Search

Kai J. Chang

Examiner (ID: 16715, Phone: (571)270-5448 , Office: P/2468 )

Most Active Art Unit
2468
Art Unit(s)
2468
Total Applications
459
Issued Applications
326
Pending Applications
38
Abandoned Applications
108

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 16208438 [patent_doc_number] => 20200241428 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-07-30 [patent_title] => Scaling Metric for Quantifying Metrology Sensitivity to Process Variation [patent_app_type] => utility [patent_app_number] => 16/741574 [patent_app_country] => US [patent_app_date] => 2020-01-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9852 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -21 [patent_words_short_claim] => 158 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16741574 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/741574
Scaling metric for quantifying metrology sensitivity to process variation Jan 12, 2020 Issued
Array ( [id] => 15902049 [patent_doc_number] => 20200150544 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-05-14 [patent_title] => OPTICAL ELEMENT FOR THE BEAM GUIDANCE OF IMAGING LIGHT IN PROJECTION LITHOGRAPHY [patent_app_type] => utility [patent_app_number] => 16/735883 [patent_app_country] => US [patent_app_date] => 2020-01-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7968 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 44 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16735883 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/735883
Optical element for the beam guidance of imaging light in projection lithography Jan 6, 2020 Issued
Array ( [id] => 15869847 [patent_doc_number] => 20200142327 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-05-07 [patent_title] => METHOD FOR REMOVING A CONTAMINATION LAYER BY AN ATOMIC LAYER ETCHING PROCESS [patent_app_type] => utility [patent_app_number] => 16/734650 [patent_app_country] => US [patent_app_date] => 2020-01-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10248 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -20 [patent_words_short_claim] => 118 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16734650 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/734650
Method for removing a contamination layer by an atomic layer etching process Jan 5, 2020 Issued
Array ( [id] => 16520502 [patent_doc_number] => 10871717 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-12-22 [patent_title] => Optical system for a projection exposure apparatus [patent_app_type] => utility [patent_app_number] => 16/731265 [patent_app_country] => US [patent_app_date] => 2019-12-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 16 [patent_no_of_words] => 11196 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 219 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16731265 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/731265
Optical system for a projection exposure apparatus Dec 30, 2019 Issued
Array ( [id] => 16159859 [patent_doc_number] => 20200218162 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-07-09 [patent_title] => EXPOSURE APPARATUS, METHOD FOR CONTROLLING THE SAME AND ARTICLE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 16/725593 [patent_app_country] => US [patent_app_date] => 2019-12-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3792 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 110 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16725593 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/725593
Exposure apparatus, method for controlling the same and article manufacturing method Dec 22, 2019 Issued
Array ( [id] => 15811129 [patent_doc_number] => 20200128707 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-04-23 [patent_title] => MARK RECOGNITION DEVICES, MARK RECOGNITION METHODS AND PSEUDO PRESSURE ALIGNMENT DEVICES [patent_app_type] => utility [patent_app_number] => 16/718371 [patent_app_country] => US [patent_app_date] => 2019-12-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7308 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 110 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16718371 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/718371
Mark recognition devices, mark recognition methods and pseudo pressure alignment devices Dec 17, 2019 Issued
Array ( [id] => 17401264 [patent_doc_number] => 20220043354 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-02-10 [patent_title] => APPARATUS AND METHOD FOR OPTICALLY CHARACTERIZING OR PROCESSING AN OBJECT, AND OBJECT TRANSPORT UNIT [patent_app_type] => utility [patent_app_number] => 17/309642 [patent_app_country] => US [patent_app_date] => 2019-12-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 24827 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => 0 [patent_words_short_claim] => 21 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17309642 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/309642
Apparatus and method for optically processing an object Dec 11, 2019 Issued
Array ( [id] => 15684423 [patent_doc_number] => 20200096875 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-03-26 [patent_title] => PATTERNING DEVICE [patent_app_type] => utility [patent_app_number] => 16/698868 [patent_app_country] => US [patent_app_date] => 2019-11-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7545 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16698868 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/698868
Patterning device Nov 26, 2019 Issued
Array ( [id] => 17223101 [patent_doc_number] => 11175597 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-11-16 [patent_title] => Pellicle structure for lithography mask [patent_app_type] => utility [patent_app_number] => 16/697138 [patent_app_country] => US [patent_app_date] => 2019-11-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 35 [patent_no_of_words] => 7579 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 76 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16697138 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/697138
Pellicle structure for lithography mask Nov 25, 2019 Issued
Array ( [id] => 18030263 [patent_doc_number] => 11513446 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-11-29 [patent_title] => Adaptive alignment [patent_app_type] => utility [patent_app_number] => 17/297691 [patent_app_country] => US [patent_app_date] => 2019-11-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 11 [patent_no_of_words] => 9826 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 205 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17297691 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/297691
