Search

Kai J. Chang

Examiner (ID: 16715, Phone: (571)270-5448 , Office: P/2468 )

Most Active Art Unit
2468
Art Unit(s)
2468
Total Applications
459
Issued Applications
326
Pending Applications
38
Abandoned Applications
108

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 19475349 [patent_doc_number] => 12105433 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-10-01 [patent_title] => Imaging overlay targets using moire elements and rotational symmetry arrangements [patent_app_type] => utility [patent_app_number] => 17/675912 [patent_app_country] => US [patent_app_date] => 2022-02-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 21 [patent_figures_cnt] => 21 [patent_no_of_words] => 13073 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 438 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17675912 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/675912
Imaging overlay targets using moire elements and rotational symmetry arrangements Feb 17, 2022 Issued
Array ( [id] => 19475349 [patent_doc_number] => 12105433 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-10-01 [patent_title] => Imaging overlay targets using moire elements and rotational symmetry arrangements [patent_app_type] => utility [patent_app_number] => 17/675912 [patent_app_country] => US [patent_app_date] => 2022-02-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 21 [patent_figures_cnt] => 21 [patent_no_of_words] => 13073 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 438 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17675912 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/675912
Imaging overlay targets using moire elements and rotational symmetry arrangements Feb 17, 2022 Issued
Array ( [id] => 18917864 [patent_doc_number] => 11880141 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-01-23 [patent_title] => Method of measuring misregistration in the manufacture of topographic semiconductor device wafers [patent_app_type] => utility [patent_app_number] => 17/673131 [patent_app_country] => US [patent_app_date] => 2022-02-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 8849 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 173 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17673131 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/673131
Method of measuring misregistration in the manufacture of topographic semiconductor device wafers Feb 15, 2022 Issued
Array ( [id] => 17613410 [patent_doc_number] => 20220155690 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-19 [patent_title] => METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE [patent_app_type] => utility [patent_app_number] => 17/589578 [patent_app_country] => US [patent_app_date] => 2022-01-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11235 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 87 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17589578 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/589578
Method and apparatus for controlling droplet in extreme ultraviolet light source Jan 30, 2022 Issued
Array ( [id] => 17580665 [patent_doc_number] => 20220137520 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-05 [patent_title] => EXPOSURE METHOD AND EXPOSURE DEVICE [patent_app_type] => utility [patent_app_number] => 17/580778 [patent_app_country] => US [patent_app_date] => 2022-01-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4422 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 216 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17580778 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/580778
EXPOSURE METHOD AND EXPOSURE DEVICE Jan 20, 2022 Abandoned
Array ( [id] => 20109745 [patent_doc_number] => 12360460 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-07-15 [patent_title] => System and method for selecting photolithography processes [patent_app_type] => utility [patent_app_number] => 17/566563 [patent_app_country] => US [patent_app_date] => 2021-12-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 14 [patent_no_of_words] => 3623 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 174 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17566563 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/566563
System and method for selecting photolithography processes Dec 29, 2021 Issued
Array ( [id] => 18888734 [patent_doc_number] => 11867501 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-01-09 [patent_title] => Integrated calibration tool for optical instrument entrance pupil 6-axis spatial allocation [patent_app_type] => utility [patent_app_number] => 17/563873 [patent_app_country] => US [patent_app_date] => 2021-12-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 5 [patent_no_of_words] => 3593 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 231 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17563873 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/563873
Integrated calibration tool for optical instrument entrance pupil 6-axis spatial allocation Dec 27, 2021 Issued
Array ( [id] => 17535032 [patent_doc_number] => 20220113641 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-04-14 [patent_title] => LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 17/560841 [patent_app_country] => US [patent_app_date] => 2021-12-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11223 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 79 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17560841 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/560841
Lithographic apparatus and device manufacturing method Dec 22, 2021 Issued
Array ( [id] => 20017575 [patent_doc_number] => 20250155797 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-05-15 [patent_title] => GENERATE 3D PHOTORESIST PROFILES USING DIGITAL LITHOGRAPHY [patent_app_type] => utility [patent_app_number] => 18/715317 [patent_app_country] => US [patent_app_date] => 2021-12-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2267 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 148 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18715317 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/715317
GENERATE 3D PHOTORESIST PROFILES USING DIGITAL LITHOGRAPHY Dec 15, 2021 Pending
Array ( [id] => 18941345 [patent_doc_number] => 20240036484 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-02-01 [patent_title] => METHOD OF METROLOGY AND ASSOCIATED APPARATUSES [patent_app_type] => utility [patent_app_number] => 18/265606 [patent_app_country] => US [patent_app_date] => 2021-12-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11884 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18265606 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/265606
