Search

Kai J. Chang

Examiner (ID: 16715, Phone: (571)270-5448 , Office: P/2468 )

Most Active Art Unit
2468
Art Unit(s)
2468
Total Applications
459
Issued Applications
326
Pending Applications
38
Abandoned Applications
108

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 16744715 [patent_doc_number] => 10969697 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2021-04-06 [patent_title] => Overlay metrology tool and methods of performing overlay measurements [patent_app_type] => utility [patent_app_number] => 16/657172 [patent_app_country] => US [patent_app_date] => 2019-10-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 10 [patent_no_of_words] => 13376 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 100 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16657172 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/657172
Overlay metrology tool and methods of performing overlay measurements Oct 17, 2019 Issued
Array ( [id] => 15772167 [patent_doc_number] => 20200117101 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-04-16 [patent_title] => Methods and Patterning Devices and Apparatuses for Measuring Focus Performance of a Lithographic Apparatus, Device Manufacturing Method [patent_app_type] => utility [patent_app_number] => 16/599215 [patent_app_country] => US [patent_app_date] => 2019-10-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 16812 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16599215 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/599215
Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method Oct 10, 2019 Issued
Array ( [id] => 17216066 [patent_doc_number] => 20210349404 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-11 [patent_title] => METHOD TO CREATE THE IDEAL SOURCE SPECTRA WITH SOURCE AND MASK OPTIMIZATION [patent_app_type] => utility [patent_app_number] => 17/283056 [patent_app_country] => US [patent_app_date] => 2019-10-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 16487 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17283056 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/283056
METHOD TO CREATE THE IDEAL SOURCE SPECTRA WITH SOURCE AND MASK OPTIMIZATION Oct 10, 2019 Pending
Array ( [id] => 15593437 [patent_doc_number] => 20200073253 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-03-05 [patent_title] => RESERVING SPATIAL LIGHT MODULATOR SECTIONS TO ADDRESS FIELD NON-UNIFORMITIES [patent_app_type] => utility [patent_app_number] => 16/597718 [patent_app_country] => US [patent_app_date] => 2019-10-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4099 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16597718 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/597718
Reserving spatial light modulator sections to address field non-uniformities Oct 8, 2019 Issued
Array ( [id] => 19167075 [patent_doc_number] => 11982976 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-05-14 [patent_title] => Hologram transcription apparatus [patent_app_type] => utility [patent_app_number] => 17/283654 [patent_app_country] => US [patent_app_date] => 2019-10-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 6709 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 90 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17283654 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/283654
Hologram transcription apparatus Oct 7, 2019 Issued
Array ( [id] => 16501138 [patent_doc_number] => 10866519 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2020-12-15 [patent_title] => Reticle-masking structure, extreme ultraviolet apparatus, and method of forming the same [patent_app_type] => utility [patent_app_number] => 16/589616 [patent_app_country] => US [patent_app_date] => 2019-10-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 25 [patent_figures_cnt] => 25 [patent_no_of_words] => 7653 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 60 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16589616 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/589616
Reticle-masking structure, extreme ultraviolet apparatus, and method of forming the same Sep 30, 2019 Issued
Array ( [id] => 15834653 [patent_doc_number] => 20200132608 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-04-30 [patent_title] => SCANNING DIFFERENTIAL INTERFERENCE CONTRAST IN AN IMAGING SYSTEM DESIGN [patent_app_type] => utility [patent_app_number] => 16/584370 [patent_app_country] => US [patent_app_date] => 2019-09-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6363 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 178 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16584370 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/584370
Scanning differential interference contrast in an imaging system design Sep 25, 2019 Issued
Array ( [id] => 17230316 [patent_doc_number] => 20210356873 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-18 [patent_title] => METROLOGY METHOD AND APPARATUS THEREFOR [patent_app_type] => utility [patent_app_number] => 17/277583 [patent_app_country] => US [patent_app_date] => 2019-09-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 1771 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 11 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17277583 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/277583
METROLOGY METHOD AND APPARATUS THEREFOR Sep 18, 2019 Pending
Array ( [id] => 17230316 [patent_doc_number] => 20210356873 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-18 [patent_title] => METROLOGY METHOD AND APPARATUS THEREFOR [patent_app_type] => utility [patent_app_number] => 17/277583 [patent_app_country] => US [patent_app_date] => 2019-09-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 1771 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 11 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17277583 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/277583
METROLOGY METHOD AND APPARATUS THEREFOR Sep 18, 2019 Pending
Array ( [id] => 16520506 [patent_doc_number] => 10871721 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-12-22 [patent_title] => Mask blank for lithography and method of manufacturing the same [patent_app_type] => utility [patent_app_number] => 16/573861 [patent_app_country] => US [patent_app_date] => 2019-09-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 12 [patent_no_of_words] => 5963 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 62 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16573861 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/573861