Adaptive alignment Nov 25, 2019 Issued
Array ( [id] => 16005019 [patent_doc_number] => 20200178380 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-04 [patent_title] => METHOD AND DEVICE FOR MEASURING CONTAMINATION IN EUV SOURCE [patent_app_type] => utility [patent_app_number] => 16/697149 [patent_app_country] => US [patent_app_date] => 2019-11-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6850 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 40 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16697149 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/697149
Method and device for measuring contamination in EUV source Nov 25, 2019 Issued
Array ( [id] => 15653191 [patent_doc_number] => 20200089126 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-03-19 [patent_title] => POSITION MEASUREMENT OF OPTICAL ELEMENTS IN A LITHOGRAPHIC APPARATUS [patent_app_type] => utility [patent_app_number] => 16/688598 [patent_app_country] => US [patent_app_date] => 2019-11-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 24034 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 134 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16688598 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/688598
Position measurement of optical elements in a lithographic apparatus Nov 18, 2019 Issued
Array ( [id] => 16493478 [patent_doc_number] => 10859510 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-12-08 [patent_title] => Robotic sensor system for measuring parameters of a structure [patent_app_type] => utility [patent_app_number] => 16/684866 [patent_app_country] => US [patent_app_date] => 2019-11-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 6 [patent_no_of_words] => 2451 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 166 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16684866 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/684866
Robotic sensor system for measuring parameters of a structure Nov 14, 2019 Issued
Array ( [id] => 17135720 [patent_doc_number] => 11137270 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-10-05 [patent_title] => Spatial modulation device [patent_app_type] => utility [patent_app_number] => 16/683376 [patent_app_country] => US [patent_app_date] => 2019-11-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 8 [patent_no_of_words] => 5428 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 129 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16683376 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/683376
Spatial modulation device Nov 13, 2019 Issued
Array ( [id] => 16114283 [patent_doc_number] => 20200209164 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-07-02 [patent_title] => WAFER BONDING METHOD, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND APPARATUS THEREFOR [patent_app_type] => utility [patent_app_number] => 16/678226 [patent_app_country] => US [patent_app_date] => 2019-11-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6822 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16678226 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/678226
Wafer bonding method, method for manufacturing semiconductor device, and apparatus therefor Nov 7, 2019 Issued
Array ( [id] => 15560667 [patent_doc_number] => 20200064745 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-02-27 [patent_title] => METHODS AND APPARATUS TO CONTROL GRAYSCALE PHOTOLITHOGRAPHY [patent_app_type] => utility [patent_app_number] => 16/672787 [patent_app_country] => US [patent_app_date] => 2019-11-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6042 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 57 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16672787 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/672787
METHODS AND APPARATUS TO CONTROL GRAYSCALE PHOTOLITHOGRAPHY Nov 3, 2019 Abandoned
Array ( [id] => 17371767 [patent_doc_number] => 20220026819 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-01-27 [patent_title] => LITHOGRAPHY SUPPORT CLEANING WITH CLEANING SUBSTRATE HAVING CONTROLLED GEOMETRY AND COMPOSITION [patent_app_type] => utility [patent_app_number] => 17/291322 [patent_app_country] => US [patent_app_date] => 2019-10-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8426 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -23 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17291322 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/291322
Lithography support cleaning with cleaning substrate having controlled geometry and composition Oct 30, 2019 Issued
Array ( [id] => 16643269 [patent_doc_number] => 10921113 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2021-02-16 [patent_title] => System and method for optical measurements in a rotary machine [patent_app_type] => utility [patent_app_number] => 16/669466 [patent_app_country] => US [patent_app_date] => 2019-10-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 18 [patent_no_of_words] => 18644 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 66 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16669466 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/669466
System and method for optical measurements in a rotary machine Oct 29, 2019 Issued
Array ( [id] => 16416192 [patent_doc_number] => 10824080 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-11-03 [patent_title] => Method to reduce native defect printability [patent_app_type] => utility [patent_app_number] => 16/663214 [patent_app_country] => US [patent_app_date] => 2019-10-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 7467 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 68 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16663214 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/663214
Method to reduce native defect printability Oct 23, 2019 Issued
Array ( [id] => 16159865 [patent_doc_number] => 20200218165 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-07-09 [patent_title] => EXPOSURE APPARATUS AND METHOD OF DETECTING ALIGNMENT ERROR OF RETICLE [patent_app_type] => utility [patent_app_number] => 16/660733 [patent_app_country] => US [patent_app_date] => 2019-10-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6133 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 117 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16660733 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/660733
EXPOSURE APPARATUS AND METHOD OF DETECTING ALIGNMENT ERROR OF RETICLE Oct 21, 2019 Abandoned
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