Search

Kai J. Chang

Examiner (ID: 16715, Phone: (571)270-5448 , Office: P/2468 )

Most Active Art Unit
2468
Art Unit(s)
2468
Total Applications
459
Issued Applications
326
Pending Applications
38
Abandoned Applications
108

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 17164470 [patent_doc_number] => 11150564 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2021-10-19 [patent_title] => EUV wafer defect improvement and method of collecting nonconductive particles [patent_app_type] => utility [patent_app_number] => 17/037558 [patent_app_country] => US [patent_app_date] => 2020-09-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 20 [patent_no_of_words] => 6559 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 74 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17037558 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/037558
EUV wafer defect improvement and method of collecting nonconductive particles Sep 28, 2020 Issued
Array ( [id] => 18493175 [patent_doc_number] => 11698589 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-07-11 [patent_title] => Light source device, illuminating apparatus, exposing apparatus, and method for manufacturing article [patent_app_type] => utility [patent_app_number] => 17/031647 [patent_app_country] => US [patent_app_date] => 2020-09-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 17 [patent_no_of_words] => 6513 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 283 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17031647 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/031647
Light source device, illuminating apparatus, exposing apparatus, and method for manufacturing article Sep 23, 2020 Issued
Array ( [id] => 17150902 [patent_doc_number] => 11143974 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2021-10-12 [patent_title] => Cleaning method and cleaning system for reticle pod [patent_app_type] => utility [patent_app_number] => 17/021120 [patent_app_country] => US [patent_app_date] => 2020-09-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 11 [patent_no_of_words] => 5923 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 113 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17021120 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/021120
Cleaning method and cleaning system for reticle pod Sep 14, 2020 Issued
Array ( [id] => 17876958 [patent_doc_number] => 11448968 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-09-20 [patent_title] => Beam-forming and illuminating system for a lithography system, lithography system, and method [patent_app_type] => utility [patent_app_number] => 17/019931 [patent_app_country] => US [patent_app_date] => 2020-09-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 13 [patent_no_of_words] => 12034 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17019931 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/019931
Beam-forming and illuminating system for a lithography system, lithography system, and method Sep 13, 2020 Issued
Array ( [id] => 16630101 [patent_doc_number] => 20210048754 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-02-18 [patent_title] => MOVABLE BODY APPARATUS, MOVING METHOD, EXPOSURE APPARATUS, EXPOSURE METHOD, FLAT-PANEL DISPLAY MANUFACTURING METHOD, AND DEVICE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 17/019963 [patent_app_country] => US [patent_app_date] => 2020-09-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 42837 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => 0 [patent_words_short_claim] => 547 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17019963 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/019963
MOVABLE BODY APPARATUS, MOVING METHOD, EXPOSURE APPARATUS, EXPOSURE METHOD, FLAT-PANEL DISPLAY MANUFACTURING METHOD, AND DEVICE MANUFACTURING METHOD Sep 13, 2020 Abandoned
Array ( [id] => 17359853 [patent_doc_number] => 20220020649 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-01-20 [patent_title] => Wavelet System and Method for Ameliorating Misregistration and Asymmetry of Semiconductor Devices [patent_app_type] => utility [patent_app_number] => 17/044963 [patent_app_country] => US [patent_app_date] => 2020-09-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7944 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -21 [patent_words_short_claim] => 68 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17044963 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/044963
Wavelet system and method for ameliorating misregistration and asymmetry of semiconductor devices Sep 3, 2020 Issued
Array ( [id] => 17308633 [patent_doc_number] => 11209738 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-12-28 [patent_title] => Lithographic apparatus and device manufacturing method [patent_app_type] => utility [patent_app_number] => 17/012657 [patent_app_country] => US [patent_app_date] => 2020-09-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 13 [patent_no_of_words] => 11203 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 106 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17012657 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/012657
Lithographic apparatus and device manufacturing method Sep 3, 2020 Issued
Array ( [id] => 17076306 [patent_doc_number] => 11112701 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-09-07 [patent_title] => Control device, control method, lithographic apparatus, method of manufacturing article, and storage medium [patent_app_type] => utility [patent_app_number] => 17/011202 [patent_app_country] => US [patent_app_date] => 2020-09-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 20 [patent_no_of_words] => 6909 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17011202 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/011202
Control device, control method, lithographic apparatus, method of manufacturing article, and storage medium Sep 2, 2020 Issued
Array ( [id] => 19398275 [patent_doc_number] => 12072636 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-08-27 [patent_title] => Fluid handling system and lithographic apparatus [patent_app_type] => utility [patent_app_number] => 17/641206 [patent_app_country] => US [patent_app_date] => 2020-08-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 11 [patent_no_of_words] => 15632 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 234 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17641206 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/641206
Fluid handling system and lithographic apparatus Aug 25, 2020 Issued
Array ( [id] => 16971937 [patent_doc_number] => 11067907 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-07-20 [patent_title] => Target supply device, extreme ultraviolet light generating apparatus, and electronic device manufacturing method [patent_app_type] => utility [patent_app_number] => 16/987739 [patent_app_country] => US [patent_app_date] => 2020-08-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 24 [patent_figures_cnt] => 29 [patent_no_of_words] => 18545 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 182 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16987739 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/987739
