| Application number | Title of the application | Filing Date | Status |
|---|
| 08/402360 | HEAT-RESISTANT ELECTRODE MATERIAL, ELECTRODE USING THE SAME, AND APPARATUS HAVING PLASMA GENERATING UNIT USING THIS ELECTRODE | Mar 12, 1995 | Abandoned |
Array
(
[id] => 3543397
[patent_doc_number] => 05571331
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1996-11-05
[patent_title] => 'Vacuum treatment apparatus'
[patent_app_type] => 1
[patent_app_number] => 8/402618
[patent_app_country] => US
[patent_app_date] => 1995-03-13
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 6
[patent_no_of_words] => 4637
[patent_no_of_claims] => 18
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 81
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/571/05571331.pdf
[firstpage_image] =>[orig_patent_app_number] => 402618
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/402618 | Vacuum treatment apparatus | Mar 12, 1995 | Issued |
Array
(
[id] => 3518912
[patent_doc_number] => 05527396
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1996-06-18
[patent_title] => 'Deposited film forming apparatus'
[patent_app_type] => 1
[patent_app_number] => 8/398071
[patent_app_country] => US
[patent_app_date] => 1995-03-03
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 29
[patent_figures_cnt] => 39
[patent_no_of_words] => 52372
[patent_no_of_claims] => 4
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 132
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/527/05527396.pdf
[firstpage_image] =>[orig_patent_app_number] => 398071
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/398071 | Deposited film forming apparatus | Mar 2, 1995 | Issued |
Array
(
[id] => 3723036
[patent_doc_number] => 05651825
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1997-07-29
[patent_title] => 'Plasma generating apparatus and plasma processing apparatus'
[patent_app_type] => 1
[patent_app_number] => 8/396779
[patent_app_country] => US
[patent_app_date] => 1995-03-01
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 2
[patent_figures_cnt] => 2
[patent_no_of_words] => 5570
[patent_no_of_claims] => 15
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 102
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/651/05651825.pdf
[firstpage_image] =>[orig_patent_app_number] => 396779
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/396779 | Plasma generating apparatus and plasma processing apparatus | Feb 28, 1995 | Issued |
| 08/395298 | PROCESS FOR SETTING A WORKING RATE DISTRIBUTION IN AN ETCHING OR PLASMA CVD APPARATUS | Feb 26, 1995 | Abandoned |
Array
(
[id] => 3719449
[patent_doc_number] => 05700326
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1997-12-23
[patent_title] => 'Microwave plasma processing apparatus'
[patent_app_type] => 1
[patent_app_number] => 8/395191
[patent_app_country] => US
[patent_app_date] => 1995-02-27
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 10
[patent_no_of_words] => 2710
[patent_no_of_claims] => 18
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 153
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/700/05700326.pdf
[firstpage_image] =>[orig_patent_app_number] => 395191
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/395191 | Microwave plasma processing apparatus | Feb 26, 1995 | Issued |
Array
(
[id] => 3533305
[patent_doc_number] => 05494523
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1996-02-27
[patent_title] => 'Controlling plasma particulates by contouring the plasma sheath using materials of differing RF impedances'
[patent_app_type] => 1
[patent_app_number] => 8/393527
[patent_app_country] => US
[patent_app_date] => 1995-02-23
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 5
[patent_no_of_words] => 2863
[patent_no_of_claims] => 4
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 117
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/494/05494523.pdf
[firstpage_image] =>[orig_patent_app_number] => 393527
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/393527 | Controlling plasma particulates by contouring the plasma sheath using materials of differing RF impedances | Feb 22, 1995 | Issued |
Array
(
[id] => 3645424
[patent_doc_number] => 05605599
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1997-02-25
[patent_title] => 'Method of generating plasma having high ion density for substrate processing operation'
[patent_app_type] => 1
[patent_app_number] => 8/390337
[patent_app_country] => US
[patent_app_date] => 1995-02-17
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 7
[patent_no_of_words] => 4339
[patent_no_of_claims] => 10
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 237
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/605/05605599.pdf
[firstpage_image] =>[orig_patent_app_number] => 390337
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/390337 | Method of generating plasma having high ion density for substrate processing operation | Feb 16, 1995 | Issued |
Array
(
[id] => 3614700
[patent_doc_number] => 05688357
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1997-11-18
[patent_title] => 'Automatic frequency tuning of an RF power source of an inductively coupled plasma reactor'
[patent_app_type] => 1
[patent_app_number] => 8/389888
[patent_app_country] => US
[patent_app_date] => 1995-02-15
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 13
[patent_figures_cnt] => 21
[patent_no_of_words] => 3386
[patent_no_of_claims] => 30
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 96
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/688/05688357.pdf
[firstpage_image] =>[orig_patent_app_number] => 389888
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/389888 | Automatic frequency tuning of an RF power source of an inductively coupled plasma reactor | Feb 14, 1995 | Issued |
Array
(
[id] => 3626742
[patent_doc_number] => 05609690
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1997-03-11
[patent_title] => 'Vacuum plasma processing apparatus and method'
[patent_app_type] => 1
[patent_app_number] => 8/389229
[patent_app_country] => US
[patent_app_date] => 1995-02-15
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 16
[patent_figures_cnt] => 28
[patent_no_of_words] => 3670
[patent_no_of_claims] => 19
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 131
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/609/05609690.pdf
[firstpage_image] =>[orig_patent_app_number] => 389229
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/389229 | Vacuum plasma processing apparatus and method | Feb 14, 1995 | Issued |
Array
(
[id] => 3731608
[patent_doc_number] => 05753044
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1998-05-19
[patent_title] => 'RF plasma reactor with hybrid conductor and multi-radius dome ceiling'
[patent_app_type] => 1
[patent_app_number] => 8/389889
