Search

Kenny S. Lin

Examiner (ID: 382)

Most Active Art Unit
2416
Art Unit(s)
3649, 2416, 2478, 2152, 2452, 2154
Total Applications
1428
Issued Applications
984
Pending Applications
122
Abandoned Applications
356

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 17468840 [patent_doc_number] => 11275317 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2022-03-15 [patent_title] => Droplet generator and method of servicing a photolithographic tool [patent_app_type] => utility [patent_app_number] => 17/187272 [patent_app_country] => US [patent_app_date] => 2021-02-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 7750 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 69 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17187272 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/187272
Droplet generator and method of servicing a photolithographic tool Feb 25, 2021 Issued
Array ( [id] => 17351934 [patent_doc_number] => 11226566 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-01-18 [patent_title] => Method of measuring misregistration of semiconductor devices [patent_app_type] => utility [patent_app_number] => 17/161035 [patent_app_country] => US [patent_app_date] => 2021-01-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 5 [patent_no_of_words] => 1965 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 108 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17161035 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/161035
Method of measuring misregistration of semiconductor devices Jan 27, 2021 Issued
Array ( [id] => 17288000 [patent_doc_number] => 11204547 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-12-21 [patent_title] => Pellicle support frame, pellicle, method for manufacturing pellicle support frame, and exposure original plate and exposure device employing pellicle [patent_app_type] => utility [patent_app_number] => 16/953748 [patent_app_country] => US [patent_app_date] => 2020-11-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 39 [patent_figures_cnt] => 116 [patent_no_of_words] => 24569 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 130 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16953748 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/953748
Pellicle support frame, pellicle, method for manufacturing pellicle support frame, and exposure original plate and exposure device employing pellicle Nov 19, 2020 Issued
Array ( [id] => 17331104 [patent_doc_number] => 11221563 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-01-11 [patent_title] => Lens control for lithography tools [patent_app_type] => utility [patent_app_number] => 17/072857 [patent_app_country] => US [patent_app_date] => 2020-10-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 15 [patent_no_of_words] => 7050 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 140 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17072857 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/072857
Lens control for lithography tools Oct 15, 2020 Issued
Array ( [id] => 16623130 [patent_doc_number] => 20210041783 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-02-11 [patent_title] => MICROLITHOGRAPHIC FABRICATION OF STRUCTURES [patent_app_type] => utility [patent_app_number] => 17/067526 [patent_app_country] => US [patent_app_date] => 2020-10-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8177 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17067526 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/067526
Microlithographic fabrication of structures Oct 8, 2020 Issued
Array ( [id] => 17194488 [patent_doc_number] => 11163239 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-11-02 [patent_title] => Method, measuring system and lithography apparatus [patent_app_type] => utility [patent_app_number] => 17/066076 [patent_app_country] => US [patent_app_date] => 2020-10-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 11 [patent_no_of_words] => 7524 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 86 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17066076 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/066076
Method, measuring system and lithography apparatus Oct 7, 2020 Issued
Array ( [id] => 16761374 [patent_doc_number] => 20210106955 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-04-15 [patent_title] => EXHAUST SYSTEM AND EXHAUST METHOD [patent_app_type] => utility [patent_app_number] => 17/061899 [patent_app_country] => US [patent_app_date] => 2020-10-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11182 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 152 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17061899 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/061899
Exhaust system and exhaust method Oct 1, 2020 Issued
Array ( [id] => 16751217 [patent_doc_number] => 20210103226 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-04-08 [patent_title] => POSITION DETECTION APPARATUS, POSITION DETECTION METHOD, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE [patent_app_type] => utility [patent_app_number] => 17/036478 [patent_app_country] => US [patent_app_date] => 2020-09-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5981 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 73 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17036478 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/036478
Position detection apparatus, position detection method, lithography apparatus, and method of manufacturing article Sep 28, 2020 Issued
Array ( [id] => 16576989 [patent_doc_number] => 20210011390 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-01-14 [patent_title] => DYNAMIC COOLING CONTROL FOR THERMAL STABILIZATION FOR LITHOGRAPHY SYSTEM [patent_app_type] => utility [patent_app_number] => 17/035105 [patent_app_country] => US [patent_app_date] => 2020-09-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6617 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 133 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17035105 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/035105
Dynamic cooling control for thermal stabilization for lithography system Sep 27, 2020 Issued
Array ( [id] => 17394452 [patent_doc_number] => 11243463 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-02-08 [patent_title] => Supporting frame for pellicle, pellicle, method for manufacturing same, exposure master using same, and method for manufacturing semiconductor device [patent_app_type] => utility [patent_app_number] => 17/033076 [patent_app_country] => US [patent_app_date] => 2020-09-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 30 [patent_figures_cnt] => 57 [patent_no_of_words] => 17511 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 218 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17033076 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/033076
