Search

Keath T. Chen

Examiner (ID: 4474, Phone: (571)270-1870 , Office: P/1716 )

Most Active Art Unit
1716
Art Unit(s)
1716, 1792, 1712, 1762
Total Applications
1368
Issued Applications
431
Pending Applications
130
Abandoned Applications
844

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18473001 [patent_doc_number] => 20230207289 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-29 [patent_title] => SUPPORT UNIT AND APPARATUS FOR TREATING SUBSTRATE WITH THE UNIT [patent_app_type] => utility [patent_app_number] => 18/147790 [patent_app_country] => US [patent_app_date] => 2022-12-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8978 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 89 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18147790 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/147790
SUPPORT UNIT AND APPARATUS FOR TREATING SUBSTRATE WITH THE UNIT Dec 28, 2022 Abandoned
Array ( [id] => 18488360 [patent_doc_number] => 20230215708 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-07-06 [patent_title] => SUBSTRATE SUPPORT UNIT AND PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 18/148044 [patent_app_country] => US [patent_app_date] => 2022-12-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6438 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 89 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18148044 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/148044
SUBSTRATE SUPPORT UNIT AND PLASMA PROCESSING APPARATUS Dec 28, 2022 Pending
Array ( [id] => 18488358 [patent_doc_number] => 20230215706 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-07-06 [patent_title] => LIFT PIN UNIT AND UNIT FOR SUPPORTING SUBSTRATE AND SUBSTRATE TREATING APPARATUS [patent_app_type] => utility [patent_app_number] => 18/148078 [patent_app_country] => US [patent_app_date] => 2022-12-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8331 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 76 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18148078 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/148078
LIFT PIN UNIT AND UNIT FOR SUPPORTING SUBSTRATE AND SUBSTRATE TREATING APPARATUS Dec 28, 2022 Pending
Array ( [id] => 18473000 [patent_doc_number] => 20230207288 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-29 [patent_title] => SUBSTRATE TREATMENT APPARATUS [patent_app_type] => utility [patent_app_number] => 18/147462 [patent_app_country] => US [patent_app_date] => 2022-12-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11090 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 127 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18147462 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/147462
SUBSTRATE TREATMENT APPARATUS Dec 27, 2022 Pending
Array ( [id] => 18470791 [patent_doc_number] => 20230205077 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-29 [patent_title] => APPARATUS AND METHOD FOR TREATING SUBSTRATE [patent_app_type] => utility [patent_app_number] => 18/146693 [patent_app_country] => US [patent_app_date] => 2022-12-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12975 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18146693 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/146693
APPARATUS AND METHOD FOR TREATING SUBSTRATE Dec 26, 2022 Pending
Array ( [id] => 19172938 [patent_doc_number] => 20240158912 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-05-16 [patent_title] => MATERIAL DEPOSITION SYSTEM EQUIPMENT MAINTENANCE [patent_app_type] => utility [patent_app_number] => 18/056062 [patent_app_country] => US [patent_app_date] => 2022-11-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 15374 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -25 [patent_words_short_claim] => 94 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18056062 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/056062
MATERIAL DEPOSITION SYSTEM EQUIPMENT MAINTENANCE Nov 15, 2022 Abandoned
Array ( [id] => 18222705 [patent_doc_number] => 20230061699 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-02 [patent_title] => UPPER ELECTRODE AND PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/983128 [patent_app_country] => US [patent_app_date] => 2022-11-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5783 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -2 [patent_words_short_claim] => 51 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17983128 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/983128
UPPER ELECTRODE AND PLASMA PROCESSING APPARATUS Nov 7, 2022 Pending
Array ( [id] => 18306196 [patent_doc_number] => 20230110096 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-04-13 [patent_title] => PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/974727 [patent_app_country] => US [patent_app_date] => 2022-10-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5757 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17974727 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/974727
PLASMA PROCESSING APPARATUS Oct 26, 2022 Abandoned
Array ( [id] => 18338130 [patent_doc_number] => 20230130079 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-04-27 [patent_title] => HIGH VAPOR PRESSURE DELIVERY SYSTEM [patent_app_type] => utility [patent_app_number] => 17/972242 [patent_app_country] => US [patent_app_date] => 2022-10-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5637 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 46 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17972242 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/972242
HIGH VAPOR PRESSURE DELIVERY SYSTEM Oct 23, 2022 Pending
Array ( [id] => 18211857 [patent_doc_number] => 20230058121 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-23 [patent_title] => MASK ASSEMBLY AND METHOD OF MANUFACTURING THE SAME [patent_app_type] => utility [patent_app_number] => 18/048686 [patent_app_country] => US [patent_app_date] => 2022-10-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7700 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 195 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18048686 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/048686
MASK ASSEMBLY AND METHOD OF MANUFACTURING THE SAME Oct 20, 2022 Pending