[patent_app_country] => US
[patent_app_date] => 1995-02-15
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 21
[patent_no_of_words] => 5526
[patent_no_of_claims] => 121
[patent_no_of_ind_claims] => 13
[patent_words_short_claim] => 87
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/753/05753044.pdf
[firstpage_image] =>[orig_patent_app_number] => 389889
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/389889 | RF plasma reactor with hybrid conductor and multi-radius dome ceiling | Feb 14, 1995 | Issued |
Array
(
[id] => 3519245
[patent_doc_number] => 05503676
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1996-04-02
[patent_title] => 'Apparatus and method for magnetron in-situ cleaning of plasma reaction chamber'
[patent_app_type] => 1
[patent_app_number] => 8/385202
[patent_app_country] => US
[patent_app_date] => 1995-02-08
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 10
[patent_no_of_words] => 4089
[patent_no_of_claims] => 24
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 171
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/503/05503676.pdf
[firstpage_image] =>[orig_patent_app_number] => 385202
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/385202 | Apparatus and method for magnetron in-situ cleaning of plasma reaction chamber | Feb 7, 1995 | Issued |
Array
(
[id] => 3574702
[patent_doc_number] => 05580386
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1996-12-03
[patent_title] => 'Coating a substrate surface with a permeation barrier'
[patent_app_type] => 1
[patent_app_number] => 8/382524
[patent_app_country] => US
[patent_app_date] => 1995-02-02
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 7
[patent_no_of_words] => 3389
[patent_no_of_claims] => 3
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 178
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/580/05580386.pdf
[firstpage_image] =>[orig_patent_app_number] => 382524
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/382524 | Coating a substrate surface with a permeation barrier | Feb 1, 1995 | Issued |
Array
(
[id] => 3651234
[patent_doc_number] => 05626679
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1997-05-06
[patent_title] => 'Method and apparatus for preparing a silicon oxide film'
[patent_app_type] => 1
[patent_app_number] => 8/378320
[patent_app_country] => US
[patent_app_date] => 1995-01-25
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 21
[patent_figures_cnt] => 27
[patent_no_of_words] => 15340
[patent_no_of_claims] => 26
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 394
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/626/05626679.pdf
[firstpage_image] =>[orig_patent_app_number] => 378320
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/378320 | Method and apparatus for preparing a silicon oxide film | Jan 24, 1995 | Issued |
Array
(
[id] => 3513210
[patent_doc_number] => 05486234
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1996-01-23
[patent_title] => 'Removal of field and embedded metal by spin spray etching'
[patent_app_type] => 1
[patent_app_number] => 8/375054
[patent_app_country] => US
[patent_app_date] => 1995-01-19
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 2
[patent_figures_cnt] => 6
[patent_no_of_words] => 2615
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 65
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/486/05486234.pdf
[firstpage_image] =>[orig_patent_app_number] => 375054
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/375054 | Removal of field and embedded metal by spin spray etching | Jan 18, 1995 | Issued |
Array
(
[id] => 3879909
[patent_doc_number] => 05714009
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1998-02-03
[patent_title] => 'Apparatus for generating large distributed plasmas by means of plasma-guided microwave power'
[patent_app_type] => 1
[patent_app_number] => 8/371195
[patent_app_country] => US
[patent_app_date] => 1995-01-11
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 8
[patent_figures_cnt] => 16
[patent_no_of_words] => 10795
[patent_no_of_claims] => 38
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 103
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/714/05714009.pdf
[firstpage_image] =>[orig_patent_app_number] => 371195
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/371195 | Apparatus for generating large distributed plasmas by means of plasma-guided microwave power | Jan 10, 1995 | Issued |
Array
(
[id] => 3589155
[patent_doc_number] => 05487787
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1996-01-30
[patent_title] => 'Apparatus and method for plasma deposition'
[patent_app_type] => 1
[patent_app_number] => 8/369427
[patent_app_country] => US
[patent_app_date] => 1995-01-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 10
[patent_no_of_words] => 2488
[patent_no_of_claims] => 2
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 68
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/487/05487787.pdf
[firstpage_image] =>[orig_patent_app_number] => 369427
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/369427 | Apparatus and method for plasma deposition | Jan 5, 1995 | Issued |
| 08/364030 | METHOD AND APPARATUS FOR ETCHBACK ENDPOINT DETECTION | Dec 22, 1994 | Abandoned |
Array
(
[id] => 3596103
[patent_doc_number] => 05578164
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1996-11-26
[patent_title] => 'Plasma processing apparatus and method'
[patent_app_type] => 1
[patent_app_number] => 8/363270
[patent_app_country] => US
[patent_app_date] => 1994-12-23
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 6
[patent_no_of_words] => 4413
[patent_no_of_claims] => 10
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 320
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/578/05578164.pdf
[firstpage_image] =>[orig_patent_app_number] => 363270
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/363270 | Plasma processing apparatus and method | Dec 22, 1994 | Issued |
Array
(
[id] => 3589141
[patent_doc_number] => 05487786
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1996-01-30
[patent_title] => 'Plasma chemical vapor deposition device capable of suppressing generation of polysilane powder'
[patent_app_type] => 1
[patent_app_number] => 8/363226
[patent_app_country] => US
[patent_app_date] => 1994-12-22
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 8
[patent_no_of_words] => 5775
[patent_no_of_claims] => 5
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 223
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/487/05487786.pdf
[firstpage_image] =>[orig_patent_app_number] => 363226
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/363226 | Plasma chemical vapor deposition device capable of suppressing generation of polysilane powder | Dec 21, 1994 | Issued |