| Application number | Title of the application | Filing Date | Status |
|---|
Array
(
[id] => 8611020
[patent_doc_number] => 20130016332
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2013-01-17
[patent_title] => 'FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD'
[patent_app_type] => utility
[patent_app_number] => 13/542530
[patent_app_country] => US
[patent_app_date] => 2012-07-05
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 9
[patent_no_of_words] => 17225
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13542530
[rel_patent_id] =>[rel_patent_doc_number] =>) 13/542530 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Jul 4, 2012 | Issued |
Array
(
[id] => 10027364
[patent_doc_number] => 09069262
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2015-06-30
[patent_title] => 'Fluid handling structure including gas supply and gas recovery openings, lithographic apparatus and device manufacturing method'
[patent_app_type] => utility
[patent_app_number] => 13/542546
[patent_app_country] => US
[patent_app_date] => 2012-07-05
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 7
[patent_figures_cnt] => 12
[patent_no_of_words] => 17577
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 165
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13542546
[rel_patent_id] =>[rel_patent_doc_number] =>) 13/542546 | Fluid handling structure including gas supply and gas recovery openings, lithographic apparatus and device manufacturing method | Jul 4, 2012 | Issued |
Array
(
[id] => 9832990
[patent_doc_number] => 08941814
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2015-01-27
[patent_title] => 'Multiple-blade holding devices'
[patent_app_type] => utility
[patent_app_number] => 13/527206
[patent_app_country] => US
[patent_app_date] => 2012-06-19
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 14
[patent_figures_cnt] => 24
[patent_no_of_words] => 8136
[patent_no_of_claims] => 38
[patent_no_of_ind_claims] => 5
[patent_words_short_claim] => 73
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13527206
[rel_patent_id] =>[rel_patent_doc_number] =>) 13/527206 | Multiple-blade holding devices | Jun 18, 2012 | Issued |
Array
(
[id] => 8566710
[patent_doc_number] => 20120329281
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2012-12-27
[patent_title] => 'METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE'
[patent_app_type] => utility
[patent_app_number] => 13/525297
[patent_app_country] => US
[patent_app_date] => 2012-06-16
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 12
[patent_figures_cnt] => 12
[patent_no_of_words] => 9702
[patent_no_of_claims] => 16
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13525297
[rel_patent_id] =>[rel_patent_doc_number] =>) 13/525297 | Method of manufacturing semiconductor device using multiple immersion areas | Jun 15, 2012 | Issued |
Array
(
[id] => 9884042
[patent_doc_number] => 08970818
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2015-03-03
[patent_title] => 'Lithographic apparatus and component with repeating structure having increased thermal accommodation coefficient'
[patent_app_type] => utility
[patent_app_number] => 13/478888
[patent_app_country] => US
[patent_app_date] => 2012-05-23
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 7
[patent_figures_cnt] => 15
[patent_no_of_words] => 15229
[patent_no_of_claims] => 19
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 14
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13478888
[rel_patent_id] =>[rel_patent_doc_number] =>) 13/478888 | Lithographic apparatus and component with repeating structure having increased thermal accommodation coefficient | May 22, 2012 | Issued |
Array
(
[id] => 8507819
[patent_doc_number] => 20120307228
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2012-12-06
[patent_title] => 'POSITIONING APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD'
[patent_app_type] => utility
[patent_app_number] => 13/478916
[patent_app_country] => US
[patent_app_date] => 2012-05-23
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 6
[patent_no_of_words] => 4078
[patent_no_of_claims] => 8
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13478916
[rel_patent_id] =>[rel_patent_doc_number] =>) 13/478916 | Positioning apparatus, exposure apparatus and device manufacturing method | May 22, 2012 | Issued |
Array
(
[id] => 10568756
[patent_doc_number] => 09291921
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2016-03-22
[patent_title] => 'Detection apparatus, exposure apparatus, device fabrication method and filter to reduce a difference between detected intensity values of lights having different wavelength ranges'
[patent_app_type] => utility
[patent_app_number] => 13/478363
[patent_app_country] => US
[patent_app_date] => 2012-05-23
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 20
[patent_no_of_words] => 10753
[patent_no_of_claims] => 16
