Search

Kenny S. Lin

Examiner (ID: 382)

Most Active Art Unit
2416
Art Unit(s)
3649, 2416, 2478, 2152, 2452, 2154
Total Applications
1428
Issued Applications
984
Pending Applications
122
Abandoned Applications
356

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 16856503 [patent_doc_number] => 20210157248 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-27 [patent_title] => Metrology Sensor, Lithographic Apparatus and Method for Manufacturing Devices [patent_app_type] => utility [patent_app_number] => 16/613551 [patent_app_country] => US [patent_app_date] => 2018-04-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11576 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16613551 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/613551
Metrology sensor, lithographic apparatus and method for manufacturing devices Apr 12, 2018 Issued
Array ( [id] => 13360717 [patent_doc_number] => 20180231898 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-08-16 [patent_title] => APPARATUS AND METHOD FOR MAINTAINING IMMERSION FLUID IN THE GAP UNDER THE PROJECTION LENS DURING WAFER EXCHANGE IN AN IMMERSION LITHOGRAPHY MACHINE [patent_app_type] => utility [patent_app_number] => 15/950619 [patent_app_country] => US [patent_app_date] => 2018-04-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6249 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -20 [patent_words_short_claim] => 147 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15950619 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/950619
APPARATUS AND METHOD FOR MAINTAINING IMMERSION FLUID IN THE GAP UNDER THE PROJECTION LENS DURING WAFER EXCHANGE IN AN IMMERSION LITHOGRAPHY MACHINE Apr 10, 2018 Abandoned
Array ( [id] => 16856502 [patent_doc_number] => 20210157247 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-27 [patent_title] => MAINTAINING A SET OF PROCESS FINGERPRINTS [patent_app_type] => utility [patent_app_number] => 16/493326 [patent_app_country] => US [patent_app_date] => 2018-04-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9094 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 89 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16493326 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/493326
Maintaining a set of process fingerprints Apr 8, 2018 Issued
Array ( [id] => 13890755 [patent_doc_number] => 10197924 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-02-05 [patent_title] => Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method [patent_app_type] => utility [patent_app_number] => 15/946030 [patent_app_country] => US [patent_app_date] => 2018-04-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 34 [patent_figures_cnt] => 50 [patent_no_of_words] => 46006 [patent_no_of_claims] => 48 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 631 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15946030 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/946030
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method Apr 4, 2018 Issued
Array ( [id] => 14540857 [patent_doc_number] => 20190206050 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-07-04 [patent_title] => USE OF LASER LIGHT AND RED-GREEN-BLUE COLORATION TO DETERMINE PROPERTIES OF BACK SCATTERED LIGHT [patent_app_type] => utility [patent_app_number] => 15/940704 [patent_app_country] => US [patent_app_date] => 2018-03-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 59338 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 133 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15940704 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/940704
Use of laser light and red-green-blue coloration to determine properties of back scattered light Mar 28, 2018 Issued
Array ( [id] => 13447965 [patent_doc_number] => 20180275525 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-09-27 [patent_title] => LITHOGRAPHIC THERMAL DISTORTION COMPENSATION WITH THE USE OF MACHINE LEARNING [patent_app_type] => utility [patent_app_number] => 15/935555 [patent_app_country] => US [patent_app_date] => 2018-03-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7199 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 232 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15935555 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/935555
Lithographic thermal distortion compensation with the use of machine learning Mar 25, 2018 Issued
Array ( [id] => 13816909 [patent_doc_number] => 10185223 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-01-22 [patent_title] => Lithographic apparatus and surface cleaning method [patent_app_type] => utility [patent_app_number] => 15/935670 [patent_app_country] => US [patent_app_date] => 2018-03-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 20 [patent_no_of_words] => 18239 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 113 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15935670 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/935670
Lithographic apparatus and surface cleaning method Mar 25, 2018 Issued
Array ( [id] => 14900571 [patent_doc_number] => 20190294051 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-09-26 [patent_title] => SPATIAL LIGHT MODULATOR WITH VARIABLE INTENSITY DIODES [patent_app_type] => utility [patent_app_number] => 15/933147 [patent_app_country] => US [patent_app_date] => 2018-03-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7469 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15933147 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/933147
Spatial light modulator with variable intensity diodes Mar 21, 2018 Issued
Array ( [id] => 14033749 [patent_doc_number] => 10228623 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-03-12 [patent_title] => Image-forming optical system, exposure apparatus, and device producing method [patent_app_type] => utility [patent_app_number] => 15/923858 [patent_app_country] => US [patent_app_date] => 2018-03-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 8427 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 301 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15923858 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/923858
Image-forming optical system, exposure apparatus, and device producing method Mar 15, 2018 Issued
Array ( [id] => 15136073 [patent_doc_number] => 10481502 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-11-19 [patent_title] => Object holder and lithographic apparatus [patent_app_type] => utility [patent_app_number] => 15/918478 [patent_app_country] => US [patent_app_date] => 2018-03-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 26 [patent_no_of_words] => 16972 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15918478 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/918478