Array ( [id] => 19083480 [patent_doc_number] => 20240110281 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-04-04 [patent_title] => STACKING TOOL FIXTURE FOR FORCED FLOW CHEMICAL VAPOR INFILTRATION [patent_app_type] => utility [patent_app_number] => 17/957610 [patent_app_country] => US [patent_app_date] => 2022-09-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3017 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 114 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17957610 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/957610
Stacking tool fixture for forced flow chemical vapor infiltration Sep 29, 2022 Issued
Array ( [id] => 20496847 [patent_doc_number] => 12538741 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-01-27 [patent_title] => Raw material feeding device, substrate processing system, and residual estimation method [patent_app_type] => utility [patent_app_number] => 17/939457 [patent_app_country] => US [patent_app_date] => 2022-09-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 16 [patent_no_of_words] => 8452 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 277 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17939457 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/939457
Raw material feeding device, substrate processing system, and residual estimation method Sep 6, 2022 Issued
Array ( [id] => 18256591 [patent_doc_number] => 20230083630 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-16 [patent_title] => WORKING TABLE FOR REEL-TO-REEL PROCESS [patent_app_type] => utility [patent_app_number] => 17/823984 [patent_app_country] => US [patent_app_date] => 2022-09-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4152 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 107 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17823984 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/823984
WORKING TABLE FOR REEL-TO-REEL PROCESS Aug 31, 2022 Pending
Array ( [id] => 20318072 [patent_doc_number] => 12456627 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-10-28 [patent_title] => Dry etching apparatus and wafer etching system using the same [patent_app_type] => utility [patent_app_number] => 17/883778 [patent_app_country] => US [patent_app_date] => 2022-08-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 2015 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 172 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17883778 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/883778
Dry etching apparatus and wafer etching system using the same Aug 8, 2022 Issued
Array ( [id] => 18036684 [patent_doc_number] => 20220380899 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-12-01 [patent_title] => VAPOR DEPOSITION APPARATUS [patent_app_type] => utility [patent_app_number] => 17/882967 [patent_app_country] => US [patent_app_date] => 2022-08-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6258 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 195 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17882967 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/882967
VAPOR DEPOSITION APPARATUS Aug 7, 2022 Pending
Array ( [id] => 18024278 [patent_doc_number] => 20220375777 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-24 [patent_title] => STRUCTURE OF MOUNTING TABLE AND SEMICONDUCTOR PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/878912 [patent_app_country] => US [patent_app_date] => 2022-08-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5949 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 146 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17878912 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/878912
STRUCTURE OF MOUNTING TABLE AND SEMICONDUCTOR PROCESSING APPARATUS Aug 1, 2022 Abandoned
Array ( [id] => 18024230 [patent_doc_number] => 20220375729 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-24 [patent_title] => PLASMA ETCHER EDGE RING WITH A CHAMFER GEOMETRY AND IMPEDANCE DESIGN [patent_app_type] => utility [patent_app_number] => 17/815318 [patent_app_country] => US [patent_app_date] => 2022-07-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6887 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 147 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17815318 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/815318
PLASMA ETCHER EDGE RING WITH A CHAMFER GEOMETRY AND IMPEDANCE DESIGN Jul 26, 2022 Pending
Array ( [id] => 20332732 [patent_doc_number] => 12463016 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-11-04 [patent_title] => Devices and methods for controlling wafer uniformity in plasma-based process [patent_app_type] => utility [patent_app_number] => 17/874124 [patent_app_country] => US [patent_app_date] => 2022-07-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 2516 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 278 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17874124 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/874124
Devices and methods for controlling wafer uniformity in plasma-based process Jul 25, 2022 Issued
Array ( [id] => 18923530 [patent_doc_number] => 20240026534 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-01-25 [patent_title] => VACUUM SYSTEM CLUSTER TOOL [patent_app_type] => utility [patent_app_number] => 17/872678 [patent_app_country] => US [patent_app_date] => 2022-07-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3526 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 245 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17872678 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/872678
VACUUM SYSTEM CLUSTER TOOL Jul 24, 2022 Abandoned
Array ( [id] => 20080778 [patent_doc_number] => 12354855 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-07-08 [patent_title] => Process kits and related methods for processing chambers to facilitate deposition process adjustability [patent_app_type] => utility [patent_app_number] => 17/871505 [patent_app_country] => US [patent_app_date] => 2022-07-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 36 [patent_figures_cnt] => 53 [patent_no_of_words] => 9728 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 390 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17871505 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/871505
Process kits and related methods for processing chambers to facilitate deposition process adjustability Jul 21, 2022 Issued
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