Search

Jeffrie Robert Lund

Examiner (ID: 3524, Phone: (571)272-1437 , Office: P/1716 )

Most Active Art Unit
1716
Art Unit(s)
1792, 1716, 1109, 1763
Total Applications
1820
Issued Applications
1165
Pending Applications
174
Abandoned Applications
493

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 17886442 [patent_doc_number] => 20220301920 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-22 [patent_title] => FILM THICKNESS UNIFORMITY IMPROVEMENT USING EDGE RING AND BIAS ELECTRODE GEOMETRY [patent_app_type] => utility [patent_app_number] => 17/832775 [patent_app_country] => US [patent_app_date] => 2022-06-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8084 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 71 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17832775 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/832775
Film thickness uniformity improvement using edge ring and bias electrode geometry Jun 5, 2022 Issued
Array ( [id] => 18058496 [patent_doc_number] => 20220389582 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-12-08 [patent_title] => APPARATUS FOR PERFORMING FILM FORMING PROCESS ON SUBSTRATE AND METHOD OF USING VACUUM CHUCK MECHANISM PROVIDED IN THE APPARATUS [patent_app_type] => utility [patent_app_number] => 17/804128 [patent_app_country] => US [patent_app_date] => 2022-05-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7839 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 303 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17804128 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/804128
Apparatus for performing film forming process on substrate and method of using vacuum chuck mechanism provided in the apparatus May 25, 2022 Issued
Array ( [id] => 19282022 [patent_doc_number] => 20240218496 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-07-04 [patent_title] => EVAPORATION SOURCE DEVICE AND EVAPORATION SOURCE SYSTEM [patent_app_type] => utility [patent_app_number] => 17/758220 [patent_app_country] => US [patent_app_date] => 2022-05-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3901 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 87 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17758220 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/758220
EVAPORATION SOURCE DEVICE AND EVAPORATION SOURCE SYSTEM May 22, 2022 Pending
Array ( [id] => 18039930 [patent_doc_number] => 20220384147 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-12-01 [patent_title] => SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING SYSTEM [patent_app_type] => utility [patent_app_number] => 17/747317 [patent_app_country] => US [patent_app_date] => 2022-05-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14034 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 86 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17747317 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/747317
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING SYSTEM May 17, 2022 Pending
Array ( [id] => 19972369 [patent_doc_number] => 12340988 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-06-24 [patent_title] => Ring carrier and substrate treating system [patent_app_type] => utility [patent_app_number] => 17/744852 [patent_app_country] => US [patent_app_date] => 2022-05-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 25 [patent_no_of_words] => 4678 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 71 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17744852 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/744852
Ring carrier and substrate treating system May 15, 2022 Issued
Array ( [id] => 19972368 [patent_doc_number] => 12340987 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-06-24 [patent_title] => Tunable plasma exclusion zone in semiconductor fabrication [patent_app_type] => utility [patent_app_number] => 17/742637 [patent_app_country] => US [patent_app_date] => 2022-05-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 22 [patent_no_of_words] => 13253 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 144 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17742637 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/742637
Tunable plasma exclusion zone in semiconductor fabrication May 11, 2022 Issued
Array ( [id] => 20229237 [patent_doc_number] => 12417892 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-09-16 [patent_title] => Shadow mask apparatus and methods for variable etch depths [patent_app_type] => utility [patent_app_number] => 17/722874 [patent_app_country] => US [patent_app_date] => 2022-04-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 21 [patent_no_of_words] => 2289 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 131 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17722874 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/722874
Shadow mask apparatus and methods for variable etch depths Apr 17, 2022 Issued
Array ( [id] => 19464641 [patent_doc_number] => 20240318310 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-09-26 [patent_title] => CONTAINER FOR VOLATILE RAW MATERIALS, AND SOLID GASIFICATION AND SUPPLY SYSTEM [patent_app_type] => utility [patent_app_number] => 18/574169 [patent_app_country] => US [patent_app_date] => 2022-03-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14313 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 213 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18574169 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/574169
CONTAINER FOR VOLATILE RAW MATERIALS, AND SOLID GASIFICATION AND SUPPLY SYSTEM Mar 24, 2022 Pending
Array ( [id] => 19274663 [patent_doc_number] => 12024776 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-07-02 [patent_title] => Gas supply apparatus, gas supply method, and substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 17/656009 [patent_app_country] => US [patent_app_date] => 2022-03-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 8668 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 200 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17656009 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/656009
Gas supply apparatus, gas supply method, and substrate processing apparatus Mar 22, 2022 Issued
Array ( [id] => 19274663 [patent_doc_number] => 12024776 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-07-02 [patent_title] => Gas supply apparatus, gas supply method, and substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 17/656009 [patent_app_country] => US [patent_app_date] => 2022-03-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 8668 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 200 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17656009 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/656009
