160284616 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-09-29 [patent_title] => 'MOVEABLE AND ADJUSTABLE GAS INJECTORS FOR AN ETCHING CHAMBER' [patent_app_type] => utility [patent_app_number] => 15/178623 [patent_app_country] => US [patent_app_date] => 2016-06-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 4526 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15178623 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/178623
Moveable and adjustable gas injectors for an etching chamber Jun 9, 2016 Issued
Array ( [id] => 14801053 [patent_doc_number] => 10403536 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-09-03 [patent_title] => Method of fixing substrate using electrostatic chuck and substrate processing apparatus including the same [patent_app_type] => utility [patent_app_number] => 15/178427 [patent_app_country] => US [patent_app_date] => 2016-06-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 8334 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 123 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15178427 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/178427
Method of fixing substrate using electrostatic chuck and substrate processing apparatus including the same Jun 8, 2016 Issued
Array ( [id] => 11084267 [patent_doc_number] => 20160281232 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-09-29 [patent_title] => 'VAPOR FLOW CONTROL APPARATUS FOR ATOMIC LAYER DEPOSITION' [patent_app_type] => utility [patent_app_number] => 15/177210 [patent_app_country] => US [patent_app_date] => 2016-06-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 9942 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15177210 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/177210
Vapor flow control apparatus for atomic layer deposition Jun 7, 2016 Issued
Array ( [id] => 16264460 [patent_doc_number] => 10755902 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-08-25 [patent_title] => Plasma processing apparatus and focus ring [patent_app_type] => utility [patent_app_number] => 15/164039 [patent_app_country] => US [patent_app_date] => 2016-05-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 13 [patent_no_of_words] => 6302 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 196 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15164039 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/164039
Plasma processing apparatus and focus ring May 24, 2016 Issued
Array ( [id] => 13675939 [patent_doc_number] => 20160376703 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-12-29 [patent_title] => VAPOR DEPOSITION APPARATUS [patent_app_type] => utility [patent_app_number] => 15/159156 [patent_app_country] => US [patent_app_date] => 2016-05-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3590 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 154 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15159156 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/159156
Vapor deposition apparatus May 18, 2016 Issued
Array ( [id] => 11063655 [patent_doc_number] => 20160260617 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-09-08 [patent_title] => 'TECHNIQUE TO DEPOSIT SIDEWALL PASSIVATION FOR HIGH ASPECT RATIO CYLINDER ETCH' [patent_app_type] => utility [patent_app_number] => 15/157322 [patent_app_country] => US [patent_app_date] => 2016-05-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 16211 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15157322 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/157322
Technique to deposit sidewall passivation for high aspect ratio cylinder etch May 16, 2016 Issued
Array ( [id] => 13182775 [patent_doc_number] => 10106891 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-10-23 [patent_title] => Substrate processing apparatus, non-transitory computer-readable recording medium thereof and semiconductor manufacturing method by employing thereof [patent_app_type] => utility [patent_app_number] => 15/141580 [patent_app_country] => US [patent_app_date] => 2016-04-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 9315 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 444 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15141580 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/141580
Substrate processing apparatus, non-transitory computer-readable recording medium thereof and semiconductor manufacturing method by employing thereof Apr 27, 2016 Issued
Array ( [id] => 12642306 [patent_doc_number] => 20180105933 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-04-19 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND METHOD FOR CLEANING CHAMBER [patent_app_type] => utility [patent_app_number] => 15/566698 [patent_app_country] => US [patent_app_date] => 2016-04-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9482 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 77 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15566698 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/566698
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR CLEANING CHAMBER Apr 18, 2016 Abandoned
Array ( [id] => 11106637 [patent_doc_number] => 20160303607 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-10-20 [patent_title] => 'DEPOSITION APPARATUS AND MANUFACTURING PROCESS INCLUDING FILM FORMING STEP BY DEPOSITION APPARATUS' [patent_app_type] => utility [patent_app_number] => 15/095325 [patent_app_country] => US [patent_app_date] => 2016-04-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 4808 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15095325 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/095325
