Search

Kai J. Chang

Examiner (ID: 16715, Phone: (571)270-5448 , Office: P/2468 )

Most Active Art Unit
2468
Art Unit(s)
2468
Total Applications
459
Issued Applications
326
Pending Applications
38
Abandoned Applications
108

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 17961737 [patent_doc_number] => 20220342318 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-27 [patent_title] => LENS ADJUSTMENT FOR AN EDGE EXPOSURE TOOL [patent_app_type] => utility [patent_app_number] => 17/809566 [patent_app_country] => US [patent_app_date] => 2022-06-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13185 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 63 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17809566 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/809566
Lens adjustment for an edge exposure tool Jun 28, 2022 Issued
Array ( [id] => 18095056 [patent_doc_number] => 20220413397 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-12-29 [patent_title] => SUPPORT UNIT, BAKE APPARATUS AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME [patent_app_type] => utility [patent_app_number] => 17/848841 [patent_app_country] => US [patent_app_date] => 2022-06-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10486 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 69 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17848841 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/848841
Support unit, bake apparatus and substrate treating apparatus including the same Jun 23, 2022 Issued
Array ( [id] => 17931498 [patent_doc_number] => 20220326623 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-13 [patent_title] => METHODS AND APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING TO AN INDUSTRIAL PROCESS [patent_app_type] => utility [patent_app_number] => 17/836099 [patent_app_country] => US [patent_app_date] => 2022-06-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 25599 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17836099 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/836099
Methods and apparatus for obtaining diagnostic information relating to an industrial process Jun 8, 2022 Issued
Array ( [id] => 20273331 [patent_doc_number] => 12443108 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-10-14 [patent_title] => Substrate treating apparatus [patent_app_type] => utility [patent_app_number] => 17/831935 [patent_app_country] => US [patent_app_date] => 2022-06-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 11 [patent_no_of_words] => 4636 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 398 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17831935 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/831935
Substrate treating apparatus Jun 2, 2022 Issued
Array ( [id] => 20273331 [patent_doc_number] => 12443108 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-10-14 [patent_title] => Substrate treating apparatus [patent_app_type] => utility [patent_app_number] => 17/831935 [patent_app_country] => US [patent_app_date] => 2022-06-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 11 [patent_no_of_words] => 4636 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 398 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17831935 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/831935
Substrate treating apparatus Jun 2, 2022 Issued
Array ( [id] => 17763040 [patent_doc_number] => 20220236652 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-07-28 [patent_title] => OPTICAL SYSTEM [patent_app_type] => utility [patent_app_number] => 17/718868 [patent_app_country] => US [patent_app_date] => 2022-04-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9351 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -26 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17718868 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/718868
Optical system Apr 11, 2022 Issued
Array ( [id] => 17763040 [patent_doc_number] => 20220236652 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-07-28 [patent_title] => OPTICAL SYSTEM [patent_app_type] => utility [patent_app_number] => 17/718868 [patent_app_country] => US [patent_app_date] => 2022-04-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9351 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -26 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17718868 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/718868
Optical system Apr 11, 2022 Issued
Array ( [id] => 19189473 [patent_doc_number] => 20240168386 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-05-23 [patent_title] => DRAWING APPARATUS AND DRAWING METHOD [patent_app_type] => utility [patent_app_number] => 18/552906 [patent_app_country] => US [patent_app_date] => 2022-04-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9275 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 200 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18552906 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/552906
DRAWING APPARATUS AND DRAWING METHOD Apr 10, 2022 Pending
Array ( [id] => 19327291 [patent_doc_number] => 12044973 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-07-23 [patent_title] => Substrate processing apparatus and substrate processing method [patent_app_type] => utility [patent_app_number] => 17/716207 [patent_app_country] => US [patent_app_date] => 2022-04-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 7 [patent_no_of_words] => 6046 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 286 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17716207 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/716207
Substrate processing apparatus and substrate processing method Apr 7, 2022 Issued
Array ( [id] => 19250496 [patent_doc_number] => 20240201486 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-06-20 [patent_title] => CONTROLLING ABERRATION IN AN OPTICAL SYSTEM, A METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF [patent_app_type] => utility [patent_app_number] => 18/556801 [patent_app_country] => US [patent_app_date] => 2022-03-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10544 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 50 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18556801 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/556801
CONTROLLING ABERRATION IN AN OPTICAL SYSTEM, A METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF Mar 30, 2022 Pending
