Keath T. Chen

Array ( [id] => 20207583 [patent_doc_number] => 20250277303 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-09-04 [patent_title] => LOW-TEMPERATURE VAPORIZER FOR ION IMPLANTER WITH IN-VACUUM CONTROLLED FLOW [patent_app_type] => utility [patent_app_number] => 19/063918 [patent_app_country] => US [patent_app_date] => 2025-02-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2296 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 151 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 19063918 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20572317 [patent_doc_number] => 20260066245 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2026-03-05 [patent_title] => Atomic Layer Process Chamber for Optimal Etching and Deposition with Controlled Ion and Radical Exposure [patent_app_type] => utility [patent_app_number] => 18/826169 [patent_app_country] => US [patent_app_date] => 2024-09-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2261 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 189 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18826169 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19820986 [patent_doc_number] => 20250079193 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-03-06 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 18/815854 [patent_app_country] => US [patent_app_date] => 2024-08-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5943 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 80 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18815854 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19754852 [patent_doc_number] => 20250043417 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-02-06 [patent_title] => CONFIGURABLE SOURCE [patent_app_type] => utility [patent_app_number] => 18/792309 [patent_app_country] => US [patent_app_date] => 2024-08-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10059 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 23 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18792309 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20381773 [patent_doc_number] => 20250364266 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-11-27 [patent_title] => INTEGRATED WET PASSIVATION ON CMP FOR HYBRID BONDING POST-CU PAD POLISH CAPPING [patent_app_type] => utility [patent_app_number] => 18/672918 [patent_app_country] => US [patent_app_date] => 2024-05-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3342 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18672918 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19546295 [patent_doc_number] => 20240363331 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-10-31 [patent_title] => SUBSTRATE SUPPORT PLATE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 18/664118 [patent_app_country] => US [patent_app_date] => 2024-05-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12843 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 117 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18664118 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20367342 [patent_doc_number] => 20250357154 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-11-20 [patent_title] => SELECTIVE PERIODIC EDGE DEPOSITION AND ETCH [patent_app_type] => utility [patent_app_number] => 18/663463 [patent_app_country] => US [patent_app_date] => 2024-05-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5249 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 83 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18663463 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19531732 [patent_doc_number] => 20240355634 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-10-24 [patent_title] => METHOD FOR PROCESSING WORKPIECE, PLASMA PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 18/653280 [patent_app_country] => US [patent_app_date] => 2024-05-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12227 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 285 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18653280 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19392726 [patent_doc_number] => 20240282596 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-08-22 [patent_title] => SEMICONDUCTOR PROCESSING DEVICE [patent_app_type] => utility [patent_app_number] => 18/648467 [patent_app_country] => US [patent_app_date] => 2024-04-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7283 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 284 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18648467 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19384588 [patent_doc_number] => 20240274458 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-08-15 [patent_title] => ELECTROSTATIC CHUCK, ETCHING APPARATUS, AND METHOD OF MANUFACTURING DISPLAY DEVICE [patent_app_type] => utility [patent_app_number] => 18/644599 [patent_app_country] => US [patent_app_date] => 2024-04-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 16374 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18644599 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20291212 [patent_doc_number] => 20250316455 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-10-09 [patent_title] => PLASMA SHOWERHEAD ASSEMBLY [patent_app_type] => utility [patent_app_number] => 18/627065 [patent_app_country] => US [patent_app_date] => 2024-04-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 1041 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 247 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18627065 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19546273 [patent_doc_number] => 20240363309 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-10-31 [patent_title] => SUBSTRATE PROCESSING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 18/620246 [patent_app_country] => US [patent_app_date] => 2024-03-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10719 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 130 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18620246 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19305521 [patent_doc_number] => 20240234101 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-07-11 [patent_title] => PLASMA SUBSTRATE TREATMENT APPARATUS [patent_app_type] => utility [patent_app_number] => 18/613512 [patent_app_country] => US [patent_app_date] => 2024-03-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8501 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 107 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18613512 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19345658 [patent_doc_number] => 20240254621 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-08-01 [patent_title] => MATERIAL DEPOSITION SYSTEM EQUIPMENT MAINTENANCE [patent_app_type] => utility [patent_app_number] => 18/604475 [patent_app_country] => US [patent_app_date] => 2024-03-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 15789 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 124 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18604475 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20235685 [patent_doc_number] => 20250293004 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-09-18 [patent_title] => SEMICONDUCTOR PROCESSING CHAMBER LID AND SEALING MECHANISM [patent_app_type] => utility [patent_app_number] => 18/603672 [patent_app_country] => US [patent_app_date] => 2024-03-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2513 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 138 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18603672 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19449378 [patent_doc_number] => 20240309508 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-09-19 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 18/600373 [patent_app_country] => US [patent_app_date] => 2024-03-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6433 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 92 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18600373 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19420894 [patent_doc_number] => 20240297018 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-09-05 [patent_title] => DISTRIBUTOR AND PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 18/589744 [patent_app_country] => US [patent_app_date] => 2024-02-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10389 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 75 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18589744 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19528668 [patent_doc_number] => 20240352570 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-10-24 [patent_title] => DEPOSITION APPARATUS [patent_app_type] => utility [patent_app_number] => 18/443710 [patent_app_country] => US [patent_app_date] => 2024-02-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14009 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 216 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18443710 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20179874 [patent_doc_number] => 20250263832 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-08-21 [patent_title] => LOCAL PART MASKING FOR IMPROVED UNIFORMITY IN CERAMIC MATRIX COMPOSITES [patent_app_type] => utility [patent_app_number] => 18/442808 [patent_app_country] => US [patent_app_date] => 2024-02-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 0 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 140 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18442808 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19817116 [patent_doc_number] => 20250075323 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-03-06 [patent_title] => SUBSTRATE SUPPORT, THIN FILM PROCESSING DEVICE, AND THIN FILM DEPOSITION CONTROL METHOD USING THE SAME [patent_app_type] => utility [patent_app_number] => 18/442991 [patent_app_country] => US [patent_app_date] => 2024-02-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8240 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 200 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18442991 [rel_patent_id] =>[rel_patent_doc_number] =>)