Search

Jeffrie Robert Lund

Examiner (ID: 16128, Phone: (571)272-1437 , Office: P/1716 )

Most Active Art Unit
1716
Art Unit(s)
1763, 1716, 1792, 1109
Total Applications
1792
Issued Applications
1147
Pending Applications
176
Abandoned Applications
491

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 1023836 [patent_doc_number] => 06884295 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-04-26 [patent_title] => 'Method of forming oxynitride film or the like and system for carrying out the same' [patent_app_type] => utility [patent_app_number] => 09/864374 [patent_app_country] => US [patent_app_date] => 2001-05-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 21 [patent_no_of_words] => 16968 [patent_no_of_claims] => 3 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 149 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/884/06884295.pdf [firstpage_image] =>[orig_patent_app_number] => 09864374 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/864374
Method of forming oxynitride film or the like and system for carrying out the same May 24, 2001 Issued
Array ( [id] => 6470662 [patent_doc_number] => 20020023715 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-02-28 [patent_title] => 'Substrate polishing apparatus and substrate polishing mehod' [patent_app_type] => new [patent_app_number] => 09/864208 [patent_app_country] => US [patent_app_date] => 2001-05-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 10129 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0023/20020023715.pdf [firstpage_image] =>[orig_patent_app_number] => 09864208 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/864208
Substrate polishing apparatus and substrate polishing mehod May 24, 2001 Abandoned
Array ( [id] => 7014543 [patent_doc_number] => 20010051403 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-12-13 [patent_title] => 'Method and apparatus for deposition of porous silica dielectrics' [patent_app_type] => new [patent_app_number] => 09/863979 [patent_app_country] => US [patent_app_date] => 2001-05-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 3306 [patent_no_of_claims] => 29 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 66 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0051/20010051403.pdf [firstpage_image] =>[orig_patent_app_number] => 09863979 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/863979
Method and apparatus for deposition of porous silica dielectrics May 22, 2001 Abandoned
Array ( [id] => 7285493 [patent_doc_number] => 20040108068 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-06-10 [patent_title] => 'Processing device and method of maintaining the device, mechanism and method for assembling processing device part, and lock mechanism and method for locking the lock mechanism' [patent_app_type] => new [patent_app_number] => 10/276671 [patent_app_country] => US [patent_app_date] => 2002-11-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 9758 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 9 [patent_words_short_claim] => 123 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0108/20040108068.pdf [firstpage_image] =>[orig_patent_app_number] => 10276671 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/276671
Processing device and method of maintaining the device, mechanism and method for assembling processing device part, and lock mechanism and method for locking the lock mechanism May 15, 2001 Issued
Array ( [id] => 5801657 [patent_doc_number] => 20020009868 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-01-24 [patent_title] => 'Method of growing a thin film in gaseous phase and apparatus for growing a thin film in gaseous phase for use in said method' [patent_app_type] => new [patent_app_number] => 09/854672 [patent_app_country] => US [patent_app_date] => 2001-05-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 5340 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 76 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0009/20020009868.pdf [firstpage_image] =>[orig_patent_app_number] => 09854672 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/854672
Method of growing a thin film in gaseous phase and apparatus for growing a thin film in gaseous phase for use in said method May 14, 2001 Abandoned
Array ( [id] => 7062841 [patent_doc_number] => 20010042511 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-11-22 [patent_title] => 'Reduction of plasma edge effect on plasma enhanced CVD processes' [patent_app_type] => new [patent_app_number] => 09/853397 [patent_app_country] => US [patent_app_date] => 2001-05-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 3337 [patent_no_of_claims] => 37 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 29 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0042/20010042511.pdf [firstpage_image] =>[orig_patent_app_number] => 09853397 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/853397
Reduction of plasma edge effect on plasma enhanced CVD processes May 10, 2001 Issued
Array ( [id] => 1403369 [patent_doc_number] => 06524428 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-02-25 [patent_title] => 'Method of holding substrate and substrate holding system' [patent_app_type] => B2 [patent_app_number] => 09/849405 [patent_app_country] => US [patent_app_date] => 2001-05-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 16 [patent_no_of_words] => 11771 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/524/06524428.pdf [firstpage_image] =>[orig_patent_app_number] => 09849405 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/849405
Method of holding substrate and substrate holding system May 6, 2001 Issued
Array ( [id] => 1342747 [patent_doc_number] => 06579372 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-06-17 [patent_title] => 'Apparatus and method for depositing thin film on wafer using atomic layer deposition' [patent_app_type] => B2 [patent_app_number] => 09/848579 [patent_app_country] => US [patent_app_date] => 2001-05-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 9 [patent_no_of_words] => 7011 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 228 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/579/06579372.pdf [firstpage_image] =>[orig_patent_app_number] => 09848579 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/848579
Apparatus and method for depositing thin film on wafer using atomic layer deposition May 2, 2001 Issued
Array ( [id] => 6469968 [patent_doc_number] => 20020151186 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-10-17 [patent_title] => 'Apparatus and method for detecting an end point of chamber cleaning in semiconductor equipment' [patent_app_type] => new [patent_app_number] => 09/833437 [patent_app_country] => US [patent_app_date] => 2001-04-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 2545 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 67 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0151/20020151186.pdf [firstpage_image] =>[orig_patent_app_number] => 09833437 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/833437
Apparatus and method for detecting an end point of chamber cleaning in semiconductor equipment Apr 10, 2001 Issued
Array ( [id] => 5888095 [patent_doc_number] => 20020012749 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-01-31 [patent_title] => 'Method and apparatus for coating and/or treating substrates' [patent_app_type] => new [patent_app_number] => 09/821763 [patent_app_country] => US [patent_app_date] => 2001-03-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4852 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 35 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0012/20020012749.pdf [firstpage_image] =>[orig_patent_app_number] => 09821763 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/821763
