Search

Kai J. Chang

Examiner (ID: 16715, Phone: (571)270-5448 , Office: P/2468 )

Most Active Art Unit
2468
Art Unit(s)
2468
Total Applications
459
Issued Applications
326
Pending Applications
38
Abandoned Applications
108

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 17321212 [patent_doc_number] => 20210410262 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-30 [patent_title] => EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 17/314775 [patent_app_country] => US [patent_app_date] => 2021-05-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13556 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 288 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17314775 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/314775
Extreme ultraviolet light generation system and electronic device manufacturing method May 6, 2021 Issued
Array ( [id] => 17038595 [patent_doc_number] => 20210255554 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-19 [patent_title] => MODULE FOR A PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY WITH A SEMI-ACTIVE SPACER, AND METHOD FOR USING THE SEMI-ACTIVE SPACER [patent_app_type] => utility [patent_app_number] => 17/307363 [patent_app_country] => US [patent_app_date] => 2021-05-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4746 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17307363 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/307363
MODULE FOR A PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY WITH A SEMI-ACTIVE SPACER, AND METHOD FOR USING THE SEMI-ACTIVE SPACER May 3, 2021 Abandoned
Array ( [id] => 17445826 [patent_doc_number] => 20220066331 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-03 [patent_title] => LITHOGRAPHY SYSTEM AND METHOD THEREOF [patent_app_type] => utility [patent_app_number] => 17/306631 [patent_app_country] => US [patent_app_date] => 2021-05-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11117 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 103 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17306631 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/306631
Lithography system and method thereof May 2, 2021 Issued
Array ( [id] => 17743978 [patent_doc_number] => 11392041 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-07-19 [patent_title] => Particle removal device and method [patent_app_type] => utility [patent_app_number] => 17/239952 [patent_app_country] => US [patent_app_date] => 2021-04-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 14 [patent_no_of_words] => 6559 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 129 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17239952 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/239952
Particle removal device and method Apr 25, 2021 Issued
Array ( [id] => 17068959 [patent_doc_number] => 20210271175 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-09-02 [patent_title] => METHOD AND APPARATUS FOR DIFFRACTION-BASED OVERLAY MEASUREMENT [patent_app_type] => utility [patent_app_number] => 17/240805 [patent_app_country] => US [patent_app_date] => 2021-04-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12778 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 186 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17240805 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/240805
Method and apparatus for diffraction-based overlay measurement Apr 25, 2021 Issued
Array ( [id] => 17445823 [patent_doc_number] => 20220066328 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-03 [patent_title] => SEMICONDUCTOR DEVICE MANUFACTURING SYSTEM [patent_app_type] => utility [patent_app_number] => 17/234908 [patent_app_country] => US [patent_app_date] => 2021-04-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9364 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 22 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17234908 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/234908
Semiconductor device manufacturing system Apr 19, 2021 Issued
Array ( [id] => 17947485 [patent_doc_number] => 20220334504 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-20 [patent_title] => SYSTEM AND METHOD FOR OPTICAL-PATH COUPLING OF LIGHT FOR IN-SITU PHOTOCHEMICAL CLEANING IN PROJECTION IMAGING SYSTEMS [patent_app_type] => utility [patent_app_number] => 17/235573 [patent_app_country] => US [patent_app_date] => 2021-04-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7638 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -37 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17235573 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/235573
System and method for optical-path coupling of light for in-situ photochemical cleaning in projection imaging systems Apr 19, 2021 Issued
Array ( [id] => 17354443 [patent_doc_number] => 11229112 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-01-18 [patent_title] => Extreme ultraviolet light generation apparatus, target control method, and electronic device manufacturing method [patent_app_type] => utility [patent_app_number] => 17/227912 [patent_app_country] => US [patent_app_date] => 2021-04-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 25 [patent_figures_cnt] => 40 [patent_no_of_words] => 13983 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 180 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17227912 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/227912
Extreme ultraviolet light generation apparatus, target control method, and electronic device manufacturing method Apr 11, 2021 Issued
Array ( [id] => 18498920 [patent_doc_number] => 20230221650 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-07-13 [patent_title] => PROGRAMMABLE NANOLITHOGRAPHY MASK [patent_app_type] => utility [patent_app_number] => 17/995230 [patent_app_country] => US [patent_app_date] => 2021-04-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12352 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17995230 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/995230
Programmable nanolithography mask Apr 1, 2021 Issued
Array ( [id] => 18103871 [patent_doc_number] => 11543755 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-01-03 [patent_title] => Method of manufacturing semiconductor device [patent_app_type] => utility [patent_app_number] => 17/206563 [patent_app_country] => US [patent_app_date] => 2021-03-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 18 [patent_no_of_words] => 14352 [patent_no_of_claims] => 29 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 206 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17206563 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/206563