METHOD OF METROLOGY AND ASSOCIATED APPARATUSES Dec 1, 2021 Pending
Array ( [id] => 17475448 [patent_doc_number] => 20220082952 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-17 [patent_title] => METHOD OF CLAMPING A SUBSTRATE TO A CLAMPING SYSTEM, A SUBSTRATE HOLDER AND A SUBSTRATE SUPPORT [patent_app_type] => utility [patent_app_number] => 17/533947 [patent_app_country] => US [patent_app_date] => 2021-11-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11981 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17533947 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/533947
Method of clamping a substrate to a clamping system, a substrate holder and a substrate support Nov 22, 2021 Issued
Array ( [id] => 18297671 [patent_doc_number] => 20230107357 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-04-06 [patent_title] => PROCESS TOOL FOR DRY REMOVAL OF PHOTORESIST [patent_app_type] => utility [patent_app_number] => 17/759281 [patent_app_country] => US [patent_app_date] => 2021-11-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 22051 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -26 [patent_words_short_claim] => 69 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17759281 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/759281
PROCESS TOOL FOR DRY REMOVAL OF PHOTORESIST Nov 8, 2021 Abandoned
Array ( [id] => 17417017 [patent_doc_number] => 20220051921 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-02-17 [patent_title] => METHOD FOR MASK AND SUBSTRATE ALIGNMENT [patent_app_type] => utility [patent_app_number] => 17/514030 [patent_app_country] => US [patent_app_date] => 2021-10-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12193 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 107 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17514030 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/514030
METHOD FOR MASK AND SUBSTRATE ALIGNMENT Oct 28, 2021 Abandoned
Array ( [id] => 17507002 [patent_doc_number] => 20220100105 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-31 [patent_title] => EUV WAFER DEFECT IMPROVEMENT AND METHOD OF COLLECTING NONCONDUCTIVE PARTICLES [patent_app_type] => utility [patent_app_number] => 17/504199 [patent_app_country] => US [patent_app_date] => 2021-10-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6593 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 54 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17504199 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/504199
EUV wafer defect improvement and method of collecting nonconductive particles Oct 17, 2021 Issued
Array ( [id] => 18896856 [patent_doc_number] => 20240012341 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-01-11 [patent_title] => ELECTROSTATIC CLAMP [patent_app_type] => utility [patent_app_number] => 18/252294 [patent_app_country] => US [patent_app_date] => 2021-10-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6514 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18252294 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/252294
Electrostatic clamp Oct 13, 2021 Issued
Array ( [id] => 18710856 [patent_doc_number] => 20230333485 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-19 [patent_title] => TARGET STRUCTURE AND ASSOCIATED METHODS AND APPARATUS [patent_app_type] => utility [patent_app_number] => 18/025183 [patent_app_country] => US [patent_app_date] => 2021-09-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14353 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 65 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18025183 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/025183
TARGET STRUCTURE AND ASSOCIATED METHODS AND APPARATUS Sep 26, 2021 Pending
Array ( [id] => 18710856 [patent_doc_number] => 20230333485 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-19 [patent_title] => TARGET STRUCTURE AND ASSOCIATED METHODS AND APPARATUS [patent_app_type] => utility [patent_app_number] => 18/025183 [patent_app_country] => US [patent_app_date] => 2021-09-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14353 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 65 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18025183 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/025183
TARGET STRUCTURE AND ASSOCIATED METHODS AND APPARATUS Sep 26, 2021 Pending
Array ( [id] => 17417023 [patent_doc_number] => 20220051927 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-02-17 [patent_title] => SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS [patent_app_type] => utility [patent_app_number] => 17/481978 [patent_app_country] => US [patent_app_date] => 2021-09-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13210 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 131 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17481978 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/481978
Substrate holder for use in a lithographic apparatus Sep 21, 2021 Issued
Array ( [id] => 17884405 [patent_doc_number] => 20220299882 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-22 [patent_title] => SYSTEM AND METHOD FOR CLEANING AN EUV MASK WITHIN A SCANNER [patent_app_type] => utility [patent_app_number] => 17/477977 [patent_app_country] => US [patent_app_date] => 2021-09-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9864 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 51 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17477977 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/477977
SYSTEM AND METHOD FOR CLEANING AN EUV MASK WITHIN A SCANNER Sep 16, 2021 Pending
Array ( [id] => 18677309 [patent_doc_number] => 20230314953 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-05 [patent_title] => METHODS TO IMPROVE PROCESS WINDOW AND RESOLUTION FOR DIGITAL LITHOGRAPHY WITH AUXILIARY FEATURES [patent_app_type] => utility [patent_app_number] => 18/006259 [patent_app_country] => US [patent_app_date] => 2021-09-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11451 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 112 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18006259 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/006259
METHODS TO IMPROVE PROCESS WINDOW AND RESOLUTION FOR DIGITAL LITHOGRAPHY WITH AUXILIARY FEATURES Sep 15, 2021 Pending
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