Kenny S. Lin

Array ( [id] => 14750011 [patent_doc_number] => 20190258179 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-08-22 [patent_title] => Noise Reduction for Overlay Control [patent_app_type] => utility [patent_app_number] => 16/402828 [patent_app_country] => US [patent_app_date] => 2019-05-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7538 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16402828 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15181543 [patent_doc_number] => 20190361363 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-11-28 [patent_title] => PERFORMANCE MONITORING OF DESIGN-BASED ALIGNMENT [patent_app_type] => utility [patent_app_number] => 16/400756 [patent_app_country] => US [patent_app_date] => 2019-05-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6556 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 90 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16400756 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16423403 [patent_doc_number] => 20200348601 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-11-05 [patent_title] => Optical Lithography System for Patterning Semiconductor Devices and Method of Using the Same [patent_app_type] => utility [patent_app_number] => 16/399332 [patent_app_country] => US [patent_app_date] => 2019-04-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11960 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 123 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16399332 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15025935 [patent_doc_number] => 20190323972 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-10-24 [patent_title] => METHOD OF DETERMINING A VALUE OF A PARAMETER OF INTEREST OF A TARGET FORMED BY A PATTERNING PROCESS [patent_app_type] => utility [patent_app_number] => 16/385651 [patent_app_country] => US [patent_app_date] => 2019-04-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 23920 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 211 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16385651 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16270109 [patent_doc_number] => 20200271596 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-08-27 [patent_title] => METHOD OF MEASURING MISREGISTRATION OF SEMICONDUCTOR DEVICES [patent_app_type] => utility [patent_app_number] => 16/349101 [patent_app_country] => US [patent_app_date] => 2019-04-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 1945 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 121 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16349101 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14970139 [patent_doc_number] => 20190312548 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-10-10 [patent_title] => METHODS AND SYSTEMS FOR DETERMINING SOILING ON PHOTOVOLTAIC DEVICES [patent_app_type] => utility [patent_app_number] => 16/376547 [patent_app_country] => US [patent_app_date] => 2019-04-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 19184 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 115 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16376547 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14933965 [patent_doc_number] => 20190302620 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-10-03 [patent_title] => MASKLESS PHOTOLITHOGRAPHY DEVICES, METHODS, AND SYSTEMS [patent_app_type] => utility [patent_app_number] => 16/366600 [patent_app_country] => US [patent_app_date] => 2019-03-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4600 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 80 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16366600 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14933947 [patent_doc_number] => 20190302611 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-10-03 [patent_title] => MICROLITHOGRAPHIC FABRICATION OF STRUCTURES [patent_app_type] => utility [patent_app_number] => 16/356836 [patent_app_country] => US [patent_app_date] => 2019-03-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8133 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16356836 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17515145 [patent_doc_number] => 11294291 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-04-05 [patent_title] => Lithographic apparatus [patent_app_type] => utility [patent_app_number] => 16/982650 [patent_app_country] => US [patent_app_date] => 2019-03-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 8 [patent_no_of_words] => 4953 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 48 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16982650 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15283897 [patent_doc_number] => 10514611 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-12-24 [patent_title] => Projection exposure method and projection exposure apparatus for microlithography [patent_app_type] => utility [patent_app_number] => 16/296662 [patent_app_country] => US [patent_app_date] => 2019-03-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 9 [patent_no_of_words] => 10416 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 203 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16296662 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14933967 [patent_doc_number] => 20190302621 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-10-03 [patent_title] => IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUCING METHOD [patent_app_type] => utility [patent_app_number] => 16/293516 [patent_app_country] => US [patent_app_date] => 2019-03-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8340 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16293516 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16833547 [patent_doc_number] => 11009794 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-05-18 [patent_title] => Anti-reflection optical substrates and methods of manufacture [patent_app_type] => utility [patent_app_number] => 16/292771 [patent_app_country] => US [patent_app_date] => 2019-03-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 11 [patent_no_of_words] => 7506 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 85 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16292771 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14505381 [patent_doc_number] => 20190196345 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-06-27 [patent_title] => PATTERNING DEVICE COOLING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/289875 [patent_app_country] => US [patent_app_date] => 2019-03-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13173 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16289875 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15852879 [patent_doc_number] => 10641713 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2020-05-05 [patent_title] => Phase retardance optical scanner [patent_app_type] => utility [patent_app_number] => 16/289632 [patent_app_country] => US [patent_app_date] => 2019-02-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 13 [patent_no_of_words] => 5264 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 91 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16289632 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16337808 [patent_doc_number] => 10788762 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-09-29 [patent_title] => Dynamic cooling control for thermal stabilization for lithography system [patent_app_type] => utility [patent_app_number] => 16/284516 [patent_app_country] => US [patent_app_date] => 2019-02-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 12 [patent_no_of_words] => 6575 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 227 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16284516 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16534788 [patent_doc_number] => 10877384 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2020-12-29 [patent_title] => Radiation shielding device and apparatus comprising such shielding device [patent_app_type] => utility [patent_app_number] => 16/971751 [patent_app_country] => US [patent_app_date] => 2019-02-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 15 [patent_no_of_words] => 7363 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 153 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16971751 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15668739 [patent_doc_number] => 10598592 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2020-03-24 [patent_title] => Retroreflective optical system and methods [patent_app_type] => utility [patent_app_number] => 16/280954 [patent_app_country] => US [patent_app_date] => 2019-02-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 15 [patent_no_of_words] => 6635 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 126 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16280954 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14824339 [patent_doc_number] => 10409173 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-09-10 [patent_title] => Pattern forming apparatus, mark detecting apparatus, exposure apparatus, pattern forming method, exposure method, and device manufacturing method [patent_app_type] => utility [patent_app_number] => 16/259269 [patent_app_country] => US [patent_app_date] => 2019-01-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 37 [patent_figures_cnt] => 57 [patent_no_of_words] => 49868 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 666 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16259269 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15283887 [patent_doc_number] => 10514606 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-12-24 [patent_title] => Method for adjusting a lighting setting [patent_app_type] => utility [patent_app_number] => 16/248413 [patent_app_country] => US [patent_app_date] => 2019-01-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 12 [patent_no_of_words] => 8281 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16248413 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15136085 [patent_doc_number] => 10481508 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-11-19 [patent_title] => Exposure apparatus and method of manufacturing article [patent_app_type] => utility [patent_app_number] => 16/243200 [patent_app_country] => US [patent_app_date] => 2019-01-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 18 [patent_no_of_words] => 10585 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 328 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16243200 [rel_patent_id] =>[rel_patent_doc_number] =>)