[patent_no_of_ind_claims] => 6
[patent_words_short_claim] => 275
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13478363
[rel_patent_id] =>[rel_patent_doc_number] =>) 13/478363 | Detection apparatus, exposure apparatus, device fabrication method and filter to reduce a difference between detected intensity values of lights having different wavelength ranges | May 22, 2012 | Issued |
Array
(
[id] => 10889228
[patent_doc_number] => 08913229
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2014-12-16
[patent_title] => 'Multi-stage system, a control method therefor, and a lithographic apparatus'
[patent_app_type] => utility
[patent_app_number] => 13/477669
[patent_app_country] => US
[patent_app_date] => 2012-05-22
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 10
[patent_no_of_words] => 6877
[patent_no_of_claims] => 15
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 299
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13477669
[rel_patent_id] =>[rel_patent_doc_number] =>) 13/477669 | Multi-stage system, a control method therefor, and a lithographic apparatus | May 21, 2012 | Issued |
Array
(
[id] => 10072033
[patent_doc_number] => 09110387
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2015-08-18
[patent_title] => 'Lithographic apparatus comprising a substrate table and a surface substrate actuator'
[patent_app_type] => utility
[patent_app_number] => 13/477748
[patent_app_country] => US
[patent_app_date] => 2012-05-22
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 7
[patent_no_of_words] => 5277
[patent_no_of_claims] => 15
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 229
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13477748
[rel_patent_id] =>[rel_patent_doc_number] =>) 13/477748 | Lithographic apparatus comprising a substrate table and a surface substrate actuator | May 21, 2012 | Issued |
Array
(
[id] => 8322386
[patent_doc_number] => 20120194790
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2012-08-02
[patent_title] => 'LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD'
[patent_app_type] => utility
[patent_app_number] => 13/446687
[patent_app_country] => US
[patent_app_date] => 2012-04-13
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 9
[patent_no_of_words] => 10249
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13446687
[rel_patent_id] =>[rel_patent_doc_number] =>) 13/446687 | Lithographic apparatus and device manufacturing method | Apr 12, 2012 | Issued |
Array
(
[id] => 9196403
[patent_doc_number] => 20130335718
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2013-12-19
[patent_title] => 'METHOD FOR MEASURING DISTORTION OF PROJECTION OBJECTIVE'
[patent_app_type] => utility
[patent_app_number] => 14/002917
[patent_app_country] => US
[patent_app_date] => 2012-03-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 4
[patent_no_of_words] => 6888
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14002917
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/002917 | Method for measuring distortion of projection objective | Mar 20, 2012 | Issued |
Array
(
[id] => 9851407
[patent_doc_number] => 08953147
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2015-02-10
[patent_title] => 'Spatial light modulation unit, illumination optical apparatus, exposure apparatus, and device manufacturing method'
[patent_app_type] => utility
[patent_app_number] => 13/409870
[patent_app_country] => US
[patent_app_date] => 2012-03-01
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 8
[patent_figures_cnt] => 11
[patent_no_of_words] => 9098
[patent_no_of_claims] => 11
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 167
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13409870
[rel_patent_id] =>[rel_patent_doc_number] =>) 13/409870 | Spatial light modulation unit, illumination optical apparatus, exposure apparatus, and device manufacturing method | Feb 29, 2012 | Issued |
Array
(
[id] => 9978811
[patent_doc_number] => 09025131
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2015-05-05
[patent_title] => 'Optical beam deflecting element, illumination system including same, and related method'
[patent_app_type] => utility
[patent_app_number] => 13/358158
[patent_app_country] => US
[patent_app_date] => 2012-01-25
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 16
[patent_figures_cnt] => 25
[patent_no_of_words] => 21898
[patent_no_of_claims] => 24
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 183
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13358158
[rel_patent_id] =>[rel_patent_doc_number] =>) 13/358158 | Optical beam deflecting element, illumination system including same, and related method | Jan 24, 2012 | Issued |
Array
(
[id] => 9382139
[patent_doc_number] => 20140085619
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2014-03-27
[patent_title] => 'Lithographic Apparatus, Spectral Purity Filter and Device Manufacturing Method'