Array ( [id] => 19375197 [patent_doc_number] => 12066760 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-08-20 [patent_title] => Reticle-masking structure, extreme ultra violet apparatus, and method of forming the same [patent_app_type] => utility [patent_app_number] => 17/704309 [patent_app_country] => US [patent_app_date] => 2022-03-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 25 [patent_figures_cnt] => 25 [patent_no_of_words] => 7676 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 63 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17704309 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/704309
Reticle-masking structure, extreme ultra violet apparatus, and method of forming the same Mar 24, 2022 Issued
Array ( [id] => 17689867 [patent_doc_number] => 20220197160 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-23 [patent_title] => RADIATION SOURCE FOR LITHOGRAPHY PROCESS [patent_app_type] => utility [patent_app_number] => 17/693703 [patent_app_country] => US [patent_app_date] => 2022-03-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8041 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 64 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17693703 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/693703
Radiation source for lithography process Mar 13, 2022 Issued
Array ( [id] => 17689860 [patent_doc_number] => 20220197153 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-23 [patent_title] => METHOD AND APPARATUS FOR DIFFRACTION-BASED OVERLAY MEASUREMENT [patent_app_type] => utility [patent_app_number] => 17/694408 [patent_app_country] => US [patent_app_date] => 2022-03-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12796 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 170 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17694408 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/694408
Method and apparatus for diffraction-based overlay measurement Mar 13, 2022 Issued
Array ( [id] => 19092387 [patent_doc_number] => 11953836 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-04-09 [patent_title] => Transport system having a magnetically levitated transportation stage [patent_app_type] => utility [patent_app_number] => 17/653661 [patent_app_country] => US [patent_app_date] => 2022-03-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 19 [patent_no_of_words] => 8058 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 75 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17653661 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/653661
Transport system having a magnetically levitated transportation stage Mar 6, 2022 Issued
Array ( [id] => 20159651 [patent_doc_number] => 12386274 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-08-12 [patent_title] => Stage device, lithography apparatus, and article manufacturing method [patent_app_type] => utility [patent_app_number] => 17/684541 [patent_app_country] => US [patent_app_date] => 2022-03-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 10 [patent_no_of_words] => 4685 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 165 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17684541 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/684541
Stage device, lithography apparatus, and article manufacturing method Mar 1, 2022 Issued
Array ( [id] => 20159651 [patent_doc_number] => 12386274 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-08-12 [patent_title] => Stage device, lithography apparatus, and article manufacturing method [patent_app_type] => utility [patent_app_number] => 17/684541 [patent_app_country] => US [patent_app_date] => 2022-03-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 10 [patent_no_of_words] => 4685 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 165 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17684541 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/684541
Stage device, lithography apparatus, and article manufacturing method Mar 1, 2022 Issued
Array ( [id] => 17658864 [patent_doc_number] => 20220179329 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-09 [patent_title] => OPTICAL ELEMENT AND EUV LITHOGRAPHIC SYSTEM [patent_app_type] => utility [patent_app_number] => 17/681876 [patent_app_country] => US [patent_app_date] => 2022-02-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6248 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 114 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17681876 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/681876
OPTICAL ELEMENT AND EUV LITHOGRAPHIC SYSTEM Feb 27, 2022 Abandoned
Array ( [id] => 19174134 [patent_doc_number] => 20240160108 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-05-16 [patent_title] => LITHOGRAPHIC APPARATUS AND METHOD FOR ILLUMINATION UNIFORMITY CORRECTION [patent_app_type] => utility [patent_app_number] => 18/282246 [patent_app_country] => US [patent_app_date] => 2022-02-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10548 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18282246 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/282246
Lithographic apparatus and method for illumination uniformity correction Feb 23, 2022 Issued
Array ( [id] => 19219517 [patent_doc_number] => 20240184221 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-06-06 [patent_title] => ALIGNMENT METHOD AND ASSOCIATED ALIGNMENT AND LITHOGRAPHIC APPARATUSES [patent_app_type] => utility [patent_app_number] => 18/279121 [patent_app_country] => US [patent_app_date] => 2022-02-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7868 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18279121 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/279121
ALIGNMENT METHOD AND ASSOCIATED ALIGNMENT AND LITHOGRAPHIC APPARATUSES Feb 17, 2022 Pending
Array ( [id] => 19219517 [patent_doc_number] => 20240184221 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-06-06 [patent_title] => ALIGNMENT METHOD AND ASSOCIATED ALIGNMENT AND LITHOGRAPHIC APPARATUSES [patent_app_type] => utility [patent_app_number] => 18/279121 [patent_app_country] => US [patent_app_date] => 2022-02-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7868 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18279121 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/279121
ALIGNMENT METHOD AND ASSOCIATED ALIGNMENT AND LITHOGRAPHIC APPARATUSES Feb 17, 2022 Pending
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