Kai J. Chang

Array ( [id] => 16918191 [patent_doc_number] => 20210191283 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-06-24 [patent_title] => PARTICLE PREVENTION METHOD IN LITHOGRAPHY EXPOSURE APPARATUS [patent_app_type] => utility [patent_app_number] => 16/885149 [patent_app_country] => US [patent_app_date] => 2020-05-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9945 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 46 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16885149 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17364639 [patent_doc_number] => 11231658 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-01-25 [patent_title] => Arrangement for an EUV lithography apparatus [patent_app_type] => utility [patent_app_number] => 16/882511 [patent_app_country] => US [patent_app_date] => 2020-05-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 21 [patent_no_of_words] => 6757 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 202 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16882511 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16299434 [patent_doc_number] => 20200285157 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-09-10 [patent_title] => METHOD AND APPARATUS TO DETERMINE A PATTERNING PROCESS PARAMETER [patent_app_type] => utility [patent_app_number] => 16/881991 [patent_app_country] => US [patent_app_date] => 2020-05-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 42284 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16881991 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18342639 [patent_doc_number] => 11640117 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-05-02 [patent_title] => Selection of regions of interest for measurement of misregistration and amelioration thereof [patent_app_type] => utility [patent_app_number] => 16/956209 [patent_app_country] => US [patent_app_date] => 2020-05-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 5049 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 189 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16956209 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17136145 [patent_doc_number] => 11137696 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-10-05 [patent_title] => Lithography apparatus and method of manufacturing article [patent_app_type] => utility [patent_app_number] => 16/877872 [patent_app_country] => US [patent_app_date] => 2020-05-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 43 [patent_no_of_words] => 11143 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 206 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16877872 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17422730 [patent_doc_number] => 11256183 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-02-22 [patent_title] => Detection method and system for pellicle membrane of photomask [patent_app_type] => utility [patent_app_number] => 16/876148 [patent_app_country] => US [patent_app_date] => 2020-05-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 4 [patent_no_of_words] => 3812 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 165 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16876148 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16285015 [patent_doc_number] => 20200278617 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-09-03 [patent_title] => RADIATION SOURCE FOR LITHOGRAPHY PROCESS [patent_app_type] => utility [patent_app_number] => 16/876442 [patent_app_country] => US [patent_app_date] => 2020-05-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8080 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16876442 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16469906 [patent_doc_number] => 20200371443 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-11-26 [patent_title] => EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE [patent_app_type] => utility [patent_app_number] => 16/876453 [patent_app_country] => US [patent_app_date] => 2020-05-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9000 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 199 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16876453 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16469909 [patent_doc_number] => 20200371446 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-11-26 [patent_title] => EXPOSURE APPARATUS AND EXPOSURE METHOD [patent_app_type] => utility [patent_app_number] => 15/930443 [patent_app_country] => US [patent_app_date] => 2020-05-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8452 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -4 [patent_words_short_claim] => 129 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15930443 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17736322 [patent_doc_number] => 20220221781 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-07-14 [patent_title] => PRINTING SYSTEM USING A PROJECTION DEVICE [patent_app_type] => utility [patent_app_number] => 17/611271 [patent_app_country] => US [patent_app_date] => 2020-05-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6985 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 108 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17611271 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17931502 [patent_doc_number] => 20220326627 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-13 [patent_title] => ACTUATOR ASSEMBLIES COMPRISING PIEZO ACTUATORS OR ELECTROSTRICTIVE ACTUATORS [patent_app_type] => utility [patent_app_number] => 17/608760 [patent_app_country] => US [patent_app_date] => 2020-05-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14422 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 125 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17608760 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16520498 [patent_doc_number] => 10871713 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-12-22 [patent_title] => Method of controlling reticle masking blade positioning to minimize impact on critical dimension uniformity and device for controlling reticle masking blade positioning [patent_app_type] => utility [patent_app_number] => 16/866188 [patent_app_country] => US [patent_app_date] => 2020-05-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 21 [patent_no_of_words] => 7369 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 117 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16866188 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16454300 [patent_doc_number] => 20200363726 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-11-19 [patent_title] => EXPOSURE APPARATUS, EXPOSURE METHOD, DECISION METHOD, AND ARTICLE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 16/864221 [patent_app_country] => US [patent_app_date] => 2020-05-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9729 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 170 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16864221 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17723370 [patent_doc_number] => 20220216092 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-07-07 [patent_title] => LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, AND NON-UNIFORM COATING METHOD [patent_app_type] => utility [patent_app_number] => 17/608238 [patent_app_country] => US [patent_app_date] => 2020-04-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9114 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 65 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17608238 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16224466 [patent_doc_number] => 20200249583 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-08-06 [patent_title] => EXPOSURE APPARATUS AND ARTICLE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 16/854152 [patent_app_country] => US [patent_app_date] => 2020-04-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5094 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 102 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16854152 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17706391 [patent_doc_number] => 20220206397 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-30 [patent_title] => LASER FOCUSSING MODULE [patent_app_type] => utility [patent_app_number] => 17/600763 [patent_app_country] => US [patent_app_date] => 2020-04-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12725 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17600763 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16801637 [patent_doc_number] => 10996574 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-05-04 [patent_title] => Substrate processing apparatus, article manufacturing method, substrate processing method, substrate processing system, management apparatus, and storage medium [patent_app_type] => utility [patent_app_number] => 16/830753 [patent_app_country] => US [patent_app_date] => 2020-03-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 8 [patent_no_of_words] => 5929 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 137 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16830753 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18917866 [patent_doc_number] => 11880144 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-01-23 [patent_title] => Object table, a stage apparatus and a lithographic apparatus [patent_app_type] => utility [patent_app_number] => 17/603812 [patent_app_country] => US [patent_app_date] => 2020-03-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 20 [patent_no_of_words] => 14292 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17603812 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16740254 [patent_doc_number] => 10965935 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-03-30 [patent_title] => Calibration systems usable for distortion characterization in cameras [patent_app_type] => utility [patent_app_number] => 16/809869 [patent_app_country] => US [patent_app_date] => 2020-03-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 31 [patent_figures_cnt] => 34 [patent_no_of_words] => 16184 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 164 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16809869 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16949824 [patent_doc_number] => 20210208515 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-08 [patent_title] => APPARATUS AND METHOD FOR PROCESSING A SUBSTRATE USING THE SAME [patent_app_type] => utility [patent_app_number] => 16/808392 [patent_app_country] => US [patent_app_date] => 2020-03-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6130 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16808392 [rel_patent_id] =>[rel_patent_doc_number] =>)