Search

Kenny S. Lin

Examiner (ID: 382)

Most Active Art Unit
2416
Art Unit(s)
3649, 2416, 2478, 2152, 2452, 2154
Total Applications
1428
Issued Applications
984
Pending Applications
122
Abandoned Applications
356

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 12843823 [patent_doc_number] => 20180173114 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-06-21 [patent_title] => SUBSTRATE HOLDING DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 15/888703 [patent_app_country] => US [patent_app_date] => 2018-02-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12383 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -28 [patent_words_short_claim] => 118 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15888703 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/888703
Substrate holding device, exposure apparatus, and device manufacturing method Feb 4, 2018 Issued
Array ( [id] => 13389745 [patent_doc_number] => 20180246415 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-08-30 [patent_title] => METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS [patent_app_type] => utility [patent_app_number] => 15/878747 [patent_app_country] => US [patent_app_date] => 2018-01-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12411 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15878747 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/878747
METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS Jan 23, 2018 Abandoned
Array ( [id] => 14628117 [patent_doc_number] => 20190227426 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-07-25 [patent_title] => IMAGE READING DEVICE AND IMAGE FORMING DEVICE [patent_app_type] => utility [patent_app_number] => 16/338662 [patent_app_country] => US [patent_app_date] => 2018-01-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8471 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 185 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16338662 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/338662
IMAGE READING DEVICE AND IMAGE FORMING DEVICE Jan 14, 2018 Abandoned
Array ( [id] => 14668293 [patent_doc_number] => 10372044 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-08-06 [patent_title] => Substrate table, a lithographic apparatus and a device manufacturing method [patent_app_type] => utility [patent_app_number] => 15/856133 [patent_app_country] => US [patent_app_date] => 2017-12-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 14 [patent_no_of_words] => 10912 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 120 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15856133 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/856133
Substrate table, a lithographic apparatus and a device manufacturing method Dec 27, 2017 Issued
Array ( [id] => 16462373 [patent_doc_number] => 10845719 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-11-24 [patent_title] => Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method [patent_app_type] => utility [patent_app_number] => 16/479959 [patent_app_country] => US [patent_app_date] => 2017-12-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 8 [patent_no_of_words] => 9062 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 130 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16479959 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/479959
Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method Dec 19, 2017 Issued
Array ( [id] => 12849133 [patent_doc_number] => 20180174884 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-06-21 [patent_title] => SUBSTRATE HOLDING METHOD, SUBSTRATE HOLDING APPARATUS, EXPOSURE APPARATUS AND EXPOSURE METHOD [patent_app_type] => utility [patent_app_number] => 15/845654 [patent_app_country] => US [patent_app_date] => 2017-12-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14135 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 80 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15845654 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/845654
SUBSTRATE HOLDING METHOD, SUBSTRATE HOLDING APPARATUS, EXPOSURE APPARATUS AND EXPOSURE METHOD Dec 17, 2017 Abandoned
Array ( [id] => 13303661 [patent_doc_number] => 20180203367 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-07-19 [patent_title] => Methods and Apparatus for Predicting Performance of a Measurement Method, Measurement Method and Apparatus [patent_app_type] => utility [patent_app_number] => 15/834763 [patent_app_country] => US [patent_app_date] => 2017-12-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 18705 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15834763 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/834763
Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus Dec 6, 2017 Issued
Array ( [id] => 12867490 [patent_doc_number] => 20180181005 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-06-28 [patent_title] => ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS [patent_app_type] => utility [patent_app_number] => 15/830876 [patent_app_country] => US [patent_app_date] => 2017-12-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4907 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15830876 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/830876
Arrangement for actuating an element in a microlithographic projection exposure apparatus Dec 3, 2017 Issued
Array ( [id] => 12234543 [patent_doc_number] => 20180067405 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-03-08 [patent_title] => 'MOVABLE BODY DRIVE METHOD AND MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION METHOD AND APPARATUS, EXPOSURE METHOD AND APPARATUS, DEVICE MANUFACTURING METHOD, AND CALIBRATION METHOD' [patent_app_type] => utility [patent_app_number] => 15/812592 [patent_app_country] => US [patent_app_date] => 2017-11-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 35 [patent_figures_cnt] => 35 [patent_no_of_words] => 48632 [patent_no_of_claims] => 40 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15812592 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/812592
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method Nov 13, 2017 Issued
Array ( [id] => 12818554 [patent_doc_number] => 20180164690 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-06-14 [patent_title] => IMAGING OPTICAL UNIT FOR EUV PROJECTION LITHOGRAPHY [patent_app_type] => utility [patent_app_number] => 15/810735 [patent_app_country] => US [patent_app_date] => 2017-11-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13472 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15810735 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/810735