Mask blank for lithography and method of manufacturing the same Sep 16, 2019 Issued
Array ( [id] => 15348533 [patent_doc_number] => 20200012158 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-01-09 [patent_title] => LIGHT IRRADIATION DEVICE [patent_app_type] => utility [patent_app_number] => 16/572213 [patent_app_country] => US [patent_app_date] => 2019-09-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8300 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -3 [patent_words_short_claim] => 172 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16572213 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/572213
LIGHT IRRADIATION DEVICE Sep 15, 2019 Abandoned
Array ( [id] => 16477306 [patent_doc_number] => 10852245 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-12-01 [patent_title] => Information processing apparatus, information processing method, and storage medium [patent_app_type] => utility [patent_app_number] => 16/572175 [patent_app_country] => US [patent_app_date] => 2019-09-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 27 [patent_no_of_words] => 12697 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16572175 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/572175
Information processing apparatus, information processing method, and storage medium Sep 15, 2019 Issued
Array ( [id] => 16520242 [patent_doc_number] => 10871456 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-12-22 [patent_title] => Semiconductor inspection system and semiconductor inspection apparatus [patent_app_type] => utility [patent_app_number] => 16/562502 [patent_app_country] => US [patent_app_date] => 2019-09-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 13 [patent_no_of_words] => 5010 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 244 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16562502 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/562502
Semiconductor inspection system and semiconductor inspection apparatus Sep 5, 2019 Issued
Array ( [id] => 18370342 [patent_doc_number] => 11650513 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-05-16 [patent_title] => Apparatus and method for measuring a position of a mark [patent_app_type] => utility [patent_app_number] => 17/280711 [patent_app_country] => US [patent_app_date] => 2019-09-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 12689 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 126 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17280711 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/280711
Apparatus and method for measuring a position of a mark Sep 4, 2019 Issued
Array ( [id] => 16430631 [patent_doc_number] => 10830710 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-11-10 [patent_title] => Method and device for inspecting a semiconductor device [patent_app_type] => utility [patent_app_number] => 16/558803 [patent_app_country] => US [patent_app_date] => 2019-09-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 16 [patent_no_of_words] => 3267 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 90 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16558803 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/558803
Method and device for inspecting a semiconductor device Sep 2, 2019 Issued
Array ( [id] => 15327667 [patent_doc_number] => 20200004163 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-01-02 [patent_title] => LITHOGRAPHIC METHOD AND APPARATUS [patent_app_type] => utility [patent_app_number] => 16/558265 [patent_app_country] => US [patent_app_date] => 2019-09-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 17884 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16558265 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/558265
Lithographic method and apparatus Sep 1, 2019 Issued
Array ( [id] => 16431028 [patent_doc_number] => 10831107 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-11-10 [patent_title] => Method for of measuring a parameter relating to a structure formed using a lithographic process [patent_app_type] => utility [patent_app_number] => 16/556685 [patent_app_country] => US [patent_app_date] => 2019-08-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 16 [patent_no_of_words] => 8813 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16556685 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/556685
Method for of measuring a parameter relating to a structure formed using a lithographic process Aug 29, 2019 Issued
Array ( [id] => 16744717 [patent_doc_number] => 10969699 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-04-06 [patent_title] => Projection lighting system for semiconductor lithography with an improved heat transfer [patent_app_type] => utility [patent_app_number] => 16/541579 [patent_app_country] => US [patent_app_date] => 2019-08-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 12 [patent_no_of_words] => 4514 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 184 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16541579 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/541579
Projection lighting system for semiconductor lithography with an improved heat transfer Aug 14, 2019 Issued
Array ( [id] => 15530155 [patent_doc_number] => 20200057383 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-02-20 [patent_title] => METHOD FOR DETECTING EUV PELLICLE RUPTURE [patent_app_type] => utility [patent_app_number] => 16/540874 [patent_app_country] => US [patent_app_date] => 2019-08-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8064 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 62 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16540874 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/540874
Method for detecting EUV pellicle rupture Aug 13, 2019 Issued
Array ( [id] => 17053994 [patent_doc_number] => 20210263428 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-26 [patent_title] => MODEL CALIBRATION AND GUIDED METROLOGY BASED ON SMART SAMPLING [patent_app_type] => utility [patent_app_number] => 17/261293 [patent_app_country] => US [patent_app_date] => 2019-07-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 24142 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 57 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17261293 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/261293
Model calibration and guided metrology based on smart sampling Jul 23, 2019 Issued
Menu