Kenny S. Lin

Array ( [id] => 16957465 [patent_doc_number] => 11061322 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-07-13 [patent_title] => Systems and methods using mask pattern measurements performed with compensated light signals [patent_app_type] => utility [patent_app_number] => 16/114880 [patent_app_country] => US [patent_app_date] => 2018-08-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 7366 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 67 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16114880 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13905109 [patent_doc_number] => 20190041759 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-02-07 [patent_title] => EXPOSURE METHOD, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING ARTICLE [patent_app_type] => utility [patent_app_number] => 16/050203 [patent_app_country] => US [patent_app_date] => 2018-07-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6476 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 153 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16050203 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14329801 [patent_doc_number] => 10295915 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-05-21 [patent_title] => Mask manufacturing apparatus and, manufacturing method of mask and, mask for lithography [patent_app_type] => utility [patent_app_number] => 16/049962 [patent_app_country] => US [patent_app_date] => 2018-07-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 12 [patent_no_of_words] => 3891 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 146 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16049962 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14346369 [patent_doc_number] => 20190155157 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-05-23 [patent_title] => LIGHT SOURCE FOR LITHOGRAPHY EXPOSURE PROCESS [patent_app_type] => utility [patent_app_number] => 16/045811 [patent_app_country] => US [patent_app_date] => 2018-07-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8042 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 24 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16045811 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15247611 [patent_doc_number] => 10509327 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2019-12-17 [patent_title] => Variable neutral density filter for multi-beam interference lithography exposure [patent_app_type] => utility [patent_app_number] => 16/044046 [patent_app_country] => US [patent_app_date] => 2018-07-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 17 [patent_no_of_words] => 10917 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16044046 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15966209 [patent_doc_number] => 20200166856 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-05-28 [patent_title] => OBJECTIVE LENS PROTECTION DEVICE, OBJECTIVE LENS SYSTEM AND LITHOGRAPHIC DEVICE [patent_app_type] => utility [patent_app_number] => 16/632812 [patent_app_country] => US [patent_app_date] => 2018-07-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4493 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -24 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16632812 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13540107 [patent_doc_number] => 20180321600 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-11-08 [patent_title] => MOVABLE BODY APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 16/032570 [patent_app_country] => US [patent_app_date] => 2018-07-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 18857 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -22 [patent_words_short_claim] => 100 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16032570 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13525239 [patent_doc_number] => 20180314162 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-11-01 [patent_title] => ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 16/028959 [patent_app_country] => US [patent_app_date] => 2018-07-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8290 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => 0 [patent_words_short_claim] => 73 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16028959 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16129123 [patent_doc_number] => 10698318 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-06-30 [patent_title] => Method and device for characterizing a mask for microlithography [patent_app_type] => utility [patent_app_number] => 16/026675 [patent_app_country] => US [patent_app_date] => 2018-07-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 19 [patent_no_of_words] => 5146 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 167 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16026675 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14106085 [patent_doc_number] => 20190094718 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-03-28 [patent_title] => RADIATION SOURCE APPARATUS, EUV LITHOGRAPHY SYSTEM, AND METHOD FOR DECREASING DEBRIS IN EUV LITHOGRAPHY SYSTEM [patent_app_type] => utility [patent_app_number] => 16/021461 [patent_app_country] => US [patent_app_date] => 2018-06-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7996 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16021461 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15230731 [patent_doc_number] => 10503085 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-12-10 [patent_title] => Lithography apparatus and method [patent_app_type] => utility [patent_app_number] => 16/007182 [patent_app_country] => US [patent_app_date] => 2018-06-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 5790 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 81 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16007182 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15788011 [patent_doc_number] => 10627727 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-04-21 [patent_title] => Lens control for lithography tools [patent_app_type] => utility [patent_app_number] => 16/007786 [patent_app_country] => US [patent_app_date] => 2018-06-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 15 [patent_no_of_words] => 7049 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 132 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16007786 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13482435 [patent_doc_number] => 20180292760 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-10-11 [patent_title] => DYNAMIC PATTERNING METHOD THAT REMOVES PHASE CONFLICTS AND IMPROVES PATTERN FIDELITY AND CDU ON A TWO PHASE-PIXELATED DIGITAL SCANNER [patent_app_type] => utility [patent_app_number] => 16/006646 [patent_app_country] => US [patent_app_date] => 2018-06-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5607 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16006646 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15058099 [patent_doc_number] => 10459349 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-10-29 [patent_title] => Exposure method, exposure apparatus and method of manufacturing article [patent_app_type] => utility [patent_app_number] => 16/003824 [patent_app_country] => US [patent_app_date] => 2018-06-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 11 [patent_no_of_words] => 4602 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 113 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16003824 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15902059 [patent_doc_number] => 20200150549 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-05-14 [patent_title] => A SYSTEM, A LITHOGRAPHIC APPARATUS, AND A METHOD FOR REDUCING OXIDATION OR REMOVING OXIDE ON A SUBSTRATE SUPPORT [patent_app_type] => utility [patent_app_number] => 16/623898 [patent_app_country] => US [patent_app_date] => 2018-06-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11204 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 64 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16623898 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15901597 [patent_doc_number] => 20200150318 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-05-14 [patent_title] => LIGHT BEAM DIFFUSER SYSTEM AND METHOD [patent_app_type] => utility [patent_app_number] => 16/613308 [patent_app_country] => US [patent_app_date] => 2018-05-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4086 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 154 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16613308 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16634040 [patent_doc_number] => 10912525 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-02-09 [patent_title] => Adjustment method for a marking laser beam, corresponding adjustment system and imaging modality [patent_app_type] => utility [patent_app_number] => 15/968799 [patent_app_country] => US [patent_app_date] => 2018-05-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 14980 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 182 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15968799 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13415651 [patent_doc_number] => 20180259368 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-09-13 [patent_title] => MEASUREMENT METHOD AND ENCODER DEVICE, AND EXPOSURE METHOD AND DEVICE [patent_app_type] => utility [patent_app_number] => 15/964230 [patent_app_country] => US [patent_app_date] => 2018-04-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 16851 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -21 [patent_words_short_claim] => 233 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15964230 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13737375 [patent_doc_number] => 20180373155 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-12-27 [patent_title] => PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS [patent_app_type] => utility [patent_app_number] => 15/963278 [patent_app_country] => US [patent_app_date] => 2018-04-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3509 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15963278 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14456847 [patent_doc_number] => 10324382 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-06-18 [patent_title] => Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method [patent_app_type] => utility [patent_app_number] => 15/958714 [patent_app_country] => US [patent_app_date] => 2018-04-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 25 [patent_no_of_words] => 20279 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 172 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15958714 [rel_patent_id] =>[rel_patent_doc_number] =>)