Keath T. Chen

Array ( [id] => 17930277 [patent_doc_number] => 20220325402 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-13 [patent_title] => THERMAL EVAPORATION PLASMA DEPOSITION [patent_app_type] => utility [patent_app_number] => 17/638796 [patent_app_country] => US [patent_app_date] => 2020-08-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 19381 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -22 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17638796 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16673561 [patent_doc_number] => 20210062324 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-03-04 [patent_title] => ELECTRON BEAM PVD ENDPOINT DETECTION AND CLOSED-LOOP PROCESS CONTROL SYSTEMS [patent_app_type] => utility [patent_app_number] => 16/995662 [patent_app_country] => US [patent_app_date] => 2020-08-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7752 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 110 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16995662 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16629071 [patent_doc_number] => 20210047724 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-02-18 [patent_title] => FILM FORMING APPARATUS AND FILM FORMING METHOD [patent_app_type] => utility [patent_app_number] => 16/992550 [patent_app_country] => US [patent_app_date] => 2020-08-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10593 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 90 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16992550 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17949169 [patent_doc_number] => 20220336188 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-20 [patent_title] => PLASMA TREATMENT SYSTEM AND PLASMA TREATMENT METHOD [patent_app_type] => utility [patent_app_number] => 17/640782 [patent_app_country] => US [patent_app_date] => 2020-08-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7951 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -26 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17640782 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17400072 [patent_doc_number] => 20220042162 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-02-10 [patent_title] => INTEGRATED CIRCUIT STRUCTURES INCLUDING A METAL LAYER FORMED USING A BEAM OF LOW ENERGY ATOMS [patent_app_type] => utility [patent_app_number] => 16/988950 [patent_app_country] => US [patent_app_date] => 2020-08-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9917 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 54 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16988950 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17025731 [patent_doc_number] => 20210249603 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-12 [patent_title] => MASK ASSEMBLY AND METHOD FOR MANUFACTURING OF THE SAME [patent_app_type] => utility [patent_app_number] => 16/988954 [patent_app_country] => US [patent_app_date] => 2020-08-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14084 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -27 [patent_words_short_claim] => 76 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16988954 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17933164 [patent_doc_number] => 20220328290 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-13 [patent_title] => MOVEABLE EDGE RINGS FOR SUBSTRATE PROCESSING SYSTEMS [patent_app_type] => utility [patent_app_number] => 17/633727 [patent_app_country] => US [patent_app_date] => 2020-08-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9575 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -23 [patent_words_short_claim] => 79 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17633727 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17840626 [patent_doc_number] => 20220277932 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-01 [patent_title] => PLASMA PROCESSING DEVICE [patent_app_type] => utility [patent_app_number] => 17/632056 [patent_app_country] => US [patent_app_date] => 2020-07-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6514 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 152 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17632056 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16598546 [patent_doc_number] => 20210025077 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-01-28 [patent_title] => POLYCRYSTALLINE SILICON MANUFACTURING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/936346 [patent_app_country] => US [patent_app_date] => 2020-07-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3529 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 47 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16936346 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16657869 [patent_doc_number] => 20210054505 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-02-25 [patent_title] => CRACKING DEVICE AND DEPOSITION APPARATUS INCLUDING THE SAME [patent_app_type] => utility [patent_app_number] => 16/934129 [patent_app_country] => US [patent_app_date] => 2020-07-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4638 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16934129 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16399251 [patent_doc_number] => 20200340109 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-10-29 [patent_title] => REACTANT VAPORIZER AND RELATED SYSTEMS AND METHODS [patent_app_type] => utility [patent_app_number] => 16/926493 [patent_app_country] => US [patent_app_date] => 2020-07-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11988 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 44 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16926493 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16677834 [patent_doc_number] => 20210066600 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-03-04 [patent_title] => MASK AND MASK ASSEMBLY [patent_app_type] => utility [patent_app_number] => 16/924512 [patent_app_country] => US [patent_app_date] => 2020-07-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4171 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16924512 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17052647 [patent_doc_number] => 20210262081 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-26 [patent_title] => DEPOSITION APPARATUS AND DEPOSITION METHOD [patent_app_type] => utility [patent_app_number] => 16/920913 [patent_app_country] => US [patent_app_date] => 2020-07-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7271 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 80 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16920913 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16901262 [patent_doc_number] => 20210180178 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-06-17 [patent_title] => EVAPORATION SOURCE AND DEPOSITION APPARATUS INCLUDING THE SAME [patent_app_type] => utility [patent_app_number] => 16/914560 [patent_app_country] => US [patent_app_date] => 2020-06-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6401 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 121 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16914560 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17292656 [patent_doc_number] => 20210388495 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-16 [patent_title] => ASYMMETRIC EXHAUST PUMPING PLATE DESIGN FOR A SEMICONDUCTOR PROCESSING CHAMBER [patent_app_type] => utility [patent_app_number] => 16/902911 [patent_app_country] => US [patent_app_date] => 2020-06-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6153 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 149 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16902911 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17764741 [patent_doc_number] => 20220238354 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-07-28 [patent_title] => MULTIPLE VACUUM CHAMBER EXHAUST SYSTEM AND METHOD OF EVACUATING MULTIPLE CHAMBERS [patent_app_type] => utility [patent_app_number] => 17/617244 [patent_app_country] => US [patent_app_date] => 2020-06-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6021 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 150 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17617244 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17913652 [patent_doc_number] => 20220316047 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-06 [patent_title] => EVAPORATION SOURCE FOR VACUUM EVAPORATION APPARATUS [patent_app_type] => utility [patent_app_number] => 17/764866 [patent_app_country] => US [patent_app_date] => 2020-06-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7340 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -2 [patent_words_short_claim] => 235 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17764866 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20274800 [patent_doc_number] => 12444585 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-10-14 [patent_title] => Electrical connector for cooled substrate support assembly [patent_app_type] => utility [patent_app_number] => 16/887596 [patent_app_country] => US [patent_app_date] => 2020-05-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 6 [patent_no_of_words] => 0 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 239 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16887596 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16484401 [patent_doc_number] => 20200378002 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-12-03 [patent_title] => DEPOSITION APPARATUS AND DEPOSITION METHOD [patent_app_type] => utility [patent_app_number] => 16/879038 [patent_app_country] => US [patent_app_date] => 2020-05-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6442 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 109 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16879038 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16272580 [patent_doc_number] => 20200274068 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-08-27 [patent_title] => VAPOR DEPOSITION MASK BASE MATERIAL, METHOD FOR MANUFACTURING VAPOR DEPOSITION MASK BASE MATERIAL, METHOD FOR MANUFACTURING VAPOR DEPOSITION MASK, AND METHOD FOR MANUFACTURING DISPLAY DEVICE [patent_app_type] => utility [patent_app_number] => 16/870716 [patent_app_country] => US [patent_app_date] => 2020-05-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9759 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -4 [patent_words_short_claim] => 154 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16870716 [rel_patent_id] =>[rel_patent_doc_number] =>)