Deposition apparatus and manufacturing process including film forming step by deposition apparatus Apr 10, 2016 Issued
Array ( [id] => 11021027 [patent_doc_number] => 20160217981 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-07-28 [patent_title] => 'SEMICONDUCTOR SYSTEM ASSEMBLIES AND METHODS OF OPERATION' [patent_app_type] => utility [patent_app_number] => 15/068811 [patent_app_country] => US [patent_app_date] => 2016-03-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 7676 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15068811 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/068811
SEMICONDUCTOR SYSTEM ASSEMBLIES AND METHODS OF OPERATION Mar 13, 2016 Abandoned
Array ( [id] => 11079242 [patent_doc_number] => 20160276206 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-09-22 [patent_title] => 'Substrate Processing Apparatus' [patent_app_type] => utility [patent_app_number] => 15/064856 [patent_app_country] => US [patent_app_date] => 2016-03-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 5341 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15064856 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/064856
Substrate processing apparatus Mar 8, 2016 Issued
Array ( [id] => 11776063 [patent_doc_number] => 09385013 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2016-07-05 [patent_title] => 'Method and apparatus of manufacturing a semiconductor device by forming a film on a substrate' [patent_app_type] => utility [patent_app_number] => 15/011896 [patent_app_country] => US [patent_app_date] => 2016-02-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 14 [patent_no_of_words] => 29570 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 230 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15011896 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/011896
Method and apparatus of manufacturing a semiconductor device by forming a film on a substrate Jan 31, 2016 Issued
Array ( [id] => 13740239 [patent_doc_number] => 20180374589 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-12-27 [patent_title] => A SYSTEM FOR CONTINUOUSLY PREPARING COATED PARTICLES IN A LARGE SCALE [patent_app_type] => utility [patent_app_number] => 15/747091 [patent_app_country] => US [patent_app_date] => 2016-01-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3571 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 94 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15747091 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/747091
A SYSTEM FOR CONTINUOUSLY PREPARING COATED PARTICLES IN A LARGE SCALE Jan 21, 2016 Abandoned
Array ( [id] => 10787621 [patent_doc_number] => 20160133778 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-05-12 [patent_title] => 'DYNAMIC SUPPORT SYSTEM FOR QUARTZ PROCESS CHAMBER' [patent_app_type] => utility [patent_app_number] => 14/997313 [patent_app_country] => US [patent_app_date] => 2016-01-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3212 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14997313 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/997313
DYNAMIC SUPPORT SYSTEM FOR QUARTZ PROCESS CHAMBER Jan 14, 2016 Abandoned
Array ( [id] => 11666077 [patent_doc_number] => 20170154797 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-06-01 [patent_title] => 'METHOD AND APPARATUS FOR POST EXPOSURE PROCESSING OF PHOTORESIST WAFERS' [patent_app_type] => utility [patent_app_number] => 14/989488 [patent_app_country] => US [patent_app_date] => 2016-01-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 7281 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14989488 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/989488
Method and apparatus for post exposure processing of photoresist wafers Jan 5, 2016 Issued
Array ( [id] => 11757649 [patent_doc_number] => 20170204517 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-07-20 [patent_title] => 'VAPOR DEPOSITION APPARATUS' [patent_app_type] => utility [patent_app_number] => 15/327024 [patent_app_country] => US [patent_app_date] => 2016-01-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 4518 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15327024 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/327024
Vapor deposition apparatus Jan 4, 2016 Issued
Array ( [id] => 10762367 [patent_doc_number] => 20160108519 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-04-21 [patent_title] => 'METHOD AND APPARATUS OF FORMING SILICON NITRIDE FILM' [patent_app_type] => utility [patent_app_number] => 14/984139 [patent_app_country] => US [patent_app_date] => 2015-12-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 21 [patent_figures_cnt] => 21 [patent_no_of_words] => 14811 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14984139 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/984139
Method and apparatus of forming silicon nitride film Dec 29, 2015 Issued
Array ( [id] => 10984197 [patent_doc_number] => 20160181142 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-06-23 [patent_title] => 'EDGE RING FOR A SUBSTRATE PROCESSING CHAMBER' [patent_app_type] => utility [patent_app_number] => 14/975119 [patent_app_country] => US [patent_app_date] => 2015-12-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3186 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14975119 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/975119
Edge ring for a substrate processing chamber Dec 17, 2015 Issued
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