| Application number | Title of the application | Filing Date | Status |
|---|
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[patent_issue_date] => 2002-12-10
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| 09/716737 | Unity-K gas dome dielectric system for ULSI interconnects | Nov 19, 2000 | Abandoned |
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Array
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| 09/670917 | SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND APPARATUS FOR REMOVING SILICON NITRIDE FORMED IN A REACTION CONTAINER WITH NF3 GAS FLOWING INTO THE REACTION CONTAINER | Sep 28, 2000 | Abandoned |
| 09/675827 | One-step etch processes for dual damascene metallization | Sep 28, 2000 | Abandoned |
Array
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Array
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