Kevin D Ahlstrom

Array ( [id] => 15274251 [patent_doc_number] => 20190385860 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-12-19 [patent_title] => METHOD OF ETCHING AT LOW TEMPERATURE AND PLASMA ETCHING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/260816 [patent_app_country] => US [patent_app_date] => 2019-01-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6304 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16260816 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14573319 [patent_doc_number] => 20190214267 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-07-11 [patent_title] => ETCHING METHOD AND ETCHING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/245411 [patent_app_country] => US [patent_app_date] => 2019-01-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10557 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 118 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16245411 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17107373 [patent_doc_number] => 11127599 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-09-21 [patent_title] => Methods for etching a hardmask layer [patent_app_type] => utility [patent_app_number] => 16/245251 [patent_app_country] => US [patent_app_date] => 2019-01-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 6 [patent_no_of_words] => 5712 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 94 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16245251 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16870319 [patent_doc_number] => 20210163786 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-06-03 [patent_title] => CHEMICAL-MECHANICAL POLISHING SOLUTION [patent_app_type] => utility [patent_app_number] => 16/958338 [patent_app_country] => US [patent_app_date] => 2018-12-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 1242 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 59 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16958338 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16386388 [patent_doc_number] => 10811231 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-10-20 [patent_title] => Plasma processing apparatus and plasma processing method [patent_app_type] => utility [patent_app_number] => 16/228934 [patent_app_country] => US [patent_app_date] => 2018-12-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 24 [patent_no_of_words] => 13351 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 145 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16228934 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16650285 [patent_doc_number] => 10927450 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-02-23 [patent_title] => Methods and apparatus for patterning substrates using asymmetric physical vapor deposition [patent_app_type] => utility [patent_app_number] => 16/225443 [patent_app_country] => US [patent_app_date] => 2018-12-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 13 [patent_no_of_words] => 5348 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 361 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16225443 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15532329 [patent_doc_number] => 20200058470 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-02-20 [patent_title] => SYSTEMS AND METHODS OF CONTROL FOR PLASMA PROCESSING [patent_app_type] => utility [patent_app_number] => 16/221971 [patent_app_country] => US [patent_app_date] => 2018-12-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14489 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 80 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16221971 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15184785 [patent_doc_number] => 20190362984 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-11-28 [patent_title] => METHOD OF ETCHING FILM AND PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/212847 [patent_app_country] => US [patent_app_date] => 2018-12-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7504 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 87 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16212847 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14446263 [patent_doc_number] => 20190181005 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-06-13 [patent_title] => Technique for Multi-Patterning Substrates [patent_app_type] => utility [patent_app_number] => 16/208252 [patent_app_country] => US [patent_app_date] => 2018-12-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4525 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -24 [patent_words_short_claim] => 106 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16208252 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14110025 [patent_doc_number] => 20190096688 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-03-28 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 16/198410 [patent_app_country] => US [patent_app_date] => 2018-11-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 51688 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 121 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16198410 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16476337 [patent_doc_number] => 10851266 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-12-01 [patent_title] => Slurry composition for polishing and method for polishing semiconductor thin film with steps of a high aspect ratio [patent_app_type] => utility [patent_app_number] => 16/191471 [patent_app_country] => US [patent_app_date] => 2018-11-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 1 [patent_no_of_words] => 5561 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 103 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16191471 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16803239 [patent_doc_number] => 10998191 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-05-04 [patent_title] => Graded hardmask interlayer for enhanced extreme ultraviolet performance [patent_app_type] => utility [patent_app_number] => 16/188843 [patent_app_country] => US [patent_app_date] => 2018-11-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 15 [patent_no_of_words] => 6180 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 80 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16188843 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16552970 [patent_doc_number] => 10886135 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-01-05 [patent_title] => Substrate processing method and substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 16/183945 [patent_app_country] => US [patent_app_date] => 2018-11-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 11 [patent_no_of_words] => 7546 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 349 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16183945 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15625435 [patent_doc_number] => 20200083122 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-03-12 [patent_title] => SYSTEM AND METHOD FOR FABRICATING SEMICONDUCTOR WAFER FEATURES HAVING CONTROLLED DIMENSIONS [patent_app_type] => utility [patent_app_number] => 16/184898 [patent_app_country] => US [patent_app_date] => 2018-11-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4370 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 100 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16184898 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14373815 [patent_doc_number] => 20190160820 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-05-30 [patent_title] => METHOD OF MANUFACTURING INKJET HEAD SUBSTRATE [patent_app_type] => utility [patent_app_number] => 16/184858 [patent_app_country] => US [patent_app_date] => 2018-11-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4338 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 202 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16184858 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15375711 [patent_doc_number] => 10529583 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-01-07 [patent_title] => Etching method [patent_app_type] => utility [patent_app_number] => 16/182774 [patent_app_country] => US [patent_app_date] => 2018-11-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 14 [patent_no_of_words] => 12004 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 358 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16182774 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14280985 [patent_doc_number] => 20190137777 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-05-09 [patent_title] => METHOD AND SYSTEM FOR TUNABLE GRADIENT PATTERNING USING A SHADOW MASK [patent_app_type] => utility [patent_app_number] => 16/182309 [patent_app_country] => US [patent_app_date] => 2018-11-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10289 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 117 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16182309 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15539245 [patent_doc_number] => 10569384 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2020-02-25 [patent_title] => Chemical mechanical polishing pad and polishing method [patent_app_type] => utility [patent_app_number] => 16/182168 [patent_app_country] => US [patent_app_date] => 2018-11-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6861 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 254 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16182168 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13986881 [patent_doc_number] => 20190062598 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-02-28 [patent_title] => Stop-On Silicon Containing Layer Additive [patent_app_type] => utility [patent_app_number] => 16/175667 [patent_app_country] => US [patent_app_date] => 2018-10-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7454 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 207 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16175667 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14706951 [patent_doc_number] => 10381234 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-08-13 [patent_title] => Selective film formation for raised and recessed features using deposition and etching processes [patent_app_type] => utility [patent_app_number] => 16/175538 [patent_app_country] => US [patent_app_date] => 2018-10-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 15 [patent_no_of_words] => 2970 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 126 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16175538 [rel_patent_id] =>[rel_patent_doc_number] =>)