| Application number | Title of the application | Filing Date | Status |
|---|
Array
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[patent_title] => 'Distributed microwave plasma reactor for semiconductor processing'
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Array
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[patent_issue_date] => 1996-08-13
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Array
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[patent_doc_number] => 05529632
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[patent_kind] => NA
[patent_issue_date] => 1996-06-25
[patent_title] => 'Microwave plasma processing system'
[patent_app_type] => 1
[patent_app_number] => 8/490087
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Array
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[patent_doc_number] => 05716485
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[patent_issue_date] => 1998-02-10
[patent_title] => 'Electrode designs for controlling uniformity profiles in plasma processing reactors'
[patent_app_type] => 1
[patent_app_number] => 8/476966
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[patent_app_date] => 1995-06-07
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[firstpage_image] =>[orig_patent_app_number] => 476966
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Array
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[patent_issue_date] => 1996-11-12
[patent_title] => 'Plasma processing system with reduced particle contamination'
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Array
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[patent_issue_date] => 1997-08-12
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Array
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[patent_issue_date] => 1997-11-04
[patent_title] => 'Inductively coupled RF plasma reactor with floating coil antenna for reduced capacitive coupling'
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[firstpage_image] =>[orig_patent_app_number] => 480174
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/480174 | Inductively coupled RF plasma reactor with floating coil antenna for reduced capacitive coupling | Jun 6, 1995 | Issued |
| 08/482405 | APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR ELEMENT | Jun 6, 1995 | Abandoned |
Array
(
[id] => 3869597
[patent_doc_number] => 05803974
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1998-09-08
[patent_title] => 'Chemical vapor deposition apparatus'
[patent_app_type] => 1
[patent_app_number] => 8/479857
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[firstpage_image] =>[orig_patent_app_number] => 479857
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Array
(
[id] => 3757017
[patent_doc_number] => 05721151
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1998-02-24
[patent_title] => 'Method of fabricating a gate array integrated circuit including interconnectable macro-arrays'
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[patent_app_number] => 8/484849
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[rel_patent_id] =>[rel_patent_doc_number] =>) 08/484849 | Method of fabricating a gate array integrated circuit including interconnectable macro-arrays | Jun 6, 1995 | Issued |
Array
(
[id] => 3640875
[patent_doc_number] => 05683517
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1997-11-04
[patent_title] => 'Plasma reactor with programmable reactant gas distribution'
[patent_app_type] => 1
[patent_app_number] => 8/475877
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[firstpage_image] =>[orig_patent_app_number] => 475877
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/475877 | Plasma reactor with programmable reactant gas distribution | Jun 6, 1995 | Issued |
| 08/470819 | PLASMA REACTOR WITH MAGNET FOR PROTECTING AN ELECTROSTATIC CHUCK FROM THE PLASMA | Jun 5, 1995 | Abandoned |
Array
(
[id] => 3583747
[patent_doc_number] => 05567243
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[patent_issue_date] => 1996-10-22
[patent_title] => 'Apparatus for producing thin films by low temperature plasma-enhanced chemical vapor deposition using a rotating susceptor reactor'
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[patent_app_number] => 8/468350
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Array
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[id] => 3826520
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[patent_issue_date] => 1998-01-27
[patent_title] => 'Apparatus for obtaining dose uniformity in plasma doping (PLAD) ion implantation processes'
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Array
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Array
(
[id] => 3687311
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[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1997-11-25
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[rel_patent_id] =>[rel_patent_doc_number] =>) 08/452999 | Integrated circuit self-aligning process and apparatus | May 29, 1995 | Issued |
| 08/456175 | PROCESS FOR EVENLY DEPOSITING IONS USING A TILTING AND ROTATING PLATFORM | May 29, 1995 | Abandoned |
Array
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