Keath T. Chen

Array ( [id] => 17983008 [patent_doc_number] => 20220349044 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-03 [patent_title] => DEVICE FOR VAPOR DEPOSITING METAL [patent_app_type] => utility [patent_app_number] => 17/863463 [patent_app_country] => US [patent_app_date] => 2022-07-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3863 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 151 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17863463 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18139715 [patent_doc_number] => 20230013551 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-01-19 [patent_title] => PLASMA PROCESSING APPARATUS AND PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/859520 [patent_app_country] => US [patent_app_date] => 2022-07-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5706 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17859520 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17983025 [patent_doc_number] => 20220349061 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-03 [patent_title] => Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium [patent_app_type] => utility [patent_app_number] => 17/853377 [patent_app_country] => US [patent_app_date] => 2022-06-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10766 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17853377 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17963550 [patent_doc_number] => 20220344131 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-27 [patent_title] => MODULAR MICROWAVE PLASMA SOURCE [patent_app_type] => utility [patent_app_number] => 17/852086 [patent_app_country] => US [patent_app_date] => 2022-06-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5482 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 75 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17852086 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18093592 [patent_doc_number] => 20220411933 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-12-29 [patent_title] => FILM FORMING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/807506 [patent_app_country] => US [patent_app_date] => 2022-06-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7054 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 186 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17807506 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18097276 [patent_doc_number] => 20220415617 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-12-29 [patent_title] => REMOTE PLASMA APPARATUS FOR GENERATING HIGH-POWER DENSITY MICROWAVE PLASMA [patent_app_type] => utility [patent_app_number] => 17/835718 [patent_app_country] => US [patent_app_date] => 2022-06-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3994 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 67 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17835718 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18821015 [patent_doc_number] => 20230395356 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-12-07 [patent_title] => PLASMA CHAMBER WITH GAS CROSS-FLOW, MICROWAVE RESONATORS AND A ROTATABLE PEDESTAL FOR MULTIPHASE CYCLIC DEPOSITION [patent_app_type] => utility [patent_app_number] => 17/834278 [patent_app_country] => US [patent_app_date] => 2022-06-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6994 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 91 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17834278 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19676273 [patent_doc_number] => 12188125 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-01-07 [patent_title] => Showerhead and substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 17/805062 [patent_app_country] => US [patent_app_date] => 2022-06-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 12 [patent_no_of_words] => 6823 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 146 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17805062 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18125686 [patent_doc_number] => 20230011303 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-01-12 [patent_title] => CLOSE COUPLE DIFFUSER FOR PHYSICAL VAPOR DEPOSITION WEB COATING [patent_app_type] => utility [patent_app_number] => 17/825136 [patent_app_country] => US [patent_app_date] => 2022-05-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10544 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 193 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17825136 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17838192 [patent_doc_number] => 20220275497 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-01 [patent_title] => METHOD OF FABRICATING ANISOTROPIC OPTICAL INTERFERENCE FILTER [patent_app_type] => utility [patent_app_number] => 17/745395 [patent_app_country] => US [patent_app_date] => 2022-05-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3770 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17745395 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18021113 [patent_doc_number] => 20220372612 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-24 [patent_title] => CONSISTENT KNOWN VOLUME LIQUID METAL OR METAL ALLOY TRANSFER FROM ATMOSPHERIC TO VACUUM CHAMBER [patent_app_type] => utility [patent_app_number] => 17/663549 [patent_app_country] => US [patent_app_date] => 2022-05-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7460 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17663549 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19318778 [patent_doc_number] => 20240240321 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-07-18 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 18/559485 [patent_app_country] => US [patent_app_date] => 2022-04-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5580 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 68 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18559485 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18170093 [patent_doc_number] => 20230036704 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-02 [patent_title] => ARC ION COATING DEVICE AND COATING METHOD [patent_app_type] => utility [patent_app_number] => 17/720482 [patent_app_country] => US [patent_app_date] => 2022-04-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6463 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 201 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17720482 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18675755 [patent_doc_number] => 20230313378 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-05 [patent_title] => METHODS OF PREVENTING METAL CONTAMINATION BY CERAMIC HEATER [patent_app_type] => utility [patent_app_number] => 17/709931 [patent_app_country] => US [patent_app_date] => 2022-03-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7424 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17709931 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17946214 [patent_doc_number] => 20220333231 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-20 [patent_title] => EVAPORATION SOURCE COOLING MECHANISM [patent_app_type] => utility [patent_app_number] => 17/706181 [patent_app_country] => US [patent_app_date] => 2022-03-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7931 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 90 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17706181 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19972410 [patent_doc_number] => 12341030 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-06-24 [patent_title] => Support unit and substrate treating apparatus [patent_app_type] => utility [patent_app_number] => 17/704218 [patent_app_country] => US [patent_app_date] => 2022-03-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 8 [patent_no_of_words] => 1194 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 237 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17704218 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18661215 [patent_doc_number] => 20230307228 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-09-28 [patent_title] => PIXELATED SHOWERHEAD FOR RF SENSITIVE PROCESSES [patent_app_type] => utility [patent_app_number] => 17/703537 [patent_app_country] => US [patent_app_date] => 2022-03-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10520 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 67 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17703537 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17960438 [patent_doc_number] => 20220341018 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-27 [patent_title] => SEMICONDUCTOR MANUFACTURING APPARATUS MEMBER AND SEMICONDUCTOR MANUFACTURING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/701831 [patent_app_country] => US [patent_app_date] => 2022-03-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 18575 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 200 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17701831 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17883145 [patent_doc_number] => 20220298622 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-22 [patent_title] => Electron-Beam Deposition of Striated Composite Layers for High-Fluence Laser Coatings [patent_app_type] => utility [patent_app_number] => 17/695476 [patent_app_country] => US [patent_app_date] => 2022-03-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5908 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -31 [patent_words_short_claim] => 125 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17695476 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18631711 [patent_doc_number] => 20230290616 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-09-14 [patent_title] => SEMICONDUCTOR CHAMBER COMPONENTS WITH MULTI-LAYER COATING [patent_app_type] => utility [patent_app_number] => 17/693037 [patent_app_country] => US [patent_app_date] => 2022-03-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9296 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 99 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17693037 [rel_patent_id] =>[rel_patent_doc_number] =>)