Method of manufacturing semiconductor device Mar 18, 2021 Issued
Array ( [id] => 19458819 [patent_doc_number] => 12099307 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-09-24 [patent_title] => Actuator unit for positioning an optical element [patent_app_type] => utility [patent_app_number] => 17/920763 [patent_app_country] => US [patent_app_date] => 2021-03-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 12 [patent_no_of_words] => 14934 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 215 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17920763 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/920763
Actuator unit for positioning an optical element Mar 18, 2021 Issued
Array ( [id] => 16918192 [patent_doc_number] => 20210191284 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-06-24 [patent_title] => LITHOGRAPHY SYSTEM AND CLEANING METHOD THEREOF [patent_app_type] => utility [patent_app_number] => 17/194327 [patent_app_country] => US [patent_app_date] => 2021-03-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7512 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 103 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17194327 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/194327
Lithography system and cleaning method thereof Mar 7, 2021 Issued
Array ( [id] => 16887119 [patent_doc_number] => 20210173316 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-06-10 [patent_title] => RADIATION SOURCE FOR LITHOGRAPHY PROCESS [patent_app_type] => utility [patent_app_number] => 17/180265 [patent_app_country] => US [patent_app_date] => 2021-02-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8168 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 96 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17180265 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/180265
Radiation source for lithography process Feb 18, 2021 Issued
Array ( [id] => 16848564 [patent_doc_number] => 20210149309 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-20 [patent_title] => POSITION MEASUREMENT OF OPTICAL ELEMENTS IN A LITHOGRAPHIC APPARATUS [patent_app_type] => utility [patent_app_number] => 17/161211 [patent_app_country] => US [patent_app_date] => 2021-01-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 24034 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => 0 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17161211 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/161211
POSITION MEASUREMENT OF OPTICAL ELEMENTS IN A LITHOGRAPHIC APPARATUS Jan 27, 2021 Abandoned
Array ( [id] => 18242851 [patent_doc_number] => 20230075162 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-09 [patent_title] => Reticle Gripper Damper and Isolation System for Lithographic Apparatuses [patent_app_type] => utility [patent_app_number] => 17/799652 [patent_app_country] => US [patent_app_date] => 2021-01-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7610 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 70 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17799652 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/799652
Reticle gripper damper and isolation system for lithographic apparatuses Jan 25, 2021 Issued
Array ( [id] => 16979270 [patent_doc_number] => 20210223507 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-22 [patent_title] => LIGHT EMISSION APPARATUS FOR EXPOSURE MACHINE AND EXPOSURE EQUIPMENT INCLUDING SAME [patent_app_type] => utility [patent_app_number] => 17/153433 [patent_app_country] => US [patent_app_date] => 2021-01-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10645 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17153433 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/153433
LIGHT EMISSION APPARATUS FOR EXPOSURE MACHINE AND EXPOSURE EQUIPMENT INCLUDING SAME Jan 19, 2021 Abandoned
Array ( [id] => 17698621 [patent_doc_number] => 11372342 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-06-28 [patent_title] => Position measurement apparatus, overlay inspection apparatus, position measurement method, imprint apparatus, and article manufacturing method [patent_app_type] => utility [patent_app_number] => 17/152362 [patent_app_country] => US [patent_app_date] => 2021-01-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 21 [patent_figures_cnt] => 34 [patent_no_of_words] => 16647 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 132 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17152362 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/152362
Position measurement apparatus, overlay inspection apparatus, position measurement method, imprint apparatus, and article manufacturing method Jan 18, 2021 Issued
Array ( [id] => 18213171 [patent_doc_number] => 20230059435 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-23 [patent_title] => APPARATUS AND METHOD FOR EXPOSURE OF RELIEF PRECURSORS [patent_app_type] => utility [patent_app_number] => 17/793870 [patent_app_country] => US [patent_app_date] => 2021-01-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6547 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -22 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17793870 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/793870
Apparatus and method for exposure of relief precursors Jan 17, 2021 Issued
Array ( [id] => 17714897 [patent_doc_number] => 11378888 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2022-07-05 [patent_title] => Lens adjustment for an edge exposure tool [patent_app_type] => utility [patent_app_number] => 17/248074 [patent_app_country] => US [patent_app_date] => 2021-01-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 13158 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 69 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17248074 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/248074
Lens adjustment for an edge exposure tool Jan 6, 2021 Issued
Array ( [id] => 18168900 [patent_doc_number] => 20230035511 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-02 [patent_title] => LITHOGRAPHIC APPARATUS AND METHOD FOR DRIFT COMPENSATION [patent_app_type] => utility [patent_app_number] => 17/791641 [patent_app_country] => US [patent_app_date] => 2021-01-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 15228 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 110 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17791641 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/791641
LITHOGRAPHIC APPARATUS AND METHOD FOR DRIFT COMPENSATION Jan 3, 2021 Pending
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