Object holder and lithographic apparatus Mar 11, 2018 Issued
Array ( [id] => 13431765 [patent_doc_number] => 20180267425 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-09-20 [patent_title] => METHOD FOR IMPROVED CD CONTROL ON 2-PHASE DIGITAL SCANNER WITH NO LOSS TO IMAGE FIDELITY [patent_app_type] => utility [patent_app_number] => 15/917522 [patent_app_country] => US [patent_app_date] => 2018-03-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6252 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -21 [patent_words_short_claim] => 109 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15917522 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/917522
METHOD FOR IMPROVED CD CONTROL ON 2-PHASE DIGITAL SCANNER WITH NO LOSS TO IMAGE FIDELITY Mar 8, 2018 Abandoned
Array ( [id] => 16462360 [patent_doc_number] => 10845706 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-11-24 [patent_title] => Mirror array [patent_app_type] => utility [patent_app_number] => 16/500460 [patent_app_country] => US [patent_app_date] => 2018-03-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 8 [patent_no_of_words] => 9182 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 85 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16500460 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/500460
Mirror array Mar 7, 2018 Issued
Array ( [id] => 16607506 [patent_doc_number] => 10908507 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-02-02 [patent_title] => Micro LED array illumination source [patent_app_type] => utility [patent_app_number] => 15/910775 [patent_app_country] => US [patent_app_date] => 2018-03-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 3631 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 118 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15910775 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/910775
Micro LED array illumination source Mar 1, 2018 Issued
Array ( [id] => 17164468 [patent_doc_number] => 11150562 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-10-19 [patent_title] => Optimizing an apparatus for multi-stage processing of product units [patent_app_type] => utility [patent_app_number] => 16/486859 [patent_app_country] => US [patent_app_date] => 2018-02-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 10705 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 92 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16486859 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/486859
Optimizing an apparatus for multi-stage processing of product units Feb 21, 2018 Issued
Array ( [id] => 16698237 [patent_doc_number] => 10948831 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-03-16 [patent_title] => Methods of determining process models by machine learning [patent_app_type] => utility [patent_app_number] => 16/484186 [patent_app_country] => US [patent_app_date] => 2018-02-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 12710 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 147 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16484186 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/484186
Methods of determining process models by machine learning Feb 19, 2018 Issued
Array ( [id] => 13664235 [patent_doc_number] => 10162275 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-12-25 [patent_title] => Homogeneous thermal equalization with active device [patent_app_type] => utility [patent_app_number] => 15/898920 [patent_app_country] => US [patent_app_date] => 2018-02-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 18 [patent_no_of_words] => 5105 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 172 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15898920 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/898920
Homogeneous thermal equalization with active device Feb 18, 2018 Issued
Array ( [id] => 14134897 [patent_doc_number] => 20190101838 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-04-04 [patent_title] => METHODS AND APPARATUS FOR REMOVING CONTAINMINATION FROM LITHOGRAPHIC TOOL [patent_app_type] => utility [patent_app_number] => 15/898813 [patent_app_country] => US [patent_app_date] => 2018-02-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7049 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 73 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15898813 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/898813
Methods and apparatus for removing contamination from lithographic tool Feb 18, 2018 Issued
Array ( [id] => 12843823 [patent_doc_number] => 20180173114 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-06-21 [patent_title] => SUBSTRATE HOLDING DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 15/888703 [patent_app_country] => US [patent_app_date] => 2018-02-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12383 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -28 [patent_words_short_claim] => 118 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15888703 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/888703
Substrate holding device, exposure apparatus, and device manufacturing method Feb 4, 2018 Issued
Array ( [id] => 12843823 [patent_doc_number] => 20180173114 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-06-21 [patent_title] => SUBSTRATE HOLDING DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 15/888703 [patent_app_country] => US [patent_app_date] => 2018-02-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12383 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -28 [patent_words_short_claim] => 118 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15888703 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/888703
Substrate holding device, exposure apparatus, and device manufacturing method Feb 4, 2018 Issued
Array ( [id] => 12843823 [patent_doc_number] => 20180173114 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-06-21 [patent_title] => SUBSTRATE HOLDING DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 15/888703 [patent_app_country] => US [patent_app_date] => 2018-02-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12383 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -28 [patent_words_short_claim] => 118 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15888703 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/888703
Substrate holding device, exposure apparatus, and device manufacturing method Feb 4, 2018 Issued
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