Target supply device, extreme ultraviolet light generating apparatus, and electronic device manufacturing method Aug 6, 2020 Issued
Array ( [id] => 17499048 [patent_doc_number] => 11287751 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-03-29 [patent_title] => System and method for lens heating control [patent_app_type] => utility [patent_app_number] => 16/942575 [patent_app_country] => US [patent_app_date] => 2020-07-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 6177 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 166 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16942575 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/942575
System and method for lens heating control Jul 28, 2020 Issued
Array ( [id] => 16709360 [patent_doc_number] => 10959317 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2021-03-23 [patent_title] => Extreme ultraviolet light generating apparatus and method of manufacturing electronic device [patent_app_type] => utility [patent_app_number] => 16/938895 [patent_app_country] => US [patent_app_date] => 2020-07-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 14037 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 257 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16938895 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/938895
Extreme ultraviolet light generating apparatus and method of manufacturing electronic device Jul 23, 2020 Issued
Array ( [id] => 16423407 [patent_doc_number] => 20200348605 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-11-05 [patent_title] => Inspection Apparatus and Methods, Substrates Having Metrology Targets, Lithographic System and Device Manufacturing Method [patent_app_type] => utility [patent_app_number] => 16/931002 [patent_app_country] => US [patent_app_date] => 2020-07-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12405 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 108 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16931002 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/931002
Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method Jul 15, 2020 Issued
Array ( [id] => 17331100 [patent_doc_number] => 11221559 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-01-11 [patent_title] => Photomask [patent_app_type] => utility [patent_app_number] => 16/924569 [patent_app_country] => US [patent_app_date] => 2020-07-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 47 [patent_no_of_words] => 7879 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 148 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16924569 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/924569
Photomask Jul 8, 2020 Issued
Array ( [id] => 19917315 [patent_doc_number] => 12292682 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-05-06 [patent_title] => Method and device for producing micro- and/or nanostructures [patent_app_type] => utility [patent_app_number] => 18/011276 [patent_app_country] => US [patent_app_date] => 2020-07-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 12 [patent_no_of_words] => 9109 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 292 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18011276 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/011276
Method and device for producing micro- and/or nanostructures Jul 5, 2020 Issued
Array ( [id] => 17808921 [patent_doc_number] => 20220260756 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-08-18 [patent_title] => OXYGEN-LOSS RESISTANT TOP COATING FOR OPTICAL ELEMENTS [patent_app_type] => utility [patent_app_number] => 17/625426 [patent_app_country] => US [patent_app_date] => 2020-06-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6197 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -25 [patent_words_short_claim] => 21 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17625426 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/625426
Oxygen-loss resistant top coating for optical elements Jun 25, 2020 Issued
Array ( [id] => 20273339 [patent_doc_number] => 12443116 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-10-14 [patent_title] => Machine measurement metrology frame for a lithography system [patent_app_type] => utility [patent_app_number] => 18/000035 [patent_app_country] => US [patent_app_date] => 2020-06-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 0 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 106 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18000035 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/000035
Machine measurement metrology frame for a lithography system Jun 14, 2020 Issued
Array ( [id] => 17379471 [patent_doc_number] => 11237483 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-02-01 [patent_title] => Method and apparatus for controlling droplet in extreme ultraviolet light source [patent_app_type] => utility [patent_app_number] => 16/901552 [patent_app_country] => US [patent_app_date] => 2020-06-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 20 [patent_no_of_words] => 10453 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 128 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16901552 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/901552
Method and apparatus for controlling droplet in extreme ultraviolet light source Jun 14, 2020 Issued
Array ( [id] => 20273339 [patent_doc_number] => 12443116 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-10-14 [patent_title] => Machine measurement metrology frame for a lithography system [patent_app_type] => utility [patent_app_number] => 18/000035 [patent_app_country] => US [patent_app_date] => 2020-06-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 0 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 106 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18000035 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/000035
Machine measurement metrology frame for a lithography system Jun 14, 2020 Issued
Array ( [id] => 16330322 [patent_doc_number] => 20200301288 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-09-24 [patent_title] => RESERVING SPATIAL LIGHT MODULATOR SECTIONS TO ADDRESS FIELD NON-UNIFORMITIES [patent_app_type] => utility [patent_app_number] => 16/895971 [patent_app_country] => US [patent_app_date] => 2020-06-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4115 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 100 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16895971 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/895971
Reserving spatial light modulator sections to address field non-uniformities Jun 7, 2020 Issued
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