Jill M. Gray

Array ( [id] => 1138773 [patent_doc_number] => 06776851 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2004-08-17 [patent_title] => 'In-situ cleaning of a polymer coated plasma processing chamber' [patent_app_type] => B1 [patent_app_number] => 10/186917 [patent_app_country] => US [patent_app_date] => 2002-06-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 9 [patent_no_of_words] => 5486 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 143 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/776/06776851.pdf [firstpage_image] =>[orig_patent_app_number] => 10186917 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1057576 [patent_doc_number] => 06851436 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2005-02-08 [patent_title] => 'Substrate processing using a fluid re-circulation system in a wafer scrubbing system' [patent_app_type] => utility [patent_app_number] => 10/186908 [patent_app_country] => US [patent_app_date] => 2002-06-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 5157 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/851/06851436.pdf [firstpage_image] =>[orig_patent_app_number] => 10186908 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1190125 [patent_doc_number] => 06729339 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2004-05-04 [patent_title] => 'Method and apparatus for cooling a resonator of a megasonic transducer' [patent_app_type] => B1 [patent_app_number] => 10/187162 [patent_app_country] => US [patent_app_date] => 2002-06-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 8 [patent_no_of_words] => 4167 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 191 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/729/06729339.pdf [firstpage_image] =>[orig_patent_app_number] => 10187162 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6811140 [patent_doc_number] => 20030070690 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-04-17 [patent_title] => 'Method for treating an object using ultra-violet light' [patent_app_type] => new [patent_app_number] => 10/186282 [patent_app_country] => US [patent_app_date] => 2002-06-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 7582 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 34 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0070/20030070690.pdf [firstpage_image] =>[orig_patent_app_number] => 10186282 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6694373 [patent_doc_number] => 20030106567 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-06-12 [patent_title] => 'Semiconductor substrate cleaning apparatus, method of cleaning semiconductor substrate and method of manufacturing semiconductor device' [patent_app_type] => new [patent_app_number] => 10/163453 [patent_app_country] => US [patent_app_date] => 2002-06-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 5812 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 47 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0106/20030106567.pdf [firstpage_image] =>[orig_patent_app_number] => 10163453 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1114520 [patent_doc_number] => 06800142 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2004-10-05 [patent_title] => 'Method for removing photoresist and post-etch residue using activated peroxide followed by supercritical fluid treatment' [patent_app_type] => B1 [patent_app_number] => 10/159951 [patent_app_country] => US [patent_app_date] => 2002-05-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 4 [patent_no_of_words] => 5939 [patent_no_of_claims] => 46 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 22 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/800/06800142.pdf [firstpage_image] =>[orig_patent_app_number] => 10159951 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6378306 [patent_doc_number] => 20020179112 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-12-05 [patent_title] => 'Method of cleaning electronic device' [patent_app_type] => new [patent_app_number] => 10/148461 [patent_app_country] => US [patent_app_date] => 2002-05-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 1999 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 21 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0179/20020179112.pdf [firstpage_image] =>[orig_patent_app_number] => 10148461 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1064791 [patent_doc_number] => 06846365 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-01-25 [patent_title] => 'Method and apparatus for acoustic suppression of cavitation' [patent_app_type] => utility [patent_app_number] => 10/157241 [patent_app_country] => US [patent_app_date] => 2002-05-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 5 [patent_no_of_words] => 2515 [patent_no_of_claims] => 1 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 99 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/846/06846365.pdf [firstpage_image] =>[orig_patent_app_number] => 10157241 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6499990 [patent_doc_number] => 20020134402 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-09-26 [patent_title] => 'Article produced by acoustic cavitation in a liquid insonification medium' [patent_app_type] => new [patent_app_number] => 10/153903 [patent_app_country] => US [patent_app_date] => 2002-05-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 8560 [patent_no_of_claims] => 29 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 95 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0134/20020134402.pdf [firstpage_image] =>[orig_patent_app_number] => 10153903 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5899628 [patent_doc_number] => 20020139395 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-10-03 [patent_title] => 'Method for cleaning ductwork' [patent_app_type] => new [patent_app_number] => 10/154934 [patent_app_country] => US [patent_app_date] => 2002-05-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2606 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 119 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0139/20020139395.pdf [firstpage_image] =>[orig_patent_app_number] => 10154934 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6832170 [patent_doc_number] => 20030159715 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-08-28 [patent_title] => 'Plasma chamber cleaning' [patent_app_type] => new [patent_app_number] => 10/133081 [patent_app_country] => US [patent_app_date] => 2002-04-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 2667 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 20 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0159/20030159715.pdf [firstpage_image] =>[orig_patent_app_number] => 10133081 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1066883 [patent_doc_number] => 06843257 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-01-18 [patent_title] => 'Wafer cleaning system' [patent_app_type] => utility [patent_app_number] => 10/133710 [patent_app_country] => US [patent_app_date] => 2002-04-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 15 [patent_no_of_words] => 3714 [patent_no_of_claims] => 38 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 64 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/843/06843257.pdf [firstpage_image] =>[orig_patent_app_number] => 10133710 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1061071 [patent_doc_number] => 06848455 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2005-02-01 [patent_title] => 'Method and apparatus for removing photoresist and post-etch residue from semiconductor substrates by in-situ generation of oxidizing species' [patent_app_type] => utility [patent_app_number] => 10/128899 [patent_app_country] => US [patent_app_date] => 2002-04-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 10 [patent_no_of_words] => 6089 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 74 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/848/06848455.pdf [firstpage_image] =>[orig_patent_app_number] => 10128899 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7618181 [patent_doc_number] => 06945258 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-09-20 [patent_title] => 'Substrate processing apparatus and method' [patent_app_type] => utility [patent_app_number] => 10/124596 [patent_app_country] => US [patent_app_date] => 2002-04-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 15 [patent_no_of_words] => 18941 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 153 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/945/06945258.pdf [firstpage_image] =>[orig_patent_app_number] => 10124596 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1095837 [patent_doc_number] => 06817369 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2004-11-16 [patent_title] => 'Device and method for cleaning substrates' [patent_app_type] => B1 [patent_app_number] => 10/111332 [patent_app_country] => US [patent_app_date] => 2002-04-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 6 [patent_no_of_words] => 6562 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/817/06817369.pdf [firstpage_image] =>[orig_patent_app_number] => 10111332 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5855603 [patent_doc_number] => 20020121290 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-09-05 [patent_title] => 'Method and apparatus for cleaning/drying hydrophobic wafers' [patent_app_type] => new [patent_app_number] => 10/124634 [patent_app_country] => US [patent_app_date] => 2002-04-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 7039 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 40 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0121/20020121290.pdf [firstpage_image] =>[orig_patent_app_number] => 10124634 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7613204 [patent_doc_number] => 06902629 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-06-07 [patent_title] => 'Method for cleaning a process chamber' [patent_app_type] => utility [patent_app_number] => 10/122481 [patent_app_country] => US [patent_app_date] => 2002-04-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 1 [patent_no_of_words] => 5713 [patent_no_of_claims] => 32 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 93 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/902/06902629.pdf [firstpage_image] =>[orig_patent_app_number] => 10122481 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 772484 [patent_doc_number] => 07001470 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-02-21 [patent_title] => 'Cleaning process for photomasks' [patent_app_type] => utility [patent_app_number] => 10/119009 [patent_app_country] => US [patent_app_date] => 2002-04-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 5 [patent_no_of_words] => 3414 [patent_no_of_claims] => 3 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 68 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/001/07001470.pdf [firstpage_image] =>[orig_patent_app_number] => 10119009 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6515236 [patent_doc_number] => 20020108631 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-08-15 [patent_title] => 'Single-transducer ACIM method and apparatus' [patent_app_type] => new [patent_app_number] => 10/118034 [patent_app_country] => US [patent_app_date] => 2002-04-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 8943 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 41 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0108/20020108631.pdf [firstpage_image] =>[orig_patent_app_number] => 10118034 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6863239 [patent_doc_number] => 20030188765 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-10-09 [patent_title] => 'Transition flow treatment process and apparatus' [patent_app_type] => new [patent_app_number] => 10/115449 [patent_app_country] => US [patent_app_date] => 2002-04-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 11189 [patent_no_of_claims] => 41 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 62 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0188/20030188765.pdf [firstpage_image] =>[orig_patent_app_number] => 10115449 [rel_patent_id] =>[rel_patent_doc_number] =>)