Gas supply apparatus, gas supply method, and substrate processing apparatus Mar 22, 2022 Issued
Array ( [id] => 19274663 [patent_doc_number] => 12024776 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-07-02 [patent_title] => Gas supply apparatus, gas supply method, and substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 17/656009 [patent_app_country] => US [patent_app_date] => 2022-03-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 8668 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 200 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17656009 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/656009
Gas supply apparatus, gas supply method, and substrate processing apparatus Mar 22, 2022 Issued
Array ( [id] => 19274663 [patent_doc_number] => 12024776 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-07-02 [patent_title] => Gas supply apparatus, gas supply method, and substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 17/656009 [patent_app_country] => US [patent_app_date] => 2022-03-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 8668 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 200 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17656009 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/656009
Gas supply apparatus, gas supply method, and substrate processing apparatus Mar 22, 2022 Issued
Array ( [id] => 19135839 [patent_doc_number] => 11970771 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-04-30 [patent_title] => Vaporizer, substrate processing apparatus and method for manufacturing semiconductor device [patent_app_type] => utility [patent_app_number] => 17/689565 [patent_app_country] => US [patent_app_date] => 2022-03-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 18 [patent_no_of_words] => 14995 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 122 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17689565 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/689565
Vaporizer, substrate processing apparatus and method for manufacturing semiconductor device Mar 7, 2022 Issued
Array ( [id] => 19912482 [patent_doc_number] => 12288701 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-04-29 [patent_title] => Multi-chamber semiconductor manufacturing system [patent_app_type] => utility [patent_app_number] => 17/682457 [patent_app_country] => US [patent_app_date] => 2022-02-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 0 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 147 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17682457 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/682457
Multi-chamber semiconductor manufacturing system Feb 27, 2022 Issued
Array ( [id] => 19311881 [patent_doc_number] => 12037684 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-07-16 [patent_title] => Solids vaporizer [patent_app_type] => utility [patent_app_number] => 17/681186 [patent_app_country] => US [patent_app_date] => 2022-02-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 8 [patent_no_of_words] => 10160 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 243 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17681186 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/681186
Solids vaporizer Feb 24, 2022 Issued
Array ( [id] => 18562889 [patent_doc_number] => 11728141 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-08-15 [patent_title] => Gas hub for plasma reactor [patent_app_type] => utility [patent_app_number] => 17/590681 [patent_app_country] => US [patent_app_date] => 2022-02-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 11 [patent_no_of_words] => 4699 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 227 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17590681 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/590681
Gas hub for plasma reactor Jan 31, 2022 Issued
Array ( [id] => 17761874 [patent_doc_number] => 20220235486 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-07-28 [patent_title] => Graphite Plate [patent_app_type] => utility [patent_app_number] => 17/582188 [patent_app_country] => US [patent_app_date] => 2022-01-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4583 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 37 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17582188 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/582188
Graphite Plate Jan 23, 2022 Abandoned
Array ( [id] => 17752647 [patent_doc_number] => 20220230852 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-07-21 [patent_title] => PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/648436 [patent_app_country] => US [patent_app_date] => 2022-01-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10070 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 91 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17648436 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/648436
Plasma processing apparatus Jan 19, 2022 Issued
Array ( [id] => 17752641 [patent_doc_number] => 20220230846 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-07-21 [patent_title] => SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM [patent_app_type] => utility [patent_app_number] => 17/576216 [patent_app_country] => US [patent_app_date] => 2022-01-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13202 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 187 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17576216 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/576216
Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium Jan 13, 2022 Issued
Array ( [id] => 17708509 [patent_doc_number] => 20220208517 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-30 [patent_title] => SYSTEMS AND METHODS FOR STORAGE AND SUPPLY OF F3NO-FREE FNO GASES AND F3NO-FREE FNO GAS MIXTURES FOR SEMICONDUCTOR PROCESSES [patent_app_type] => utility [patent_app_number] => 17/575049 [patent_app_country] => US [patent_app_date] => 2022-01-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 17000 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -4 [patent_words_short_claim] => 119 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17575049 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/575049
Systems and methods for storage and supply of F3NO-free FNO gases and F3NO-free FNO gas mixtures for semiconductor processes Jan 12, 2022 Issued
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