Keath T. Chen

Array ( [id] => 18237754 [patent_doc_number] => 20230070064 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-09 [patent_title] => RAW MATERIAL FEEDING DEVICE, SUBSTRATE PROCESSING SYSTEM, AND RESIDUAL ESTIMATION METHOD [patent_app_type] => utility [patent_app_number] => 17/939457 [patent_app_country] => US [patent_app_date] => 2022-09-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13194 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 182 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17939457 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18237754 [patent_doc_number] => 20230070064 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-09 [patent_title] => RAW MATERIAL FEEDING DEVICE, SUBSTRATE PROCESSING SYSTEM, AND RESIDUAL ESTIMATION METHOD [patent_app_type] => utility [patent_app_number] => 17/939457 [patent_app_country] => US [patent_app_date] => 2022-09-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13194 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 182 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17939457 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18256591 [patent_doc_number] => 20230083630 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-16 [patent_title] => WORKING TABLE FOR REEL-TO-REEL PROCESS [patent_app_type] => utility [patent_app_number] => 17/823984 [patent_app_country] => US [patent_app_date] => 2022-09-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4152 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 107 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17823984 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20318072 [patent_doc_number] => 12456627 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-10-28 [patent_title] => Dry etching apparatus and wafer etching system using the same [patent_app_type] => utility [patent_app_number] => 17/883778 [patent_app_country] => US [patent_app_date] => 2022-08-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 2015 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 172 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17883778 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18036684 [patent_doc_number] => 20220380899 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-12-01 [patent_title] => VAPOR DEPOSITION APPARATUS [patent_app_type] => utility [patent_app_number] => 17/882967 [patent_app_country] => US [patent_app_date] => 2022-08-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6258 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 195 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17882967 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18024278 [patent_doc_number] => 20220375777 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-24 [patent_title] => STRUCTURE OF MOUNTING TABLE AND SEMICONDUCTOR PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/878912 [patent_app_country] => US [patent_app_date] => 2022-08-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5949 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 146 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17878912 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18024230 [patent_doc_number] => 20220375729 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-24 [patent_title] => PLASMA ETCHER EDGE RING WITH A CHAMFER GEOMETRY AND IMPEDANCE DESIGN [patent_app_type] => utility [patent_app_number] => 17/815318 [patent_app_country] => US [patent_app_date] => 2022-07-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6887 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 147 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17815318 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20332732 [patent_doc_number] => 12463016 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-11-04 [patent_title] => Devices and methods for controlling wafer uniformity in plasma-based process [patent_app_type] => utility [patent_app_number] => 17/874124 [patent_app_country] => US [patent_app_date] => 2022-07-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 2516 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 278 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17874124 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18923530 [patent_doc_number] => 20240026534 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-01-25 [patent_title] => VACUUM SYSTEM CLUSTER TOOL [patent_app_type] => utility [patent_app_number] => 17/872678 [patent_app_country] => US [patent_app_date] => 2022-07-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3526 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 245 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17872678 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18923530 [patent_doc_number] => 20240026534 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-01-25 [patent_title] => VACUUM SYSTEM CLUSTER TOOL [patent_app_type] => utility [patent_app_number] => 17/872678 [patent_app_country] => US [patent_app_date] => 2022-07-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3526 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 245 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17872678 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20080778 [patent_doc_number] => 12354855 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-07-08 [patent_title] => Process kits and related methods for processing chambers to facilitate deposition process adjustability [patent_app_type] => utility [patent_app_number] => 17/871505 [patent_app_country] => US [patent_app_date] => 2022-07-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 36 [patent_figures_cnt] => 53 [patent_no_of_words] => 9728 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 390 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17871505 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17983008 [patent_doc_number] => 20220349044 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-03 [patent_title] => DEVICE FOR VAPOR DEPOSITING METAL [patent_app_type] => utility [patent_app_number] => 17/863463 [patent_app_country] => US [patent_app_date] => 2022-07-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3863 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 151 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17863463 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18139715 [patent_doc_number] => 20230013551 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-01-19 [patent_title] => PLASMA PROCESSING APPARATUS AND PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/859520 [patent_app_country] => US [patent_app_date] => 2022-07-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5706 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17859520 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17983025 [patent_doc_number] => 20220349061 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-03 [patent_title] => Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium [patent_app_type] => utility [patent_app_number] => 17/853377 [patent_app_country] => US [patent_app_date] => 2022-06-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10766 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17853377 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17963550 [patent_doc_number] => 20220344131 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-27 [patent_title] => MODULAR MICROWAVE PLASMA SOURCE [patent_app_type] => utility [patent_app_number] => 17/852086 [patent_app_country] => US [patent_app_date] => 2022-06-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5482 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 75 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17852086 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17963550 [patent_doc_number] => 20220344131 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-27 [patent_title] => MODULAR MICROWAVE PLASMA SOURCE [patent_app_type] => utility [patent_app_number] => 17/852086 [patent_app_country] => US [patent_app_date] => 2022-06-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5482 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 75 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17852086 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18093592 [patent_doc_number] => 20220411933 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-12-29 [patent_title] => FILM FORMING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/807506 [patent_app_country] => US [patent_app_date] => 2022-06-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7054 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 186 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17807506 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18097276 [patent_doc_number] => 20220415617 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-12-29 [patent_title] => REMOTE PLASMA APPARATUS FOR GENERATING HIGH-POWER DENSITY MICROWAVE PLASMA [patent_app_type] => utility [patent_app_number] => 17/835718 [patent_app_country] => US [patent_app_date] => 2022-06-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3994 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 67 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17835718 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18097276 [patent_doc_number] => 20220415617 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-12-29 [patent_title] => REMOTE PLASMA APPARATUS FOR GENERATING HIGH-POWER DENSITY MICROWAVE PLASMA [patent_app_type] => utility [patent_app_number] => 17/835718 [patent_app_country] => US [patent_app_date] => 2022-06-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3994 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 67 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17835718 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18821015 [patent_doc_number] => 20230395356 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-12-07 [patent_title] => PLASMA CHAMBER WITH GAS CROSS-FLOW, MICROWAVE RESONATORS AND A ROTATABLE PEDESTAL FOR MULTIPHASE CYCLIC DEPOSITION [patent_app_type] => utility [patent_app_number] => 17/834278 [patent_app_country] => US [patent_app_date] => 2022-06-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6994 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 91 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17834278 [rel_patent_id] =>[rel_patent_doc_number] =>)