Method and apparatus for coating and/or treating substrates Mar 29, 2001 Abandoned
Array ( [id] => 6539854 [patent_doc_number] => 20020137312 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-09-26 [patent_title] => 'Emissivity-change-free pumping plate kit in a single wafer chamber' [patent_app_type] => new [patent_app_number] => 09/798424 [patent_app_country] => US [patent_app_date] => 2001-03-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 2274 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 28 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0137/20020137312.pdf [firstpage_image] =>[orig_patent_app_number] => 09798424 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/798424
Emissivity-change-free pumping plate kit in a single wafer chamber Mar 1, 2001 Issued
Array ( [id] => 5858666 [patent_doc_number] => 20020122885 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-09-05 [patent_title] => 'Methods, systems, and apparatus for uniform chemical-vapor depositions' [patent_app_type] => new [patent_app_number] => 09/797324 [patent_app_country] => US [patent_app_date] => 2001-03-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3310 [patent_no_of_claims] => 62 [patent_no_of_ind_claims] => 15 [patent_words_short_claim] => 30 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0122/20020122885.pdf [firstpage_image] =>[orig_patent_app_number] => 09797324 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/797324
Methods, systems, and apparatus for uniform chemical-vapor depositions Feb 28, 2001 Issued
Array ( [id] => 1492719 [patent_doc_number] => 06402849 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2002-06-11 [patent_title] => 'Process tube having slit type process gas injection portion and hole type waste gas exhaust portion, and apparatus for fabricating semiconductor device' [patent_app_type] => B2 [patent_app_number] => 09/793314 [patent_app_country] => US [patent_app_date] => 2001-02-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 8 [patent_no_of_words] => 4354 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 101 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/402/06402849.pdf [firstpage_image] =>[orig_patent_app_number] => 09793314 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/793314
Process tube having slit type process gas injection portion and hole type waste gas exhaust portion, and apparatus for fabricating semiconductor device Feb 25, 2001 Issued
Array ( [id] => 7062723 [patent_doc_number] => 20010042439 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-11-22 [patent_title] => 'Molecular contamination control system' [patent_app_type] => new [patent_app_number] => 09/790769 [patent_app_country] => US [patent_app_date] => 2001-02-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 4219 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 211 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0042/20010042439.pdf [firstpage_image] =>[orig_patent_app_number] => 09790769 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/790769
Molecular contamination control system Feb 20, 2001 Issued
Array ( [id] => 1370048 [patent_doc_number] => 06539891 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-04-01 [patent_title] => 'Chemical deposition reactor and method of forming a thin film using the same' [patent_app_type] => B1 [patent_app_number] => 09/763238 [patent_app_country] => US [patent_app_date] => 2001-02-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 11 [patent_no_of_words] => 4644 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 86 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/539/06539891.pdf [firstpage_image] =>[orig_patent_app_number] => 09763238 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/763238
Chemical deposition reactor and method of forming a thin film using the same Feb 13, 2001 Issued
Array ( [id] => 6894814 [patent_doc_number] => 20010025604 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-10-04 [patent_title] => 'Substrate processing apparatus' [patent_app_type] => new [patent_app_number] => 09/779549 [patent_app_country] => US [patent_app_date] => 2001-02-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 5941 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 155 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0025/20010025604.pdf [firstpage_image] =>[orig_patent_app_number] => 09779549 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/779549
Substrate processing apparatus Feb 8, 2001 Abandoned
Array ( [id] => 1381604 [patent_doc_number] => 06544379 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-04-08 [patent_title] => 'Method of holding substrate and substrate holding system' [patent_app_type] => B2 [patent_app_number] => 09/778780 [patent_app_country] => US [patent_app_date] => 2001-02-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 16 [patent_no_of_words] => 11758 [patent_no_of_claims] => 50 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 156 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/544/06544379.pdf [firstpage_image] =>[orig_patent_app_number] => 09778780 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/778780
Method of holding substrate and substrate holding system Feb 7, 2001 Issued
Array ( [id] => 1472590 [patent_doc_number] => 06387185 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-05-14 [patent_title] => 'Processing chamber for atomic layer deposition processes' [patent_app_type] => B1 [patent_app_number] => 09/764035 [patent_app_country] => US [patent_app_date] => 2001-01-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 23 [patent_figures_cnt] => 30 [patent_no_of_words] => 15639 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 279 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/387/06387185.pdf [firstpage_image] =>[orig_patent_app_number] => 09764035 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/764035
Processing chamber for atomic layer deposition processes Jan 15, 2001 Issued
Array ( [id] => 1527067 [patent_doc_number] => 06478877 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-11-12 [patent_title] => 'Gas collector for epitaxial reactors' [patent_app_type] => B1 [patent_app_number] => 09/757612 [patent_app_country] => US [patent_app_date] => 2001-01-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 2317 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 46 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/478/06478877.pdf [firstpage_image] =>[orig_patent_app_number] => 09757612 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/757612
Gas collector for epitaxial reactors Jan 10, 2001 Issued
Array ( [id] => 6959264 [patent_doc_number] => 20010011524 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-08-09 [patent_title] => 'Linear aperture deposition apparatus and coating process' [patent_app_type] => new [patent_app_number] => 09/758839 [patent_app_country] => US [patent_app_date] => 2001-01-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 20 [patent_no_of_words] => 10707 [patent_no_of_claims] => 37 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 48 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0011/20010011524.pdf [firstpage_image] =>[orig_patent_app_number] => 09758839 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/758839
Linear aperture deposition apparatus and coating process Jan 9, 2001 Issued
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