Supporting frame for pellicle, pellicle, method for manufacturing same, exposure master using same, and method for manufacturing semiconductor device Sep 24, 2020 Issued
Array ( [id] => 16542853 [patent_doc_number] => 20200409268 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-12-31 [patent_title] => METHOD FOR EXPOSING WAFER [patent_app_type] => utility [patent_app_number] => 17/019220 [patent_app_country] => US [patent_app_date] => 2020-09-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7445 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 76 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17019220 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/019220
Method for exposing wafer Sep 11, 2020 Issued
Array ( [id] => 17252492 [patent_doc_number] => 11187976 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-11-30 [patent_title] => Methods of detecting printing defects on photoresist patterns [patent_app_type] => utility [patent_app_number] => 17/017470 [patent_app_country] => US [patent_app_date] => 2020-09-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 22 [patent_figures_cnt] => 22 [patent_no_of_words] => 8319 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 160 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17017470 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/017470
Methods of detecting printing defects on photoresist patterns Sep 9, 2020 Issued
Array ( [id] => 17237955 [patent_doc_number] => 11181832 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-11-23 [patent_title] => Movable body apparatus, exposure apparatus, and device manufacturing method [patent_app_type] => utility [patent_app_number] => 17/011255 [patent_app_country] => US [patent_app_date] => 2020-09-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 12 [patent_no_of_words] => 18890 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 122 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17011255 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/011255
Movable body apparatus, exposure apparatus, and device manufacturing method Sep 2, 2020 Issued
Array ( [id] => 17091237 [patent_doc_number] => 11119421 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-09-14 [patent_title] => Extreme ultraviolet light condensation mirror, extreme ultraviolet light generation apparatus, and electronic device manufacturing method [patent_app_type] => utility [patent_app_number] => 17/004608 [patent_app_country] => US [patent_app_date] => 2020-08-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 13 [patent_no_of_words] => 9415 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 161 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17004608 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/004608
Extreme ultraviolet light condensation mirror, extreme ultraviolet light generation apparatus, and electronic device manufacturing method Aug 26, 2020 Issued
Array ( [id] => 17332342 [patent_doc_number] => 11222810 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2022-01-11 [patent_title] => Color filter structure and method to construct topography of stack structure [patent_app_type] => utility [patent_app_number] => 16/988713 [patent_app_country] => US [patent_app_date] => 2020-08-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 10 [patent_no_of_words] => 6275 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 79 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16988713 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/988713
Color filter structure and method to construct topography of stack structure Aug 8, 2020 Issued
Array ( [id] => 17379474 [patent_doc_number] => 11237486 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-02-01 [patent_title] => Radiation source [patent_app_type] => utility [patent_app_number] => 16/932184 [patent_app_country] => US [patent_app_date] => 2020-07-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 13 [patent_no_of_words] => 18425 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 113 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16932184 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/932184
Radiation source Jul 16, 2020 Issued
Array ( [id] => 17270315 [patent_doc_number] => 11195743 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-12-07 [patent_title] => Adjustable substrate support and adjustment method [patent_app_type] => utility [patent_app_number] => 16/931812 [patent_app_country] => US [patent_app_date] => 2020-07-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 20 [patent_no_of_words] => 9389 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 166 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16931812 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/931812
Adjustable substrate support and adjustment method Jul 16, 2020 Issued
Array ( [id] => 16675132 [patent_doc_number] => 20210063896 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-03-04 [patent_title] => SUBSTRATE CARRYING DEVICE, AND PHOTORESIST COATING DEVELOPMENT DEVICE [patent_app_type] => utility [patent_app_number] => 16/928059 [patent_app_country] => US [patent_app_date] => 2020-07-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5736 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 94 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16928059 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/928059
Substrate carrying device, and photoresist coating development device Jul 13, 2020 Issued
Array ( [id] => 16423409 [patent_doc_number] => 20200348607 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-11-05 [patent_title] => RADIATION SOURCE APPARATUS AND METHOD FOR DECREASING DEBRIS IN RADIATION SOURCE APPARATUS [patent_app_type] => utility [patent_app_number] => 16/927142 [patent_app_country] => US [patent_app_date] => 2020-07-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7978 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 87 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16927142 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/927142
Radiation source apparatus and method for decreasing debris in radiation source apparatus Jul 12, 2020 Issued
Array ( [id] => 16698234 [patent_doc_number] => 10948828 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-03-16 [patent_title] => Illumination optical element for projection lithography [patent_app_type] => utility [patent_app_number] => 16/925018 [patent_app_country] => US [patent_app_date] => 2020-07-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 19 [patent_no_of_words] => 5674 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 121 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16925018 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/925018
Illumination optical element for projection lithography Jul 8, 2020 Issued
Menu