| Application number | Title of the application | Filing Date | Status |
|---|
| 08/109848 | IC MECHANICAL PLANARIZATION PROCESS INCORPORATING TWO SLURRY COMPOSITIONS FOR FASTER MATERIAL REMOVAL TIMES | Aug 19, 1993 | Abandoned |
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[patent_issue_date] => 1994-12-27
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| 08/096690 | PROCESS FOR SETTING A WORKING RATE DISTRIBUTION IN AN ETCHING OR PLASMA CVD APPARATUS | Jul 22, 1993 | Pending |
| 08/092090 | REMOVAL OF FIELD AND EMBEDDED METAL BY SPIN SPRAY ETCHING | Jul 15, 1993 | Pending |
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[id] => 3103959
[patent_doc_number] => 05413672
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[patent_issue_date] => 1995-05-09
[patent_title] => 'Method of etching sendust and method of pattern-etching sendust and chromium films'
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| 08/089856 | COPPER BRIGHTENING PROCESS AND BATH | Jul 8, 1993 | Pending |
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[id] => 3103922
[patent_doc_number] => 05413670
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[patent_kind] => NA
[patent_issue_date] => 1995-05-09
[patent_title] => 'Method for plasma etching or cleaning with diluted NF.sub.3'
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[patent_app_number] => 8/089210
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| 08/085930 | PHOTO-ASSISTED CVD APPARATUS | Jul 5, 1993 | Pending |
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[patent_issue_date] => 1995-05-09
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| 08/079529 | DRY ETCHING METHOD AND DRY ETCHING APPARATUS | Jun 21, 1993 | Pending |
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[patent_issue_date] => 1996-09-17
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| 08/069684 | IONIZATION DEPOSITION APPARATUS | May 27, 1993 | Pending |
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Array
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Array
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| 08/042961 | CHEMICAL VAPOR DEPOSITION CHAMBER | Apr 4, 1993 | Pending |