[patent_app_type] => utility
[patent_app_number] => 14/002000
[patent_app_country] => US
[patent_app_date] => 2011-12-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 11
[patent_no_of_words] => 11620
[patent_no_of_claims] => 24
[patent_no_of_ind_claims] => 12
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14002000
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/002000 | Lithographic apparatus, spectral purity filter and device manufacturing method | Dec 20, 2011 | Issued |
Array
(
[id] => 11258064
[patent_doc_number] => 09482963
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2016-11-01
[patent_title] => 'Method of controlling a patterning device in a lithographic apparatus, device manufacturing method and lithographic apparatus'
[patent_app_type] => utility
[patent_app_number] => 13/885066
[patent_app_country] => US
[patent_app_date] => 2011-12-02
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 8
[patent_no_of_words] => 10611
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 198
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13885066
[rel_patent_id] =>[rel_patent_doc_number] =>) 13/885066 | Method of controlling a patterning device in a lithographic apparatus, device manufacturing method and lithographic apparatus | Dec 1, 2011 | Issued |
Array
(
[id] => 10595839
[patent_doc_number] => 09316926
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2016-04-19
[patent_title] => 'Lithographic apparatus and device manufacturing method'
[patent_app_type] => utility
[patent_app_number] => 13/885960
[patent_app_country] => US
[patent_app_date] => 2011-11-15
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 5
[patent_no_of_words] => 5400
[patent_no_of_claims] => 18
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 143
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13885960
[rel_patent_id] =>[rel_patent_doc_number] =>) 13/885960 | Lithographic apparatus and device manufacturing method | Nov 14, 2011 | Issued |
Array
(
[id] => 7786637
[patent_doc_number] => 20120048193
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2012-03-01
[patent_title] => 'LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD'
[patent_app_type] => utility
[patent_app_number] => 13/288855
[patent_app_country] => US
[patent_app_date] => 2011-11-03
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 7
[patent_figures_cnt] => 7
[patent_no_of_words] => 7133
[patent_no_of_claims] => 19
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0048/20120048193.pdf
[firstpage_image] =>[orig_patent_app_number] => 13288855
[rel_patent_id] =>[rel_patent_doc_number] =>) 13/288855 | Lithographic apparatus and device manufacturing method involving a resistivity sensor | Nov 2, 2011 | Issued |
Array
(
[id] => 9032725
[patent_doc_number] => 20130235363
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2013-09-12
[patent_title] => 'DEVICE-SPECIFIC MARKINGS'
[patent_app_type] => utility
[patent_app_number] => 13/882628
[patent_app_country] => US
[patent_app_date] => 2011-10-31
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 3
[patent_no_of_words] => 1925
[patent_no_of_claims] => 15
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13882628
[rel_patent_id] =>[rel_patent_doc_number] =>) 13/882628 | DEVICE-SPECIFIC MARKINGS | Oct 30, 2011 | Abandoned |
Array
(
[id] => 9509811
[patent_doc_number] => 20140146302
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2014-05-29
[patent_title] => 'DEVICE FOR HOMOTHETIC PROJECTION OF A PATTERN ONTO THE SURFACE OF A SAMPLE, AND LITHOGRAPHY METHOD USING SUCH A DEVICE'
[patent_app_type] => utility
[patent_app_number] => 13/881842
[patent_app_country] => US
[patent_app_date] => 2011-10-25
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 3
[patent_no_of_words] => 6691
[patent_no_of_claims] => 18
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13881842
[rel_patent_id] =>[rel_patent_doc_number] =>) 13/881842 | DEVICE FOR HOMOTHETIC PROJECTION OF A PATTERN ONTO THE SURFACE OF A SAMPLE, AND LITHOGRAPHY METHOD USING SUCH A DEVICE | Oct 24, 2011 | Abandoned |
Array
(
[id] => 9001656
[patent_doc_number] => 20130222781
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2013-08-29
[patent_title] => 'METHOD FOR DRIVING SPATIAL LIGHT MODULATOR, METHOD FOR FORMING PATTERN FOR EXPOSURE, EXPOSURE METHOD, AND EXPOSURE APPARATUS'
[patent_app_type] => utility
[patent_app_number] => 13/825948
[patent_app_country] => US
[patent_app_date] => 2011-09-26
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 14
[patent_figures_cnt] => 14
[patent_no_of_words] => 16314
[patent_no_of_claims] => 22
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13825948
[rel_patent_id] =>[rel_patent_doc_number] =>) 13/825948 | Method for driving spatial light modulator, method for forming pattern for exposure, exposure method, and exposure apparatus | Sep 25, 2011 | Issued |