Kenny S. Lin

Array ( [id] => 10392236 [patent_doc_number] => 20150277243 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-10-01 [patent_title] => 'SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 14/634272 [patent_app_country] => US [patent_app_date] => 2015-02-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 20515 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14634272 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10349290 [patent_doc_number] => 20150234295 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-08-20 [patent_title] => 'DYNAMIC PATTERNING METHOD THAT REMOVES PHASE CONFLICTS AND IMPROVES PATTERN FIDELITY AND CDU ON A TWO PHASE-PIXELATED DIGITAL SCANNER' [patent_app_type] => utility [patent_app_number] => 14/628163 [patent_app_country] => US [patent_app_date] => 2015-02-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 5671 [patent_no_of_claims] => 30 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14628163 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11896609 [patent_doc_number] => 09766543 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-09-19 [patent_title] => 'Liquid treatment method, substrate processing apparatus and non-transitory storage medium' [patent_app_type] => utility [patent_app_number] => 14/621522 [patent_app_country] => US [patent_app_date] => 2015-02-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 10239 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 157 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14621522 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10342070 [patent_doc_number] => 20150227075 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-08-13 [patent_title] => 'METHOD FOR IMPROVED CD CONTROL ON 2-PHASE DIGITAL SCANNER WITH NO LOSS TO IMAGE FIDELITY' [patent_app_type] => utility [patent_app_number] => 14/617863 [patent_app_country] => US [patent_app_date] => 2015-02-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 6397 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14617863 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13109421 [patent_doc_number] => 10073357 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-09-11 [patent_title] => Measuring a process parameter for a manufacturing process involving lithography [patent_app_type] => utility [patent_app_number] => 15/117409 [patent_app_country] => US [patent_app_date] => 2015-01-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 11 [patent_no_of_words] => 12826 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 92 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15117409 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11384484 [patent_doc_number] => 20170010541 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-01-12 [patent_title] => 'METHOD OF DETERMINING EDGE PLACEMENT ERROR, INSPECTION APPARATUS, PATTERNING DEVICE, SUBSTRATE AND DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 15/114368 [patent_app_country] => US [patent_app_date] => 2015-01-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 10433 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15114368 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12310101 [patent_doc_number] => 09939740 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-04-10 [patent_title] => Lithographic apparatus and device manufacturing method [patent_app_type] => utility [patent_app_number] => 15/116794 [patent_app_country] => US [patent_app_date] => 2015-01-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 13 [patent_no_of_words] => 12275 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 350 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15116794 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11384486 [patent_doc_number] => 20170010543 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-01-12 [patent_title] => 'STAGE POSITIONING SYSTEM AND LITHOGRAPHIC APPARATUS' [patent_app_type] => utility [patent_app_number] => 15/115876 [patent_app_country] => US [patent_app_date] => 2015-01-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 7062 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15115876 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13664227 [patent_doc_number] => 10162271 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-12-25 [patent_title] => Metrology method and apparatus, substrate, lithographic system and device manufacturing method [patent_app_type] => utility [patent_app_number] => 15/115229 [patent_app_country] => US [patent_app_date] => 2014-12-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 17 [patent_no_of_words] => 14442 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 164 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15115229 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11384488 [patent_doc_number] => 20170010544 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-01-12 [patent_title] => 'COIL ASSEMBLY, ELECTROMAGNETIC ACTUATOR, STAGE POSITIONING DEVICE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 15/113428 [patent_app_country] => US [patent_app_date] => 2014-12-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 6596 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15113428 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12949495 [patent_doc_number] => 09835950 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-12-05 [patent_title] => Radiation source [patent_app_type] => utility [patent_app_number] => 15/112602 [patent_app_country] => US [patent_app_date] => 2014-12-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 26 [patent_no_of_words] => 16737 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 159 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15112602 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13664233 [patent_doc_number] => 10162274 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-12-25 [patent_title] => Movable body drive method and system, pattern formation method and apparatus, exposure method and apparatus for driving movable body based on measurement value of encoder and information on flatness of scale, and device manufacturing method [patent_app_type] => utility [patent_app_number] => 14/570669 [patent_app_country] => US [patent_app_date] => 2014-12-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 33 [patent_figures_cnt] => 48 [patent_no_of_words] => 44273 [patent_no_of_claims] => 31 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 200 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14570669 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10200281 [patent_doc_number] => 20150085267 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-03-26 [patent_title] => 'Method of Determining Focus Corrections, Lithographic Processing Cell and Device Manufacturing Method' [patent_app_type] => utility [patent_app_number] => 14/562133 [patent_app_country] => US [patent_app_date] => 2014-12-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 11025 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14562133 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10283848 [patent_doc_number] => 20150168846 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-06-18 [patent_title] => 'OPTICAL ELEMENT UNIT FOR EXPOSURE PROCESSES' [patent_app_type] => utility [patent_app_number] => 14/560756 [patent_app_country] => US [patent_app_date] => 2014-12-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 12940 [patent_no_of_claims] => 30 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14560756 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9915465 [patent_doc_number] => 20150070669 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-03-12 [patent_title] => 'CALCULATION METHOD, GENERATION METHOD, PROGRAM, EXPOSURE METHOD, AND MASK FABRICATION METHOD' [patent_app_type] => utility [patent_app_number] => 14/542166 [patent_app_country] => US [patent_app_date] => 2014-11-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 27 [patent_figures_cnt] => 27 [patent_no_of_words] => 22877 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14542166 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10246076 [patent_doc_number] => 20150131071 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-05-14 [patent_title] => 'SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS' [patent_app_type] => utility [patent_app_number] => 14/534340 [patent_app_country] => US [patent_app_date] => 2014-11-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 17 [patent_no_of_words] => 14480 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14534340 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10239241 [patent_doc_number] => 20150124236 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-05-07 [patent_title] => 'LIGHT EXPOSURE SYSTEM AND LIGHT EXPOSURE PROCESS' [patent_app_type] => utility [patent_app_number] => 14/535012 [patent_app_country] => US [patent_app_date] => 2014-11-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 7128 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14535012 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11830246 [patent_doc_number] => 09726986 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-08-08 [patent_title] => 'Tray for an exposure machine' [patent_app_type] => utility [patent_app_number] => 14/533778 [patent_app_country] => US [patent_app_date] => 2014-11-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 12 [patent_no_of_words] => 7271 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 204 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14533778 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10246069 [patent_doc_number] => 20150131065 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-05-14 [patent_title] => 'FOREIGN SUBSTANCE DETECTION METHOD, FOREIGN SUBSTANCE DETECTION APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING DEVICE' [patent_app_type] => utility [patent_app_number] => 14/533733 [patent_app_country] => US [patent_app_date] => 2014-11-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 5710 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14533733 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11272170 [patent_doc_number] => 20160334717 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-11-17 [patent_title] => 'METHOD OF DETERMINING A MEASUREMENT SUBSET OF METROLOGY POINTS ON A SUBSTRATE, ASSOCIATED APPARATUS AND COMPUTER PROGRAM' [patent_app_type] => utility [patent_app_number] => 15/111763 [patent_app_country] => US [patent_app_date] => 2014-11-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 9977 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15111763 [rel_patent_id] =>[rel_patent_doc_number] =>)