Imaging optical unit for EUV projection lithography Nov 12, 2017 Issued
Array ( [id] => 15166161 [patent_doc_number] => 10488567 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-11-26 [patent_title] => Faceted mirror for EUV projection lithography and illumination optical unit with same [patent_app_type] => utility [patent_app_number] => 15/801693 [patent_app_country] => US [patent_app_date] => 2017-11-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 10 [patent_no_of_words] => 5693 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15801693 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/801693
Faceted mirror for EUV projection lithography and illumination optical unit with same Nov 1, 2017 Issued
Array ( [id] => 16407934 [patent_doc_number] => 10816482 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-10-27 [patent_title] => High throughput, high resolution optical metrology for reflective and transmissive nanophotonic devices [patent_app_type] => utility [patent_app_number] => 15/770095 [patent_app_country] => US [patent_app_date] => 2017-10-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 35 [patent_no_of_words] => 12835 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15770095 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/770095
High throughput, high resolution optical metrology for reflective and transmissive nanophotonic devices Oct 25, 2017 Issued
Array ( [id] => 16031421 [patent_doc_number] => 10678127 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-06-09 [patent_title] => Photolithography device for generating pattern on a photoresist substrate [patent_app_type] => utility [patent_app_number] => 16/341942 [patent_app_country] => US [patent_app_date] => 2017-10-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 44 [patent_figures_cnt] => 47 [patent_no_of_words] => 13161 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 113 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16341942 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/341942
Photolithography device for generating pattern on a photoresist substrate Oct 19, 2017 Issued
Array ( [id] => 12207174 [patent_doc_number] => 20180052399 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-02-22 [patent_title] => 'EXPOSURE APPARATUS, EXPOSING METHOD, METHOD FOR MANUFACTURING DEVICE, PROGRAM, AND RECORDING MEDIUM' [patent_app_type] => utility [patent_app_number] => 15/784907 [patent_app_country] => US [patent_app_date] => 2017-10-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 32 [patent_figures_cnt] => 32 [patent_no_of_words] => 64232 [patent_no_of_claims] => 1 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15784907 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/784907
Exposure apparatus, exposing method, method for manufacturing device, program, and recording medium Oct 15, 2017 Issued
Array ( [id] => 15499853 [patent_doc_number] => 20200050115 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-02-13 [patent_title] => MOTOR ASSEMBLY, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 16/343569 [patent_app_country] => US [patent_app_date] => 2017-09-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9504 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16343569 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/343569
Motor assembly, lithographic apparatus and device manufacturing method Sep 26, 2017 Issued
Array ( [id] => 14249301 [patent_doc_number] => 10274847 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-04-30 [patent_title] => Humidity control in EUV lithography [patent_app_type] => utility [patent_app_number] => 15/708800 [patent_app_country] => US [patent_app_date] => 2017-09-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 7571 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 82 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15708800 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/708800
Humidity control in EUV lithography Sep 18, 2017 Issued
Array ( [id] => 14249253 [patent_doc_number] => 10274823 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-04-30 [patent_title] => Microlithographic fabrication of structures [patent_app_type] => utility [patent_app_number] => 15/705948 [patent_app_country] => US [patent_app_date] => 2017-09-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 12 [patent_no_of_words] => 8114 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 90 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15705948 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/705948
Microlithographic fabrication of structures Sep 14, 2017 Issued
Array ( [id] => 12122839 [patent_doc_number] => 20180006425 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-01-04 [patent_title] => 'ONLINE CALIBRATION FOR REPETITION RATE DEPENDENT PERFORMANCE VARIABLES' [patent_app_type] => utility [patent_app_number] => 15/700754 [patent_app_country] => US [patent_app_date] => 2017-09-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 10063 [patent_no_of_claims] => 30 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15700754 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/700754
Online calibration for repetition rate dependent performance variables Sep 10, 2017 Issued
Array ( [id] => 13947721 [patent_doc_number] => 10209631 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-02-19 [patent_title] => Exposure apparatus and method of manufacturing article [patent_app_type] => utility [patent_app_number] => 15/700481 [patent_app_country] => US [patent_app_date] => 2017-09-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 18 [patent_no_of_words] => 10585 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 317 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15700481 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/700481
Exposure apparatus and method of manufacturing article Sep 10, 2017 Issued
Array ( [id] => 12241554 [patent_doc_number] => 20180074417 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-03-15 [patent_title] => 'SYSTEM AND METHOD FOR CONTROL OF A WORKPIECE AND A CHUCK' [patent_app_type] => utility [patent_app_number] => 15/698503 [patent_app_country] => US [patent_app_date] => 2017-09-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 13280 [patent_no_of_claims] => 30 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15698503 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/698503
System and method for control of a workpiece and a chuck Sep 6, 2017 Issued
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